Calibration Of Z - Hitachi TM3030 Plus Instruction Manual

7.24.2 Calibration of Z

This function calibrates the size in the direction of height (Z-axis) by using the specimen
whose height is known. More accurate result of the Z-axis calibration can be provided after
Flat calibration.
NOTE : 3D-VIEW measures height based on contrast difference among the four BSE
images observed from different directions. The contrast of each BSE image is
different depending on the material of the observed specimen, distance from the
BSE detector to the specimen, and the magnification, etc. Therefore, the specimen
and observation condition for Z calibration should be the same as those under actual
situation as much as possible.
1. Capture an image of a specimen whose height is known by 3D-Image capture, and then
import the image using 3D-Image Viewer.
2. Select [Z] from the [Calibration] menu, or click the [Z] button on the main operation
screen of 3D-Image Viewer view.
3. The message in Figure 7.24.2-1 is displayed. On the image displayed in the image view,
click the position whose height is known, and click the [Next] button.
Figure 7.24.2-1 Calibration of Z Message Dialog 1
4. The message in Figure 7.24.2-2 is displayed.
The Profile Measure dialog and the height between two points are displayed when
clicking the position in which the height between two points which is known on the profile
view. Click the [Next] button on the message window shown in Figure 7.24.2-2.
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