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Advanced Energy RFG 1251 User Manual

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RFG 1251 Generator

User Manual

5706058-A
Advanced Energy Industries, Inc.
1625 Sharp Point Drive Fort Collins, CO 80525 USA
970.221.4670 support@ftc1.aei.com
August 1999

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Summary of Contents for Advanced Energy RFG 1251

  • Page 1: User Manual

    RFG 1251 Generator User Manual 5706058-A Advanced Energy Industries, Inc. 1625 Sharp Point Drive Fort Collins, CO 80525 USA 970.221.4670 support@ftc1.aei.com August 1999...
  • Page 3 User Manual RFG 1251 Generator 5706058-A...
  • Page 4 Z-Scan is a trademark of Advanced Energy Industries, Inc. Z-Ware is a trademark of Advanced Energy Industries, Inc. 1998 © Copyright by Advanced Energy Industries Inc. All rights reserved. Without written permission, no part of this manual covered by copyright herein may be reproduced or copied in any form or by any means: graphic, electronic, or mechanical, including photocopying, recording, taping, or information and retrieval systems.

  • Page 5: Table Of Contents

    RFG 1251 Generator Table of Contents Chapter 1. Introduction ..........1-1 Read This Section! .
  • Page 6 ® Advanced Energy Grounding ........... . 5-1 Dimensional Information .
  • Page 7 Figure 2-1. RFG 1251 simplified block diagram ........2-2...
  • Page 8 ® Advanced Energy List of Figures 5706058-A...
  • Page 9 RFG 1251 Generator List of Tables Table 1-1. Electromagnetic Compatibility (EMC) ....... .1-4 Table 1-2.
  • Page 10 ® Advanced Energy List of Tables 5706058-A...

  • Page 11: Read This Section

    RFG 1251 Generator Chapter Chapter Introduction Read This Section! ..........1-1 Interpreting the Manual .
  • Page 12 ® Advanced Energy We include this symbol in Danger, Warning, and Caution boxes to identify specific levels of hazard seriousness. DANGER: This box identifies hazards that could result in severe personal injury or death. WARNING: This box identifies hazards or unsafe practices that could result in personal injury.

  • Page 13: Safety

    RFG 1251 Generator • Chassis ground • Warning (refer to manual) • CE label • GS • Non-ionizing radiation • Hot surface SAFETY Do not attempt to install or operate this equipment if you have not first acquired proper training.

  • Page 14: Product Safety/Compliance

    ® Advanced Energy • Use proper ESD precautions. • BE CAREFUL AROUND THIS EQUIPMENT. WARNING: RISK OF DEATH OR BODILY INJURY. Disconnect all sources of input power before working on this unit or anything connected to it. PRODUCT SAFETY/COMPLIANCE Note: This product is designed to meet and is tested for compliance to the following standards and directives.

  • Page 15: Installation Requirements

    RFG 1251 Generator This device must be installed and used only in compliance with the standards listed in addition to VDE 0113, EN 60204 (IEC 204), and applicable requirements. For more information, refer to the letter of conformance (US) or declaration of conformity (EU) accompanying the product.
  • Page 16 ® Advanced Energy Introduction 5706058-A...

  • Page 17: Chapter 2. Theory

    Theory of Operation..........2-1 GENERAL DESCRIPTION The RFG 1251 generator is a 13.56 MHz RF generator capable of providing up to 1250 W into Ω...

  • Page 18: Figure 2-1. Rfg 1251 Simplified Block Diagram

    Control Control & Interface Logic Figure 2-1. RFG 1251 simplified block diagram Table 2-1. Block Diagram Explanation (1) Input In the input section, 208 Vac, 3φ, line voltage is routed through a circuit breaker and line filter to a 3φ contactor and the input of an auxiliary supply (2).
  • Page 19 (4A), the power amplifier (4B), the output tank/filter (4C), and the CEX/interconnect card (4D). The RF module uses a space- and power-efficient design that is made possible by proprietary circuitry developed at Advanced Energy Industries, Inc. (4A) Driver/Exciter The hybrid driver/exciter provides a buffered 13.56 MHz signal capable of driving the power amplifier (4B).
  • Page 20 ® Advanced Energy Table 2-1. Block Diagram Explanation (5) Power This section provides stable, precise, analog signals representing Measurement System the forward and reflected power measured at the output connector. The measurement system consists of a microstrip directional coupler and two channels of processing electronics.

