Specifications - EBARA EV-SA20 Instruction Manual

2.5.2

Specifications

Ultimate
Pressure
Maximum Inlet Pressure
Maximum pure water vapor tolerance
[note 1]
Connection
Approx.
Power
Lubrication
oil
Power
Supply
Circuit Protector Rating
Ambient Temperature
[note 1] It is an amount of the maximum processing when the gas ballast is "ON".
[note 2] This is tolerable voltage range, and is not steady voltage.
PM10U
Model
Pumping Speed
Gas ballast : OFF
Gas ballast : ON
Gas Inlet
Gas Outlet
at Ultimate Pressure
Maximum
Current Rating
Brand, Manufacturer
Quantity
Approx. Weight
Inlet Voltage [50/60 Hz]
Tolerable Voltage
Fluctuation [note 2]
Power Capacity
Connection
SCCR
Control Signal
Cooling System
Table 2.1 Specification
MODEL EV-SA20
EV-SA20-2
(1Phase 200V)
11.1 A
BARRIERTA J100ES, NOK
1Phase, 200-240 V
IEC 60320-C20
16 A
1.0 kA
EV-SA20-3
(3Phase 200V)
1,670 L/min
3.0 Pa
5.0 Pa
Atmospheric
100 g/hr
NW40
NW40
0.45 kW
1.5 kW
6.5 A
70 mL
65 kg
3Phase, 200-240 V
+/- 10 %
3.0 kVA
Amphenol
C016 20C003 100 12
15A
1.0 kA
D-sub 15Pin
Air Cooling
5 to 40 deg C
EBARA
P.21
CORPORATION