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Safety requirements for electrical equipment for measurement, control, and
laboratory use
INDUSTRY GUIDELINES
• SEMI S2-0706
Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing
Equipment
Conditions of Use
To comply with the stated directives and standards, you must meet the following
conditions of use:
• Before making any other connection to this device, either
ground through mounting to a grounded tool or
Earth (ground) terminal to a local earth (ground) terminal with a copper wire that
is sized according to the applicable requirements.
• Install and operate this device only in accordance with the listed safety guidelines
and all other applicable directives and standards specific to your process and
application.
• Install and operate this device in an overvoltage category II installation only.
• Install and operate this device only with an RF generator which is installed in an
overvoltage category II or better environment.
• Install and operate this device only in a pollution degree 2 or better environment,
which means an indoor location such as a computer room, office, or factory floor
where only nonconductive pollution occurs during operation. Occasionally,
condensation causes temporary conductivity when the device is not operating.
• Operate this device under the ambient temperature and water specifications
declared in the specification.
• To prevent against condensation, install and operate this device with an external
water solenoid valve so that water flow is interrupted when the device is not
operating.
• Use only shielded cables on the remote control INTERFACE port connector.
• Install this device so that the output power connection is inaccessible to the user.
• Dispose of this product as directed by applicable laws and regulations.
57020080-00D
AE VarioMatch
Safety and Product Compliance Guidelines
Match Network, VM 1000/1500 Platform
TM
connect
connect
the secondary Protective
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1- 5
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