1. Manuals
  2. Brands
  3. Advanced Energy Manuals
  4. Inverter
  5. Paramount MF 2 kW
  6. User manual

Advanced Energy Paramount MF 2 kW User Manual

Generator
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
Advanced Energy Paramount MF 2 kW User Manual

Advertisement

Table of Contents
loading

Related Manuals for Advanced Energy Paramount MF 2 kW

Summary of Contents for Advanced Energy Paramount MF 2 kW

  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 ® Paramount MF 2 kW Generator User Manual 57020114-00E January 2018 ...
  • Page 3 Advanced Energy Industries, Inc. shall not be liable in damages, of whatever kind, as a result of the reliance on or use of the information contained herein.
  • Page 4 All other trademarks are the property of their respective owners. CUSTOMER FEEDBACK Advanced Energy’s technical writing staff has carefully developed this manual using research-based document design principles. However, improvement is ongoing, and the writing staff welcomes and appreciates customer feedback. Please send any comments on the content, organization, or format of this user manual to: •...

  • Page 5: Table Of Contents

    ® ® Advanced Energy Paramount MF 2 kW Generator Table of Contents   Chapter 1. Safety and Product Compliance Guidelines   Important Safety Information ................. 1-1 Danger, Warning, and Caution Boxes .............. 1-1 Safety Guidelines .................... 1-1 Rules for Safe Installation and Operation ............ 1-2 Interpreting Product Labels ................
  • Page 6 ® ® Advanced Energy Paramount MF 2 kW Generator   25-Pin User Port .................... 4-1 25-Pin User Port Connector ................ 4-1 User Port Cabling Requirements .............. 4-1 Satisfying Minimal Requirements for the 25-Pin User Port ...... 4-1 25-Pin User Port Signal and Pin Descriptions .......... 4-2 Wiring Diagrams for the 25-Pin User Port .......... 4-6...
  • Page 7 ® ® Advanced Energy Paramount MF 2 kW Generator Connecting For External Voltage Regulation Mode ........ 5-15 Front Panel Functions .................. 5-16 Using the Front Panel to Monitor Unit Status and Unit Operating Data .. 5-16 LED and Numeric Display Behavior When a Fault is Present ...... 5-17 LED and Numeric Display Behavior When Interlock is Not Satisfied ..
  • Page 8 ® ® Advanced Energy Paramount MF 2 kW Generator List of Tables Table 1-1. Hardware interlocks ................ 1-5 Table 3-1. Physical specifications ................. 3-1 Table 3-2. Electrical specifications ................ 3-3 Table 3-3. Cooling specifications ................ 3-11 Table 3-4. Environmental standard specifications .......... 3-13 Table 3-5.
  • Page 9 MF 2 kW Generator List of Figures Figure 1-1. Interlock circuit .................. 1-6 Figure 2-1. Paramount MF 2 kW generator block diagram ........ 2-2 Figure 3-1. Timing diagram ................... 3-9 Figure 3-2. Pressure drop ................... 3-12 Figure 4-1. User port connector, 25-pin .............. 4-1 Figure 4-2.

  • Page 10: Chapter 1. Safety And Product Compliance Guidelines

    Guidelines IMPORTANT SAFETY INFORMATION To ensure safe installation and operation of the Advanced Energy Paramount MF 2 kW unit, read and understand this manual before attempting to install and operate this unit. At a minimum, read and follow the safety guidelines, instructions, and practices.

  • Page 11: Rules For Safe Installation And Operation

    ® ® Advanced Energy Paramount MF 2 kW Generator Rules for Safe Installation and Operation Please note the following rules: • Do not attempt to install or operate this equipment without proper training. • Ensure that this unit is properly grounded.

  • Page 12: Product Compliance

    ® ® Advanced Energy Paramount MF 2 kW Generator Refer to manual for more information ® SEMI F47 compliant Heavy object—can cause muscle strain or back injury Environmentally Friendly Use Period of 25 years per China RoHS—recycle responsibly at end of life...

  • Page 13: Conditions Of Use

    • EU REACH – European Union Regulation (EC) No. 1907/2006 Registration, Evaluation, Authorization and Restriction of Chemicals Advanced Energy manufactures articles subject to Article 33 of REACH and, upon request, will provide information regarding Substances of Very High Concern (SVHC) currently identified by the European Chemical Agency (ECHA) that are contained in this product, at concentrations greater than 0.1%...

  • Page 14: Interlocks

    Period (EFUP) of 25 years. INTERLOCKS   WARNING: Advanced Energy products only include interlocks when required by product specification. Interlocks in Advanced Energy products are not intended to meet or satisfy safety requirements. Where interlocks exist, you must still meet and satisfy safety requirements. The presence of interlocks does not imply operator protection.

