EBARA EV-SA20 Instruction Manual page 44

Multi-stage dry vacuum pump
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b) STOP
【LOCAL MODE】
After checking the LO/RE lamp is ON, push
【REMOTE MODE】
After checking the LO/RE lamp is OFF, interrupt RUN signal from the control connector.
NOTE
Even if the operation mode is REMOTE MODE, it is able to stop the pump by pressing
the STOP button.
The pump starts decelerating and the RUN lamp blinks.
The pump stops and the RUN lamp will be OFF.
The pump and exhaust piping will remain at a high temperature during operation and for
a short time after the pump has stopped. Be sure to avoid contact and keep inflammable
substances out of reach. Do not remove the outer cover during operation.
NOTE
Be sure to stop by the STOP button or interrupt the RUN signal, and keep the pump
power supply for at least one minute. If the CP places off to stop the pump, the electrical
components of the inverter may be damaged.
c) Power OFF
After one minutes or more the RUN lamp turns off, confirm the pump is stopped surely and the CP
placed in the OFF position.
The
After other a few seconds, the display and ALM lamp turns off.
NOTE
If the CP turns on under
Input RESET command to cancel the ALARM before restart the pump.
PM10U
WARNING
display and ALM lamp blink, a few seconds after the CP placed in the OFF position.
.
blinking,
or
ALARM may occur.
EBARA
P.43
CORPORATION

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