Preface; About This Instruction Manual - Hitachi TM3030 Plus Instruction Manual

Thank you for your recent purchase of a TM3030Plus Tabletop Microscope.
The TM3030Plus Tabletop Microscope ("TM" for short) is designed to observe microstructure
of specimen surface prepared specifically for the TM, using an electron beam accelerated to
5 or 15kV as a light source.
This product involves the use of a vacuum and high voltages. In order to ensure the safe and
proper operation of the system, you are urged to receive a briefing on operation,
maintenance, and safety precautions by representatives of Hitachi's service department or
technicians certified by the same. Carefully read the safety tips provided in this manual, and
use the system after you have thoroughly understood the safety precautions ("Safety Tips"
for short) contained in this publication. After reading this manual, keep it in a safe place for
future reference.
When allowing children and pupils ("minors") to use the system, do so under the
supervision of a system administrator who is thoroughly familiar with the
above-mentioned safety tips, and by limiting their use to personal computer (PC)
operations and moving the specimen stage. Because minors can take unexpected
action out of curiosity, the system administrator should use utmost caution not to
operate the system miners independently or unmentioned way (in this manual).

ABOUT THIS INSTRUCTION MANUAL

 This Instruction Manual describes TM operating methods, maintenance and inspection
methods, items that are necessary to support these requirements, and items that require
special attention.
 The Instruction Manual consists of the following components:
Cautionary Items (warranty, installation, relocation, after service, the life length of the
system, and other items)
Safety (a summary of safety tips)
Chapter 1: SPECIFICATIONS AND INSTALLATION CONDITIONS (installation
conditions, customer-provided items, and so forth)
Chapter 2: INSTALLATION AND SETUP (installing an application, connecting the
system to the PC, and so forth)
Chapter 3: SYSTEM CONFIGURATION (configuration, descriptions of parts, and so
forth)
Chapter 4: OPERATIONS (image observation, saving image data, and so forth)
Chapter 5: MAINTENANCE (beam axis adjustment, servicing the various parts, taking
corrective action, and so forth)
Chapter 6: REPLACEMENT PARTS (consumables, finite-life items, and lists of spare
parts)
Chapter 7: 3D-VIEW (Option)
APPENDIX

PREFACE

- 1 -