User Manuals: Edwards nEXT400 Turbomolecular Pump

Manuals and User Guides for Edwards nEXT400 Turbomolecular Pump. We have 3 Edwards nEXT400 Turbomolecular Pump manuals available for free PDF download: Instruction Manual

Edwards nEXT400 Instruction Manual (108 pages)

Turbomolecular Pump

Brand: Edwards | Category: Water Pump | Size: 2 MB

Table of Contents
3
Safety and Compliance
8
Definition of Warnings and Cautions
8
Safety Symbols
9
Trained Personnel
9
Introduction
11
Overview
11
Pump Model Description
12
Pump Controller
12
Figure 1 Pump Model Description
12
Operational Features
13
Power Limit Setting
13
Standby Speed
13
Timer
14
Analogue Output
14
Automatic Vent Options
15
Normal Speed Setting
15
Logic Interface
15
Parallel Control and Monitoring
16
Serial Control and Monitoring
16
Serial Control with Parallel Monitoring
16
Parallel Control with Serial Monitoring or Serial Configuration
17
Controller Configuration (Serial Configuration)
17
Technical Data
18
General Technical Data
18
Figure 2 Next240 Performance Curve
22
Figure 3 Next300 Performance Curve
23
Figure 4 Next400 Performance Curve
23
Figure 5 Next 240 Dimensions (MM)
24
Figure 6 Next 300 Dimensions (MM)
25
Figure 7 Next 400 Dimensions (MM)
26
Operation and Storage Environment
27
Vent Gas Specification and Vent Control Data
27
Purge Gas Specification
28
Cooling Water
28
Figure 8: Max Allowed Rate of Pressure Rise During Venting: Pressure against Time
28
Electrical Data
29
Pumping Media
29
Materials Exposed to Gases Pumped
31
Logic Interface Connector
31
Controller Connector Socket
34
Figure 9 Interface Circuits for Next Turbo Pump Controllers
34
Indicator Led's
35
Figure 10 Controller Connector Showing Pin Numbers
35
Installation
37
Unpack and Inspect
37
Typical Installation
38
Connect to the Vacuum System
38
Inlet Screen (Installed on CF Only)
39
Figure 11 Typical Pumping System with a Next Pump
39
Mechanical Fixing
40
Inlet Connection and Orientation
41
Figure 12 Installation Orientation
41
Base Mounting
42
Backing Port Connection
42
Interstage Connection (Variants Only)
43
Purge Gas Connection
43
Recommended Purge Gas Flow
43
Connect the Purge Gas
43
Electrical Installation
43
Ground the Connections
44
Connect the Logic Interface to the TIC
44
Connect the Logic Interface to the Customer Control Equipment
44
Connect the Electrical Supply
45
Connect the Parallel Control and Monitoring
46
Figure 13 Logic Interface Connections - Parallel Control
46
Connection for Serial Control and Monitoring
47
Connect the Serial Interface to the Customer Control Equipment
47
Figure 14 Controller Status Information
48
Serial Enable
49
Figure 15 Logic Interface Connections - RS232 Serial Control
49
Figure 16 Logic Interface Connections - RS485 Serial Control
49
Serial Protocol
50
Figure 17 Conceptual Diagram for Multi-Drop Connection Using RS232 Interface
51
Message Structure
52
Command Set
52
Figure 18 RS485 Multi-Drop Connection
52
Multi-Drop Operation
55
Connection for Mixed Parallel and Serial Operation
56
Vent Options, Vent Valve Connection and Control
57
Figure 19 Logic Interface Connection - Mixed Parallel and Serial Operation
57
Manual Vent Valve
58
TAV5 or TAV6 Solenoid Vent Valve
58
Vent Valve Control
59
Alternative Valve Connected to the Vacuum System
60
Cooling
60
Introduction
60
Forced Air Cooling
61
Water Cooling
61
Figure 20 Maximum Relative Humidity to Avoid Condensation with Water Cooling
62
Configuration
63
Configure the Pump Using Serial Commands
63
Power Limit Setting
63
Power Supply to the Fan from the Controller
64
Controlled Venting Options
64
Standby Speed Setting
65
Normal Speed Setting
65
Timer Setting and Options
66
Analogue Signal Options
67
Factory Settings
67
Assigning a Multi-Drop Address
67
Configuring the Next Pump Using a TIC
68
Operation
70
Before Starting the Pump
70
Close the Vent Valve
70
Pre-Start Sequence
70
Operation with Parallel Control and Monitoring
71
Start the Pump
71
Running at Standby Speed
71
Stop the Pump
71
Parallel Monitoring
71
Operation with Serial Control and Monitoring
71
Delayed Start
71
Start the Pump
72
Standby Speed
72
Stop the Pump
72
Temperature Readings
73
Link Parameter Readings
73
Measured Motor Speed
73
Mixed Parallel and Serial Operation
74
Operation with a TIC
75
Decelerating and Venting
75
Figure 21 Serial and Parallel Control Flowchart
75
Operation at Extreme Conditions
76
Operation with High Inlet Pressure
76
Operation at High Temperatures
76
Protection against Over-Speed
76
Electrical Supply Failure
77
Bakeout
77
Maintenance
80
Introduction
80
Bearing and Oil Cartridge Maintenance
80
Rotor Life
80
Clean the External Surfaces of the Pump
81
Fault Finding
82
Flashing Service Codes
85
Decoding Service Status Words
86
Controller Run Time
87
Pump Run Time
87
Pump Cycles
87
Bearing Run Time
88
Oil Cartridge Run Time
88
Flashing Error Codes
88
Decoding System Status Words
89
Useful Service Information
91
Storage
93
Disposal
94
Service
95
Return the Equipment or Components for Service
95
Bearing and Oil Cartridge On-Site Maintenance
96
Spares
97
ISX Inlet Screen
97
Inlet Strainer
97
Inlet-Flange Seals and Integrated Inlet Screens
97
NW16 and NW25 Ports
98
Accessories
99
Installation
99
Figure 22 Next Exploded Accessories View
99
ACX Air Cooler
100
Figure 23 Next Exploded Accessories View
100
WCX Water Cooler
101
BX Bakeout Band
101
TAV Vent Valve and Vent Port Adaptor
101
VRX Vent Restrictor
101
Vent Port Adaptor
102
PRX Purge Restrictor
102
C-Clamp Adaptor Kit
102
Interface Cable
103
TIC PC Program
103

