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Page 2 • Before using the instrument, read the safety instructions and precautions carefully. • Keep this manual in a safe place nearby so it can be referred to whenever needed. Copyright © Hitachi High-Technologies Corporation. 2002. All rights reserved. Printed in Japan. Part No. 539-8050...
Page 3 NOTICE: Information contained in this document is subject to change without notice for improvement. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved. No part of this manual may be reproduced, transmitted or disclosed to a third party in any form or by any means without the express written permission of Hitachi High-Technologies Corporation.
Page 4: Foreword
FOREWORD • The S-4800 SEM utilizes electron beam accelerated at 500 V to 30 kV. APPLICATION The instrument is designed mainly for observation and evaluation of specimens prepared for observation using SEM. • Note that Hitachi High-Technologies Corporation will not be responsible for injury or damage caused by usage of the instrument in a manner not described in this manual.
Page 5: Scope Of Instruction Manual
Accessory Operation This instruction manual describes the operation, maintenance, and specific precautions pertinent to daily operation on the model S-4800 scanning electron microscope. First, read and get familiar with the safety precautions described in the opening pages and General Safety Guidelines.
Page 6: Guarantee
(a) Failure due to use in improperly installed condition. (b) Failure due to power supply voltage/frequency other than specified by Hitachi High-Technologies Corporation or due to power failure. (c) Corrosion or deterioration of the tubing due to impurities contained in gas, air or cooling water supplied by the customer.
Page 7 LIMITATION THEREOF, GUARANTEES AS TO MARKETABILITY, MERCHANTABILITY, FOR A PARTICULAR PURPOSE OR USE, OR AGAINST INFRINGEMENT OF ANY PATENT. IN NO EVENT SHALL HITACHI HIGH-TECHNOLOGIES CORPORATION BE LIABLE FOR ANY DIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES OF ANY NATURE, OR LOSSES OR EXPENSES RESULTING FROM ANY DEFECTIVE PRODUCT OR THE USE OF ANY PRODUCT.
Page 8: Installation And After-Sales Service
INSTALLATION AND AFTER-SALES SERVICE Installation • Installation at delivery will be carried out by Hitachi High-Technologies Corporation installation engineers. • Before installation, refer to section 1 and prepare the necessary utilities. • Installation at another place after delivery will be provided at charge. Consult your nearest Hitachi High-Technologies Corporation service representative for details.
Page 9: Available Training Programs
Available Training Programs Hitachi High-Technologies Corporation offers various kinds of training programs at its own facilities or at the user’s site and facilities to ensure proper and safe operations of the equipment to its full performance. Please contact your sales representative about the details of the training programs and application to them.
Page 10: Safety Summary
Follow all the operating procedures provided in this manual. • Installation and maintenance must be entrusted to personnel who have received training at and are authorized by Hitachi High-Technologies Corporation. • Pay special attention to and follow all the hazard warnings on the machine and in the manual.
Page 11 The customer is responsible for proper ventilation of the room when using chemicals. Inadequate ventilation could cause a health hazard. • Maintenance up to 4.4 in section 4 must be entrusted to the service engineers (of Hitachi Instrument Service). The user should not carry out these procedures. •...
Page 12: Electrical Hazard
Electrical Hazard Electrical hazards exist due to the following: Electron Gun : 0.5 to 30 kV DC Ion Pump : 5 kV DC Photomultiplier : 1 kV DC Scintillator of secondary electron detector : 10 kV DC Electrode 1 : 50 V DC Electrode 2 : 200 V (Max) DC Electrode 3...
Page 13: High Temperature Hazard
High Temperature Hazard Baking the electron gun part is carried out about once per 6 months to keep high vacuum inside the part. When baking, the surface of the gun housing and ion pumps reaches around 250 °C. The electron gun part is surrounded by a metal guard to prevent high temperature hazard caused by direct contact.
Page 14 Laser light Hazard The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Personal Computer with a laser device complies with safety standards, including International Electrotechnical Commission (IEC) 825. With specific regard to the laser, the equipment complies with laser product performance standards set by US government agencies for a Class 1 laser product.
Page 16 Pinch...
Page 19 WARNING • Voltages up to 100 V AC and 30 kV DC are used inside this instrument. Do not touch inside or you may receive an electric shock. • Do not remove the covers of column unit, control unit or power unit and do not touch internal parts or circuits while the instrument power is turned on.
Page 20 WARNING (cont’d) The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Be sure to observe the following warnings when operating a product equipped with a laser device. ・ Do not try to open the unit enclosure. There are no user-serviceable components inside.
Page 21: Other Relevant Precautions
Hitachi shall not be responsible for a third party’s claim regarding infringement of any patent rights or industrial properties with respect either to products manufactured through the use of equipment supplied by Hitachi or its related companies or to applications of the Hitachi equipment.
Page 22 S-4800 control program. If a problem occurs after you install a vaccine program, remove it or execute virus check when the S-4800 program is not running. It is desirable not to set the vaccine program in the auto start-up group, or to terminate the vaccine program before starting the S-4800 program.
Page 23 • Do not forget other precautions described in the text of the instruction manual. NOTICE:The model S-4800 has two nameplates. The nameplate at the back of the main unit indicates production serial number, production date, manufacturer name and AC power input. The nameplate at the back of the display unit idicates rated voltage, current and frequency of AC power input.
Page 24: Emergency Off Button
RECOVER OF EMERGENCY OFF Check the whole system. If the system has something wrong, call service personnel (Hitachi High-Technologies Corporation service engineer etc.) and execute maintenance. Turn all breakers on the back og the display unit. Unlock EMO switch. (Turn clockwise for unlocking) Refer to section 4 for starting up.
Page 25: Main Power Disconnect
Main Power Disconnect Lock out/tag out procedure are very important safety concern. The purpose of the lock out/tag out procedure is to insure safety while working on electrical and mechanical equipment. Make sure you get introduced to the person responsible for the equipment at the site.
Page 26: Interlock
INTERLOCK Electron Gun The Gun cable is now interlocked with a momentary switch. If the cover at the top of the electron gun is removed to disconnect gun cable, the High Voltage applied to the electron gun is shut off. This switch can be overridden for service. However, if the cable is replaced the service override is removed.
Page 29 Fig S- 8 Protection from movement during earthquakes (Main unit) SAFETY - 20...
Page 30 Fig S- 9 Gravity location of Main unit (Type1) SAFETY - 21...
Page 31 Fig S- 10 Gravity location of Main unit (Type2) SAFETY - 22...
Page 32 Fig S- 11 Gravity location of Display unit (Not include monitor display) SAFETY - 23...
Page 33 Fig S- 12 An example of the water-leakage detector SAFETY - 24...
Page 34: Precautions On Handling
PRECAUTIONS ON HANDLING For the sake of safety, the following points should be taken into consideration. 1. PRECAUTIONS FOR TRANSPORT CAUTION Do not lift the instrument by holding the table. The strength of table fitting is not sufficient for bearing the weight of display unit, approximately 200 kg. Should the table be lifted, the display unit might slip off and crash.
Page 35 CAUTION Never touch the electron gun with bare hands in the course of baking and cooling. High temperature during baking may cause burns. When using liquid nitrogen, wear leather gloves and protective glasses. There is danger if it touches the skin as it can cause low temperature burns. Also, make sure there is enough ventilation in the room to prevent oxygen deficiency.
Page 36: General Precautions
3. GENERAL PRECAUTIONS Maintenance items other than those described in this manual should be left to the service engineer. Any replacement of the FE (field emission) tip should be performed by a Hitachi High-Technologies Corporation service representative. 4. MEASURES FOR EMERGENCY Turn off the main switch on the distribution board.
Page 37: Cautions On Operation
5. CAUTIONS ON OPERATION During operation, occasionally confirm that the ion pumps are in a stable state. 2 × 10 IP-1 Pa or better 2 × 10 IP-2 Pa or better 5 × 10 IP-3 Pa or better When emission current varies widely during operation depress the HV OFF switch to cut off high voltage of the electron gun.
Page 38 7. FLASHING Principle of Field Emission Electron Gun Figure 1 shows the principle of the field emission electron gun. The gun consists of cathode, first anode and second anode. An extracting voltage (Vext) is applied between the cathode and first anode, and electrons are emitted from the cathode.
Page 39 The periods sectioned on the time axis in Fig. 2 vary depending on electron gun vacuum, residual gas component, cathode/anode cleanliness and emission current value. With the Model S-4800, they are roughly given as follows. • Initial reduction period : 30 min to 3 hours •...
Page 40 Flashing Procedure (a) Check and set up intensity of flashing as follows: Click the HV display area on the control panel. The HV control dialog window will open. (b) Click the Flashing button on it. The Flashing execution dialog window will open. Set Intensity to “2”...
Page 41: Specification
SPECIFICATION Specifications for Hitachi Model S-4800, Field Emission Scanning Electron Microscope 1. Resolution: Accelerating voltage 15 kV Working distance = 4 mm ......1.0 nm Accelerating voltage 1 kV Working distance = 1.5 mm ......2.0 nm 2. Magnification: High magnification mode ....... 100× to 800,000×...
