EBARA EV-SA20 Instruction Manual page 73

APPENDIX 6 Typical Hazardous Gas Information
1. Etching process
Combustion
Gas
Support
NF
3
HF
Cl
2
BCl
3
HBr
Br
2
CF
4
CHF
3
C F
2 6
2. LP-CVD
Combustion
Gas
Support
SiH Cl
2 2
SiH
4
Si H
2 6
Si(OC H )
2 5 4
(TEOS)
As(OC H )
2 5 4
(TEOA)
NH
3
H
2
NF
3
ClF
3
3. Ion-implant
Combustion
Gas
Support
AsH
3
B H
2 6
PH
3
BF
3
Flammable
○
○
Flammable
○
○
○
○
○
○
○
○
○
Flammable
○
○
○
Toxic Corrosive
○ ○
○ ○
○ ○
○ ○
○ ○
○ ○
*Allowable level is specified as TLV of ACGIH.
Toxic Corrosive
○ ○
○
○
○
○ ○
○ ○
○ ○
*LEL : Lower Explosion Level
Toxic Corrosive
○
○
○ ○
○ ○
Global Allowable
Warming Level*
10ppm
3ppm
0.5ppm
5ppm
as HCl
3ppm
0.1ppm
○
N/A
○
N/A
○
N/A
Global Allowable
Warming Level
5ppm
as HCl
5ppm
5ppm
10ppm
0.01mg/m3
as As
25ppm
4% LEL*
10ppm
0.1ppm
Global Allowable
Warming Level
0.05ppm
0.1ppm
0.3ppm
1ppm