Advanced Energy Paramount MF 2 kW User Manual page 139

®
Advanced Energy
Table 6‑2. Fault codes (Continued)
Fault Code
73
Coldplate Temperature Fault
101
Inverter Not Ready Fault
200
Unable To Tune Fault
201
Communication Watchdog
Timer Fault
57020114-00E
Problem Description
Latching fault
Temperature is detected by a
thermistor.
• Coldplate temperature is
higher than 65°C (149°F)
• Coolant is out of
specification
Non-latching fault
Generator is in soft start mode.
Soft start mode is engaged on
initial power up or following a
deep AC line sag.
• AC line voltage is less
than 90% nominal
• AC cable might be faulty
Latching fault
• The auto-tuning
algorithm might be
unsuccessful (see the
tuning sections for more
information)
• A problem external to the
generator exists:
◦ The plasma did not
ignite
◦ The match position is
not correct
Latching fault
• No communications.
Timer timed out.
Troubleshooting and Global Services
®
Paramount MF 2 kW Generator
Suggested Action
inlet panel on the back of
the unit.
If the fault persists, contact AE
Global Services.
Verify that coolant
specifications for flow rate and
maximum temperature are
met.
If the fault persists, contact AE
Global Services.
• Verify that loaded AC
line voltage meets
specifications.
• Verify that AC cable is
intact and functioning.
If the fault persists, contact AE
Global Services.
• Check the RF output
cable connections and
integrity.
• Ensure that process
parameters are within
limits.
If the fault persists, contact AE
Global Services.
Ensure that host
communications meet
minimum timeout value.
If the fault persists, contact AE
Global Services.
6‑13