Page 42 4. Specimen Stage Motion Model S-4800, Type I Model S-4800, Type II X Traverse 0 to 50 mm (continuous) 0 to 110 mm (continuous) Y Traverse 0 to 50 mm (continuous) 0 to 110 mm (continuous) Z Traverse 1.5 to 30.0 mm (continuous) 1.5 to 40.0 mm (continuous)
Page 43 Signal processing modes ....Automatic brightness control, Gamma control, Automatic focus, Automatic stigmator Automatic data display ......Image number, accelerating voltage, magnification, micron bar, micron value, date/time and working distance can be printed on the film. Data entry ..........Alphanumeric characters, numbers, and marks can be written on the image from the keyboard.
Page 44: Installation Conditions
INSTALLATION CONDITIONS 1. Power Requirements 100 V AC (±10%), single phase, 50/60 Hz, 4 kVA In case to use other voltage than 100V AC, a double insulation transformer should be provided by user. Exclusive grounding of less than 100 ohms in ground resistance should be provided by user. 2.
Page 45 220,000× Acoustic noise ....The following table shows the relation between allowable noise level (C characteristic) and frequency at the S-4800 installation site. The allowable amplitude corresponds to an image deviation of less than 0.2 mm on a micrograph at magnification 220,000×.
Page 46 Water temperature....10 to 20 °C (temperature variation: less than 0.5 °C/10 min) Water supply port ....One port, with Rc 3/8 taper internal thread. (If water contains significant deposit or impurities, consult Hitachi High-Technologies Corporation separately.) Water drain port....... One port, more than 20 mm in diameter (natural drainage type)
Page 47: Table Of Contents
MODEL S-4800 FIELD EMISSION SCANNING ELECTRON MICROSCOPE Table of Contents FOREWORD...................... FOREWORD-1 Scope of Instruction Manual ............... FOREWORD-2 GUARANTEE..................... FOREWORD-3 INSTALLATION AND AFTER-SALES SERVICE..........FOREWORD-5 CAUTION ON DISPOSAL OF INSTRUMENT ........... FOREWORD-5 Available Training Programs............... FOREWORD-6 Handling of Chemicals ................FOREWORD-6 Instruction Manual..................
Page 48 Table of Contents (Cont’d) PRECAUTIONS ON HANDLING ..............PRECAUTION-1 Precautions for Transport ..............PRECAUTION-1 Precautions for Power Connection ............. PRECAUTION-1 General Precautions ................PRECAUTION-3 Measures for Emergency..............PRECAUTION-3 5. Cautions on Operation ............... PRECAUTION-4 6. Others....................PRECAUTION-4 7. Flashing....................PRECAUTION-5 SPECIFICATION .....................
Page 49 2.2 Control Knobs and Switches on Display Unit............2-13 2.2.1 Display ....................2-13 Graphical User Interface (GUI) ................2-16 2.3.1 Starting the PC and Logging in the S-4800 Program ......2-16 2.3.2 S-4800 SEM Main Window..............2-18 2.3.3 Control arrangement on the window............2-19 2.3.4...
Page 50 Table of Contents (Cont’d) Application of High Voltage .................. 3-12 3.3.1 Condition where the gun high voltage is applicable........ 3-12 3.3.2 Flashing ....................3-12 3.3.3 Setting of Accelerating Voltage and Emission Current ......3-13 3.3.4 Application of High Voltage..............3-14 Optimizing the Electron Beam ................
Page 51 Table of Contents (Cont’d) 3.9.8 Data Entry Function ................3-94 3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation ....... 3-97 3.9.11 Printing images using Report generation function ........3-99 3.9.12 Copy Image .................... 3-101 3.9.13 Copy Image information text..............3-101 3.9.14 Oblique Image ..................
Page 52 When PC has Hanged up ............... 4-17 4.4.12 When Error Messages are shown ............4-18 Operation for shutting down all power supply of S-4800 ........4-18 Operation when power was shut down by power line failure........ 4-18 Operation for Starting S-4800 ................
Page 53: Installation
1.1 Installation Requirements 1.1.1 General For installing the Model S-4800, the sites and conditions mentioned below must be avoided Room located in the vicinity of transformer substation Room located in the vicinity of elevator Location near electric equipment consuming a large quantity of power (e.g., electric...
Page 54: Line Power Requirement
1.1.3 Line Power Requirement Single-phase AC, 4 kVA, 50/60 Hz. When the supplied power line voltage is 100V, the instrument works by direct connection. When the supplied power line voltage is other than 100V (200V or others), use a step down transformer to step the power line voltage down to 100V.
Page 55: Stray Magnetic Field
1.1.6 Stray Magnetic Field You should measure the stray magnetic field at the place for installing the Model S-4700 in advance. When the requirements given in Table 1-1 are satisfied, no image trouble will occur. Avoid locations at which abrupt electric current change or magnetic field change might occur due to the presence of a large-sized magnetic clutch or power cable for other equipment.
Page 56: Floor Vibration
(electric car, for example) are not operated nearby. Table 1-2 Allowable Vibration Floor vibration: Image trouble will not be observed when the conditions below are satisfied. S-4800 Type I Vibration Allowable Amplitude (X, Y) Vibration...
Page 57 Figure 1-1 shows the relation between frequency of floor vibration and vibration transmittance of the instrument. Since the vibration transmittance is maximum at the resonance point (about 2 Hz) of the anti-vibration mount provided with the instrument, the allowable amplitude is minimum at this point.
Page 58 In case an equipment energized by power of a frequency different from the commercial frequency employed on the Model S-4800 or the power line for it is located nearby, scan synchronization with power line frequency will become ineffective. Such a location should be avoided.
Page 59: Disturbance By Sound Waves
Sound waves (vibrations of air) adversely affect the Model S-4800 regardless of their frequency and may cause image trouble. To prevent this, confirm before installation that equipment which may cause a sonic disturbance is not located in the vicinity of the S-4800. If such equipment exists, then check for noise level.
Page 60 3400 Weight (500) Cooling water circulator (option) Main compressor column unit Display unit (800)∗1 1000 (225) Photographing unit (option) 1100 Dimensions in mm Fig. 1-2 Installation Layout example...
Page 61: Materials Or Instruments To Be Prepared By User
1.2 Materials or Instruments to be prepared by User See Table 1-4. Table 1-4 Materials or Instruments to be Prepared by User Name Quantity Remarks Ethanol 500 mL Used for cleaning parts. Acetone 500 mL Used for cleaning parts. Liquid nitrogen 2 L/day For cooling the anti-contamination trap.
Page 62: Power And Ground Wirings
The instrument operates only with a power supply of AC100 V. If using a power voltage other than AC100 V, the double insulation transformer (option) is required. The transformer shall be put after MAIN switch of S-4800. Fig 1-3 shows connection of the step down transformer. Safety circuit...
Page 63 In the case, connect the input of the transformer to the main breaker of the site power supply. Connect the out put to the Main breaker (ELB) of S-4800. Refer fig 1-5 for the connection. However, the former way (put the step down transformer next to the S-4800 Main breaker) is strongly recommended for safety.
Page 64: Functions
2. FUNCTIONS Fig. 2-1a and 2-1b show the appearance of the Model S-4800 type 1 and Type2. Main unit Display unit Fig. 2-1a Model S-4800 System (type 1) Fig. 2-1b Model S-4800 System (type 2) 2 - 1...
Page 65: Control Knobs And Switches On Main Unit
2.1 Control Knobs and Switches on Main Unit 2.1.1 Main unit (Column) Fig. 2-2 shows the appearance of the S-4800 main unit (type I). Beam monitor preamplifier Electron gun Beam monitor aperture Gun valve Secondary electron Anti-contamination detector (Upper) trap dewar...
Page 66 Fig. 2-3 sketches the sectional view of the S-4800 column. Electron gun IP–1 IP–2 Beam monitor aperture 1st condenser lens IP–3 Gun valve (V-1) Objective movable aperture 2nd condenser lens Deflection coil Specimen goniometer stage Objective lens Specimen Specimen chamber Fig.
Page 67 Fig. 2-4 shows the Type 1 specimen stage. Fine opening control X knob Opening selector Fine opening control Y knob [T] control [Z] control Stage lock switch [R] control Absorbed current measuring terminal [X] control [Y] control Fig. 2-4 Specimen Stage (type I) [X] control : Moves specimen in X direction within a range from 0 to 50 mm.
Page 68 Fig. 2-5 shows the appearance of large specimen stage driven by motors (type II). Fine opening control X knob Opening selector Fine opening control Y knob Absorbed current measuring terminal (normally used for specimen bias voltage terminal) Fig. 2-5 Large Specimen Stage (type II) Range of movement in X direction : 0 to 110 mm Range of movement in Y direction...
Page 69 Fig. 2-6a and 2-6b show the specimen exchange device of Type 1 and type2 instruments. Exchange Specimen exchange chamber Viewing window Exchange rod control switches (a) Type1 (b) Type2 Fig. 2-6 specimen exchange device [Specimen exchange control switches ] Switches for Gate valve control and evacuating / air introducing exchange chamber.
