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Advanced Energy
For the output cable:
a. Visually make sure there is a good connection between the output cable and
end connectors on both sides of the output cable.
b. Verify the continuity of the center conductor.
c. Verify the continuity of the outer shield.
d. Verify that there is no continuity between the center conductors and outer
shields.
e. Swap cables if possible and retry operating the HFV generator.
For the tuner and the chamber:
The only way to isolate the tuner or the chamber is to exchange the tuner or the
HFV generator with another known, functioning unit. You can also run the HFV
generator into a 50-Ω dummy load.
Also consider these questions:
1. Are you currently setting up a new chamber system?
2. Has any work been done recently on the chamber?
3. Have there been any changes in your process recently?
4. Is your reflected power reading close to 1000 W (the HFV generator's reflected
power limit)?
If you answered yes to any one of the previous questions, and the HFV generator
passed the Internal Diagnostics test, the HFV generator is probably working properly,
and it may be reacting to an external load condition. You may want to consult a
process engineer or system manufacturer to troubleshoot chamber-related issues.
No Output / No Plasma
If there is no output or plasma, check the front panel RF On indicator.
1. If the RF On indicator is off, see the
2. If the RF On indicator is on, then follow the troubleshooting steps in
Indicator Off" on page
High Reflected Power
High reflected power is usually caused by a load mismatch.
Note: The concept of reflected power is often misunderstood. Most users believe the
presence of reflected power is bad and that it should be minimized. Check the
regulation mode of the HFV generator. The reflected power may seem higher
than expected in Load Regulation because Load power is actually the difference
between Forward and Reflected (Load power = Forward power – Reflected
6-8
6-7.
Troubleshooting and Global Customer Support
"RF On Indicator Off" on page
6-6.
"At Set Point
5705211-C
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