  • Page 15: Figure 1-1. Interlock Circuit

    ® ® Advanced Energy Paramount MF 2 kW Generator User Unit Interlock Interlock relay Interlock return Cable interlock Figure 1‑1. Interlock circuit 57020114-00E Safety and Product Compliance Guidelines 1‑6...

  • Page 16: Chapter 2. Product Overview

    • Voltage with an optional AE peak voltage sensor The Paramount MF 2 kW generator provides up to 2000 W into a 50 Ω, nonreactive load. The generator is capable of delivering 100% of its rated power into a 4.79:1 VSWR load, making it an ideal choice for applications with a fixed match.

  • Page 17: Rectifier Module

    ® ® Advanced Energy Paramount MF 2 kW Generator signal. The Paramount MF 2 kW generator can also control the voltage at the load with proper voltage feedback and setting the unit to voltage control mode. Rectifier Inverter Isolation Filter...

  • Page 18: Directional Coupler/Detector

    Voltage Control Mode The Paramount MF 2 kW generator has the capability to control the amplitude of RF output voltage at the load with the use of the AE Low Frequency Fixed Match and voltage peak detector.

  • Page 19: Load Power

    ® ® Advanced Energy Paramount MF 2 kW Generator travelling waves, one moving toward the load and one returning to the generator. The power in the imagined wave moving toward the load is the forward power, and the power in the imagined return wave is the reverse, or reflected, power.

  • Page 20: Chapter 3. Specifications

    ® Paramount MF 2 kW Generator Chapter   Specifications PHYSICAL SPECIFICATIONS   Table 3‑1. Physical specifications   Description Specification Size 178 mm (H) x 434 mm (W) x 501 mm (D) 7″ (H) x 17.1″ (W) x 19.7″ (D) ☞  Important These measurements do not include handles, connectors, and switches.
  • Page 21 ® ® Advanced Energy Paramount MF 2 kW Generator Table 3‑1. Physical specifications (Continued)   Description Specification Bias V-Out connector Coolant connectors (water in ® SS female Swagelok 3/8″ on nickel plated brass panel and water out) Chassis ground terminal 10-32 stud with nut and star washer...

  • Page 22: Electrical Specifications

    ® ® Advanced Energy Paramount MF 2 kW Generator   ELECTRICAL SPECIFICATIONS ☞  Important AE Host command 7 restores all nonvolatile RAM values to factory preset values. See individual product specifications for factory default parameters. For more information, contact AE Global Services.
  • Page 23 ® ® Advanced Energy Paramount MF 2 kW Generator Table 3‑2. Electrical specifications (Continued)   Description Specification Reflected power limit 1500 W maximum Delivered power into Generator maximum delivered power is based on reflected power mismatched loads limit. (Automatic load • Within VSWR 1.1:1 it is 2000 W mismatch protection, •...
  • Page 24 ® ® Advanced Energy Paramount MF 2 kW Generator Table 3‑2. Electrical specifications (Continued)   Description Specification Measured power accuracy Power accuracy: into 4.79:1 VSWR circle • ± 2 W of setpoint for 5 W to 50 W, over entire frequency range •...
  • Page 25 ® ® Advanced Energy Paramount MF 2 kW Generator Table 3‑2. Electrical specifications (Continued)   Description Specification Setpoint change response Analog response time is measured from step setpoint change to time 90% change of the RF output voltage. Analog User interface •...
  • Page 26 ® ® Advanced Energy Paramount MF 2 kW Generator Table 3‑2. Electrical specifications (Continued)   Description Specification Diagnostics The generator will evaluate its internal parameters for the relative health of the generator. Special diagnostic capability is provided for testing into short (0 Ω) load.
  • Page 27 ® ® Advanced Energy Paramount MF 2 kW Generator Table 3‑2. Electrical specifications (Continued)   Description Specification • Maximum 25% Power accuracy Pulse power level is the same as CW after pulse settling time. Pulse to pulse jitter Pulse length uncertainty (pulses can be longer than programmed): Maximum 1 RF period (2.5 μs at 400 kHz)

  • Page 28: Figure 3-1. Timing Diagram

    ® ® Advanced Energy Paramount MF 2 kW Generator Table 3‑2. Electrical specifications (Continued)   Description Specification Asynchronous voltage sample RF pulse Sampling window (150 usec deadtime) 3800 Valid Sample Valid Sample Window Window Figure 3‑1. Timing diagram External Voltage Control Mode...
  • Page 29 ® ® Advanced Energy Paramount MF 2 kW Generator Table 3‑2. Electrical specifications (Continued)   Description Specification • Accuracy of output voltage ± 0.7% or ± 80 mV (accuracy is the difference between the digital signal sent to DAC and the actual output voltage) •...

  • Page 30: Cooling Specifications

    See the following pressure drop figure Contaminates AE recommends the following specifications for the water used to cool the Paramount MF 2 kW generator: • pH between 7.0 and 9.0 • Total chlorine < 20 ppm • Total nitrate < 10 ppm •...

