Advanced Energy HFV 8000 User Manual page 33

Table 3-3. Electrical specifications (Continued)
Description
Harmonics
AC Line Sag Response
5705211-C
Specification
At full rated output, all harmonics are 21 dB below the
RF output signal when operated into a 50 Ω,
nonreactive load impedance. All spurious
(nonharmonic) outputs are 30 dB below the RF output
signal.
The HFV generator is compliant with the SEMI F47-
0200 guidelines for voltage sag immunity; the power
regulation folds back during a voltage event, then self-
recovers.
Product Specifications
HFV 8000 Generator
3-7