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Advanced Energy VarioMatch Match Network VM 1000 Platform User Manual

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,\ -C
ADVANCED
Ll
ENERGY*
AE VarioMatch
Match
TM
Network, VM 1000/1500 Platform
User Manual
October 2009 57020080-00D
RENO EXHIBIT 2006
Advanced Energy v. Reno, IPR2021-01397

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Summary of Contents for Advanced Energy VarioMatch Match Network VM 1000 Platform

  • Page 1 ,\ -C ADVANCED ENERGY* AE VarioMatch Match Network, VM 1000/1500 Platform User Manual October 2009 57020080-00D RENO EXHIBIT 2006 Advanced Energy v. Reno, IPR2021-01397...
  • Page 3 User Manual AE VarioMatch Match Network, VM 1000/1500 Platform 57020080-00D - ADVANCED &.l ENERGY-...
  • Page 4 Industries, Inc. All Rights Reserved. DISCLAIMER AND LIMITATION OF LIABILITY The information contained in this manual is subject to change by Advanced Energy Industries, Inc. without prior notice. Advanced Energy Industries, Inc. makes no warranty of any kind whatsoever, either expressed or implied, with respect to the information contained herein.
  • Page 5 Windows ® CUSTOMER FEEDBACK Advanced Energy's technical writing staff has carefully developed this manual using research-based document design principles. However, improvement is ongoing, and the writing staff welcomes and appreciates customer feedback. Please send any comments on the content, organization, or format of this user manual to: •...
  • Page 6 Advanced Energy ® 57020080-00D...

  • Page 7: Table Of Contents

    AE VarioMatch Match Network, VM 1000/1500 Platform Table of Contents Chapter 1. Safety and Product Compliance Guidelines Important Safety Information ......... 1-1 Danger, Warning, and Caution Boxes in the Manual ....... 1-1 Safety Guidelines ..........1-2 Rules for Safe Installation and Operation ......1-2 Interpreting Product Labels ........
  • Page 8 Advanced Energy ® Chapter 4. Communication Interfaces and Controls 15-Pin VarioMatch Match Interface ........4-1 INTERFACE Connector ......... 4-1 Match Interface Cabling Requirements ......4-2 Pin Descriptions ..........4-2 Wiring Diagrams ..........4-4 Match INTERFACE Using Switches ........ 4-7 Chapter 5. Installation, Setup, and Operation Preparing to Install the VarioMatch Match Network ......
  • Page 9 External Load Checks - Open/Short RF Output Path ....6-3 Contacting AE Global Services ........6-4 Advanced Energy World Headquarters, 24 x 7 Technical Support ..6-4 Returning Units for Repair ........... 6-5 Chapter 7.
  • Page 10 Advanced Energy ® Table of Contents 57020080-00D...
  • Page 11 AE VarioMatch Match Network, VM 1000/1500 Platform List of Tables Table 2-1. Theory of operation description ........2-3 Table 2-2. Load capacitor capacity by load ........2-6 Table 3-1. Physical specifications ......... 3-7 Table 3-2. Electrical specifications for VM 300 series ......3-11 Table 3-3.
  • Page 12 Advanced Energy ® List of Tabl 57020080-00D...
  • Page 13 AE VarioMatch Match Network, VM 1000/1500 Platform List of Figures Figure 2-1. Theory of operation ........... 2-3 Figure 2-2. L match network circuit ........2-5 Figure 2-3. VarioMatch L match network circuit ......2-5 Figure 2-4. Gamma topology ..........2-7 Figure 2-5.
  • Page 14 Advanced Energy ® Figure 7-2. Tune coil, 14 turns: tap 1; Load coil, 3 turns: tap A ....7-3 Figure 7-3. Tune coil, 14 turns: tap Load coil, 3 turns: tap A ....7-4 Figure 7-4. Tune coil, 14 turns: tap 3; Load coil, 3 turns: tap A ....7-5 Figure 7-5.
  • Page 15 AE VarioMatch Match Network, VM 1000/1500 Platform 4 turns: tap B ..7-50 Figure 7-49. 4 MHz; Tune coil, 25 turns: tap 4; Load coil, Figure 7-50. 4 MHz; Tune coil, 25 turns: tap 5; Load coil, 4 turns: tap B ..7-51 Figure 7-51.
  • Page 16 Advanced Energy ® 57020080-00D 1-xvi...

  • Page 17: Chapter 1. Safety And Product Compliance Guidelines

    Guidelines IMPORTANT SAFETY INFORMATION To ensure safe installation and operation of the Advanced Energy V arioMatch match ® network, read and understand this manual before attempting to install and operate this unit. At a minimum, read and follow the safety instructions and practices documented under "Safety Guidelines"...

  • Page 18: Safety Guidelines

    Advanced Energy ® ,&CAUTION: CAUTION indicates a potentially hazardous situation that, if not avoided, could result in minor or moderate injury, and/or damage to property. CAUTION is also used for property-damage-only accidents. SAFETY GUIDELINES Review the following information before attempting to install and operate the product.

  • Page 19: Product Compliance

    AE VarioMatch Match Network, VM 1000/1500 Platform CE label � 1020 Protective Earth Ground 1029 Further information found in this guide. � & High voltage 1028 PRODU CT COMPLIA NCE The following sections include information about unit compliance and certification, including the conditions of use required to be in compliance with the standards and directives.

  • Page 20: Electromagnetic Compatibility (Emc) Directives And Standards

    Advanced Energy ® Safety and Compliance Directives and Standards Certain options of this unit have been tested for and comply with the following electromagnetic compatibility (EMC) and safety directives and standards and industry guidelines. Note: This device must be installed and used only in compliance with the directives and standards listed in addition to EN 60204 (IEC 60204) and applicable requirements.

  • Page 21: Conditions Of Use

    AE VarioMatch Match Network, VM 1000/1500 Platform Safety requirements for electrical equipment for measurement, control, and laboratory use INDUSTRY GUIDELINES • SEMI S2-0706 Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment Conditions of Use To comply with the stated directives and standards, you must meet the following conditions of use: •...
  • Page 22 ® INTERLOC KS AND LIMITS &_W ARNING: Advanced Energy® products only include interlocks when required by product specification. Interlocks in AE products are not intended to meet or satisfy safety requirements. Where interlocks exist, you must still meet and satisfy safety requirements. The presence of interlocks does not imply operator protection.

  • Page 23: Chapter 2. Product Overview And Theory

    AE Vario Match™ Match Network, VM 1 000/1500 Platform Product Overview and Theory This chapter describes the AE VarioMatch Match Network, VM 1000/1500 ™ Platform, including its theory of operation. PRODU CT DESCRIPTION A match network transforms the impedance of the load to 50 Q to avoid reflected power and to ensure that the generator's full power is delivered to the load.