  • Page 31: Figure 3-2. Pressure Drop

    ® ® Advanced Energy Paramount MF 2 kW Generator Figure 3‑2. Pressure drop 57020114-00E Specifications 3‑12...

  • Page 32: Environmental Specifications

    ® ® Advanced Energy Paramount MF 2 kW Generator   ENVIRONMENTAL SPECIFICATIONS   Table 3‑4. Environmental standard specifications   Description Specification Overvoltage Category Pollution degree   Table 3‑5. Climatic specifications   Temperature Relative Humidity Air Pressure Operating +5°C to +40°C 78.8 kPa to 106 kPa...

  • Page 33: Chapter 4. Communication Controls

    ® Paramount MF 2 kW Generator Chapter   Communication Controls 25-PIN USER PORT 25-Pin User Port Connector The User port uses a 25-pin, shielded, female, subminiature-D connector. Ground/ return lines are floating and need to be connected as close to the system as possible. Pin 14 Pin 25 Pin 1...

  • Page 34: 25-Pin User Port Signal And Pin Descriptions

    ® ® Advanced Energy Paramount MF 2 kW Generator If you are not using the User port to control or monitor the unit, you can use a “dummy” or “cheater” plug to satisfy these signals, thereby ignoring the User port.

  • Page 35: Table 4-3. 25-Pin User Port Pin Descriptions

    ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑2. User port signal descriptions (Continued)   Description Specification Return wire should be connected to system ground. Accuracy of voltage measurement: ± 0.6% or ± 20 mV. The input impedance for all analog input signals is greater than 10 kΩ.
  • Page 36 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑3. 25-pin User port pin descriptions  (Continued)   Signal Related Name Signal Description Type the RF output. Logic low disables the RF output in either user control mode or host control mode.
  • Page 37 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑3. 25-pin User port pin descriptions  (Continued)   Signal Related Name Signal Description Type In voltage control mode, this pin is ignored. Figure 4‑7 on page 4‑8 for the wiring diagram.

  • Page 38: Wiring Diagrams For The 25-Pin User Port

    ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑3. 25-pin User port pin descriptions  (Continued)   Signal Related Name Signal Description Type GROUND Signal/chassis ground. Not connected. GROUND Signal/chassis ground. OVERTEMP Digital When an internal overtemperature output shutdown condition is detected, a low (opto-coupler output) impedance is created between this pin and pin 9.

  • Page 39: Figure 4-3. Fwd/Load Pwr Monitor (Pins 3 And 16)

    ® ® Advanced Energy Paramount MF 2 kW Generator User Unit 10 H OP400 1000 pF Voltage Measurement Device (see pin description for scaling) 10 H Pin 16 must 1000 pF be grounded 3033 Figure 4‑3. FWD/LOAD PWR MONITOR (pins 3 and 16)

  • Page 40: Figure 4-6. Dc Bias/Power Regulation (Pins 6 And 19)

    ® ® Advanced Energy Paramount MF 2 kW Generator User Unit +4 V to +25 V Current Limiter 11 mA 3395 Figure 4‑6. DC BIAS/POWER REGULATION (pins 6 and 19) User Unit +4 V to +25 V Current Limiter 11 mA 3396 Figure 4‑7. FWD/LOAD PWR REGULATION (pins 8 and 21)

  • Page 41: Figure 4-8. Interlock Loop (Pins 23 And 10)

    ® ® Advanced Energy Paramount MF 2 kW Generator User Unit Interlock Interlock relay Interlock return Cable interlock Figure 4‑8. INTERLOCK LOOP (pins 23 and 10) Unit +15 V +15 V provided to user 3045 Figure 4‑9. +15 VDC (pins 13 and 21)

  • Page 42: Ae Bus Interface (Host Port)

    AE BUS INTERFACE (HOST PORT) The Paramount MF 2 kW unit provides a serial communications interface through the Host port. This interface allows the Paramount MF 2 kW unit to interface with a host computer using the AE Bus protocol.

  • Page 43: Host Connector

    ® ® Advanced Energy Paramount MF 2 kW Generator the unit through the Host port. To find out more about this software, please call AE Global Services. Host Connector The serial Host port connector is a 9-pin, female, shielded, subminiature-D connector for interfacing with a host computer.

  • Page 44: Host Port Dip Switches

    • Low-order bytes transmitted before high-order bytes (little endian) The timeout period for the Paramount MF 2 kW unit is factory set at 0.75 seconds (that is, no more than 0.75 seconds can elapse between bytes, or the unit will reset and begin searching for a new message packet).

  • Page 45: Setting The Baud Rate

    ® ® Advanced Energy Paramount MF 2 kW Generator SETTING THE BAUD RATE Use the DIP switch to set the serial AE Bus port baud rate.   Table 4‑5. DIP switch settings for variable baud rate, switches 6 and 7  ...