  • Page 21: Chapter 3. Specifications

    RFG 1251 Generator Chapter Chapter Specifications Physical Specifications ......... 3-1 Electrical Specifications.
  • Page 22 ® Advanced Energy Table 3-2. Electrical Specifications Ω Power Factor Minimum 0.85 with full rated output into 50 , non-reactive load RF Output Specifications Ω Full Rated Output 1250 W minimum into a 50 , non-reactive load Power Output Power Range 6.25 to 1250 W...

  • Page 23: Environmental Specifications

    RFG 1251 Generator ENVIRONMENTAL SPECIFICATIONS Table 3-3. Climatic Conditions Temperature Relative Humidity Air Pressure Class 3K3 Class 3K2 Class 3K3 Operating (Note 1) C to +40 10% to 85% 80 kPa to 106 kPa ° ° F to +104 +2 g/m...
  • Page 24 ® Advanced Energy Table 3-4. Environmental Specifications Pressure 5.17 bars (75 psi) maximum inlet water pressure Contaminates • The following specifications are recommended for the wa- ter used to cool the RFG 3001 generator: • pH between 7 and 9 •...

  • Page 25: User Port

    Table 4-1 provides the connector pinouts for the User port connector. The 25-pin User port on the RFG 1251 generator provides analog and digital signals for control and monitoring of the generator functions. Figure 4-2 shows the electrical diagrams for the interface circuitry in the generator.

  • Page 26: Table 4-1. User Port Signals

    ® Advanced Energy Table 4-1. User Port Signals Analog Outputs The analog readback signals from the generator (pins 2 and 3) are driven by precision, low-offset operational amplifiers (industry type OP200GP). These devices are capable of driving high-capacitance loads such as those expected in shielded interface applications.

  • Page 27: Table 4-2. User Port Pins

    RFG 1251 Generator Table 4-2. User Port Pins Signal Return Signal Signal Name Signal Description Type SETPOINT Digital A low-impedance path between these STATUS Output pins indicates that an internal power limit has been encountered. When RF power is enabled, a high impedance path between these pins indicates that the generator is “at setpoint”.
  • Page 28 ® Advanced Energy Table 4-2. User Port Pins PWR REG Input This signal is used to control the MODE SEL desired power regulation mode. If pin 8 is open or grounded, the generator regulates on forward power. A voltage level of 4 to 30 V on pin 8 selects delivered power mode.

  • Page 29: Interface Cabling Requirements

    EMI shield in the cable must be terminated to the metal shells of the cable’s D connectors. Additionally, the chassis of the RFG 1251 generator must be tied to a local earth ground through an adequately sized grounding strap.

  • Page 30: Water Control Connector

    ® Advanced Energy WATER CONTROL CONNECTOR Figure 4-3. Water control connector Connector type: 2-pin miniature power jack (Switchcraft P/N 712A) Signal characteristics: +24 Vdc switched power source for an external coolant control solenoid Table 4-3. Water Control Connector Pins Signal Pin...

  • Page 31: Status Indicators

    Safety/Earth Ground (green/yellow wire) Note: The three ac line phases may be wired in any order. STATUS INDICATORS The RFG 1251 generator provides the following status indicators located on the connector panel: Table 4-5. Status Indicators AC ON This green LED indicates that ac power is available within the generator.
  • Page 32 LED remains lit until both the overtemperature condition subsides and the RF ON CMD signal is de-activated. Note: The RFG 1251 generator contains a high-temperature shutdown sensor which shuts off all circuitry in the generator if the internal temperature exceeds a potentially damaging level.