  • Page 24: Operating Modes

    MAINS INTERFACE Advanced Energy ® A DC bias measurement circuit (available on most units) permits the DC self bias voltage created in the load to be monitored. The bias voltage is scaled down by a factor of :400 (if not otherwise stated) to a safe, convenient value. The DC bias test voltage delivered by the VarioMatch match network always is positive, even if the actual self bias voltage in the chamber is negative.

  • Page 25: Table 2-1. Theory Of Operation Description

    AE VarioMatch Match Network, VM 1000/1500 Platform THEORY OF OPERATION Figure 2-1 describes the VarioMatch match network's theory of operation. �----+- - - - - - - - - - - - - - - - - - , DC Bias Phase/ RF In Magnitude...
  • Page 26 Advanced Energy ® Table 2-1. Theory of operation description Description Section Motor Control The Motor Control section generates the signals needed to drive the capacitor motors using the phase and magnitude signals, and provides for the manual control interface. The motors are DC motors and use potentiometers to provide feedback as to the capacitor positions.

  • Page 27: L Match Topology

    AE VarioMatch Match Network, VM 1000/1500 Platform L Match Topology Figure 2-1 shows a basic L match network circuit. 50 Ohms Load RF-Generator Impedance Series (Tune) Coil (Plasma) Shunt (Load) Capacitor 3260 Figure 2-2. L match network circuit The L match network received its name because of the configuration of the capacitor and coil used.

  • Page 28: Gamma Topology

    Advanced Energy ® The major practical problem of the L match network is the need for very large tuning capacitors when matching low impedances - a typical situation with plasma chambers. The following table provides an idea of the load capacitor's capacity. The...

  • Page 29: Figure 2-4. Gamma Topology

    AE VarioMatch Match Network, VM 1 000/1 500 Platform In configuration A (Gamma topology) the tune (series) capacitor comes first from the generator's point of view while in configuration B (L match topology) the load (shunt) capacitor comes first. 3430 Gamma topology Figure 2-4.
  • Page 30 Advanced Energy ® Product Overview and T heory 57020080-00D...

  • Page 31: Chapter 3. Specifications

    AE Vario Match™ Match Network, VM 1000/1500 Platform Specifications This chapter lists specifications for the V arioMatch match network. PHYSICAL S PECIFICATIONS Unit Dimensions Figure 3-1 through Figure 3-4 illustrate the physical dimensions. The PLASMA/LOAD connector can be located on either the rear panel or the bottom panel, depending on your model.

  • Page 32: Figure 3-2. Vm 1000/1500 Platform Left Side Panel

    Advanced Energy ® 21 mm 0.83" 250.96mm 9.88" b � 3 1 m _ 3266 5.16" Figure 3-2. VM 1000/1500 platform left side panel Specifications 57020080-00D...

  • Page 33: Figure 3-3. Vm 1000/1500 Platform Rear Panel

    AE VarioMatch Match Network, VM 1000/1500 Platform GROUND 32.00 mm 1.26" .50 mm 0.87 " .50 m ·� 3269 7.58" 7.50 mm 8.56" · - --< -i Figure 3-3. VM 1000/1500 platform rear panel 57020080-00D Specifications...
  • Page 34 Advanced Energy ® i---------- 244.00 mm ________ _ ..__ 9.61" 230.00 mm --------- ----------- 9.06 " ________ 182.00 mm _______ -t 7.17" 62.00 mm 2.44" 14.00 mm 0.5 5 " 14.00 mm 0.55" Holes mounting the unit ground connection 254.00 mm 10.00"...

  • Page 35: Figure 3-5. Vm 1000/1500 Platform Top Panel

    AE VarioMatch Match Network, VM 1000/1500 Platform 3275 Figure 3-5. VM 1000/1500 platform top panel Spacing Requirements The following sections describe the space needed to provide room for connections and to meet cooling requirements. 57020080-00D Specifications...

  • Page 36: Plasma/Load Connection

    RF Input RF Input RF Input PLASMA/LOAD PLASMA/LOAD PLASMA/LOAD Advanced Energy ® FRONT PANEL CONNECTIONS For front panel and other connections: • 200 mm (7 .9") required for the connector when using a straight connector • 100 mm (3.9") required for the...

  • Page 37: Table 3-1. Physical Specifications

    AE VarioMatch Match Network, VM 1000/1500 Platform Physical Specifications Table Table 3-1 describes the physical specifications of the V arioMatch match network. Physical specifications Table 3-1. Description Specification Mounting Directly onto the load or onto a mounting plate. See "Installing the VarioMatch Match Network" on page 5-4.
  • Page 38 AC power input (AC- IEC 320 connector MAINS) connector Coolant connectors Brass water fittings for water tubing 6 mm OD / 4 mm ID (0.24" OD/ 0.16" ID) Advanced Energy ® Table 3-1. Physical specifications (Continued ) Description Specification PLASMA/LOAD Internal coil specifications...

  • Page 39: Figure 7-11. Tune Coil

    AE VarioMatch Match Network, VM 1000/1500 Platform Physical specifications (Continued) Table 3-1. Description Specification Tune coil The tune coil varies by part number on the number of turns, the number of possible taps, and the default tap setting from the factory. PN 69000001: 2.5 turns, fixed coil PN 69000036, 690001 16: 14 turns, taps at 4, 6, 8, 10, 12, 14 turns, default tap setting on 1...
  • Page 40 Gamma (Default: Gamma) PN 69000001: Gamma All other PNs: L match This section includes electrical specifications for VM 300, 700, VM 1000, and VM 1500 products. Advanced Energy ® Table 3-1. Physical specifications (Continued) Description Specification ELECTRICAL S PECIFICATIONS 3-10...

  • Page 41: Vm 700 Series

    AE VarioMatch Match Network, VM 1000/1500 Platform VM 300 Series Table 3-2 describes the VM 300 series electrical specifications. Electrical specifications for VM 300 series Table 3-2. Description Specification Frequency 13.56 MHz 100 VAC to 240 V AC, single � AC line voltage AC line frequency 50 Hz to 60 Hz...

  • Page 42: Vm 1000 Series

    Advanced Energy ® Electrical specifications for VM 700 series (Continued ) Table 3-3. Description Specification Maximum RF load current 15 A Maximum RF load voltage 4000 p eak Input impedance to generator 5 0 Q Maximum load DC self bias...

  • Page 43: Table 3-5. Electrical Specifications For Vm 1500 Series

    AE VarioMatch Match Network, VM 1000/1500 Platform Table 3-4. Electrical specifications for VM 1000 series (Continued ) Description Specification o voe Maximum load DC self bias to 4000 voltage DC seltbias monitor voltage O V to l O V Runtime from start point to end 3 seconds point Tuning range...