  • Page 46: Ae Bus Protocol

    Paramount MF 2 kW unit. The AE Bus message packet combines a set quantity of bits and bytes in such a way that groups of information can be sent over communications lines at one time.

  • Page 47: Ae Bus Header Byte

    (to the Paramount MF 2 kW unit, for example). If the packet is going to the host, the address specifies the packet origin (from the Paramount MF 2 kW unit). The address section of the header field is five bits long (bits 3 to 7), which allows a total of 32 distinct addresses.

  • Page 48: Ae Bus Optional Length Byte

    If the value specified in the length bits (bits 0, 1, and 2) of the header field is 0 to 6, the Paramount MF 2 kW unit expects 0 to 6 data bytes. However, if the value in the header field is 7 (07h), the Paramount MF 2 kW unit looks for the optional length byte after the command field and reads this value to calculate the data byte count.

  • Page 49: Creating An Ideal Communications Transaction

    Paramount MF 2 kW unit verifies that the message is intended for it and not for another unit on the network. At this time, the Paramount MF 2 kW unit also analyzes the checksum to verify that the message was received correctly.

  • Page 50: T2: Unit Transmits Response To Host

    If the Paramount MF 2 kW unit receives an ACK from the host computer, it returns to the normal waiting state. If the Paramount MF 2 kW unit receives a NAK from the host computer, the unit retransmits the response packet. The Paramount MF 2 kW unit continues to retransmit in response to NAK transmissions until the host computer stops the cycle.

  • Page 51: Ae Host Commands

    AE HOST COMMANDS The following sections describe the command status response (CSR) codes returned by the Paramount MF 2 kW unit in response to a command, as well as the AE Host commands for the Paramount MF 2 kW unit.