Page 70 Fig. 2-7 shows the block diagram of evacuating system. Electron gun chamber intermediate Chamber intermediate Chamber SEC: Specimen SC:Specimen exchange chamber chamber PiG‑2 PiG‑1 leak valve Fig. 2-7 Evacuating System IP–1, –2, –3 : Ion pumps : Turbo-molecular pump : Rotary pump : Buffer tank Keeps back pressure of TMP while RP is evacuating specimen exchange chamber.
Page 71 Indicator lamp (Option) Fig. 2-8a Evacuation Control Panel [EMERGENCY OFF] switch : Shuts down S-4800 entirely in an emergency. [EVAC POWER] switch : Main switch of evacuation system. [STAGE POWER] switch : Main switch of Stage controller (Type 2 only).
Page 72: Start Stop Switch
Fig. 2-8b shows the Display / Operation area. Numeric / character display Status indicator lamps Display mode Operation selection switches switches Fig. 2-8a Display / Operation area Vacuum of each chamber, status of evacuation sequence and messages are displayed on this area.
Page 73 The display status changes as the following table by depressing the MODE switch. Display Status indicator Numeric / description status lamp character display Initial status No lamp blinks No indication (Normal running status) IP1 lamp blinks IP1vacuum XE−Y （X−Y Pa） IP2 lamp blinks IP2 vacuum XE−Y （X−Y Pa）...
Page 74 The following tables show alarm or error message and how to recover from the error. Errors with (*) mark are caused by failure on equipment. [Alarm for operation] Message description recovering operation Specimen exchange rod is not at Pull out the rod fully (+ buzzer) proper position when the GV is to be closed.
Page 75 ［Alarm according to gun baking］ Message description recovering operation E31(+ HV cable head is not placed to t Refer to 4.10 Gun baking. buzzer) the cable holder properly. E32(+ Baking protection cover is not put. buzzer) E34(+ Ion pump high voltage is not buzzer) applied.
Page 76: Control Knobs And Switches On Display Unit
2.2 Control Knobs and Switches on Display Unit 2.2.1 Display Figure 2-9 shows the display unit. Monitor display Keyboard Manual Mouse operation panel DISPLAY Power switch (inside the door) C980012 Fig. 2-9 Display Unit • PC ： SEM control personal computer. Placed inside of the door. •...
Page 77 Fig. 2-10 shows the front panel of PC. CD-ROM drive unit FD drive unit PC power switch Power lamp Hard disk accessing lamp Fig. 2-10 PC Panel • PC power switch Power switch of PC. Usually the switch need not be used. PC power is controlled with DISPLAY power switch.
Page 78 [Focus] [Coarse] [Fine] knobs : Use for coarse and fine focus adjustment. • Magnification/Image shift control section [Magnification] knob : Use for Magnification setting. [Image Shift] knobs : Move image by electrical image shift. • Brightness/Contrast adjusting section [Brightness] knob : Use for brightness adjustment.
Page 79: Graphical User Interface (Gui)
S-4800 : Power user level, no password (“S-4800” is set to Power User level. It is because, different from NT, the Windows 2000 does not allow changing registry to User level) For operation of Windows, refer to instruction manual for Windows 2000 S-4800 control program will start up automatically.
Page 80 The S-4800 login dialog window will open. Fig. 2-15 S-4800 Loin dialog window At the first starting up after installation of the program, use the log-in name [S-4800] and click the OK button. You need no Password. After log-in names and passwords for them are set, input the name and the password and then, click the OK button.
Page 81: S-4800 Sem Main Window
This button will be changed to Maximize button. Close button: Terminates the S-4800 operation program and close the window. • Menu bar: Clicking a main menu on the menu bar shows pull-down menus. Click one of commands on the pull-down menu to execute the command.
Page 82: Control Arrangement On The Window
Three modes of scanning image display are available, Full screen (shown on previous page), Small screen (Fig 2-17 left) and Dual screen (Fig 2-17 right). Fig 2-17 S-4800 Main window (Small and Dual screen mode) 2.3.3 Control arrangement on the window Operation tools are placed as follows.
Page 83: Mouse Operation On The Scanning Image
(3) Menu bar Almost functions are executed on the menu bar. (4) Mouse operation on the scanning image The S button of mouse changes operation on the scanning image alternately. The following operations are available using mouse. < Image adjustment > Focusing, astigmatism correction and brightness / contrast adjustment <...
Page 84 2.3.4 Menu The menu bar and the toolbar include the following menus and commands. (1) File menu: The File menu includes commands for opening SEM Data Manager, saving files, photo recording, and image printing. • Open SEM Data Manager Opens the SEM Data Manager window. Refer to <3.12 Using SEM Data Manager >...
Page 85 • Column Opens the Column tab of the Setup dialog window. Use it to select the optimal electron optical column. Refer to <3.4 Optimizing the electron beam> • Condition Load Opens the Op. Cond. Tab of the Setup dialog window. Use it for loading and reproducing previously saved electron optical column condition.
Page 86 (5) Scan menu: The Scan menu includes commands for scanning control. • Run (Freeze) Runs or Freezes scanning alternately. • Capture Starts image capturing. Refer to <3.6.4 Image Capturing> • Capture Reso Selects capturing image resolution • Split DM Mode Activates Split/Dual Mag mode.
Page 87 (8) Option menu: The Option menu includes commands for optional functions. • Optional Setup - Op. Panel Setting Opens Op. Panel tab of the Optional Setup dialog window. Use for arrangement of functions on the Operation Panel. Refer to <3.9.15 Optional Setting> •...
Page 88 ECO mode setting. • Index Show the index of S-4800 Help. • Search Show the key-word search of S-4800 Help. • About FE-PC SEM Indicates the version of S-4800 PC-SEM. (11) Undo menu : Recovers previous status of doing following operation.
Page 89: Control Panel
2.3.5 Control Panel Most frequently used controls such that for Image observation, image recording. Usual operation will be able to perform using the Control panel and the manual operation panel. In case of present model S-4700 and S-5200, these controls are placed on the Toolbar and on the top of the Scanning Image window.
Page 90 When HV has been applied, click SET button after changing HV value. • Set Ie to button shows a pull down list of Ie (emission current) value. Select a Ie value. • Vext indicator Extracting voltage value is indicated. • Flashing button The button further opens Flasing controller.
Page 91: Auto Control
2.3.5.3 Scan control block (1) Run button Run or freeze scanning. The button is when scanning and changed to while scan is frozen. To stop scanning, click the button. Scanning continues until it goes to the end of the frame and then, stops.
Page 92: Monitoring Function
little or no surface detail on the specimen, or when the specimen is charged, Auto Focus will not operate properly. 2.3.5.5 Monitoring function (1) Align Opens Alignment dialog window and starts Aperture alignment. Refer to <3.4.3 Column Alignment operation> (2) Monit Waveform monitor mode is activated.
Page 93 Alternately, click the area with the right button to increase or with the left button to decrease magnification in a step. (2) Preset button The three preset magnifications are toggled through with each click of the button. To set preset magnifications, open the Image tab of the Setup dialog window and input desired values in the three Preset Magnification boxes.
Page 94 Direct Save : Opens the Save Image dialog window. Use it for saving viewing images to disk. (To save captured images, use the Save button in the Captured Image window.. Layout Print Opens the Report Generation dialog window. Use it for printing viewing images to a Windows-supported printer.
Page 95 button is green when the stage is at home position. (3) EXC button Move the stage to the position for specimen exchange (X=35, Y=0mm). The indication window beside the button is green when the stage is at specimen exchange position. (4) !STOP button Use the button to stop stage movement when, for example, started with incorrect stage coordinates value.
Page 96: Operation Panel
(4) Record A / B selection It selects which screen is to be recorded by Record functions. 2.3.6 Operation Panel Operation Panel has three tabs. Controls and setup tools for SEM operation are placed on the SEM and UTILITY tabs. Arrangement of controls is possible to be customized over two tabs.
Page 97 (B) screen. The signal addition is effective only on the Dual screen mode. (4) SE detector selection S-4800 SEM has two detectors, Upper and Lower. These have different characters and therefore result different image information. Also mixed signal of two detectors is available.
Page 98 2.3.6.2 OPE CONDITION block Probe Current mode selection box Focus mode selection box WD(Working distance) set / indicate box WD range indication Condition Load / Save button Setup button (1) Probe Current mode selection Select Normal for resolution prior application or High for application needs large probe current. Refer to <3.4 Optimizing the Electron beam>...
Page 99 2.3.6.3 R.ROTATION block Controls electron beam scanning direction to rotate image. Rotation ON/OFF check box Rotation angle set and indication box Angle adjust slider Angle adjust button 90°step rotate button To activate raster rotation, check the ON/OFF check box. Rotation angle can be set with the slider, clicking the side of slider, clicking the Angle adjust button or with 90°step rotate button.
Page 100 2.3.6.5 SCAN SIZE block Selects a screen mode. (1) Full : Full screen mode Scanning image is displayed on full desktop. (2) Dual : Dual screen mode Two image screens are displayed. Use the mode to observe different signal images simultaneously or for color mixing image observation.
Page 101 2.3.6.7 SIGNAL PROCESSING block Applies real time digital image processing to the scanning image. Processing selection box Intensity selection box (1) Processing selection box Selects a processing • Smooth : Applies pixel averaging spatial filtering. Reduces snow noise. Effective especially in case of high magnification image where the beam spot size is larger than pixel size.