  • Page 44: Cooling Specifications

    Advanced Energy ® Electrical specifications for VM 1500 series (Continued ) Table 3-5. Description Specification Maximum reactive power Varies by V arioMatch product part number: PN 69000070, 69000226: 80,000 W PN 69000062: 100,000 W PN 69000001, 69000024, 69000025, 69000229, 69001207, 69001214, 69002207, 69002208: 140,000 W...

  • Page 45: Table 3-6. Cooling Specifications

    AE VarioMatch Match Network, VM 1000/1500 Platform ,&CAUTION: Do not use de-ionized water for cooling purposes. De-ionized water causes both corrosion and erosion of cooling manifolds. Cooling specifications Table 3-6. Description Specification Cooling medium Air-cooled (for units that show only "A" after the model name or Air- and Water-cooled (for units that show "W"...
  • Page 46 Advanced Energy ® Cooling specifications (Continued) Table 3-6. Description Specification Contaminates AE recommends the following specifications for the water used to cool the Navigator match network: • pH between 7 and 9 • total chlorine <20 ppm • total nitrate <10 ppm •...

  • Page 47: Environmental Specifications

    AE VarioMatch Match Network, VM 1000/1500 Platform ENVIRONMENTAL S PECIFICATIONS Table 3-7 Table 3-8 describe the environmental specifications of the V arioMatch match network. Table 3-7. Climatic specifications (per EN50178) Temperature Relative Humidity Air Pressure Not e C to +40 °...
  • Page 48 Advanced Energy ® 3-18 Specifications 57020080-00D...

  • Page 49: Chapter 4. Communication Interfaces And Controls

    INTERFACE INTERFACE. INTERFACE AE Vario Match™ Match Network, VM 1000/1500 Platform Communication Interfaces and Controls This chapter describes the V arioMatch match network's communication interface. 15-PIN VARIOMATCH MATCH INTERFACE The 15-pin match on the VarioMatch match network provides analog and digital signals for controlling and monitoring the unit. This interface allows manual tune, preset, and monitoring functionality for a VarioMatch match network by an AE generator, such as a CESAR.

  • Page 50: Match Interface Cabling Requirements

    Advanced Energy ® Match Interface Cabling Requirements INTERFACE Connect the VarioMatch match network's 15-pin port to the generator with a shielded, 15-wire 1/0 cable. Minimize signal losses by keeping the cable as short as possible. The maximum recommended cable length between the V arioMatch match network and the controller is 10 meters (33 feet), although this may vary by installation.
  • Page 51 AE VarioMatch Match Network, VM 1000/1500 Platform Table 4-1. VarioMatch match INTERFACE connector pin description Return Name Signal Description Type GROUND Reference ground for DC Bias and capacitor position signals. Reserved or 9 M ANUAL Input Connect this + 15 V input to ground to set the MODE...

  • Page 52: Wiring Diagrams

    MONITOR MATCHING Advanced Energy ® Table 4-1. VarioMatch match INTERFACE connector pin description Return Name Signal Description Type Output Shunt (load) capacitor position signal. C Lo POSITION The voltage at this output is directly proportional to the position of the capacitor ·...
  • Page 53 AE VarioMatch Match Network, VM 1000/1500 Platform User-supplied c i rcuitry Internal circuitry �-J may vary Figure 4-3. Pin 1 O User-suppl i ed circuitry Internal circuitry may vary � 3441 Figure 4-4. Pin 1 1 57020080-00D Communication Interfaces and Controls...
  • Page 54 Advanced Energy ® User�upplied circuitry Internal circuitry may vary 1 0 k Q 100 nF 1 kQ 12 -----., Figure 4-5. Pin 12 User- supplied circuitry Internal circu i try may vary 10 kQ $f------- G <21 f 100 ,F <2...

  • Page 55: Match Interface Using Switches

    INTERFACE AE VarioMatch Match Network, VM 1000/1500 Platform Internal circu User supplied c i rcui!Jy may vary CD4001 B (NOR Gate) 9 1-- - ... Figure 4-7. Pin 15 Match INTERFACE Using Switches To construct a simple manual control, wire four normally open momentary switches for the motor drive and one on/off switch for auto/manual mode selection as described...
  • Page 56 Advanced Energy ® 4- 8 Communication Interfaces and Controls 57020080-00D...

  • Page 57: Chapter 5. Installation, Setup, And Operation

    AE Vario Match™ Match Network, VM 1000/1500 Platform Installation, Setup, and Operation PREPARING TO INSTALL THE VARIOMATCH MATCH NETWORK The following sections provide information that you need to understand before installing the V arioMatch match network. Spacing Requirements "Physical Specifications" on page 3-1 for the unit dimensions and clearance.

  • Page 58: Tools Required For Installation

    Unpacking Unpack and inspect the unit carefully, looking for obvious physical damage. If no damage is apparent, proceed with the installation. If you do see signs of shipping damage, contact Advanced Energy and the carrier immediately (see "Contacting AE ®...

  • Page 59: General Cabling Considerations For Plasma/Load

    AE VarioMatch Match Network, VM 1000/1500 Platform Cable Requirements GENERAL CABLING CONSIDERATIONS FOR PLASMA/LOAD The main objective of an RF delivery system is to provide as much of the generator's output power to the load as possible. However, losses occur in the coaxial cable, the match network, and in the lead between the match network and load.

  • Page 60: Shielding The Rf Connections

    PLASMA/LOAD Advanced Energy ® If your unit uses a coaxial connector, then wire the coaxial connector to the load using the shortest possible length of cable. For power levels greater than 1 kW cable length should not exceed one meter. Use a coaxial cable with high voltage capability and good thermal immunity.

  • Page 61: Mounting The Unit

    _& CAUTION: AE VarioMatch Match Network, VM 1 000/1 500 Platform "Connecting the Match INTERFACE (Optional)" on page 5-7 "Connecting the Cooling Water" on page 5-7 "Connecting RF Input From a Generator" on page 5-8 "Connecting to the Load" on page 5-9 "Connecting AC Input (Mains) Power"...
  • Page 62 GROUND Advanced Energy ® A good ground connection is essential to achieve the best possible RF connection between the match network and the ground of the load. The V arioMatch match network chassis must be intimately grounded to the plasma chamber The ground lead must provide a low impedance RF path.

  • Page 63: Connecting The Match Interface (Optional)

    MAINS, PLASMA/LOAD, RF-GENERA TOR PLASMA/LOAD INTERFACE CAUTION: AE VarioMatch Match Network, VM 1000/1500 Platform When selecting the mounting hardware, choose screws that will not extend into the unit cabinet more than 10 mm. Brass fasteners are recommended . • Mounting plate {acts as ground) Figure 5-1.

