Hitachi TM3030 Plus Instruction Manual page 274

Code Error Message
1214 The filament has burned out.
Or, it is not set right.
Please check the filament
setting.
1222 Beam current is too high.
Please check the filament
setting.
1223 Beam current is too low.
Please check the filament
setting.
1224 The filament has burned out.
Or, it is not set right.
Please check the filament
setting.
Countermeasure
An emission current lower than 10 µA has been
detected during a gradual-increase process of a
high voltage. Click the [OK] button to close the
message. Make sure there are no particles on
the filament tip and the opening of the Wehnelt.
Since the filament may have burned out, replace
the filament with a new one.
For the details, refer to 5.1 Filament
Replacement.
An emission current of 200 µA or more
(overcurrent) has been detected while the
electron beam is being emitted. Click the [OK]
button to close the message. Make sure there
are no particles on the filament tip and the
opening of the Wehnelt. Also confirm that the
specified spacer ring is properly mounted.
For the details, refer to 5.1 Filament
Replacement.
An emission current higher than 10 µA or lower
than 20 µA has been detected while the electron
beam is being emitted. Click the [OK] button to
close the message. The filament may have
burned out. Replace the filament.
For the details, refer to 5.1 Filament
Replacement.
An emission current lower than 10 µA has been
detected while the electron beam is being
emitted. Click the [OK] button to close the
message. Make sure there are no particles on
the filament tip and the opening of the Wehnelt.
Since the filament may have burned out, replace
the filament with a new one.
For the details, refer to 5.1 Filament
Replacement.
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