Gas Ballast - EBARA EV-SA20 Instruction Manual

P.46

5.5 Gas Ballast

 When introducing a condensable gas, such as water vapor, into the pump, remove the plug of the
gas ballast port and operate a pump. (See Fig. 5.4)
 This pump introduces air or N
pressure is 0.05 MPa or less.
Please do not introduce explosive, flammable, toxic or corrosive gases into the pump.
 Condensed gas can be prevented from being condensed in the pump by introducing the ballast
gas.
 It is more effective if a pump is operated for 2 hours, introducing ballast gas after condensation
gas introduction.
 When the pump is in low temperature, the effect of gas ballast is degrade. Before the introduction
of condensable gas, please warm up the pump, 1 hour or more.
 The gas ballast has different effect, depending on the pump operating temperature, the kind of
condensable gas and its amount.
 Please use with a plug of gas ballast port, when you do not introduce condensable gas.
PM10U
gas as ballast gas. If N
2
WARNING
Gas Ballast
port
Inlet
port
Fig. 5.4 Gas Ballast port
gas is supplied as ballast gas, supplied
2
Gas Ballast port
(1/4" Tube Fitting)
EBARA
Plug
CORPORATION