Installation Condition - Hitachi TM3030 Plus Instruction Manual

1.5 Installation Condition

Install the TM3030Plus in the place of the following condition:
Item
General 1. Flat location
requirements 2. Avoid liquids
3. Avoid external shock
4. Avoid heat sources
5. Avoid strong magnetic field (vertically from system: 15 mT, horizontally
from system: 5 mT）
6. Avoid strong electric field
7. Avoid dust
8. Avoid vibration (follow the instructions below)
Amplitude Meet the following amplitude value for the installation site. The allowable
(Vibration) value is defined as the amount of image blurring is 0.2 mm or less in
photography at a magnification of 5,000x.
Allowable amplitude value (*)
Frequency  7 Hz, 4.0 µm p-p or less
7 Hz < frequency  10 Hz, 1.5 µm p-p or less
10 Hz < frequency, 2.0 cm/s
Magnetic Meet the following stray magnetic field value for the installation site. The
field allowable value of AC magnetic field is defined as the amount of image
distortion (elongation, shrinkage, or bending) is 0.5 mm or less in
photography at a specified magnification or specified focus position
(D=4.5 mm). If D becomes longer, it becomes the more susceptible to the
influence of a stray magnetic field, and the allowable value of stray
magnetic fields becomes smaller.
Accelerating voltage: 5 kV
Magnification: 2 kx
D：4.5 mm
Accelerating voltage: 15 kV
Magnification: 5 kx
D：4.5 mm
Table 1.5 Installation Conditions
Installation Conditions
2
or less
Allowable stray magnetic field for the TM3030Plus (*)
AC magnetic field
Horizontal
1 - 5
(nT)
Vertical Horizontal
376 607
289 369
DC magnetic field
fluctuation (nT)
(Peak-to-Peak)
Vertical
425 686
327 417