  • Page 52: Ae Host Command Set

    Command not accepted (there is no such command). AE Host Command Set • Commands 1 through 127 request a change to the Paramount MF 2 kW unit, such as changing a setting in the unit. The unit responds to these commands by sending a command status response (CSR).
  • Page 53 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Turns RF output on if there are no active or latched faults or warnings. Accepted only RF On when host control mode is active.
  • Page 54 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned unit retains the user external feedback limit as long as power is applied. If power is cycled, the external feedback limit returns to the default value, 2000 V.
  • Page 55 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned maximum external feedback value while the output is on. Valid values are from 10 V to 65535 V. If the...
  • Page 56 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned The following table shows the factory set/ default values for pulsing parameters. Parameter Factory Set/ Default Value...
  • Page 57 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Send 6 data bytes. • Bytes 0 and 1 = 5 (set memory mode) • Bytes 2 and 3 = Memory mode ◦...
  • Page 58 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned ◦ 0 = Disabled ◦ 1 = Watts/second (W/s) ◦ 2 = Timed (in ms) • Bytes 2 and 3 (16-bit value) = Ramp up (in W/s or time in ms) •...
  • Page 59 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Sets the communications watchdog timer value in ms. This timer denotes the amount of set communications time that can pass without a successful watchdog timer communication.
  • Page 60 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Sets the minimum frequency that the 4 or 5 generator uses for automatic tuning. The unit set minimum tuning stores this parameter in nonvolatile memory.
  • Page 61 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Send 4 data bytes to set the value in kHz, or 5 data bytes to set the value in either kHz or Hz.
  • Page 62 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Sets the time in ms that the tuning algorithm 2 or 4 waits before beginning to tune the generator set tune delay automatically.
  • Page 63 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned format. For example, to set the seconds to 48, the data value transmitted must be 0x48. The real time clock features automatic leap year compensation for years up to 2100.
  • Page 64 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned You must enter a valid command for pulsing frequency and duty cycle to enable pulsing. Any combination of pulsing frequency and duty cycle that results in an output on time of less than 225 μs is invalid and returns a CSR...
  • Page 65 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned You can set the memory mode (volatile or nonvolatile memory) with command 26. If the unit is a master unit, setting the pulsing duty cycle to 0 disables pulsing.
  • Page 66 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Byte 0 = Subcommand Set frequency step start Set gamma threshold high Set gamma threshold low Set maximum tuning count...
  • Page 67 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Send 4 data bytes. • Bytes 0 and 1 = 3 (set step up gain) • Bytes 2 and 3 = Step up gain Command 248 reports this value;...
  • Page 68 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Send 4 data bytes. • Bytes 0 and 1 = 7 (set gamma threshold low, LSB first) •...
  • Page 69 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned • Bytes 0 and 1 = 23 (set tuning gain delay) • Bytes 2 and 3 = Tuning gain delay Command 248 reports this value;...
  • Page 70 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned ◦ 2 = Delivered power limit If you selected SOA mode ◦ 0 = Disabled ◦ 1 = Enabled If you selected memory mode: ◦...
  • Page 71 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Returns a nonterminated 9-character ASCII string that represents the power supply type (PT-MF). Send 1 data byte: •...
  • Page 72 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Send 1 data byte (8-bit value) to select the software part number to be returned. • Byte 0 = Software request ◦...
  • Page 73 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Since each interface has a unique watchdog timer, the value reported is the value of the watchdog timer associated with that specific interface.
  • Page 74 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Set this value with command 44. Reports the maximum frequency that the 0 or 1 generator uses for automatic tuning. The...
  • Page 75 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned ◦ 0 = Returns frequency in kHz ◦ 1 = Returns frequency in Hz Set this value with command 46.
  • Page 76 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Optional: Send 1 data byte (with a value of 0). Returns 2 data bytes (16-bit value): • Byte 1: ◦...
  • Page 77 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned ◦ 1 = W/s ◦ 2 = Timed (in ms) • Bytes 2 and 3 (16-bit value) = Ramp up (in W/s or time in ms) •...
  • Page 78 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Returns 1 data byte (8-bit value): • 6 = Forward • 7 = Delivered or real • 8 = External (DC bias) Optional: Send 1 data byte (with a value of 0).
  • Page 79 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Returns 4 data bytes: • Bytes 0 through 3 = Tuning criteria Set this value with command 58.
  • Page 80 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Send 1 data byte: • Byte 0: ◦ 0 = Returns frequency in kHz ◦ 1 = Returns frequency in Hz ◦...
  • Page 81 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned ◦ Bits 4 through 6 = Reserved ◦ Bit 7 = Interlock (0 = interlock closed, 1 = interlock open) •...
  • Page 82 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned in volts. This command also returns the active regulation mode. Returns 3 data bytes (one 16-bit value, one 8- bit value): •...
  • Page 83 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Returns 2 data bytes (16-bit value): • Bytes 0 and 1 = Power limit Set this value with command 4.
  • Page 84 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Reports pulsing configuration. report pulsing This command allows you to send configuration subcommands. Send a value in the first two...
  • Page 85 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned ◦ 1 = Pulse sync output on • Bytes 2 and 3 = Reserved Command 26 B0 = 2 sets these values.
  • Page 86 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Returns 2 data bytes: • Bytes 0 and 1= Pulsing duty cycle in % (on time) Command 96 sets this value.
  • Page 87 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Reports the number of unit on events stored in nonvolatile memory. The unit increments the report unit on...
  • Page 88 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Returns 4 data bytes (one 32-bit value). • Bytes 0 through 3 = Total energy output in kWh Reports the system real time clock time and date.
  • Page 89 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Returns 28 data bytes: • Bytes 0 and 1 (16-bit value) = Forward power in watts (see command 165).
  • Page 90 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Reports the coldplate temperature in degrees 0 or 1 Celsius. You can send either 0 or 1 data bytes.
  • Page 91 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned ◦ 0 = Diagnostics in progress ◦ 1 = Diagnostic test complete – passed ◦ 2 = Diagnostic test complete – failed ◦...
  • Page 92 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Byte 0 = Subcommand Report maximum tuning count Report tuning step time Report tuning gain delay Report DC bias operating...
  • Page 93 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned the error is decreasing (frequency step size is increasing). A value of n sets the gain to 2 Send 2 data bytes.
  • Page 94 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Reports the gamma threshold low used during the tuning process. The generator first report gamma attempts to achieve a tuning criteria less than threshold low the low threshold.
  • Page 95 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Reports tuning gain delay, which is the delay before increasing the step size after a change report tuning gain in direction.
  • Page 96 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned ◦ 3 = Memory mode Returns 4 data bytes. • Bytes 0 and 1 = Parameter being reported: ◦...
  • Page 97 ® ® Advanced Energy Paramount MF 2 kW Generator Table 4‑10. AE Host commands (Continued)   Command Description Data Bytes Data Sent Bytes Returned Send 2 data bytes. • Bytes 0 and 1 = 51 (report fixed frequency memory mode) Returns 2 data bytes.

  • Page 98: Chapter 5. Installation, Setup, And Operation

    ® Paramount MF 2 kW Generator Chapter   Installation, Setup, and Operation PREPARING TO INSTALL THE UNIT Spacing and Mounting Requirements For proper cooling, mount the unit so that there is 13 mm (0.51″) minimum clearance on the right side of the unit and 102 mm (4″) minimum clearance at the rear. Any blockages could cause overheating to occur.

  • Page 99: Unit Drawings

    ® ® Advanced Energy Paramount MF 2 kW Generator Unit Drawings Digital display Status LEDs Generator LEDs Figure 5‑1. Front panel 57020114-00E Installation, Setup, and Operation 5‑2...

  • Page 100: Figure 5-2. Rear Panel

    ® ® Advanced Energy Paramount MF 2 kW Generator On/Off breaker #10-32 ground stud Exhaust vent AC power input (Harting connector) 3/8 Swagelok (female) water cooling ports Air intake vents SMA connector Pulse In SMA connector Pulse Out SMA connector...

