Newport XPS-Q8 Users Manual, Software Tools And Tutorial page 133

XPS-Q8 Controller
Example
The following example shows the X error mapping files for an XYZ mapping. Note that
it is not necessary to repeat the XY coordinates in the table, Z = -1 to the other tables, Z
= 0 and Z = 1.
Matrix of X errors: XYZMapping_X.txt
-1.00 -3.00 -2.00
-3.00 -0.00192 -0.00534
-2.00 0.00453 -0.00322
-1.00 -0.00331 0.00445 -0.00769 -0.00126 -0.00153
0.00 -0.00787 0.00228 -0.00787
1.00 0.00232 0.00210 -0.00342
2.00 -0.00134 0.00308
3.00 0.00189 -0.00148
#
0 0 0
0 -0.00192 -0.00534
0 0.00453 -0.00322
0 -0.00331 0.00445 -0.00769 -0.00126 -0.00153
0 -0.00787 0.00228 -0.00787
0 0.00232 0.00210 -0.00342
0 -0.00134 0.00308
0 0.00189 -0.00148
#
1.00 0 0
0 -0.00192 -0.00534
0 0.00453 -0.00322
0 -0.00331 0.00445 -0.00769 -0.00126 -0.00153
0 -0.00787 0.00228 -0.00787
0 0.00232 0.00210 -0.00342
0 -0.00134 0.00308
0 0.00189 -0.00148
#
121
-1.00 0.00 1.00
0.00254 0.00125 -0.00137
0.00376 -0.00412 -0.00258 -0.00111 -0.00287
0.00320 0.00154 -0.00169 -0.00369
0.00169 0.00265
0.00275 -0.00369 0.00337 -0.00214 -0.00456
0.00234 0.00458 -0.00333
0 0 0
0.00254 0.00125 -0.00137
0.00376 -0.00412 -0.00258 -0.00111 -0.00287
0 0.00154 -0.00169 -0.00369
0.00169 0.00265
0.00275 -0.00369 0.00337 -0.00214 -0.00456
0.00234 0.00458 -0.00333
0 0 0
0.00254 0.00125 -0.00137
0.00376 -0.00412 -0.00258 -0.00111 -0.00287
0.00320 0.00154 -0.00169 -0.00369
0.00169 0.00265
0.00275 -0.00369 0.00337 -0.00214 -0.00456
0.00234 0.00458 -0.00333
XPSDocumentation V1.4.x (EDH0301En1060 — 10/17)
Motion Tutorial
2.00 3.00
0.00110 0.00123
0.00298 0.00487
0.00169 0.00125
0.00152 0.00335
0 0
0.00110 0.00123
0.00298 0.00487
0.00169 0.00125
0.00152 0.00335
0 0
0.00110 0.00123
0.00298 0.00487
0.00169 0.00125
0.00152 0.00335