Advanced Energy Paramount MF 2 kW User Manual page 80

®
Advanced Energy
Table 4‑10. AE Host commands (Continued)
Command
162
report process status
57020114-00E
Description
Send 1 data byte:
• Byte 0:
◦ 0 = Returns frequency in kHz
◦ 1 = Returns frequency in Hz
◦ 2 = Maximum fixed frequency that the
unit can be set to in Hz (only available
in some units)
◦ 3 = Minimum fixed frequency that the
unit can be set to in Hz (only available
in some units)
Returns 4 data bytes (32-bit value) =
Frequency in kHz or Hz
Set this value with command 61.
Reports the generator process status.
Returns 4 data bytes (four 8-bit flags):
• Byte 0:
◦ Bit 0 = Tuning status (0 = Not tuned, 1
= Tuned)
◦ Bit 1 = setpoint ramping (0 = Not
ramping, 1 = Ramp in progress)
◦ Bit 2 = Reserved for recipe active
◦ Bits 3 and 4 = Reserved
◦ Bit 5 = RF output on (0 = Off, 1 = On)
◦ Bit 6 = RF On requested (0 = Off, 1 =
On)
◦ Bit 7 = setpoint tolerance (0 = In
tolerance, 1 = Out of tolerance)
• Byte 1:
◦ Bit 0 = Reserved for end of target life
◦ Bits 1 and 2 = Reserved
◦ Bit 3 = Coldplate overtemperature fault
(1 = Fault)
Communication Controls
®
Paramount MF 2 kW Generator
Data Bytes
Sent
Returned
0
Data
Bytes
4
4‑48