  • Page 64: Connecting Rf Input From A Generator

    GENERATOR connector on the match network. The RF-GENERATOR connector is a 50 Q N-type connector. RF-GENERATOR connector, and Advanced Energy ® ,&CAUTION: When fastening the water hose, be sure the bullkhead does not rotate; this could cause internal damage to the unit.

  • Page 65: Connecting To The Load

    AE VarioMatch Match Network, VM 1000/1500 Platform 3280 N-type connector Figure 5-3. input connector pin descriptions T able 5-1. RF Description Center RF input Outer Ground Connecting to the Load Note: VM 69000082: The RF output connector is customer supplied. See your company's internal documentation for information.

  • Page 66: Figure 5-4. 7 /16 Din Female Connector

    Advanced Energy ® • 7/16 DIN socket (Figure 5-4 on page 5-10) • (Figure 5-5 Figure 5-6 on page • 6 mm brass tube fitting (Figure 5-7 on page 5-1 3281 7 /16 DIN female connector Figure 5-4. 3277 MC6 connector Figure 5-5.

  • Page 67: Connecting The Variomatch Match Network To The Load

    AE VarioMatch Match Network, VM 1000/1500 Platform 6 mm brass tube fitting Figure 5-7. CONNECTING THE VARIOMATCH MATCH NETWORK TO THE LOAD To Connect the VarioMatch Match Network to the Load: 1. Review the cabling requirements in "Cable Requirements" on page 5-3.

  • Page 68: First-Time Operation

    Advanced Energy ® The AC input (Mains) connector is an IEC 320 connector. Figure 5-8 shows the input power connector, and Table 5-2 describes each pin. Input (Mains) connector Figure 5-8. Table 5-2. Input connector pin description Description Phase ( or neutral if pin 2 is...
  • Page 69 MAINS. MAINS AE VarioMatch Match Network, VM 1000/1500 Platform & DANGER: RISK OF DEATH OR BODILY INJURY. Disconnect and lockout/tagout all sources of input power before working on this unit or anything connected to it. & W ARNING: Leaving on the RF power after turning off the input power to the match network may damage the unit.

  • Page 70: Specifications

    MAINS, MAINS MAINS Advanced Energy ® Services (see Chapter 6, ''Troubleshooting and Global Services"). d. Did reflected power decrease to within specifications? If not, ensure the capacitors are within the tuning range of 30 to 80%. e. Did the motors stop moving? If the motors do not stop moving, ensure the capacitors are within the tuning range of 30 to 80%.
  • Page 71 INTERFACE INTERFACE. AE VarioMatch Match Network, VM 1000/1500 Platform The second sensor is the phase detector, which measures the phase change compared to a perfect 50 resistive load. This sensor drives the tune variable capacitor which is in series with the coil. Both magnitude and phase information are fed to the motor drive electronics which immediately drive the electric motors in the correct direction.

  • Page 72: Set Up The Match For Your Load

    MATCHING INTERFACE. Host Port Advanced Energy ® Interaction With a Cesar Generator You can control the V arioMatch match network in either manual mode or automatic mode using a Cesar generator. When the V arioMatch match network is connected to a...
  • Page 73 AE VarioMatch Match Network, VM 1000/1500 Platform &WARNING: Maintenance personnel must receive proper training before installing, troubleshooting, or maintaining high-energy electrical equipment. Potentially lethal voltages could cause death, serious personal injury, or damage to the equipment. Ensure that all appropriate safety precautions are taken.

  • Page 74: Selecting The Correct Tap Setting For The Tune Coil

    Advanced Energy ® • You can configure some ICP units to use either the Gamma or the L match topology. See "Changing the Configuration Between the match and the Gamma Topology" on page 5 - If you purchased a unit with 2 MHz frequency, you can change additional fixed capacitors.
  • Page 75 MAINS. PLASMA/LOAD). AE VarioMatch Match Network, VM 1000/1500 Platform For specific recommendations, contact Global Services for a technical bulletin for your model. To Change the Tap Settings on the Tune Coil: 1. Turn off RF from the generator. 2. Disconnect AC 3.
  • Page 76 Advanced Energy ® 8. Using the wrench, screw the tap to the selected tum on the coil. Tune coil, tap position for small capacitive load PLASMNLOAD Tapping of the tune coil for small capacitive load Figure 5-9. 5-20 Installation, Setup, and Operation...
  • Page 77 AE VarioMatch Match Network, VM 1000/1500 Platform Tune coil, tap position for medium capac tive load PLASMNLOAD Figure Tapping of the tune coil for medium capacitive load 5-10. 57020080-00D Installation, Setup, and Operation 5-21...

  • Page 78: Figure 5-11. Tapping Of The Tune Coil For High Capacitive Load

    Advanced Energy ® Tune coil, tap position for high capacitive load PLASMA/LOAD Figure 5-11. Tapping of the tune coil for high capacitive load 9. Reattach the top cover: a. Plug in the fan b. Attach the top cover using the twelve screws you removed in step 2.
  • Page 79 MAINS. (PLASMA/LOAD). AE VarioMatch Match Network, VM 1000/1500 Platform By changing the tap position on this coil, you can adjust the match range for the size of the load. The more coils that are active between the tap and the load capacitor, the higher the resulting capacitance.

  • Page 80: Figure 5-12. Tap Position For Small Loads

    Advanced Energy ® ---- RFGENERATOR connection ---- Load coil, tap position small loads Figure 5-12. Tap position for small loads 5- 24 Installation, Setup, and Operation 57020080-00D...

  • Page 81: Figure 5-13. Tap Position For Medium Loads

    AE VarioMatch Match Network, VM 1000/1500 Platform �--- GENERATOR connection •◄ 1-- - - Load coil, tap position medium loads Tap position for medium loads Figure 5-13. 57020080-00D Installation, Setup, and Operation 5-25...

  • Page 82: Figure 5-14. Tap Position For Large Loads

    Advanced Energy ® RFGENERATOR connection - - - Load coil, position C for large loads Tap position for large loads Figure 5-14. 8. Reattach the top cover: a. Plug in the fan b. Attach the top cover using the twelve screws you removed in step 2.

  • Page 83: Changing The Configuration Between The L Match And The Gamma Topology

    AE VarioMatch Match Network, VM 1 000/1 500 Platform Changing the Configuration Between the L match and the Gamma Topology filW ARNING: Maintenance personnel must receive proper training before installing, troubleshooting, or maintaining high-energy electrical equipment. Potentially lethal voltages could cause death, serious personal injury, or damage to the equipment.