Page 102 2.3.6.8 TILT COMPENSATION block Specimen tilting causes defocusing and magnification change to the tilt direction. Tilt compensation is the tool to correct the two phenomena. Dynamic focus check box Dynamic focus set / indication box Dynamic focus adjust slider Dynamic focus adjust button Tilt-magnification compensation check box Tilt-magnification compensation set / indication box Tilt-magnification compensation adjust slider...
Page 103 then a color composite image of yellow BSE and Blue SE is displayed. To return to standard image display mode, uncheck the COLOR MIXING box. A color mixing image can be saved as a 24 bit color image file. Select B of the Record A/B buttons and then, save the image.
Page 104 2.3.6.13 Arrangement of control blocks Above controls are placed on SEM and UTILITY tabs by user arrangement. Open the Operation Panel tab of the Optional setup dialog window by selecting Option menu – Optional Setup – Op.Panel Setting. It is recommended to place frequently used controls on the SEM tab, and others to Utility tab.
Page 105 2.3.7 Mouse operation on the scanning image Mouse operation tools for adjusting focus, stigma, contrast, brightness and specimen stage are provided. 2.3.7.1. Exchanging mouse control functions Mouse operation tools are divided in three groups, focus/stigma/contrast/brightness and specimen stage and no operation. The S button of the mouse exchanges above groups.
Page 106 Area Coarse focus adjustment : move mouse horizontally pressing down right button. Fine focus adjustment : move mouse horizontally pressing down left button. Area Stigma adjustment (X) : move mouse horizontally pressing down left button. Stigma adjustment (Y) : move mouse horizontally pressing down right button. Area Brightness adjustment : move mouse horizontally pressing down left button.
Page 107: Setup Dialog Window
2.3.7.3 Stage and image shift tools Controls shown below will be shown on the scanning image. Type1 manual stage Type2 motorized stage Fig 2-23 Mouse control (stage) (1) Type1 manual stage It is for image shift operation. Move the mouse pointer to a position to be moved and press down left or right button.
Page 108 Set it to ON for normal operation. Turn it off for some special applications such as EBIC. When operating the S-4800 at short working distance, you may end up with images of uneven brightness throughout the field at low magnifications. We suggest to set Specimen Bias Voltage at OFF in order to correct this problem.
Page 109 particularly in the central field of view at low magnifications. In such a case, use Low Mag mode for observation at low magnifications. Turning Specimen Bias Voltage ON and OFF may cause change of focus, astigmatism and aperture alignment and need adjustment. (1-7) Magnetic Sample Astigmatism correction range is enlarged when the box is checked.
Page 110 2.3.8.2 Image tab The Image tab is for setting operating condition regarding to image observation. (1) PRESET MAGNIFICATION block Select or input desired value in the three preset magnification boxes. (2) ABCC block If the results of ABCC are not adequate, you can change the reference brightness and contrast.
Page 111 (space). If the Auto Increment check box is checked and the Data Number has “-nn” at its end (n : numerals, for example “Hitachi-00” ), Data Number is incremented with each successive photographing. (1-4) Back Ground Image checkbox When this box is checked, the data display is overlaid on the scanning image.
Page 112 For 640×480 pixels image data →960 lines (16/19 s photographing time) For 1280×960 pixels image data →19200 lines (32/38 s photographing time) For 2560×1920 pixels image data →1920 lines (32/38 s photographing time) (3) BRIGHTNESS/CONTRAST block Sets brightness and contrast for photo recording. These are compensation factors for brightness and contrast adjusted in the scanning image.
Page 113 2.3.8.4 OP. Cond tab This function is provided for saving and loading conditions of the electron optical column. Save Load Fig 2-24 Condition Load/Save For detail of operation, refer to < 3.9.6 Operating Condition memory > 2 - 50...
Page 114: Captured Image Window
2.3.9 Captured Image Window Captured images are displayed as thumbnails on this window. It opens when you captured an image. Also it can be opened by selecting Captured Image command from Window menu or using the short-cut key (Ctrl + L). The yellow border shows the present selected image.
Page 115: Sem Data Manager Window
2.3.10 SEM Data Manager Window SEM Data Manager is an image-filing program with an easy-to-operate database function. Images are registered to the database automatically when saved. For detail, refer to <3.12 Using SEM Data Manager> 2.3.11 Alignment Dialog Window The Alignment dialog window is used for alignment operations. To open the dialog window, click the Wobbler button in the Scanning Image window or the Column Alignment...
Page 116: Cd Measurement Dialog Window (Option)
2.3.14 Login Setting Dialog Window It opens by selecting Login Setting command from Option menu. It is possible only when logined with the login name [S-4800]. You can create or change login names and their password for each users. Refer to <3.9.17 Setting Login Name>...
Page 117: Oblique Dialog Window
2.3.15 Oblique Dialog Window The Oblique dialog window is used to display an oblique image. To open the dialog window, select the Oblique command from the Analysis menu. Refer to <3.9.14 Oblique Image> 2.3.16 Password Setting Dialog Window Use the Password Setting Dialog Window for setting or changing the password of the login name for current user.
Page 118: Save Image Dialog Window
2.3.17 Save Image Dialog Window The Save Image dialog window is used for saving scanning images or captured images. To save scanning images, Use the Direct save button on the Control panel. Use the save button on the captured image window to save captured images. Refer to <3.6 Saving and Recording Images>...
Page 119: Using Short-Cut Keys
2.3.20 Using Short-Cut Keys Short-cut keys are available for execution of many commands. (1) Using short-cut keys Input Alt + [underlined character in a main menu command] opens the pull-down menu. And then, [underlined character in a pull-down menu] executes the command. For example, Alt + F opens the File menu and S key executes the Direct Save command.
Page 120: Operation
3. OPERATION Shown below is the procedural flow of typical SEM operation. For details, refer to each subsection. • Check of Column Vacuum ........(3.1.1) • Starting the Display..........(3.1.2) 3.1 Preliminary Operation • Use of Anti-Contamination Trap and Cold Trap . (3.1.3) •...
Page 121 • Contrast Conversion .......... (3.8.1) • Image Processing ..........(3.8.2) 3.8 Image Processing • Saving Processed Image ........(3.8.3) • Turning High Voltage Off ........(3.9.1) • Specimen Exchange Position ......(3.9.2) • Taking the Specimen out of the Chamber ..(3.9.3) At the End of Daily Use •...
Page 122: Preliminary Operation
3.1 Preliminary Operation 3.1.1 Check of Column Vacuum At the beginning of SEM operation, check the evacuation control panel. The following conditions must be met: (1) Lamps of IP1, IP2 and IP3 RESET switches are lit. (2) Ion pump readings are better than the followings. IP1: 2 ×...
Page 123: Flow The Cooling Water
S-4800 requires water flow for cooling the objective lens coil. It is necessary while the Display unit is powered on. A water valve is provided and is open when the S-4800 control program starts up. It is closed when the POWER switch of the display unit is turned off.
Page 124: Starting The Display
NOTICE Use S-4800 on the Administrator level. (4) The S-4800 system will start up automatically and the initial log-in dialog window appears. (To start the S-4800 system after once closing it, select PC_SEM from start menu) Input login name and its password. The SEM main window will open.
Page 125: Use Of Anti-Contamination Trap
3.1.4 Use of Anti-Contamination Trap For image observation at high magnifications or low accelerating voltages, the use of the Anti- contamination trap is recommended to prevent specimen contamination by hydrocarbon build-up. The traps need to be filled with liquid nitrogen. Injection funnel The Anti-contamination trap is a plate above the specimen that adsorbs gas around the specimen.
Page 126: Specimen Setting And Specimen Exchange
3.2 Specimen Setting and Specimen Exchange 3.2.1 Cautions on Specimen Preparation During specimen preparation, observe the followings. (1) Use clean gloves when exchanging specimens. Holding the specimen or specimen stub with bare hands should be avoided. (2) Avoid using an excessive amount of conductive paste to fix a specimen on the specimen stub. Ensure that the paste has dried before placing the specimen in the chamber.
Page 127: Adjustment Of Specimen Height
3.2.3 Adjustment of Specimen Height Put the specimen stub on the specimen holder and adjust it to the proper height using the specimen height gauge as shown in the figure. To adjust, loosen the lock screw and adjust the specimen height so that the highest point of the specimen is the same as the bottom of the height gauge.
Page 128: How To Set Specimen
(2) Type II (5-axis motorized stage): Click the EXC button on the control panel. The stage is then moved to the specimen exchange position, and the color of the indicator beside the button turns green. Specimen exchange positions: X: 35.0mm Y: 55.0mm R: 0゜...
Page 129 (2) Turn the knob of the specimen exchange rod clockwise so as the Unlock mark comes upwards. Insert the rod straightly and plug the two spring pins at the end of the rod to holes of the specimen holder. Turn the knob counterclockwise so as the Lock mark comes upwards to hook on the specimen holder.
Page 130 3.2.5.2 Opening the specimen exchange chamber door When a specimen is not set inside the chamber and the specimen exchange chamber has been evacuated, open the exchange chamber door as follows. (1) Press the AIR button on the specimen exchange chamber. Air is introduced into the specimen exchange chamber.
