Frequency Tuning; Understanding Automatic Tuning And Sweep Frequency; Rf On Tuning - Advanced Energy Paramount MF 2 kW User Manual

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Advanced Energy
Table 5‑6. Recommended command sequence and timing (Continued)
Sequence description
• RF is off
• Unit is in voltage control
(DC bias) mode
• Forward power regulation
setting is active

FREQUENCY TUNING

Understanding Automatic Tuning and Sweep Frequency

The Paramount MF 2 kW generator has an automatic tuning feature, which allows a
generator to sweep through its frequencies until it optimizes power delivery and
minimizes load mismatch.
Different processes and chambers run with varying operating parameters. The
Paramount MF 2 kW generator delivers up to 2000 W from 360 kHz to 440 kHz (400
kHz ± 10%). To optimize the power being delivered, the Paramount MF 2 kW
generator uses an automatic tuning algorithm.
During tuning, the Paramount MF 2 kW generator minimizes parameter D, which is
calculated based on load impedance and quantifies the amount of load mismatch.
D can vary from 0 to 3000. If the generator is loaded to 50 Ω, D = 0. If the generator
is loaded to an open or short circuit, D = 3000.

RF ON TUNING

☞
Important
This description gives only basic information about automatic tuning. For
detailed information about automatic tuning, contact AE Global Services.
If automatic frequency tuning is enabled, the generator automatically tries to find the
best operating frequency. The best operating frequency is the frequency at which the
parameter D is at its lowest possible value (a small value of D corresponds to small
load mismatch when load impedance is close to 50 Ω).
57020114-00E
Command sequence
4. Wait 10 ms.
5. Set pulse frequency at the Host port.
6. Wait 10 ms or wait for CSR code before sending next
command.
7. Set pulse duty cycle at the Host port.
8. Wait 5 ms.
9. Set power set point at the User port.
10. Wait 20 ms.
11. Turn RF ON at the User port.
Installation, Setup, and Operation
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Paramount MF 2 kW Generator
5‑23