EBARA EV-SA20 Instruction Manual page 72

Appendix 6 Information of typical hazardous materials
Information of typical hazardous gas
The table below lists the typical gases used in a semiconductor-processing tool.
involving operations, maintenance and services of the process tools and pumps must fully understand
properties and hazardous nature of the gases used in those devices.
Many of those processing gases are inclined to explosive reaction when contacted with other
chemicals or gases. It is also well known that the mixing or exhausting combustion gases and
combustion support gases results in explosive reaction while causing serious damages. The list
neither encompass all explosive gases nor describe all risks and dangers those may cause. It is
strongly advised to contact your tool supplier to obtain sufficient and the latest information on potential
risks and hazard the process gases have as well as on the safe operation of the tool. It is the
responsibility of users to conduct safety practices to avoid any potential risks.
Personnel