Temperature Management System (Tms); Configuration Of The Stp Pump With The Tms; Configuration Of The Tms - Edwards STP-XF803 Series Instruction Manual

STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
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TEMPERATURE MANAGEMENT SYSTEM (TMS)

The STP pump operates at high temperatures while the Temperature Management
System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral
equipment while TMS unit are in operation. Operators can burn hands. Moreover,
NEVER remove the TMS cover while the Temperature Management System (TMS)
unit is in operation. Doing so may result in electric shock or burnt hands.
The Temperature Management System (TMS) maintains the temperature of the turbomolecular pump
by monitoring the temperature with temperature sensor in the base of the turbomolecular pump, and
performing the TMS valve and TMS heater ON/OFF control.
3.1

Configuration of the STP pump with the TMS

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1. STP control unit
2. STP connection cable
3. TMS heater (Built-in)
4. STP pump
5. TMS heater cover
6. TMS valve
7. TMS valve cable
8. TMS heater cable
Note: The shape of each part is an example. It varies according to specifications.
WARNING
3, 5
15
12
13
2
14
9. Sensor cable
10. Outlet port heater cable
11. Outlet port heater
12. Power cable
13. Power extension cable
14. STC-U remote cable
15. TMS unit
Figure 4 - Configuration of the TMS
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4
9
11
7
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MT-92E-101-C
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