  • Page 84: Tools Required To Change The Interconnection

    Advanced Energy ® • "Changing the Interconnector" on page 5-29 • "Changing the Jumpers" on page 5-32 • "Reattaching the Top Cover and Reconnecting Power and R ' on page 5-35 • Also see "Interaction With a Cesar Generator" on page 5-16...
  • Page 85 AE VarioMatch Match Network, VM 1000/1500 Platform CHANGING THE INTERCONNECTOR To Change the lnterconnector: 1. Locate the alternate interconnector and bridge. These two pieces were attached to the unit when shipped from the factory. lnterconnector Bridge Figure Alternate interconnector and bridge 5-15.
  • Page 86 Advanced Energy ® 6. Using a 7 mm wrench, unscrew the interconnection from it's current position. Step4 interconnector Step 3 Figure Disconnect the original interconnection 5-16. 7. Attach the bridge by screwing it onto the bracket with two 7 mm bolts.

  • Page 87: Figure 5-17. Attach The New Interconnector

    AE VarioMatch Match Network, VM 1000/1500 Platform Step 8 Step 9 Step 11 _ a Step interconnector Step bridge .__step? Attach the new interconnector Figure 5-17. 57020080-00D Installation, Setup, and Operation 5-31...

  • Page 88: Changing The Jumpers

    Advanced Energy ® CHANGING THE JUMPERS To Change the Jumpers: 1. Remove the front panel by unscrewing the eleven screws as shown, then remove the front panel. Screws Figure 5-18. Remove the front panel 5-32 Installation, Setup, and Operation 57020080-00D...
  • Page 89 AE VarioMatch Match Network, VM 1000/1500 Platform 2. Carefully remove the three solder joints on the left box as shown, and remove the top of the box. Solder locations Remove solder joints Figure 5-19. 57020080-00D Installation, Setup, and Operation 5-33...

  • Page 90: Figure 5-20. Jumper Setting For L Match Topology

    Advanced Energy ® 3. Move the jumpers as needed for the desired configuration (see Figure 5-20 on 5-35). page 5-34 Figure 5-21 on page Two jumpers on the left two posts for L topology Jumper setting for L match topology Figure 5-20.

  • Page 91: Reattaching The Top Cover And Reconnecting Power And Rf

    AE VarioMatch Match Network, VM 1000/1500 Platform Two jumpers on the right two posts for Gamma-topology Figure 5-21. Jumper setting for Gamma topology 4. Replace the top cover of the metal box, carefully resoldering in place. 5. Replace the front panel by replacing the eleven screws. REA TT ACHING THE TOP COVER AND RECONNECTING POWER AND RF To Reattach the Top Cover and Reconnect Power and RF:...

  • Page 92: Changing The Fixed Capacitor Setting (Model 0415 2 Mhz Units Only)

    Advanced Energy ® Changing the Fixed Capacitor Setting (Model 041 5 2 MHz Units Only) The V arioMatch match network Model 0415 2 MHz unit is equipped with a circuit board containing additional fixed capacitors You can switch these capacitors in parallel to the load capacitor to increase the capacitance.

  • Page 93: Table 5-3. Capacitance Due To Jumper Settings On Circuit Board

    AE VarioMatch Match Network, VM 1000/1500 Platform table shows the additional capacitance as a consequence of the jumper settings. Figure 5-22 shows the location of the circuit board and jumpers. Table 5-3. Capacitance due to jumper settings on circuit board Bridge Capacitance 0 pF...

  • Page 94: Disconnecting Water And Draining The Variomatch Match Network

    Advanced Energy ® b. Attach the top cover using the twelve screws you removed in step 2. 8. Reconnect PLASMA/LOAD, RF-GENERATOR, and AC MAINS as described "Installing the VarioMatch Match Network" on page 5-4 DISCONNECTING WATER A ND DRAINING THE VARIOMATCH MATCH NETWORK Use this procedure when you need to purge the VarioMatch match network of cooling water for maintenance, moving, or storing.
  • Page 95 AE VarioMatch Match Network, VM 1000/1500 Platform For information to assist you in disconnecting the input power cable, see "Connecting AC Input (Mains) Power'' on page 5-11. 3. Disconnect the RF input connector. For information to assist you in this procedure, see "Connecting RF Input From a Generator"...
  • Page 96 Advanced Energy ® 5-40 Installation, Setup, and Operation 57020080-00D...

  • Page 97: Chapter 6. Troubleshooting And Global Services

    AE Vario Match™ Match Network, VM 1000/1500 Platform Troubleshooting and Global Services This chapter contains basic troubleshooting information, as well as procedures for returning a unit for repair. TROU BLESHOOTING OVERVIEW Before calling AE Global Services, consult the following sections and perform recommended checks and troubleshooting procedures.

  • Page 98: Troubleshooting Checklists

    Advanced Energy ® TROU BLESHOOTING CHEC KLISTS Use troubleshooting checklists to begin troubleshooting your unit. .&_ W ARNING: RISK OF DEATH OR BODILY INJURY. Disconnect all sources of input power before working on this unit or anything connected to it.

  • Page 99: External Load Checks - Open/Short Rf Output Path

    AE VarioMatch Match Network, VM 1000/1500 Platform TROU BLESHOOTING U NIT OUTPUT Use extreme caution as this section involves troubleshooting the output of the unit. .&_ W ARNING: RISK OF DEATH OR BODILY INJURY. Disconnect all sources of input power before working on this unit or anything connected to it. .&_ W ARNING: Operating and maintenance personnel must have the correct training...

  • Page 100: Contacting Ae Global Services

    When you call Global Services, make sure to have the unit serial number and part number. These numbers are available on unit labels. Advanced Energy World Headquarters, 24 x 7 Technical Support AE Global Services contact information Table 6-1. Office Contact...

  • Page 101: Returning Units For Repair

    AE VarioMatch Match Network, VM 1000/1500 Platform RETURNING U NITS FOR REPAIR Before returning any product for repair and/or adjustment, first follow all troubleshooting procedures. If, after following these procedures, you still have a problem, or if the procedure instructs you to, contact AE Global Services and discuss the problem with a representative.
  • Page 102 Advanced Energy ® Troubleshooting and Global Services 57020080-00D...

  • Page 103: Chapter 7. Variomatch Match Network Tuning Ranges

    AE Vario Match™ Match Network, VM 1000/1500 Platform VarioMatch Match Network Tuning Ranges This chapter shows the V arioMatch match network's tuning ranges, using Smith charts. The figure captions include the number of turns and tap settings for the Smith chart shown in the illustration.

  • Page 104: Table 7-1. Location Of Smith Chart Illustrations For 14-Turn Tune Coil

    Advanced Energy ® Smith Charts T able 7-1. Location of Smith chart illustrations for 14-turn tune coil Tune Coil Load Coil Tap Setting Tap Setting Figure 7-2 Figure 7-8 Figure 7-14 Figure 7-3 Figure 7-9 Figure 7-15 Figure 7-4 Figure 7-10...

