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Advanced Energy
To set the generator to a single frequency while in automatic tuning mode, set
port commands 3, 4, and 5 to the same desired frequency (see
page
4-20).
ADJUSTING TUNING PARAMETERS
To control automatic tuning, the HFV generator uses a tuning algorithm, which you
can adjust by setting several parameters (see
automatic tuning mode, the HFV unit begins by scanning through frequencies (using
the user-set frequency limits) until a user-set scan threshold is passed. When the
threshold is passed, the generator begins to tune automatically. Automatic tuning
mode has, therefore, two distinct periods, the scanning phase and the tuning phase.
Note: If the scan threshold is set too high, the generator will begin to tune too early
and the tuning will not be optimal. If the scan threshold is set too low, the
threshold may never be reached and automatic tuning will not take over.
By characterizing a chamber, you can identify the scan threshold appropriate to a
specific process and chamber. Advanced Energy offers HFV Virtual Front Panel
(VFP) software that can help you characterize a chamber and identify
appropriate tuning settings for it, then set those parameters (refer to the HFV
VFP software manual for instructions). To order VFP software, contact your AE
sales representative (for contact information, see
To optimize the HFV generator's automatic tuning mode, you may adjust the
following tuning parameters using the
optional VFP software.
To reset to factory defaults, see
parameters.
Frequency Limits
The frequency limits parameter sets the range of frequencies over which the HFV unit
will operate. You can set a start frequency, an upper frequency limit, and a lower
frequency limit. (See
frequency, and starting frequency.)
In center frequency mode, all three frequencies are set to the center frequency. In
automatic tuning mode, the HFV unit starts searching for a tune at the start frequency
and sweeps up until a satisfactory tuning is found or until the upper frequency limit is
reached. If a tune is not found, this pattern is repeated. (See also
Mode" on page 5-12
5-14
"Host port commands" on page 4-20
Table 4-7 on page
Table
4-7, commands 3, 4, and 5, minimum frequency, maximum
and
"Automatic Tuning Mode" on page
Installation, Setup, and Operation
Table 4-7 on
"Host port commands" on page
Table 6-1 on page
4-20, command 7, reset tuning
"Center Frequency
5-13.)
Host
4-20). In
6-10).
or the
5705211-C
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