Industry Guidelines; Conditions Of Use; Interlocks; Table 1-3. Industry Guidelines - Advanced Energy HFV 8000 User Manual

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Advanced Energy

INDUSTRY GUIDELINES

Guideline

SEMI F47-

0200

SEMI S2-0200

*The power regulation folds back during a voltage sag event, then self-recovers.

This device must be installed and used only in compliance with the standards listed in

addition to VDE 0113, EN 60204 (IEC 204), and applicable requirements.

To comply with the stated directives and standards, you must meet the following

conditions of use:

• This device must be used in an overvoltage category II installation only.

• Before making any other connection, connect the auxiliary Protective Earth

ground conductor on the rear panel.

• Use only a shielded power cable on the output power connector.

• Install and operate this device only in a pollution degree 2 or better environment,

which means an indoor location such as a computer room, office, or factory floor

where only nonconductive pollution occurs during operation. Occasionally, a

temporary conductivity caused by condensation occurs when the device is not

operating.

• Nonstandard connectors for input/output power must be inaccessible to the user.

• Use only shielded cables on control, interface, and communication connectors.

Advanced Energy Industries, Inc. products may include interlocks. When

interlocks exist, they are not intended for the protection of the operator,

but are intended to prevent damage to equipment or property. Hazardous

areas of Advanced Energy products are not operator accessible; the use

of a tool is required.

1-6

Specification for Semiconductor Processing Equipment Voltage

Sag Immunity*

Environmental, health, and safety guidelines for semiconductor

manufacturing equipment

Safety and Product Compliance Guidelines

Description

5705211-C

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