Advanced Energy Paramount MF 2 kW User Manual page 27

®
Advanced Energy
Table 3‑2. Electrical specifications (Continued)
Description
Power accuracy
Pulse to pulse jitter
Synchronization
Pulsing into non 50 Ω Loads
Load is a fixed matching network loaded to the "plasma model", which is 30 Ω to 116 Ω resistor
in series with 1.1 nF capacitor.
Minimum on width
Settling time
Voltage overshoot
Pulse Sync In/Out
Frequency range
Duty cycle
Minimum on width
Pulse Sync In
Pulse Sync Out
Pulsed output timing
accuracy
RF Voltage/Power Detection Sampling
Sample delay
Sample rate
Averaging
57020114-00E
• Maximum 25%
Pulse power level is the same as CW after pulse settling time.
Pulse length uncertainty (pulses can be longer than programmed):
Maximum 1 RF period (2.5 μs at 400 kHz)
Start of pulse is synchronized to the phase of the RF clock.
225 μs
Less than 500 μs
x 6 times (typical)
10 Hz to 2 kHz
Minimum on width must be satisfied.
10% to 90%
Minimum on width must be satisfied.
225 μs
RF pulse on high level
Z = 50 Ω
0 VDC to 5 VDC maximum
RF pulse on high level
Z = 50 Ω source impedance
0 VDC to 5 VDC unloaded
0 VDC to 2.5 VDC across a 50 Ω load
1.0 μs edge uncertainty
150 μs
36 μs sampling rate of voltage in voltage control mode
16 μs sampling rate of power in power control mode
Control loop--averaging by integrator, readback--Moving average
of 8 samples
Specifications
®
Paramount MF 2 kW Generator
Specification
3‑8