  • Page 33: Connector Panel

    RFG 1251 Generator CONNECTOR PANEL Figure 4-5. RFG 1251 panel 5706058-A Connectors, Indicators, and Controls...
  • Page 34 ® Advanced Energy 4-10 Connectors, Indicators, and Controls 5706058-A...

  • Page 35: Setting Up

    Unpack and inspect your generator carefully. Check for obvious physical damage. If no damage is apparent, proceed with the unit connections. If you do see signs of shipping damage, contact Advanced Energy Industries, Inc., and the carrier immediately. Save the shipping container for submitting necessary claims to the carrier.

  • Page 36: Dimensional Information

    ® Advanced Energy DIMENSIONAL INFORMATION NEED Figure 5-1. RFG 1251 dimensions Installation 5706058-A...

  • Page 37: Connecting Cooling Water

    DANGER: Before making any input line power connection, turn off building circuit breakers supplying input power to the RFG 1251 generator. Also, ensure that the circuit breaker on the RFG 1251 is in the OFF position. Check to be sure the input power is within the specifications shown in Chapter 3.
  • Page 38 ® Advanced Energy Installation 5706058-A...

  • Page 39: Chapter 6. Operation

    (maximum contact resistance of 15 Ω). 2. Apply 208 Vac power to the generator and activate the circuit breaker on the RFG 1251. Verify that the green AC ON indicator is lit on the generator and that the AC ON status signal is active on the User Port (low impedance between pins 24 and 11).
  • Page 40 ® Advanced Energy 7. Temporarily inhibit the RF output by clearing the RF PWR ON signal (pin 4). Verify that the RF ON indicator extinguishes, the RF STATUS signal (pins 20 and 7) goes inactive, and the RF output power goes to 0 (as measured at the readback signal, pin 3). Re-enable the RF output by activating the RF PWR ON signal (pin 4).

  • Page 41: Before Calling Ae Customer Support

    RFG 1251 Generator Chapter Chapter Troubleshooting and Customer Support Before Calling AE Customer Support ......7-1 Checks with the Power Off.

  • Page 42: Troubleshooting Tables

    ® Advanced Energy Troubleshooting Tables Table 7-1. No Power Intlk Over Power Probable Cause Action Open temp Limit The interlock string Install and/or tighten the is open. The RF out- RF output connector. Con- put cable is not con- nect pins 10 and 23 on the nected or loose.

  • Page 43: Ae Customer Support

    RFG 1251 Generator AE CUSTOMER SUPPORT Please contact one of the following offices if you have questions: Table 7-3. Customer Support Locations Office Telephone AE, World Headquarters Phone: 970.221.0108 or 970.221.0156 1625 Sharp Point Drive Fort Collins, CO 80525 USA Fax: 970.407.5334...

  • Page 44: Returning Units For Repair

    ® To ensure years of dependable service, Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide.

  • Page 45: Authorized Returns

    RFG 1251 Generator Authorized Returns Before returning any product for repair and/or adjustment, call AE Customer Support and discuss the problem with them. Be prepared to give them the model number and serial number of the unit as well as the reason for the proposed return. This consultation call will allow Customer Support to determine if the unit must actually be returned for the problem to be corrected.
  • Page 46 ® Advanced Energy Troubleshooting and Customer Support 5706058-A...
  • Page 47 RFG 1251 Generator Index ac power connector 4-6 grounding 5-1 ac power connector pins 4-7 ac power input 3-1 harmonics 3-2 analog inputs 4-2 analog outputs 4-2 auxiliary supply 2-2 icons in user manual 1-1 on unit 1-2 CEX/interconnect 2-3...
  • Page 48 ® Advanced Energy safety checks 7-1 precautions 1-3 safety/compliance standards 1-4 setting up 5-1 simplified block diagram 2-2 size 3-1 spurious signals 3-2 status indicators 4-7 symbols in user manual 1-1 on unit 1-2 theory of operation 2-1 transient response 3-2...

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