EBARA EV-SA20 Instruction Manual page 41

Multi-stage dry vacuum pump
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P.40
When any ALARM occurs the pump will be stopped and the ALM lamp will immediately turn on or
blink. The data screen will be changed to the ALARM display shown in Table 4.4.
The pump cannot be restarted until the pump meets the requirement for recovery.
No.
Display
1
2
3
4
5
6
7
8
9
[note 1] The ALARM is described in this list are typical alarm. If the alarm other than these is
[note 2] Under Over-Voltage (OV) condition the inverter retries automatically. After several times
[note 3] Under-Voltage (UV) condition is kept for less than 1sec, the inverter condition is returned to
PM10U
Table 4.4 ALARM list
ALM lamp
"Over-Current"
Lit
Inverter output current is too large.
"Over-voltage"
Lit
Inverter inner voltage is too high.
"Under-voltage"
Lit
Inverter inner voltage is insufficient.
Lit
Inverter control powers are in trouble.
Lit
Motor step out.
Lit
Inverter is overheated.
"Over-Load"
Lit
Pump load is too large.
"Over-Load"
Lit
Pump load is too large.
Lit
"Motor Overheat"
displayed, please contact EBARA.
retry the condition is still bad, the data screen will display as Table 4.3 and pump will be
stopped.
ALM lamp and "
" display on the data screen are blinking for OV retry process.
before UV ALARM occurred.
ALM lamp and "
" display on the data screen are blinking for UV condition.
[note 1]
Description
Requirements for recovery
Normalized + Reset signal input.
Normalized + Reset signal input.
[note 2]
Normalized + Reset signal input.
[note 3]
Normalized + Reset signal input.
Reset signal input.
Normalized + Reset signal input.
Normalized + Reset signal input.
Normalized + Reset signal input.
Normalized + Reset signal input.
EBARA
CORPORATION

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