  • Page 105: Figure 7-2. Tune Coil, 14 Turns: Tap 1; Load Coil, 3 Turns: Tap A

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-2. Tune coil, 14 turns: tap 1; Load coil, 3 turns: tap A 57020080-00D VarioMatch Match Network Tuning Ranges...

  • Page 106: Figure 7-3. Tune Coil, 14 Turns: Tap

    Advanced Energy ® Figure 7-3. Tune coil, 14 turns: tap 2; Load coil, 3 turns: tap A VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 107: Figure 7-4. Tune Coil, 14 Turns: Tap 3; Load Coil, 3 Turns: Tap A

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-4. Tune coil, 14 turns: tap 3; Load coil, 3 turns: tap A 57020080-00D VarioMatch Match Network Tuning Ranges...

  • Page 108: Figure 7-5. Tune Coil, 14 Turns: Tap 4; Load Coil, 3 Turns: Tap A

    Advanced Energy ® Figure 7-5. Tune coil, 14 turns: tap 4; Load coil, 3 turns: tap A VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 109: Figure 7-6. Tune Coil, 14 Turns: Tap 5; Load Coil, 3 Turns: Tap A

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-6. Tune coil, 14 turns: tap 5; Load coil, 3 turns: tap A 57020080-00D VarioMatch Match Network Tuning Ranges...

  • Page 110: Figure 7-7. Tune Coil, 14 Turns: Tap 6; Load Coil, 3 Turns: Tap A

    Advanced Energy ® Figure 7-7. Tune coil, 14 turns: tap 6; Load coil, 3 turns: tap A VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 111: Figure 7-8. Tune Coil, 14 Turns: Tap 1; Load Coil, 3 Turns: Tap B

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-8. Tune coil, 14 turns: tap 1; Load coil, 3 turns: tap B 57020080-00D VarioMatch Match Network Tuning Ranges...

  • Page 112: Figure 7-9. Tune Coil, 14 Turns: Tap 2; Load Coil, 3 Turns: Tap B

    Advanced Energy ® Figure 7-9. Tune coil, 14 turns: tap 2; Load coil, 3 turns: tap B 7-10 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 113: Figure 7-10. Tune Coil

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-10. Tune coil, 14 turns: tap 3; Load coil, 3 turns: tap B 57020080-00D VarioMatch Match Network Tuning Ranges 7-11...
  • Page 114 Advanced Energy ® Figure 7-11. Tune coil, 14 turns: tap 4; Load coil, 3 turns: tap B 7-12 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 115 AE VarioMatch Match Network, VM 1000/1500 Platform Figure Tune coil, 14 turns: tap 5; Load coil, 3 turns: tap B 7-12. 57020080-00D VarioMatch Match Network Tuning Ranges 7-13...
  • Page 116 Advanced Energy ® Figure 7-13. Tune coil, 14 turns: tap 6; Load coil, 3 turns: tap B 7-14 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 117 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-14. Tune coil, 14 turns: tap 1; Load coil, 3 turns: tap C 57020080-00D VarioMatch Match Network Tuning Ranges 7-15...
  • Page 118 Advanced Energy ® Figure 7-15. Tune coil, 14 turns: tap 2; Load coil, 3 turns: tap C 7-16 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 119: Figure 7-16. Tune Coil

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-16. Tune coil, 14 turns: tap 3; Load coil, 3 turns: tap C 7-17 57020080-00D VarioMatch Match Network Tuning Ranges...

  • Page 120: Figure 7-17. Tune Coil

    Advanced Energy ® Figure 7-17. Tune coil, 14 turns: tap 4; Load coil, 3 turns: tap C 7-18 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 121: Figure 7-18. Tune Coil

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-18. Tune coil, 14 turns: tap 5; Load coil, 3 turns: tap C 57020080-00D VarioMatch Match Network Tuning Ranges 7-19...

  • Page 122: Figure 7-19. Tune Coil

    Advanced Energy ® Figure 7-19. Tune coil, 14 turns: tap 6; Load coil, 3 turns: tap C 7-20 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 123: 6-Turn Tune (Series) Coil

    AE VarioMatch Match Network, VM 1000/1500 Platform 6-TURN TUNE (SERIES) COIL Schematic Lseries s e ries (copper tube) (wire) RFIN 6 5 -4 3 2 1 Cshunt � RF OUT Lout Models 1000 and 1500 coil and inductor schematic, 6 turn coil Figure 7-20.

  • Page 124: 27 Mhz Units

    Advanced Energy ® 27 MHZ UNITS Figure 7-21. 27 MHz; Tune coil, 6 turns: tap 1; 7-22 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 125 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 27 MHz; Tune coil, 6 turns: tap 2 7-22. 57020080-00D VarioMatch Match Network Tuning Ranges 7-23...
  • Page 126 Advanced Energy ® Figure 7-23. 27 MHz; Tune coil, 6 turns: tap 3 7-24 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 127 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-24. 27 MHz; Tune coil, 6 turns: tap 4 57020080-00D VarioMatch Match Network Tuning Ranges 7-25...
  • Page 128 Advanced Energy ® Figure 7-25. 27 MHz; Tune coil, 6 turns: tap 5 7-26 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 129 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 27 MHz; Tune coil, 6 turns: tap 6 7-26. 57020080-00D VarioMatch Match Network Tuning Ranges 7-27...

  • Page 130: 40 Mhz Units

    Advanced Energy ® 40 MHZ UNITS Figure 7-27. 40 MHz; Tune coil, 6 turns: tap 1 7-28 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 131 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-28. 40 MHz; Tune coil, 6 turns: tap 2 57020080-00D VarioMatch Match Network Tuning Ranges 7-29...
  • Page 132 Advanced Energy ® Figure 7-29. 40 MHz; Tune coil, 6 turns: tap 3 7-30 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 133 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-30. 40 MHz; Tune coil, 6 turns: tap 4 57020080-00D VarioMatch Match Network Tuning Ranges 7-31...
  • Page 134 Advanced Energy ® Figure 7-31. 40 MHz; Tune coil, 6 turns: tap 5 7-32 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 135: Schematic

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 40 MHz; Tune coil, 6 turns: tap 6; 7-32. VM 041 5 Schematic The tune (series) coil has taps at taps at 10, 13, 16, 19, 22, and 25 turns. These are labeled through 6 in the schematic.

  • Page 136: Table 7-3. Location Of Smith Chart Illustrations For 2 Mhz Vm 0415

    Advanced Energy ® "' �x - - i-- (\\ ' i RF IN t_t_r_t_t_t ___ _ mnttnfff 1 1 1 RF OUT Lout � � � Figure 7-33. VM 0415 coil and inductor schematic Smith Charts 2 MHZ UNITS The Smith charts for the 2 MHz VM 4015 show the tuning range with tune coil tap set at 6, load coil tap set at E.
  • Page 137 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-34. 2 MHz; Tune coil, 6; Load coil, E; O pF 57020080-00D VarioMatch Match Network Tuning Ranges 7-35...

