Advanced Energy HFV 8000 User Manual page 28

®
Advanced Energy
Table 3-1. Functional specifications (Continued)
Description
RF output operating conditions
Cooling
3-2
Specification
To achieve RF output, ensure the following conditions
are met:
• External interlock loop closed (less than 15 Ω in
series path)
• RF output cover firmly attached
• Front panel Standby switch in the Standby (up)
position
• No faults present (Front Panel Fault indicator
should be off)
• No chamber arcing present
• Set point signal > 220 mV (Generator User port)
Set point signal > 180 W (DeviceNet)
• RF Enable command present
The HFV generator is water-cooled to allow operation in
a clean room environment. The HFV generator will not
reduce performance when the inlet water temperature is
+15°C to +30°C (59°F to 86°F) and the flow rate is
11.4 lpm (3 gpm) or greater. All supplied water
connections should be 9.53 mm (3/8
lines. Keep the incoming and outgoing water lines as
short as possible and the outlet back-pressure
minimized.
In addition, you may purchase an optional water
solenoid to control water flow. A valve automatically
opens during RF power delivery and closes 30 minutes
after the last RF off command. An electrical connector is
located on the rear panel for this option. To order the
optional solenoid, contact AE Global Customer Support
(see "AE Global Customer Support" on page
Product Specifications
"
) ID or larger water
6-10).
5705211-C