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specification 3-6
,
regulation 3-6
4-21
reporting, see commands
response time 3-6
returning units for repair 6-11
RF on indicator 5-17
RF output cover
interlock 1-7
RF output operating conditions 3-2
RF output power specifications 3-6
frequency 3-6
harmonics 3-7
load impedance 3-6
regulation 3-6
response time 3-6
transient regulation 3-6
RF power enable
schematic diagram 4-8
RF power on status
schematic diagram 4-9
RS-232 with AE Bus 4-9
S
safety
conditions of use 1-6
directives 1-5
see also directives
standards 1-5
see also standards
scaling
DeviceNet (poll command) 4-56
scan frequency delta 4-22
,
scan threshold 4-22
5-14
scanning phase 5-14
schematic diagrams 4-7
selecting
automatic tuning mode 5-13
center frequency mode 5-12
SEMI guideline
F47-0200 1-6
S2-0200 1-6
serial I/O Host port, see Host port
set point
forward/load power set point schematic
diagram 4-8
indicator 5-18
setting the frequency band 5-11
shielding
condition of use 1-6
shielding requirements 5-5
signals
5705211-C
,
5-15
,
,
5-15
5-16
see also pin descriptions
analog 4-1
digital 4-1
User port pin descriptions 4-2
,
size 3-4
3-5
spacing requirements 5-1
specifications
AC line sag response 3-7
coolant 3-8
electrical 3-5
environmental 3-8
functional 3-1
overvoltage category 3-8
physical 3-3
pollution degree 3-8
standards
47 CFR Part 18 1-5
ANSI/ISA 82.02.01 1-5
CSA C22.2 No. 1010.1 1-5
EN 50178 1-5
EN 55011 1-5
EN 61000-6-2 1-5
SEMI F47-0200 1-6
SEMI S2-0200 1-6
standby switch 5-12
stop switch 5-12
switches
DIP 4-11
interlock 1-7
Standby 5-12
Stop 5-12
switches, rotary (DeviceNet) 4-41
symbols
in user manual 1-2
T
theory of operation 2-2
threshold, minimum 5-11
,
threshold, scan 4-22
5-14
transient regulation 3-6
transmission parameters table 4-12
,
tuning delta limit 4-22
5-15
,
tuning gain 4-22
5-15
tuning goal 5-15
tuning parameters 5-14
,
delta limit 4-22
5-15
frequency limits 4-20
frequency rate of change 4-21
maximum frequency command 4-20
minimum frequency command 4-20
reset command 4-21
HFV 8000 Generator
,
5-16
,
,
4-21
5-14
,
5-15
vi
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