Page 131: Application Of High Voltage
3.3 Application of High Voltage 3.3.1 Condition where the gun high voltage is applicable You can apply high voltage when the HV display area on the control panel is blinking with yellow and blue colors. When the indication is blue, high voltage can not be applied. It will be in almost case because of vacuum degradation of specimen chamber or gun ion pumps.
Page 132: Setting Of Accelerating Voltage And Emission Current
(3) Set Intensity to “2” and click Execute button. The emission current value caused by flashing will be displayed on the Ie part of the HV Display area about 2 seconds. For normal flashing operation, use intensity “2”. However, when the stable stage of the emission current is short, or the emission current begins to increase about 1 hour after applying HV (in that case a large quantity of gas molecules are absorbed on the cathode), use intensity “3”.
Page 133: Application Of High Voltage
3.3.4 Application of High Voltage When the HV Display are is blinking with yellow and blue color, click the ON button on the control panel at the left of the HV Display area. Accelerating voltage (Vacc) and extracting voltage (Vext) are then applied with the emission current values indicated in the HV display area.
Page 134: Optimizing The Electron Beam
3.4 Optimizing the Electron Beam 3.4.1 Selecting a Magnification Mode S-4800 provides two magnification modes, High Mag mode and Low Mag mode. Magnification range of the modes are as follows. : ×300 to ×800,000 High Mag Mode (HM) (The lowest and highest magnification will be changed depending on present accelerating voltage and working distance) : ×20 to ×10,000...
Page 135 surface of the specimen. At a shorter WD, higher resolution is attainable. At a longer WD, a larger tilt angle and a greater depth of focus is attainable. Objective lens Specimen When a WD is selected from pull-down menu, the objective lens current is adjusted in order to focus an image at the specified WD.
Page 136 For detailed condition setting, lick the Setup button on the above OPE CONDITION block. The Column tab of the Setup dialog window will open. (Alternately the Column command in the Setup menu or the Setup button on the tool button area of the Operation panel are available.) Probe Current mode selection HIgh Mag mode area...
Page 137 select a number from the pull-down menu, click on the up and down button (0.1 step), or key in a number (0.5 to 2.0) followed by the Return key. Note that the optical axis and astigmatism may change when Focus Depth value is changed. NOTICE: Because the primary beam is more sensitive to stray magnetic field as the Focus Depth increases, large values of the Focus Depth may cause image disturbance due to stray...
Page 138 brightness in the field of view. In such a case, decrease the size of the specimen, use a longer WD, or lower the accelerating voltage in order to correct the astigmatism. (7) Degauss Operation The Degauss operation eliminates hysteresis of the magnetic field in the objective lens. When focus is changed greatly, accuracy of magnification or alignment of the electron optical axis may degrade due to hysteresis of the focusing magnetic field.
Page 139: Column Alignment Operation
Cond Lens1. If you notice the image moving while focusing or correcting astigmatism, only perform an Aperture Alignment or Stigma Alignment, respectively. The S-4800 allows alignment conditions to be saved for each combination of accelerating voltage and Probe Current mode.
Page 140 3.4.2 (1) Beam Alignment Beam Alignment is necessary in order to align the electron beam down the center of the electron optical column and through the center of the objective lens aperture. (a) Open the Alignment dialog window by clicking the button on the Control Panel.
Page 141 Stigma Alignment does not change by Aperture Alignment. (4) Adjustment of Low Mag Position The S-4800 has two magnification modes: High Mag mode and Low Mag mode. Low Mag Position adjustment is necessary to minimize a shift in the field of view for the two magnification modes.
Page 142 NOTICE: Complete Beam Alignment and Aperture Alignment before starting Low Mag Position mode. Low Mag Position adjustment is necessary for each Operation Mode. When you changed Operation mode, you need to adjust it again. Lowest magnification Lowest magnification WD (mm) in High Mag Mode in Low Mag Mode 3500×...
Page 143: Operation For Image Observation
(5-Axis Motorized Stage)..(3.1.3) 3.5.1 SE detector S-4800 has two secondary electron detectors. the upper and the lower. The upper secondary electron detector is placed above the objective lens and secondary electrons are detected through the magnetic field of the lens. The lower secondary electron detector is placed in the specimen chamber, where a large amount of the signal is due to backscattered electrons.
Page 144 ABCC will start automatically when detector selection is changed. Image brightness will be adjusted to adequate value. 3.5.1.1 Secondary and backscattered signals and their Characteristics The following figure shows detectable signals using the S-4800. Primary electron BSE-H （Upper detector）...
Page 145 General Characteristic of signals utilized in S-4800 Signal Characteristics Applications SE signal Useful for ultra high resolution ･High resolution surface information topmost surface observation of light ･Voltage contrast materials like carbon ･High edge contrast ･Sensitive to specimen charging BSE-L Useful for microscopy of a wide range ･Sensitive to compositional...
Page 146 The image formed with the upper detector is similar to of pure SE. (2) BSE-L Signal Detection When the +BSE button and one of L.A. (L.A.0 to L.A. 100) is selected in the BSE ratio selection box, the upper detector detects the both SE and BSE-L signal combined. Select from the pull down menu or use the up/down buttons.
Page 147: Selecting Magnification
3.5.2 Selecting Magnification There are several ways to select a magnification. (1) Dragging the mouse in the Magnification indication area on the control panel. To increase magnification, drag the mouse to the right. To decrease magnification, drag the mouse to the left. For coarse changes, press the right button and for fine changes, the left button.
Page 148: Selecting Scanning Speed
3.5.3 Selecting Scanning Speed Eight scanning speeds are available with four buttons. To select a scanning speed, click one of the Scan speed icons on the control panel. Two scanning speeds are assigned to each button. They are set alternately by clicking the button. Totally 14 scanning speeds are available for image observation.
Page 149 Slow1 and Slow are relatively fast slow scan. These two speeds are asynchronous to AC line frequency. It may cause some field magnetic disturbance at high magnification and/or low kV condition. Use for a field search of the specimen, coarse focus, etc. Slow 1: about 1 sec/frame(Full screen) about 0.5 sec/frame(Small Screen) Slow 2: about 4 sec/frame(Full screen)
Page 150: Image Brightness And Contrast Adjustment
3.5.4 Image Brightness and Contrast Adjustment Image brightness and contrast can be adjusted both manually and automatically. BC Monitor mode is also available for manual adjustment. The Beam Monitor function is provided to reduce the tip noise. (1) Auto Adjustment (ABCC) Click the ABCC icon on the control panel or select the ABCC command from Operate menu to start auto-adjustment.
Page 151 Sensitivity of mouse operation can be adjusted on the Mouse Operation tab in the Optional setup dialog window. Additionally, you can adjust the brightness and contrast using the scroll bars. Checking the Scroll Bar box on the Utility tab in the Operation panel enables these scroll bars. Refer to <...
Page 152 current; for example, during quantitative X-ray analysis using a probe current drift cancellation function, etc. When the Beam Monitor function is not desirable, for example in case of observing EBIC image where it possibly increases tip noise, uncheck Beam Monitor Active on the SCAN MODE block in the operation panel.
Page 153: Focus And Astigmatism Correction
3.5.5 Focus and Astigmatism Correction Focus and astigmatism correction can be done manually and automatically. Focus Monitor mode is available for manual focusing. (1) General Method for Focusing and Astigmatism Correction Focusing and astigmatism corrections are related to each other and need to be repeated alternately.
Page 154 little or no surface detail on the specimen, or when the specimen is charged, Auto Focus does not operate properly. (3) Manual Focus Manual focusing can be done using the control knobs on the operation panel or the mouse in the Scanning Image window.
Page 155 (6) Focus Monitor Mode A waveform is displayed for monitoring the focus. The magnification is set at 1,000×. To start the Focus Monitor, click the Monitor icon on the control panel and focus the image so that the waveform shows sharp peaks. defocused focused To close the Focus Monitor, click the Cancel button in the Focus Monitor or click one of the...
Page 156: Operation Of The Specimen Stage (Type I - Manual Stage)
3.5.6 Operation of the Specimen Stage (Type I - Manual Stage) The S-4800 type I SEM provides a 5-axis manual stage. 3.5.6.1 Movable range and specimen exchange position The following table shows movable range and specimen exchange position. Movable Range...
Page 157 3.5.6.3 Tilt and Z axes limitation The allowable tilting angle depends on both Z axis position and specimen size. Figure of relationship between allowable tilting angle for various Z position is shown below. If the specimen height is set at higher than the standard setting, add the difference to Z and use the figure. φ15mm φ25mm φ50mm...
Page 158 CAUTION Set Z and T within the allowable range; otherwise, the specimen may strike the objective lens and cause damage to the specimen and objective lens. Important In case of φ15mm and φ25mm specimens, by applying limitation in X and Y directions written in page 3-40, the figure for 3 axes motorized stage (shown below) can be used.
Page 159 Relationship between minus tilting angle and Z position is the same as manual stage. Movable range of X and Y directions (3 axes motorized stage) Type1 Specimen Size φ15mm 17.5〜32.5 17.5〜32.5 φ25mm 12.5〜37.5 12.5〜37.5 φ50mm 0〜50 0〜50 φ75mm 0〜50 0〜50 φ100mm 0〜50 0〜50...
