External Dimensions - YOKOGAWA ADMAG AXR User Manual

12.7 EXTERNAL DIMENSIONS

● Lay Length Code 1, AXR080-AXR100, Wafer Type
AXR080 G
1 A
AXR100 C
Size code
080
80
Size
(3)
Lining code A
Face-to- 120
* 2
L
face length
(4.72)
129
Outside
øD
(5.08)
dia.
77
Inter diameter of
ød
Grounding ring (3.03)
129
Width
W
(5.08)
157
H1
Height
(6.18)
319
Max.
Hi
Height
(12.54)
5.8
Weight kg (lb)
(12.8)
● Lay Length Code 1, AXR150-AXR200, Wafer Type
AXR150 G
1 A
AXR200 C
Size code
150
150
Size
(6)
Lining code A
200
Face-to-
* 2
L
face length
(7.87)
202
Outside
øD
dia. (7.95)
146.1
Inter diameter of
ød
Grounding ring (5.75)
220
Width
W
(8.66)
243
H1
Height
(9.57)
Max. 405
Hi
Height
(15.93)
15.9
Weight kg (lb)
(35.1)
28
(1.10)
1 A 1
Ground Terminal
(M4)
100
100
(4)
A
150
(5.91)
155
(6.10)
102
(4.02)
*1: When indicator code N is selected, subtract 5 mm (0.2 inch) from the value in the figure.
155
*2: Depending on the selection of grounding ring code and optional code, add the following
(6.10)
value to "L" (face-to-face length).
183
Grounding Ring Code
(7.20)
345
None
(13.56) Optional
GA, GC, GD
8.1
Code
(Special Gaskets)
(17.9)
164 (6.46)
28
70(2.76)
(1.10)
33
(1.30)
18.5(0.73)
Ground Terminal
(M4)
1 A 1
200
200
(8)
A
250
(9.84)
252
W
(9.92)
193.6
(7.62)
*1: When indicator code N is selected, subtract 5 mm (0.2 inch) from the value in the figure.
272
*2: Depending on the selection of grounding ring code and optional code, add the following
(10.71)
value to "L" (face-to-face length).
293
Grounding Ring Code
(11.54)
455
None
(17.89) Optional
GA, GC, GD
23.5
Code
(Special Gaskets)
(51.8)
*1
164 (6.46)
*1
70(2.76)
33
33
(1.30)
(1.30)
18.5(0.73)
W
S, L, H P, T
+0 +26 (1.02)
+8 (0.31) +30 (1.18)
*1
*1
33
(1.30)
S, L, H P, T
+0 +32 (1.26)
+10 (0.39) +38 (1.5)
<12. OUTLINE>
Unit: mm (approx. inch)
154(6.06)
90(3.54)
L *2
N
-2 (0.08)
–
F1212.ai
Unit: mm (approx. inch)
154 (6.06)
90 (3.54)
*2
L
N
-2 (0.08)
–
F1213.ai
IM 01E30D01-01EN
12-16