EBARA EV-SA20 Instruction Manual page 8

Precautions necessary for safe use of the EBARA MODEL EV-SA20 DRY VACUUM PUMP are detailed
in this instruction manual, while important items concerning precautions for handling EBARA MODEL
EV-SA20 DRY VACUUM PUMP are listed below.
· Keep out from under the pump when it is elevated. Only qualified personnel shall
unload and lift the pump.
· Keep pump at horizontal position when lifted.
· Do not lift the pump without eyebolt spacer.
·
Be careful not to overturn the pump when pushing and pulling it sideways, because
the pump is narrow in comparison to its height.
·
Be sure to turn off the power at the circuit protector (CP) and disconnect the power
cable from the power connector, when the pump installing, the wiring and
maintenance work. Never supply power to the pump, Until you have completed
these works.
·
Only a qualified electrician, observing all national and local regulations, should
perform electrical work.
·
Be sure to connect the grounding wire, otherwise an electric shock may be caused
by electric leakage.
·
The earthing of the pump is realized by connecting the cable with qualified
electricians. The qualified electricians should have themselves a connection the
ground.
·
The pump unit is not equipped with circuit breaker (CB). Please install CB based on
the law and the standard in the installation region.
·
The pump must be connected to electrical power supply with a suitable circuit
beaker (lockout / tagout CB).
·
Be sure to check for leaks after you have installed the pump. When checking for
gas leaks by pressurization, please pressurize by less than 0.05 MPa into the
exhaust piping.
·
This pump is suitable for use on clean and non-corrosive gases. Do not use
explosive, flammable, toxic or corrosive substances.
·
The pump and exhaust piping will remain at a high temperature during operation
and for a short time after the pump has stopped. Be sure to avoid contact and keep
inflammable substances out of reach. Do not remove the pump cover during
operation.
·
Do not perform a withstand voltage test. Failure to comply could result in damage to
the sensitive devices.
·
Do not insert any part of body to ventilation inlet. Moving parts of the cooling fan can
crash and cut.
·
Check safety interlock functions periodically (every 6 months) to confirm the
interlocks will work correctly.
·
Do not alter the pump member nor change any parts without the EBARA's consent
or approval.
PM10U
DANGER
WARNING
P.7
EBARA
CORPORATION