Hitachi TM3030 Plus Instruction Manual page 255

Figure 5.2-15 STEP 3 Reference Image
NOTE : Figure 5.2-15 is only an example. Don't be alarmed if the same image does not
appear; it is not a problem.
7. When the beam axis alignment window closes automatically, the axis alignment of the
electron beam is completed.
Figure 5.2-16 Electron Beam Condition Setup Window (3)
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