Edwards nEXT400 Instruction Manual (81 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 2 MB

Table of Contents
3
Introduction

8
- Scope and Definitions
  8
- General Description
  9
- Pump Controller
  10
- Operational Features
  10
- Power Limit Setting
  10
- Standby Speed
  10
- Timer
  11
- Analogue Output
  11
- Automatic Vent Options
  11
- Normal Speed Setting
  12
- Logic Interface
  12
- Parallel Control and Monitoring
  12
- Serial Control and Monitoring
  12
- Serial Control with Parallel Monitoring
  13
- Parallel Control with Serial Monitoring or Serial Configuration
  13
- Controller Configuration (Serial Set-Up)
  13
Technical Data

14
Installation

32
Operation

52
- Configuring the Next Pump Using Serial Commands
  52
- Power Limit Setting
  52
- Powering a Fan from the Controller
  53
- Controlled Venting Options
  53
- Standby Speed Setting
  54
- Normal Speed Setting
  54
- Timer Setting and Options
  55
- Analogue Signal Options
  56
- Factory Settings
  56
- Assigning a Multi-Drop Address
  56
- Configuring the Next Pump Using a TIC
  57
- Start-Up
  58
- Close the Vent Valve
  58
- Pre-Start Checks
  58
- Operation with Parallel Control and Monitoring
  59
- Start the Pump
  59
- Running at Standby Speed
  59
- Stop the Pump
  59
- Parallel Monitoring
  59
- Operation with Serial Control and Monitoring
  59
- Delayed Start
  59
- Start the Pump
  60
- Standby Speed
  60
- Stop the Pump
  60
- Temperature Readings
  60
- Link Parameter Readings
  61
- Measured Motor Speed
  61
- Simultaneous Parallel and Serial Operation
  61
- Operation with a TIC
  61
- Decelerating and Venting
  61
- Operation at Extreme Conditions
  62
- Operation with High Inlet Pressure
  62
- Operation at High Temperatures
  62
- Operation at Over-Speed
  62
- Electrical Supply Failure
  62
- Bakeout
  63
Maintenance

66
- Introduction
  66
- Bearing and Oil Cartidge Maintenance
  66
- Rotor Life
  66
- Clean the External Surfaces of the Pump
  67
- Fault Finding
  67
- Flashing Service Codes
  70
- Flashing Error Codes
  70
- Decoding System Status Words
  71
- Useful Service Information
  73
Storage and Disposal

74
- Storage
  74
- Disposal
  74
Service, Spares and Accessories

76
- Introduction
  76
- Service
  76
- Returning a Pump for Service
  76
- Bearing and Oil Cartridge On-Site Maintenance
  76
- Spares
  77
- ISX Inlet-Screen
  77
- Inlet-Strainer
  77
- Inlet-Flange Seals and Integrated Inlet Screens
  77
- Accessories
  77
- Installation
  77
- ACX Air-Cooler
  77
- WCX Water-Cooler
  78
- BX Bakeout Band
  78
- TAV Vent-Valve and Vent-Port Adaptor
  78
- VRX Vent-Restrictor
  78
- Vent-Port Adaptor
  79
- PRX Purge-Restrictor
  79
- Next Exploded Accessories View
  80
- Next Exploded Accessories View
  81

Edwards nEXT400 Instruction Manual (20 pages)

Vibration Isolator Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 0 MB

Table of Contents
3
Safety and Compliance
5
Definition of Warnings and Cautions
5
Safety Symbols
6
Trained Personnel
6
Introduction
7
Overview
7
Figure 1 General View of the Vibration Isolator
7
Technical Data
8
Figure 2 Axial Transmission Function of Isolator
8
Figure 3 Radial Transmission Function of Isolator
9
Storage
10
Installation
11
Installation Safety
11
Unpack and Inspect
11
Install the Vibration Isolator
12
Figure 4 Installation Orientation
13
Maintenance
14
Maintenance Safety
14
Maintenance Plan
14
Service
15
Return the Equipment or Components for Service
15
Legal Declarations
17

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