EBARA EV-SA20 Instruction Manual page 62

Multi-stage dry vacuum pump
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Appendix 2 Material Safety Data Sheet of Lubricant oil(ENG)
BARRIERTA J100ES
Product name:
MSDS No. 1863
1. Product and company identification
Product name: BARRIERTA J100ES
NOK KLÜBER CO.,LTD
Company:
955-4, Aza Ohishi, Isohara, Isoharamachi, Kitaibaraki city, Ibaraki 319-1541, Japan
+81-293-42-5365
Telephone:
+81-293-43-3817
Fax:
2. Composition/information on ingredients
Chemical names and synonyms: Fluorinated lubricating oil
CAS No.
Components
Perfluoropolyether
Additives
Hazardous ingredients:
3. Hazardous identification
>280 C traces of fluorinated products
Some materials (e.g. titanium, aluminum or alloys of these materials) may cause lower decomposition
temperatures.
Prolonged skin contact may cause skin irritation and/or dermatitis.
4. First aid measures
After inhalation
Remove victim to fresh air. If symptoms persist, call a physician.
After contact with skin
Wash off with mild cleaners and plenty of water. If symptoms persist, call a physician.
After contact with eyes
Rinse with plenty of water. If symptoms persist, call a physician.
After ingestion
If large amounts are swallowed, do not induce vomiting. Obtain medical attention.
Material Safety Data Sheet
NOK KL Ü BER CO.,LTD
September 10, 2002
Date:
February 20, 2009
Revision Date:
Value
>95wt%
<5wt%
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