Hitachi TM3030 Plus Instruction Manual page 249

3. Start the beam axis alignment mode.
The beam axis can be adjusted to the center of the lens in the three steps. From the
[Maintenance] menu, select [Beam axis alignment]. The Beam Axis Alignment window
will be displayed.
Figure 5.2-3 Starting the Beam Axis Alignment Mode
NOTE : Beam axis alignment can be performed only when electron beam irradiation is on
(HV-ON). During the execution of beam axis alignment, do not operate the
specimen stage, otherwise, the beam axis cannot be aligned.
Click the [OK] button as the following confirmation message is displayed. The Beam Axis
Alignment window appears.
Figure 5.2-4 Reference Sample Loading Confirmation Window (1)
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