Page 160: Operation Of The Specimen Stage (Type 2 - 5-Axis Motorized Stage)
S-4800 utilizes two coordinate notation system, stage (mechanical) coordinate and sample coordinate. The sample coordinate system will be better for using the Rotation Assist function. The stage coordinate system is also available for users familiar with previous Hitachi SEMs using the stage coordinate system.
Page 161 3.5.7.2 Movable range and specimen exchange position The following table shows movable range and specimen exchange position. Mechanical coordinate and specimen coordinate expression are selectable for X and Y axes. The specimen coordinate is (0,0) at the center of the specimen holder. Movable Range Movable Range Exchange position of...
Page 162 3.5.7.3 Setting specimen size and detectors in use The specimen size and height and optional detectors set at its operating position in the specimen chamber need to be set correctly to keep the motion of each axis within allowable range. Use the following process.
Page 163 CAUTION The specimen size and height, and detectors being used must be set correctly to allow motion of each axis in the proper ranges. If this is not done, the specimen may strike the objective lens and cause damage to the specimen and objective lens 3.5.7.4 Valious operation for specimen stage The following operation methods are available.
Page 164 3.5.7.5 Stage tab Basically use the Stage tab of the operation panel for stage operation. SPECIMEN block (Set specimen size, height and detectors in use) Speed slider Set driving speed of trackball and R axis X / Y / R block X / Y position indication Disp button (opens stage history dialog window) Reg button (register present position to stage history)
Page 165 3.5.7.6 X, Y, R axes operation (1) Manual operation using trackball Stage moves to the direction of rotating trackball. Upper button Ball Lower button Amount of stage motion by ball rotation is linked with magnification. To move long distance, it is advisable to lower the magnification. When you rotate ball pressing down one of upper buttons, stage moves only to Y direction.
Page 166 (5) Position display The size of specimen, its present position and rotation angle are displayed on the XYR position monitor area. The white circle shows specimen, blue rectangle movable area, red cross observing point, gray straight line rotation angle and green rectangle beam scanning direction. Followings are 5 inches sample examples.
Page 167 NOTICE When the specimen height is set higher than the standard position, actual specimen surface position will be changed by tilting. The allowable range of Z and Tilt are therefore recalculated after the tilting angle is specified for movement. It may cause somewhat different allowable range value than that has been indicated before specifying tilting angle.
Page 168 3.5.7.8 Stage mouse operation on the scanning image The mouse operation tools on the scanning image, for image adjustment (focus, stigma, contrast) and for stage operation, alternates by clicking the S button of the mouse. The following tools are shown for stage operation. (1) X, Y continuous driving (Joy-stick like operation) Move the mouse pointer to the circle at the center.
Page 169 (3) RISM function If the end point of the above operation is near the center of the image, the red line is changed to a yellow line and the end point is positioned at the center of the image. When the left mouse button is released, the stage is driven so that the image at the start point moves to the center of the viewing screen with help of the electrical image shift.
Page 170 (5) R axis operation to a specified angle On the circle of the R axis tool, mouse pointer will be changed as shown below. Press down the left button and move the mouse holding down the button. The tool rotates following mouse and the rotation angle is shown in the indicator box.
Page 171 (7) Z axis operation to a specified coordinate On the circle of the Z axis tool, mouse pointer will be changed as shown below. Press down the left button and move the mouse up or downward holding down the button. The circle moves following mouse and the Z axis value is shown in the indicator box.
Page 172 (9) Tilt axis operation to a specified coordinate On the circle of the Tilt axis tool, mouse pointer will be changed as shown below. Press down the left button and move the mouse up or downward holding down the button. The circle moves following mouse and the Tilt axis value is shown in the indicator box.
Page 173 (11) Rotation adjust tool The rotation adjust tool is convenient for adjusting a line in image to horizontal. R adjust tool Move the mouse at about the center of the tool. Mouse pointer will be changed to array mark . Press down the left button and move the tool to fit an end to the inclined line part to be rotated to horizontal.
Page 174 3.5.7.9 Position memory function The stage coordinates, both absolute and relative, can be memorized and retrieved. 200 absolute coordinates (20 points on each of the 10 pages) and 20 relative coordinates can be saved in total. Click the Memory button on the Stage tab. The following Position Memory dialog window will open.
Page 175 (6) Moving the stage by relative movement To move the stage by a relative movement from the present position, select a page Rel and click Go. (7) Clear registered data Select a coordinate number and page, and click Clear. 3.5.7.10 Stage History function Display present position and registered positions on a specimn picture with trajectory lines showing the order of registration.
Page 176 Click Go button to go to the position represented the selected point. (4) Deleting registered points To delete points individually, select the point and click the Delete button. To delete all points, click the Clear button. (5) Saving and reading history data To save displayed position data, click the Save button.
Page 177 use any one selecting with << and >> button. By clicking a point on the navigation image, coordinate of the specified point is calculated and stage is driven so as the point comes to the center of field of view. The Need Refresh indication is green when the present selected image is effective, and is blinks red when ineffective.
Page 178 the center of image and then, click the 1st button. (3-3) Find the first alignment point in the navigation image and click it. The next message [Move a remarkable object to the center of image and click 2nd button, click the position in the navigation image corresponding to the remarkable object by mouse.] will appear.
Page 179 5 inches sample Stage movable area (0,62.5) (‑35､‑55) (75,‑55) (62.5,0) (‑62.5,0) (‑35,0) (0,0) (‑50,10) (‑34,10) (‑35,55) (75,55) (0,‑62.5) The gray area is not covered with X and Y movable range but can be observed with stage rotation. If the point A is specified by coordinate (X=50, Y=10) input, the following message will be shown.
Page 180 be shown. (a) When the present position is 2mm or less near to the X or Y limit OK rotates the stage and move X and Y axes so as the specified point comes under the beam. (b) When the present position is 2mm or more far from the X and Y limit In this case, stage is not rotated.
Page 181 The above (a) and (b) are basically dependent on in assembling error of the instrument. These are measured and corrected once in the beginning (before delivery of the instrument). But since the beam irradiation position may shift when adjusting the electron beam axis, this measurement tool is provided to enable measurement and correction at any time.
Page 182 1. [Rotation Center]: A mask holder specimen cannot be used. 2. [Tilt Center]: A BSE detector must be pulled out. 3. [Z Axis Comp.]: Both EDX and BSE detectors must be pulled out. And mask holder specimen cannot be used. 4.
Page 183 As described in the message, bring the structure of interest to the image center at a magnification of about 500×, then click Enter button of Tilt 0 deg. (d) Bring the stage to a tilt angle of 30°. Again bring the structure of interest to the image center, and click Enter button of Tilt 30 deg.
Page 184 (e) The specimen rotates to an angle of 90°. Again bring the point of interest to the center and click Enter button. (f) In the same way, each click of Enter button rotates the specimen 45° at a time. Bring the point of interest to the center each time and then click Enter. Upon clicking Enter at a rotation angle of 315°, a Calibration Factor is calculated and indicated.
Page 185 Insert a specimen, set WD at 30 mm, tilt at 0° and R at 0°. Set the accelerating voltage to 5 kV or less, Probe current mode to Normal and Focus mode to UHR. Then search for a structure of interest near the specimen center. (b) Select Stage Calibration –...
Page 186 3.5.7.15 Stopping stage and Returning to previous stage position To stop stage movement while it is running, use the !STOP button on the Control panel. Do not repeat to click the button. It may cause irregular movement. To return to a previous position after moving stage using coordinate specifying operation, use Undo –...
Page 187 3.5.7.16 Moveable range and limitation by optional detectors (1) Movable range of the specimen stage for various specimen size The movable range is limited when observing large size specimens. Stage motion is limited to inside of movable range automatically by computer. The limit value is calculated using the size information set on the Set Sample Size/Detector dialog window For small size specimen, X and Y limitation is specified so as the movable range covers just the size of specimen.
Page 188 φ75 specimen φ100 specimen (0,5) （85,5) (0,17.5) （72.5,17.5) 100mmφ Area of observation Area of observation （35,55) （35,55) Possible to observe 75mmφ by rotation Possible to observe (0,92.5) （72.5,92.5) by rotation (0,105) （85,105) φ125 specimen φ150 specimen 150mmφ (0,0) （97.5,0) (0,0) （110,0) 125mmφ Area of Area of observation observation （35,55) （35,55) Possible to observe by rotation Possible to observe by (0,110) （97.5,110) rotation (0,110)
Page 189 φ50mm <φ15mm φ25mm φ75mm φ100mm φ125mm φ150mm φ200mm Z (mm) Fig 3-2 Allowable plus Tilting angle for various specimen size For all specimen size Z (mm) Fig 3-3 Allowable minus Tilting angle 3 - 70...
Page 190: Saving And Recording Images
3.6 Saving and Recording Images 3.6.1 Saving and Recording Images It is possible to record images using conventional photo films and printers, and/or as image data files (to disk or hard drive). There are four methods of image saving: (1) Taking Photographs (optional photo-recording unit is necessary) For photographic image recording, you can use Direct Photo recording or Memory Photo recording.