  • Page 101: Figure 5-3. Rear Panel With Dimensions

    ® ® Advanced Energy Paramount MF 2 kW Generator 48.06 mm 178.0 mm 3.13 mm 1.89" 7.01" 0.123" 382.78 mm 433.50 mm 15.07" 17.07" 39.2 mm 1.54" 4088 34.26 mm 3.73 mm 1.35" 0.15" Figure 5‑3. Rear panel with dimensions 57020114-00E Installation, Setup, and Operation 5‑4...

  • Page 102: Figure 5-4. Rear Panel Three Dimensional

    ® ® Advanced Energy Paramount MF 2 kW Generator 4087 Figure 5‑4. Rear panel three dimensional 57020114-00E Installation, Setup, and Operation 5‑5...

  • Page 103: Figure 5-5. Left Side

    ® ® Advanced Energy Paramount MF 2 kW Generator Figure 5‑5. Left side 57020114-00E Installation, Setup, and Operation 5‑6...

  • Page 104: Figure 5-6. Right Side

    ® ® Advanced Energy Paramount MF 2 kW Generator Figure 5‑6. Right side 57020114-00E Installation, Setup, and Operation 5‑7...

  • Page 105: Figure 5-7. Top Side

    ® ® Advanced Energy Paramount MF 2 kW Generator 3712 Figure 5‑7. Top side 57020114-00E Installation, Setup, and Operation 5‑8...

  • Page 106: Installation Requirements

    ® ® Advanced Energy Paramount MF 2 kW Generator 3713 Figure 5‑8. Bottom side Installation Requirements Install this unit according to the following requirements.   DANGER: RISK OF DEATH OR BODILY INJURY. Disconnect and lockout/tagout all sources of input power before working on this unit or anything connected to  ...

  • Page 107: Unpacking The Unit

    Save the shipping container for submitting necessary claims to the carrier. INSTALLING THE UNIT Grounding   WARNING: Do not attempt to turn on power until the Paramount MF 2 kW unit is grounded.     WARNING: For a corner-grounded delta configuration, connect the secondary Protective Earth (ground) stud to the system ground terminal before making any other connection.

  • Page 108: Connecting Cooling Water

    Do not apply more than 54.2 Nm (40 ft-lb) to water fittings. Water leakage and damage to the unit could result.   The water fittings used on the Paramount MF 2 kW generator are SS female 3/8″ Swagelok. TO CONNECT COOLING WATER 1.

  • Page 109: Connecting Output Power

    This device must be installed so that the output power connection is inaccessible to the user.   The Paramount MF 2 kW generator output connector is a female HN coaxial. The center pin provides the RF output connection, while the outer cable provides a ground connection.

  • Page 110: Connecting Ac Input Power

    Not connected Ground The parts listed in the following table are those used on the Paramount MF 2 kW generator HARTING AC connector. Do not order these parts. Contact HARTING to find mating connector parts for the customer side of the AC connection.

  • Page 111: To Connect Ac Input Power With The Harting Connector

    ® ® Advanced Energy Paramount MF 2 kW Generator   Table 5‑2. HARTING 70 A connector part numbers   HARTING Part Quantity Description Number 09 14 006 0303 HARTING frame 09 30 006 0301 HARTING housing mounting 09 14 002 2642...

  • Page 112: Connecting I/O And Auxiliary Connectors

    Sense V-In connector to be equal to the voltage on pin 5, SET POINT, of the User port. The Paramount MF 2 kW generator is designed to be used with the AE Low Frequency Fixed Match. This fixed match has an output where the RF output voltage is scaled to 10 VDC = 2000 V pk-pk.

  • Page 113: Front Panel Functions

    Operating Data Figure 5‑11. Front panel display with Status and Generator LEDs The Paramount MF 2 kW generator does not provide an operator control panel. All power, control, and water connections are made at the rear of the unit. Six Status LEDs are visible from the front of the unit for monitoring the status of the generator.

  • Page 114: Led And Numeric Display Behavior When A Fault Is Present

    ® ® Advanced Energy Paramount MF 2 kW Generator LED and Numeric Display Behavior When a Fault is Present When a fault is present the Fault LED lights. All LEDs in the Generator column are unlit. The Display Select (Generator LED scroll) button is disabled. Active error codes are displayed on the numeric display.

  • Page 115: Generator Leds

    ® ® Advanced Energy Paramount MF 2 kW Generator Table 5‑4. Status LED indicators (Continued)   Status LED Description Over-temp When lit, this yellow LED indicates that the unit's internal temperature has exceeded its allowable level. The unit's output power will be disabled until the temperature falls below the internal temperature limit and the RF on command is toggled.

  • Page 116: First Time Operation

    Whether you control and monitor the unit through the User port or the RS-232 Host interface, you must satisfy the User port INTERLOCK (pins 10 and 23) signal to operate the Paramount MF 2 kW generator. The RF output cable interlock must also be satisfied by firmly connecting the RF cable.