  • Page 138: Figure 7-35. 2 Mhz; Tune Coil, 6; Load Coil, E; 680 Pf

    Advanced Energy ® Figure 7-35. 2 MHz; Tune coil, 6; Load coil, E; 680 pF 7-36 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 139 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 2 MHz; Tune coil, 6; Load coil, 1360 pF 7-36. 57020080-00D VarioMatch Match Network Tuning Ranges 7-37...

  • Page 140: Figure 7-37. 2 Mhz; Tune Coil, 6; Load Coil, E; 2040 Pf

    Advanced Energy ® Figure 7-37. 2 MHz; Tune coil, 6; Load coil, E; 2040 pF 7-38 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 141 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 2 MHz; Tune coil, 6; Load coil, E; 2720 pF 7-38. 57020080-00D VarioMatch Match Network Tuning Ranges 7-39...

  • Page 142: Table 7-4. Location Of Smith For 4 Mhz Vm 0415

    Advanced Energy ® Figure 7-39. 2 MHz; Tune coil, 6; Load coil, E; 3400 pF 4 MHZ UNITS The Smith charts for the 4 MHz VM 4015 show the tuning range at each tune and load coil tap setting. AE does not recommend varying the additional capacitance setting.

  • Page 143: Figure 7-15. Tune Coil

    AE VarioMatch Match Network, VM 1000/1500 Platform Table 7-4. Location of Smith for 4 MHz VM 0415 Tune Coil Load Coil Tap Setting Tap Setting Figure 7-42 Figure 7-48 Figure 7-54 Figure 7-60 Figure 7-66 Figure 7-43 Figure 7-49 Figure 7-55 Figure 7-61 Figure 7-67 Figure 7-44...

  • Page 144: Figure 7-41. 4 Mhz; Tune Coil

    Advanced Energy ® Figure 7-41. 4 MHz; Tune coil, 25 turns: tap 2; Load coil, 4 turns: tap A 7-42 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 145 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-42. 4 MHz; Tune coil, 25 turns: tap 3; Load coil, 4 turns: tap A 57020080-00D VarioMatch Match Network Tuning Ranges 7-43...

  • Page 146: Figure 7-43. 4 Mhz; Tune Coil

    Advanced Energy ® Figure 7-43. 4 MHz; Tune coil, 25 turns: tap 4; Load coil, 4 turns: tap A 7-44 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 147: Figure 7-44. 4 Mhz; Tune Coil

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-44. 4 MHz; Tune coil, 25 turns: tap 5; Load coil, 4 turns: tap A 57020080-00D VarioMatch Match Network Tuning Ranges 7-45...

  • Page 148: Figure 7-45. 4 Mhz; Tune Coil

    Advanced Energy ® Figure 7-45. 4 MHz; Tune coil, 25 turns: tap 6; Load coil, 4 turns: tap A 7-46 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 149: Figure 7-46. 4 Mhz; Tune Coil

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-46. 4 MHz; Tune coil, 25 turns: tap 1; Load coil, 4 turns: tap B 57020080-00D VarioMatch Match Network Tuning Ranges 7-47...

  • Page 150: Figure 7-47. 4 Mhz; Tune Coil

    Advanced Energy ® Figure 7-47. 4 MHz; Tune coil, 25 turns: tap 2; Load coil, 4 turns: tap B 7-48 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 151: Figure 7-48. 4 Mhz; Tune Coil

    AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-48. 4 MHz; Tune coil, 25 turns: tap 3; Load coil, 4 turns: tap B 57020080-00D VarioMatch Match Network Tuning Ranges 7-49...
  • Page 152 Advanced Energy ® Figure 7-49. 4 MHz; Tune coil, 25 turns: tap 4; Load coil, 4 turns: tap B 7-50 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 153 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-50. 4 MHz; Tune coil, 25 turns: tap 5; Load coil, 4 turns: tap B 57020080-00D VarioMatch Match Network Tuning Ranges 7-51...
  • Page 154 Advanced Energy ® Figure 7-51. 4 MHz; Tune coil, 25 turns: tap 6; Load coil, 4 turns: tap B 7-52 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 155 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 4 MHz; Tune coil, 25 turns: tap 1; Load coil, 4 turns: tap C 7-52. 57020080-00D VarioMatch Match Network Tuning Ranges 7-53...
  • Page 156 Advanced Energy ® Figure 7-53. 4 MHz; Tune coil, 25 turns: tap 2; Load coil, 4 turns: tap C 7-54 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 157 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-54. 4 MHz; Tune coil, 25 turns: tap 3; Load coil, 4 turns: tap C 57020080-00D VarioMatch Match Network Tuning Ranges 7-55...
  • Page 158 Advanced Energy ® Figure 7-55. 4 MHz; Tune coil, 25 turns: tap 4; Load coil, 4 turns: tap C 7-56 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 159 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-56. 4 MHz; Tune coil, 25 turns: tap 5; Load coil, 4 turns: tap C 57020080-00D VarioMatch Match Network Tuning Ranges 7-57...
  • Page 160 Advanced Energy ® Figure 7-57. 4 MHz; Tune coil, 25 turns: tap 6; Load coil, 4 turns: tap C 7-58 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 161 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-58. 4 MHz; Tune coil, 25 turns: tap 1; Load coil, 4 turns: tap D 57020080-00D VarioMatch Match Network Tuning Ranges 7-59...
  • Page 162 Advanced Energy ® Figure 7-59. 4 MHz; Tune coil, 25 turns: tap 2; Load coil, 4 turns: tap D 7-60 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 163 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-60. 4 MHz; Tune coil, 25 turns: tap 3; Load coil, 4 turns: tap D 57020080-00D VarioMatch Match Network Tuning Ranges 7-61...
  • Page 164 Advanced Energy ® Figure 7-61. 4 MHz; Tune coil, 25 turns: tap 4; Load coil, 4 turns: tap D 7-62 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 165 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 4 MHz; Tune coil, 25 turns: tap 5; Load coil, 4 turns: tap D 7-62. 57020080-00D VarioMatch Match Network Tuning Ranges 7-63...
  • Page 166 Advanced Energy ® Figure 7-63. 4 MHz; Tune coil, 25 turns: tap 6; Load coil, 4 turns: tap D 7-64 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 167 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-64. 4 MHz; Tune coil, 25 turns: tap 1; Load coil, 4 turns: tap E 57020080-00D VarioMatch Match Network Tuning Ranges 7-65...
  • Page 168 Advanced Energy ® Figure 7-65. 4 MHz; Tune coil, 25 turns: tap 2; Load coil, 4 turns: tap E 7-66 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 169 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-66. 4 MHz; Tune coil, 25 turns: tap 3; Load coil, 4 turns: tap E 57020080-00D VarioMatch Match Network Tuning Ranges 7-67...
  • Page 170 Advanced Energy ® Figure 7-67. 4 MHz; Tune coil, 25 turns: tap 4; Load coil, 4 turns: tap E 7-68 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 171 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-68. 4 MHz; Tune coil, 25 turns: tap 5; Load coil, 4 turns: tap E 57020080-00D VarioMatch Match Network Tuning Ranges 7-69...
  • Page 172 Advanced Energy ® Figure 7-69. 4 MHz; Tune coil, 25 turns: tap 6; Load coil, 4 turns: tap E 7-70 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 173 RF IN RF OUT RF IN RF OUT AE VarioMatch Match Network, VM 1000/1500 Platform Schematics C selies Cslnmt Figure 7-70. /GP coil and inductor schematic, Gamma C seiies Csbunt Figure 7-71. /GP coil and inductor schematic, L match 57020080-00D VarioMatch Match Network Tuning Ranges 7-71...