Page 191: Preparing Images For Recording
3.6.2 Preparing Images for Recording The source of image to be recorded is frozen image in the image memory except for direct photographing. (1) Freezing an image (a) Using Run/Freeze button Scanning image will be frozen. When scanning speed is slow, scanning continues to end of the frame and then, frozen.
Page 192: Setting Conditions For Image Capturing
(b) Data Entry When recording scanning images, graphics and texts written using Data Entry function are recorded as they are shown on the scanning image. When recording captured images using command buttons placed on the captured image window, graphics and texts written before capturing are embedded into captured images and recorded.
Page 193: Image Capturing
• 5120x3840 Highest resolution. Effective for relatively low magnification and containing very fine structure. Note that the large image size requires long processing time for creation, saving, loading and image processing. NOTICE For large size captured images, there are following limitations. (a) CD Measurement function works on 2560×1920 pixels or smaller images.
Page 194: Saving A Scanning Image (Direct Save)
The Captured Image window opens by Capture button on the tool bar section of the operation panel, Captured Image command in the Window menu and the shortcut [Ctrl – L] at any time. Refer to <2.3.9 Captured Image Dialog Window> 3.6.5 Saving a Scanning Image (Direct Save) The scanning Image, simply frozen or captured, can be saved.
Page 195: Saving Captured Images
(4) Set options. The saved data is automatically registered to SEM Data Manager database when the SDM Register is checked. Graphics and texts written on the scanning image is embedded when the Embed into Image is checked. (5) Specify folder and file name. The ↓...
Page 196 (1) Setting Photo Condition To select the conditions for photo recording, open the Setup dialog window – Record tab by clicking the icon on the tool button section of the operation panel, or by selecting the Photo Condition command in the Setup menu. (a) Photo Speed [Direct Photo] Recommended selection is 80 seconds.
Page 197 [Photo Size] Select a size of film. The magnification value is adjusted internally according to the selected size. ×0.6: For Type 120 Negative film ×0.8: For small size Polaroid film (type 107, 105 or equivalents) ...
Page 198: Using Sem Data Manager
3.7 Using SEM Data Manager SEM Data Manager is an image filing program with an easy-to-operate database function. A database table is established for each user, and acquired SEM images are registered to this table automatically when saving. The SEM Data Manager lists image files, finds images following a Select query, displays images, displays and enables image information editing, and allows image processing.
Page 199: At The End Of Daily Use
3.8 At the End of Daily Use 3.8.1 Turning High Voltage Off (1) Close opening dialog windows. Save data if necessary (2) Click the HV OFF button on the control panel. 3.8.2 Setting the Stage at the Specimen Exchange Position Set the all 5 axes of the specimen stage at the exchange position.
Page 200 Turn the knob counterclockwise so as the Lock mark comes upwards to hook on the specimen holder. Looking in the chamber and confirming that the specimen holder comes out with the rod, pull out the rod completely. (3) Press the AIR button on the specimen exchange chamber. The gate valve is closed and air is introduced into the specimen exchange chamber.
Page 201: Closing Windows And Shutting The Display Power
(1) Click on the title bar or select the Exit command in the File menu. (2) The Exit dialog window is brought up. Click the OK button. The S-4800 SEM main window will be closed. (3) On the Windows task bar, click the Start button and select Shut Down.
Page 202: Using Other Functions
3.9 Using Other Functions 3.9.1 Screen Mode Screen modes, Full, Dual or small are selectable with SCAN SIZE block of the operation panel. (1) Full screen mode: A scanning image is displayed with full desktop size. Image resolution is 1280×960 pixels. It is recommended to use this mode for normal operation.
Page 203 (3) Dual screen display mode: Two 640×480 pixel images are shown simultaneously. These two images can be live or frozen independently, and can display different or the same signal. In this mode, color mixing is available, while analysis modes (line, spot and area analysis) and split screen modes are disengaged.
Page 204: Split Screen And Dual Mag Mode
(c) Capturing images The small indicators below the Capture button shows which screen is to be captured. You can change the indication by clicking the indicators. Green color indicates corresponding screen will be captured by the Capture button. When both indicators are set green, both A and B screen are captured simultaneously.
Page 205: Signal Selection And Color Mixing
Exit button in the Split/Dual Mag controller. 3.9.3 Signal Selection and Color Mixing The S-4800 has three external signal channel for optional signal detectors and one X-ray signal input. in addition to the standard secondary electron detector. When these detectors are installed, you can select a signal from among these detectors.
Page 206 screen) image, and right side box for right side (B screen) image. Brightness and Contrast knobs on the manual operation panel is applied to the signal selected with the Signal A/B selection buttons. (3) Signal mixing (available in dual screen display mode) In the Dual screen mode, two signals assigned to A and B screens can be mixed and displayed.
Page 207: X-Ray Analysis Mode
3.9.4 X-ray Analysis Mode Scanning modes for analysis are available in the Full and Small screen modes. Use the SCAN MODE block in the operation panel. (1) Normal mode Normal image observation mode. Click to return from analysis modes. (2) Line Analysis mode Displays a line profile of the signal intensity as a horizontal line in the observing image.
Page 208 button and click the Direct Photo or Memory Photo button. Recommended procedures for taking a photograph is; ① Observe an image in Position Set mode at Slow3 or slower scanning speeds. Click the Line Analysis button when the scanning raster reaches the bottom of the screen.
Page 209: Signal Processing
specified area on the specimen. The Area Analysis button is used for two scanning modes as follows. (a) Position Set mode for Area Analysis Upon the first click of the button in other scanning modes or in Area Analysis mode, a box cursor with dotted line is overlaid on the image.
Page 210 The following processing are available. (a) Smooth (1/2) Reduces snow noise. It is effective especially at high magnification, where originally image itself has defocusing limited by spatial resolution. In this case, nnoise can be reduced without image defocusing. For lower magnification images, the processing may cause loss of sharpness. (b) Sharpen (1/2) Increases image sharpness.
Page 211: Operating Condition Memory
(b) Differential: Differential 1 and 2 are high-pass filters for the image signal. When applied, the image is differentiated in a horizontal direction and details of the image are emphasized, while broad shades are suppressed. Results vary with scanning speeds because it applies time domain differentiation.
Page 212 (d) Save condition Click the Save button. The Condition Save dialog window will open. Input comment, specify a Condition name and then, click Save button. (2) Loading a Set of Operating Conditions Use the following steps to load a set of operating conditions. (a) Open the Setup dialog window Select Condition Load from the Operate menu, or click the Setup button in the tool button section of the...
Page 213: Pseudo Color Display
3.9.7 Pseudo Color Display Use function of SEM Data Manager for pseudo Color imaging. 3.9.8 Data Entry Function Use the DATA ENTRY block on the Operation panel for drawing graphics and texts on the scanning image display. For saved image, use the same function provided in the SEM Data Manager.
Page 214 Line Draw lines on the image. Click this button, and press the left button of the mouse to create the starting point of the line on the image. Move the mouse to an end point and then release the button of the mouse. While this button is depressed, you can repeat a line drawing.
Page 215 Select buttons button selects graphics or text on the image in order. A selected graphics is indicated with gray color and a surrounding dotted line box. A selected text is indicated with gray color and black background. They can be moved and re-positioned by mouse dragging.
Page 216: Raster Rotation, Dynamic Focus And Tilt Compensation
3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation (1) Raster Rotation Scanning of electron beam can be rotated within a range of -200º to +200º, using the slider. This allows observation of an image at the best orientation. Use the R. ROTATION block on the operation panel.
Page 217 screen. Adjust Dynamic Focus slider for the best focus. And use the following steps to use Tilt (magnification) compensation. (a) Set the Raster Rotation angle at 0. In this condition, direction of the compensation coincides with the tilting direction. (b) Use Dynamic Focus, if necessary. (c) Check the Tilt Compensation box, and set the angle to the specimen tilting angle (move the slider or input angle into the angle indication box).
Page 218: Printing Images Using Report Generation Function
3.9.11 Printing images using Report generation function The scanning image or saved image can be printed using a Windows-supported printer. (1) Report Generation function The Report Generation window will open by selecting Layout Print from the File menu or clicking the Print button on the control panel or on the Captured Image window.
Page 219 Photo Size button sets the default 4x5 inches photograph size. Or you can set any size desirable. (4) Adjusting layout and image size To adjust image size on the sheet, select an image by clicking it and drag the lower-right corner.
Page 220: Copy Image
The result of adjustment is applied to the image on the sheet by OK button. (7) Print Set number of print on the Setting tab and then, click Print button. The layout sheet will be printed. 3.9.12 Copy Image The Copy Image command copies the scanning image to the Windows clipboard with pixels of 1280x960 pixels (Full screen) or 640×480 pixels (Small or Dual screen).
Page 221: Oblique Image
3.9.14 Oblique Image An oblique (or birds-eye-view) image is formed from scanning image. To open the Oblique window, select the Oblique command from the Analysis. (1) Setting properties Check the Image box to show reference image together with oblique image. Birds eye area specifies viewing angle and tilting angle.
Page 222: Optional Setting
3.9.15 Optional setting Operation environments are set on the Optional Setup dialog window. To open the Optional Setup dialog window, select the Optional Setup command from the Option menu or click the Opt Setup button on the tool button area of the operation panel. .The dialog window has 5 tabs.
