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Meeting Minimum Power Threshold
The output power set point minimum is a threshold that allows the generator to deliver
power. The set point circuitry uses hysteresis so that the generator has two thresholds.
If an RF On command is given, the power requested through the set point level must
be above the minimum power On threshold for the HFV generator to deliver power.
The HFV generator will continue to deliver power until the power requested through
the set point level falls below the minimum power Off off threshold, or until the RF
On command is disabled.
That is, the generator delivers power when the RF On command is enabled AND the
power set point is above 176 W. The generator ceases to deliver power when the RF
On command is disabled OR the Power Set Point is below 144 W.
Setting the Frequency Band
Table 5-1
lists the frequency values for the four possible frequency band options: top,
side, full, and custom.
Table 5-1. Frequency values in center frequency mode
Frequency
Band
Top
The frequency band that is used to
operate the top coil of the process
chamber (1.765 - 1.915 MHz)
Side
The frequency band that is used to
operate the side coil of the process
chamber (2.015 - 2.165 MHz)
Full
The entire frequency band of the HFV
generator (1.765 - 2.165)
Custom
The frequency band defined by Host
port command 3 (minimum
frequency) and command 4
(maximum frequency). See "Host
port commands" on page 4-20.
To set the frequency band:
1. Press the Display Mode button repeatedly until the top line of the screen displays:
Press and hold [Top line]
5705211-C
Description
Installation, Setup, and Operation
HFV 8000 Generator
Frequency in
Center Frequency Mode
1.840 MHz
2.090 MHz
1.965 MHz
Automatically calculated as the
midpoint between the maximum and
minimum frequencies. For example,
if the minimum frequency is set to
1.900 MHz and the maximum
frequency is set to 2.100 MHz, the
center frequency will automatically
be set to 2.000 MHz.
5-11
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