  • Page 117: Command Sequence And Timing Recommendations

    ® ® Advanced Energy Paramount MF 2 kW Generator 8. Select the regulation mode: ◦ forward power ◦ load power ◦ voltage regulation 9. Make sure that set point in power control mode is set between the minimum and maximum specifications. In voltage control mode, ensure that set point is set at 20 V or more.

  • Page 118: Table 5-6. Recommended Command Sequence And Timing

    ® ® Advanced Energy Paramount MF 2 kW Generator Table 5‑6. Recommended command sequence and timing   Sequence description Command sequence Issue commands in this order from the indicated interface: To set the unit to voltage 1. Set to voltage control (DC bias) mode at the User port.
  • Page 119 ® ® Advanced Energy Paramount MF 2 kW Generator Table 5‑6. Recommended command sequence and timing (Continued)   Sequence description Command sequence • Forward power regulation 7. Turn RF ON at the User port. setting is active Issue commands in this order from the indicated interface: To set the unit to load power 1.

  • Page 120: Frequency Tuning

    Different processes and chambers run with varying operating parameters. The Paramount MF 2 kW generator delivers up to 2000 W from 360 kHz to 440 kHz (400 kHz ± 10%). To optimize the power being delivered, the Paramount MF 2 kW generator uses an automatic tuning algorithm.

  • Page 121: Retuning

    ® ® Advanced Energy Paramount MF 2 kW Generator At RF on, the generator starts at predefined frequency (start frequency) and waits a predefined amount of time (tuning delay) to let the process to stabilize. Actual initial delay is: t = Tuning delay + 10 ms After the initial delay, the generator starts to adjust the frequency to minimize the parameter D.

  • Page 122: Automatic Tuning Parameters

    ® ® Advanced Energy Paramount MF 2 kW Generator Automatic Tuning Parameters You can allow the tuning algorithm to sweep the entire range of generator frequencies, or you can optimize the automatic tuning by setting tuning parameters. For additional information on these parameters and how to use them, contact AE Global Services..
  • Page 123 ® ® Advanced Energy Paramount MF 2 kW Generator Table 5‑7. Frequency tuning parameters (Continued)   Parameter Description Command High tuning Sets the high tuning threshold. If the generator cannot Set: 118, threshold reach the low tuning threshold and it exceeds the...

  • Page 124: Pulsing Output

    PULSING OUTPUT Understanding Pulsing When pulsing is enabled, the Paramount MF 2 kW generator pulses RF output on and off based on frequency and duty-cycle settings: • The frequency defines the length of pulsing cycles, that is, the time from the beginning of one RF on event to the beginning of the next RF on event.

  • Page 125: Pulsing Parameters

    You can use AE Host port command 172 to report these values. To Enable/Disable Pulsing and Set Pulsing Parameters If your Paramount MF 2 kW generator has the pulsing option, you can enable or disable pulsing output. You can make pulsing settings through any of the generator's serial communication ports or Virtual Front Panel (VFP).

  • Page 126: Safe Operating Area (Soa) Feature

    MAINTENANCE Consumable Parts Some parts in the Paramount MF 2 kW are consumable and may wear out over time. For a current list of consumable and wear components in the Paramount MF 2 kW as well as for estimated lifetimes and recommended refurbishment schedules, please contact AE Global Services.

  • Page 127: Chapter 6. Troubleshooting And Global Services

    ◦ Also, there could be an external AC line fault. Verify that there is AC voltage on the pins of the connector that plugs into the Paramount MF 2 kW generator. 2. Is the INTERLOCK LED lit? ◦...

  • Page 128: To Troubleshoot An Overtemperature Condition

    ® ® Advanced Energy Paramount MF 2 kW Generator 3) Make sure that the RF output interlock is properly calibrated as described in the installation procedures. 3. Is the FAULT LED lit? ◦ If no, go to the next step.

  • Page 129: To Troubleshoot Set Point Problems

    1. Make sure that the inlet cooling water is flowing at the specified rate. 2. Make sure that inlet water temperature does not exceed specifications. 3. Make sure that the ambient air temperature around the Paramount MF 2 kW generator during operation does not exceed the specified limit, 40ºC (104ºF).

  • Page 130: To Run Internal Diagnostics

    ® ® Advanced Energy Paramount MF 2 kW Generator 1. Turns RF on and operates into a shorted load condition. 2. Determines if the values of three parameters are within ranges set in a diagnostic tab file: ◦ Rectified bus voltage ◦...

  • Page 131: Troubleshooting Using Error Codes

    TROUBLESHOOTING USING ERROR CODES Accessing Error Codes You can access Paramount MF 2 kW generator error codes in two ways: • You can view active error codes on the front panel display. The display will scroll through the active error codes, showing each for about one second. If there is only one error code, it is displayed continuously.