  • Page 174: Figure 7-72. Vm 1500, Gamma

    Advanced Energy ® Smith Charts VM 1500, Gamma Figure 7-72. 7-72 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 175 AE VarioMatch Match Network, VM 1000/1500 Platform VM 1500, L match Figure 7-73. 57020080-00D VarioMatch Match Network Tuning Ranges 7-73...

  • Page 176: Figure 7-74. Vm 4015, Gamma

    Advanced Energy ® VM 4015, Gamma Figure 7-74. 7-74 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 177: Delta Match

    AE VarioMatch Match Network, VM 1000/1500 Platform DELTA MATCH Schematic Cseries Lout (wire) RF IN RF OUT Cshunt Figure 7-75. Delta match coil and inductor schematic 57020080-00D VarioMatch Match Network Tuning Ranges 7-75...

  • Page 178: Smith Chart

    Advanced Energy ® Smith Chart Figure 7-76. Tune coil, 2.5 turns VM PN 69000082 Schematic and Smith charts are not available. 7-76 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 179: Schematic

    10 9 8 7 6 5 4 3 2 1 AE VarioMatch Match Network, VM 1000/1500 Platform VM 700 Schematic These units have one 10-turn tapped tune (series) coil and one 26.5-turn fixed coil. The tapped coil has taps on every tum, labeled 1 through 10 in the schematic. The load (shunt) coil has 3 turns, with taps labeled A, B, and C.

  • Page 180: Figure 7-78. Tune Coil, 1

    Advanced Energy ® Table 7-5. Location of Smith chart illustrations for VM 700 Tune Coil Load Coil Tap Setting Tap Setting Figure 7-84 Figure 7-85 Figure 7-86 Figure 7-87 Figure 7-78. Tune coil, 10 turns: tap 1; Load coil, 3 turns: tap A...
  • Page 181 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-79. Tune coil, 10 turns: tap 2; Load coil, 3 turns: tap A 57020080-00D VarioMatch Match Network Tuning Ranges 7-79...

  • Page 182: Figure 7-80. Tune Coil, 1

    Advanced Energy ® Tune coil, 1 O turns: tap 3; Load coil, 3 turns: tap A Figure 7-80. 7-80 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 183: Figure 7-81. Tune Coil, 1

    AE VarioMatch Match Network, VM 1000/1500 Platform Tune coil, 1 O turns: tap 4; Load coil, 3 turns: tap A Figure 7-81. 57020080-00D VarioMatch Match Network Tuning Ranges 7-81...
  • Page 184 Advanced Energy ® Tune coil, 1 O turns: tap 5; Load coil, 3 turns: tap Figure 7-82. 7-82 VarioMatch Match Network Tuning Ranges 57020080-00D...

  • Page 185: Figure 7-83. Tune Coil, 1

    AE VarioMatch Match Network, VM 1000/1500 Platform Tune coil, 1 O turns: tap 6; Load coil, 3 turns: tap A Figure 7-83. 57020080-00D VarioMatch Match Network Tuning Ranges 7-83...

  • Page 186: Figure 7-84. Tune Coil, 1

    Advanced Energy ® Figure 7-84. Tune coil, 1 O turns: tap Load coil, 3 turns: tap A 7-84 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 187 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-85. Tune coil, 10 turns: tap 8; Load coil, 3 turns: tap A 57020080-00D VarioMatch Match Network Tuning Ranges 7-85...

  • Page 188: Figure 7-86. Tune Coil, 1

    Advanced Energy ® Tune coil, 1 O turns: tap 9; Load coil, 3 turns: tap A Figure 7-86. 7-86 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 189 AE VarioMatch Match Network, VM 1000/1500 Platform Figure 7-87. Tune coil, 10 turns: tap 10; Load coil, 3 turns: tap A 57020080-00D VarioMatch Match Network Tuning Ranges 7-87...
  • Page 190 Advanced Energy ® 7-88 VarioMatch Match Network Tuning Ranges 57020080-00D...
  • Page 191 AE VarioMatch Match Network, VM 1000/1500 Platform I ndex CESAR generator 4-1 cooling water 5-7 AC input 5-12 ground 5-5 connecting 5-11 match INTERFACE 5-7 connector pin description 5-12 PLASMA/LOAD 5-9 connector specifications 3-8 RF input from generator 5-8 current specifications 3-11, 3-12, 3-13 to CESAR generator 5-16 frequency specifications 3-11, 3-12, 3-13 to the load 5-11...
  • Page 192 Advanced Energy ® MAINS Gamma topology 2-6 general description 2-1 see also AC input ground 4-2, 5-5 connector 3-8, 5-12 guidelines manual tuning mode 5-15 marking, CE 1-3 safety 1-2 SEMI 1-5 maximum load DC selfb ias voltage 3-11, 3-12,...
  • Page 193 AE VarioMatch Match Network, VM 1000/1500 Platform input, cabling specifications 5-2 tuning range 3-11, 3-12, 3-13, 3-14 shiel ding 5-4 water contaminates 3-16 runtime from startpoint to endpoint 3-11, 3-12, water flow 3-15 3-13, 3-14 water pressure 3-15 water temperature 3-15 weight 3-7 standards 1-4 safety...
  • Page 194 Advanced Energy ® voltage AC input speci f ications 3-11, 3-12, 3-13 warranty authorized returns 6-5 water connecting 5-7 connectors 3-8 contaminants specification 3-16 flow specification 3-15 hose speci f icatinos 5-2 pressure specification 3-15 temperature speci f ication 3-15...

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