Yaw" Mapping (Pp Firmware Version Only) - Newport XPS-Q8 Users Manual, Software Tools And Tutorial

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XPS-Q8 Controller
XPSDocumentation V1.4.x (EDH0301En1060 — 10/17)
Use of the functions:
• GroupInitialize(XYZ)
• GroupHomeSearch(XYZ)
• GroupMoveAbsolute(XYZ, 3, 1, 1)
The mapping files must at least cover the minimum and the maximum travel of the
XYZ group (they must cover the MinimumTargetPosition and the
MaximumTargetPosition for the X, Y and Z positioners, parameters defined in the
stages.ini, see section Travels). So in the above example the travel of the X and Y
positioners can not be larger than ±3 units, and the travel for the Z positioner can not be
larger than ±1 unit. But the travel can be smaller than these. The unit of the data is the
same as defined by EncoderResolution in the stages.ini. The data reads as follows: at
position (X,Y,Z) = (3.00, 2.00, 1.00), the corrected X position is 2.99848 units (3.00 -
0.00152), the corrected Y position is 2.9989 units (3.00 - 0.00110) and the corrected Z
position is 3.0002 units (3.00 + 0.0002). Between two datas, the XPS controller does a
linear interpolation of the error. The three mapping files for X, Y, and Z don't need to
contain the same X, Y and Z positions.
Mapping is a function implemented in the XPS controller to correct errors. But
when mapping is activated, it is transparent to the user. At position (X,Y,Z) =
(3.00, 1.00, 1.00), the function GroupPositionCurrentGet(XYZ.X) doesn't return
3.00333 (3.00 + 0.00333) but returns 3.
10.6

"Yaw" Mapping (PP Firmware Version Only)

During an XY move, due to surface flatness errors in the base, the Theta axis (compared
with the base) turns slightly around its center. So a correction, DeltaTheta value,
calculated from the XY positions, must be sent to Theta to move it in order to keep the
Theta immobile relative the base, during the XY move. In the following discussion,
"Theta" is a SingleAxisTheta Group.
NOTE
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