  • Page 132: Warning And Fault Code Tables

    • Non-Latching Warnings: Warnings self clear when the condition that caused the warning clears. If a warning occurs while output is on, output remains on. Warning and Fault Code Tables The Paramount MF 2 kW generator provides both warning and fault codes for unit troubleshooting. • See Table 6‑1...
  • Page 133 ® ® Advanced Energy Paramount MF 2 kW Generator Table 6‑1. Warning codes (Continued)   Warning Code Problem Description Suggested Action Non-latching warning 1. Ensure that you have set the correct regulation Out Of Setpoint Warning • Power Limit LED on the mode.
  • Page 134 ® ® Advanced Energy Paramount MF 2 kW Generator Table 6‑1. Warning codes (Continued)   Warning Code Problem Description Suggested Action If the warning persists, contact AE Global Services. Non-latching warning Auxiliary Coldplate 1. Verify ambient • Auxiliary coldplate Temperature Warning...

  • Page 135: Fault Codes

    ® ® Advanced Energy Paramount MF 2 kW Generator Table 6‑1. Warning codes (Continued)   Warning Code Problem Description Suggested Action Non-latching warning Cycle AC power to the unit. UART 3 Buffer Overflow If the warning persists, contact • Serial communication Warning AE Global Services.
  • Page 136 ® ® Advanced Energy Paramount MF 2 kW Generator Table 6‑2. Fault codes (Continued)   Fault Code Problem Description Suggested Action If the fault persists, contact AE Global Services. Internal, unrecoverable fault Cycle AC power to the unit. A-D Converter Initialization...
  • Page 137 ® ® Advanced Energy Paramount MF 2 kW Generator Table 6‑2. Fault codes (Continued)   Fault Code Problem Description Suggested Action Latching fault 1. Verify ambient temperature at air inlet Ambient Air Overtemperature • Air temperature is higher on the side panel.
  • Page 138 ® ® Advanced Energy Paramount MF 2 kW Generator Table 6‑2. Fault codes (Continued)   Fault Code Problem Description Suggested Action • A temperature sensor has If the fault persists, contact AE failed Global Services. Latching fault Cycle AC power to the unit.
  • Page 139 ® ® Advanced Energy Paramount MF 2 kW Generator Table 6‑2. Fault codes (Continued)   Fault Code Problem Description Suggested Action inlet panel on the back of the unit. If the fault persists, contact AE Global Services. Latching fault Verify that coolant...

  • Page 140: Ae Global Services

    ® ® Advanced Energy Paramount MF 2 kW Generator Table 6‑2. Fault codes (Continued)   Fault Code Problem Description Suggested Action Latching fault Cycle AC power to the unit. Flash Mode Failure If the fault persists, contact AE • Unit failed to go into Global Services.

  • Page 141: Table 6-3. Ae Global Services 24 X 7 Contact Information

    ® ® Advanced Energy Paramount MF 2 kW Generator ☞  Important For returns and repairs, please call AE Global Services to get the correct shipping address.   Table 6‑3. AE Global Services 24 X 7 contact information   Office Contact...

  • Page 142: Returning Units For Repair

    MF 2 kW Generator Table 6‑3. AE Global Services 24 X 7 contact information (Continued)   Office Contact Local or regional sales or service Visit the Advanced Energy website for office current contact information:   http://www.advanced-energy.com RETURNING UNITS FOR REPAIR Before returning any product for repair and/or adjustment, first follow all troubleshooting procedures.
  • Page 143 ® ® Advanced Energy Paramount MF 2 kW Generator Index   25-pin User port introduction 4‑1 cabling requirements pin descriptions 4‑2 25-pin User port 4‑1 satisfying minimal requirements 4‑1 certification 1‑3 wiring diagrams 4‑6 checksum byte AE Bus 4‑16 command number byte AE Bus 4‑15...
  • Page 144 ® ® Advanced Energy Paramount MF 2 kW Generator customer service contact information 6‑14 icons in user manual 1‑1 on unit 1‑2 data bytes industry guidelines, compliance with 1‑3 AE Bus 4‑16 input power DIP switch connecting 5‑13 AE Bus communication mode, setting HARTING connector 5‑13...
  • Page 145 6‑16 6‑2 symbols in user manual 1‑1 on unit 1‑2 Paramount MF 2 kW generator see unit physical specifications 3‑1 theory of operation 2‑1 pin descriptions transmission parameters 25-pin User port 4‑2 AE Bus 4‑11 Host port 4‑11...
  • Page 146 ® ® Advanced Energy Paramount MF 2 kW Generator unit warning see error codes compliance 1‑3 description 2‑1 types 6‑5 grounding 5‑10 warranty icons and symbols used 1‑2 authorized returns 6‑16 preparing to install 5‑1 water unpacking 5‑10 prepare for storage 6‑16 unpacking 5‑10...
  • Page 147 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

Table of Contents