Related Manuals for Hitachi 4700 FE-SEM
Summary of Contents for Hitachi 4700 FE-SEM
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Page 1: Table Of Contents
HITACHI 4700 FE-SEM COLD FIELD EMISSION STARTING CONDITIONS SPECIMEN LOADING SAMPLE INSERTION SAMPLE WITHDRAWAL SET IMAGE PARAMETERS 8-10 OBTAINING AN IMAGE ALIGNMENT GENERAL OPERATION 13-14 IMAGE ACQUISITION BACKSCATTER ELECTRON IMAGING COMPUTER STARTUP AND GUN FLASH PROCEDURE 17-19 END OF DAY SHUTDOWN PROCEDURE... -
Page 2: Cold Field Emission
WHY COLD FIELD EMISSION? There are several benefits to cold field emission and few detractors. Cold Cathode Field Emission microscopy provides higher resolution, higher beam density (brightness), and longer tip life than Thermal Tungsten wire SEMs and thermally assisted “Schottky” field emitters. The following Table highlights those parameters responsible for the Cold Cathode Field Emission’s higher performance at lower accelerating voltages. -
Page 3: Starting Conditions
STARTING CONDITIONS 1. EVAC POWER is ON (-) 2. DP/TMP, WATER, and AIR PRES lamps are LIT (green) 3. IP-1, IP-2, and IP-3 lamps LIT (green). 4. OBJ. APT. switch is set at HEAT 5. Gun and Column MinimumVacuum Levels: IP-1 -- 1x10 IP-2 -- 1x10 IP-3 -- 5x10... - Page 4 COLD FINGER (Optional) The built-in anti-contamination cold finger, located on the right side of the specimen chamber, can be filled with liquid Nitrogen to reduce visible contamination on the specimen by collecting any grease, dirt, or impurities that can impede image observation, especially at high magnifications.
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Page 5: Specimen Loading
SPECIMEN LOADING (standard Hitachi stage; Hitachi specimen rod) A sample mounted at the appropriate height is shown on the right. The Sled is attached to the Specimen Exchange Rod; the Post connects the Sled to the Sample Mount of choice; the Locking Ring is... -
Page 6: Sample Insertion
Rotate (°) Tilt (°) X (mm) Y (mm) EMITECH cryo-stage EMITECH rod 12.5 12.5 EMITECH cryo-stage HITACHI rod 28.5 12.5 12.5 HITACHI stage HITACHI rod 12.5 12.5 3. Make sure the High Voltage is OFF*; S.C./S.E.C toggle switch to S.E.C position; and the MV1 Chamber Valve is in the closed position. -
Page 7: Sample Withdrawal
Z (mm) Rotate (°) Tilt (°) X (mm) Y (mm) EMITECH cryo-stage EMITECH rod 12.5 12.5 EMITECH cryo-stage HITACHI rod 28.5 12.5 12.5 HITACHI stage HITACHI rod 12.5 12.5 3. OPEN the MV1 Chamber Valve. 4. While viewing the Specimen Chamber, insert the Specimen Exchange Rod and screw it into the Specimen Holder. -
Page 8: Set Image Parameters
SET IMAGING PARAMETERS 1. Switch GUN VALVE to OPEN/AUTO. The valve can be kept on OPEN/AUTO all the time, and the gun valve will automatically open upon turning on the High Voltage. 2. Open the HV Control window by left clicking anywhere in the gray HV display area (top right corner of the viewing screen). - Page 9 6. Open the Column Setup window by clicking on the icon. Select the Operation Mode (see Table below). Note: changing modes alters the path of the beam down the column, changing cross-over positions or the strengths of the stigmator coils. Thus, realignment may be necessary.
- Page 10 Select the Cond Lens 1 setting (range: 1 – 16 with higher numbers representing a smaller spot size; the default setting is 5). The condenser lens controls the final spot size on the specimen. The smaller the spot size, the better the resolution; however, beam current will be reduced.
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Page 11: Obtaining An Image
OBTAINING AN IMAGE 1. Select Low Magnification mode. Click on the H/L button to toggle between High and Low Magnification modes. 2. Click the Automatic Brightness and Contrast button. 3. Locate and center an area of interest with the manual Stage Controls (Magnification may also need to be adjusted at this point). -
Page 12: Alignment
ALIGNMENT Once the image is well focused and initial astigmatism compensation has been performed, the alignment procedure should be performed. In fact, any time a detector, operating condition, or voltage is changed, the alignment sequence should be completed. The alignment procedure is an iterative process. Also, at times, you should click the Off button in the Alignment window, focus and compensate for astigmatism, and then continue with the alignment process. -
Page 13: General Operation
Stage Ranges ● ● X (mm) Y (mm) Z (mm) T (°) * R (°) HITACHI stage 0 -- 25 0 -- 25 2.5 -- 27.5 -5 -- 45 0 -- 360 EMITECH cryo-stage 0 -- 25 0 -- 25 2.5 -- 27.5... - Page 14 Charging: Finding the E2 Value Charging is the condition when a material cannot effectively conduct the beam energy imparted to it. There are two types of charging: Negative (the most common) and Positive. Negative charging occurs when impinging electrons are trapped within the sample and an electrostatic charge builds up.
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Page 15: Image Acquisition
IMAGE ACQUISITION There are a few options for capturing images: a. Integration of a TV (Fast Scan) rate scan b. Slow scan capture c. “Instant freeze”, in which case the image can automatically be transferred to PCI. 1. To set up the capturing methods, click on the “Image Setup”... -
Page 16: Backscatter Electron Imaging
BACKSCATTER ELECTRON IMAGING 1. Establish a 10 mm or greater distance on the Chamber Scope between the top of your specimen and the bottom of the Objective Lens. 2. Screw the Backscatter Detector fully into the column (see orange indicator guides on the detector). -
Page 17: Computer Startup And Gun Flash Procedure
Hitachi S-4700 FEGSEM Computer Startup and Gun Flash Procedure The “flash” procedure helps to establish stable operation of the cold field-emission electron gun by driving excess adsorbed gas molecules from the gun’s cathode, or electron emitter. This is done by briefly heating the cathode to high temperature. Remember that the S-4700’s field- emission gun normally operates with an unheated cathode Flashing is usually done in the morning prior to the start of the day’s observations, and it will... - Page 18 “S-4700 Scanning Electron Microscope” “Enter Login: S-4700” “Password: _______________” (Hit Enter key or click OK) “Hitachi S-4700 Scanning Electron Microscope” window appears. Set VALVE : GUN, on column panel, to AUTO, if it’s not already there. (flip toggle switch up) Procedure Flash Left click on “Vacc”, in upper right corner of screen.
- Page 19 When “HV Control” window reappears, click “ON”. The FE-PCSEM / “HV On” window appears and displays the rise in Vext and Ie. When Step e is finished, note the Ie”, “Vext”, and time of flash and enter data in the log book.
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