Page 223 (2) Operation Panel tab The arrangement of control blocks to be placed on the operation panel can be customized. (3) Tool bar Setting tab Select tool buttons to place on the tool button section of the operation panel. Tool buttons put check mark are shown on the tool button section.
Page 224: Password Setting
By setting login names and passwords, the instrument will be protected from unauthorized users operation. When the instrument is shipped, the login name “S-4800” is available with no password. Use this name for the user who is responsible to the instrument.
Page 225 Option menu. (3) Select the “S-4800” in the Login Name list. Set a password for the name. Input Old Password, if already set, and input new password to New and Confirm Password box and then, click the Change button. If you do not open the password to other users, they can not use the login name “S-4700” for next login.
Page 226: Image Quality
3.10 Image Quality The followings are references for getting better image quality. 3.10.1 Accelerating Voltage and Image Quality There is a multitude of accelerating voltages to choose from. Resolution, image quality, charging and other effects are greatly determined by the selected accelerating voltage. Below is a guideline for selecting an accelerating voltage in which to image various specimens.
Page 227: Condenser Lens Setting And Image Quality
3.10.2 Condenser Lens Setting and Image Quality Probe current is adjusted by changing the Cond Lens 1 value. To increase probe current, select a lower Cond Lens 1 value (larger spot size). Information necessary for setting of Cond Lens 1 is as follows. (1) Resolution: The electron beam size is smaller with a higher excitation value of Cond Lens 1.
Page 228: Mechanical Column Alignment
3.11 Mechanical Column Alignment For normal operation, mechanical alignment of the electron gun and condenser lens is not necessary. If, however, an electromagnetic alignment is not sufficient, proceed with a mechanical alignment using the following process: 1. Preparative operation for Alignment 2.
Page 229: Mechanical Alignment Of The Electron Gun
(5) Set the Z axis of the stage at 8 mm and set the WD at 8 mm in the Column Tab. (6) Set the lowest magnification in High Mag Mode. (7) Set the beam monitor aperture and the objective lens aperture to O (open). (8) Open the Alignment dialog window and click the Reset All button.
Page 230: Alignment Of The Objective Lens Aperture
3.11.4 Alignment of the Objective Lens Aperture (1) In the Beam Align mode, set the objective lens aperture at 2 or 3. Aperture diameter is opening 1：100 µm opening 2 and 3：50 µm opening 4：30 µm (2) Adjust the brightness and contrast if the circular image becomes dark. (3) Adjust the X and Y knobs of the objective lens aperture so that the circular image is aligned to the center of the screen.
Page 231: Stigma Alignment (Electro-Magnetic Alignment)
(5) Click the DeGauss button in the Column tab and adjust focus again. (6) Click the Aperture Align button in the Alignment dialog window, and adjust alignment knobs of the second condenser lens so that wobbling motion of the image is reduced. (7) Click the Off button in Alignment dialog window to terminate Aperture Align mode.
Page 232 After completing column alignment, the indicator beside the Beam Monit button may blink in red color. If it is, click the button. The indication will become green color, indicating that it is working correctly. NOTICE: When you changed accelerating voltage, make electro-magnetic column alignment referring to 3.4.3 Column Alignment Operation.
Page 233: Using Sem Data Manager
3.12 Using SEM Data Manager SEM Data Manager is an image filing program with an easy-to-operate database function. A database table is established for each user, and acquired SEM images are registered to the table automatically when saving. The SEM Data Manager lists image files, finds images following a Select query, displays images, displays and enables image information editing, and allows image processing.
Page 234: Functions
3.12.2 Functions 3.12.2.1 Image Database The top part of SEM Data Manager window when opened is as follows. Selection items Data tree area (1) Opening a database Database name is shown on the Data tree area. Double click database to open. User names included in the database will be shown following the database name on the Data tree.
Page 235 ▪ signal, Keywords : Put when saving. ▪ Sample ▪ Keyword1 / 2 ▪ Media 3.12.2.2 Menu and tool buttons The following picture shows an example where image is open. Menu Toolbar Data tree Image file list Image display Image information Thumbnail display...
Page 236 Remove the image from database. Image file do not erased. ▪ Delete Delete the image. Image file is erased. ▪ Rename Rename the image file.Save the image on the display area. ▪ Layout Print ( The Report Generation window opens for printing images. ▪...
Page 237 Enable or disable image enlargement by clicking on the image. Mouse pointer is the mark when it is enabled. ▪ Show thumbnail Shoe or hide thumbnail display. ▪ Viewer Open ( Open a viewer window and display the mage. The window remains even when SEM Data Manager is closed.
Page 238: Operation
▪ Data Entry（） Draw shapes and characters on the image. ▪ CD Measurement（） Open CD Measurement dialog window (Optional function) (6) Tool menu ▪ Options Open Options dialog window. Use for setting size of thumbnail, character font and others. ▪...
Page 239 (2) Registering images stored on disks To register already saved images to the SEM Data Manager database, use Add from File command in Database menu or the Add from File button on the tool bar. The following Add from File dialog window will open. Select a folder and image files and then, click Open button.
Page 240 with mark. NOTICE When you changed one of selection item, the data tree will be closed. Open the tree again. To make a new user name, Use Make New User command in Database menu or Make New User button on the tool bar. Input a user name and click OK.
Page 241 3.12.3.4 Image information Information of the present selected image is shown on the image information area. Sample, Comment, and Keywords. You can edit Click Edit button to edit above items. Input each items and click OK. 3.12.3.5 Viewer display To display the present selected image on a viewer window, use Viewer Open command in View menu or Viewer button.
Page 242 (1) Function of tool buttons Function of tool buttons in the Data Entry toolbox is similar to the function on S-4800. Edit text Edit already written texts . Selecting the Edit button changes mouse pointer to mark. Click the text to be edited.
Page 243 and then releasing the mouse button. While this button is depressed, you can repeat drawing of a shape Rectangle Draw rectangles on the image. Click this button and press the left button of the mouse to create a starting point on the image. Draw a shape by moving the mouse and then releasing the mouse button.
Page 244 The Clear button erases the selected data. To erase all, select all data by clicking button and then, click the Clear button. (5) Saving image with entry data Click OK to fix entry data. Use Save as command in File menu or Save button on the tool bar.
Page 245 → → (4) Contrast inversion The Negative button inverse black and white. (5) Gamma correction A Gamma value of larger than 1 enhances dark area and suppresses highlight area. A value smaller than 1 suppresses dark area and enhances highlight area. Select a gamma value and click the button.
Page 246 (a) Color Mode and Color Order • Off : No coloring • Color1 or Color2 : Convert gray scale value to RGB color as following figures. The L, M and H represent R, G or B color specified by Color Order setting. Color 1 mode Color2 mode Intensity...
Page 247 3.12.3.8 Image Processing Digital image processing for noise reduction, increasing sharpness and detail enhancement are available. Open the Image Processing tool window by Image Processing – Processing command in Processing menu or Processing button on the tool bar. The following tool window will open. OK applies processing result to the image data, Cancel recovers the original image and Close terminates the window.
Page 248 3.12.3.9 Color Mixing Creates color composite image using two original images. It is applicable for color composition of two different signal images, or stereo imaging using color grasses. Positional alignment of two original images is possible. (1) Color mixing operation Select one of two original images to be mixed and open the Color mixing dialog window by Color Mixing command in Processing menu or Color Mixing button.
Page 249 Select color for source images. Check Color and select R, G or B button. Select a mixing mode in the mixing selection box. • ADD : Add A and B source images. When A and B is different single color, use it. •...
Page 250 3.12.3.10 Printing images Use Layout Print command in File menu or Layout Print button on the tool bar. The Report Generation window will open with the present selected image on the layout sheet. Double click a thumbnail image to add it to the layout sheet. Refer to 3.9.10 Printing images using Report generation function.
Page 251 3.12.3.12 Batch operation of image files Plural of image files can be operated at once. Use Batch Process command in Database menu or Batch Process button on the tool bar. The Batch Process dialog window will open. (1) Action buttons (a) Move Files: Moves image files selected from the Source list to other folders specified in the destination area.
Page 252 down the button to the last selecting file, and then, release the button. Selected files are shown by reverse color. (b) Click the first selecting file and then, click the last selecting file holding down the Shift key. (c) Click selecting files holding down the Ctrl key. (3) Destination These are enabled when Move Files, Copy Files, Copy Files Only or Convert/Copy actions are selected.
Page 253 3.12.3.13 Slide show Use the Slide Show controller for viewing images in continuous slide motion. To open the Slide Show controller, use Slide Show command in View menu or Slide Show button on the tool bar. Start slide show Interval : Select interval time Stop slide show 3.12.3.14 Optimizing and repairing database file Use Database Utility command in Tool menu.
Page 254: Maintenance
4. MAINTENANCE 4.1 Maintenance of Electron optical Column 4.1.1 Maintaining Vacuum of Electron Gun and Intermediate Chamber The electron gun shall be continuously evacuated. Keep ion pump power supply ON even when SEM is not operated. If ion pump vacuum degraded than the following value, perform gun baking. Refer to <4.10 Gun Baking operation>...
Page 255 (4) Disconnect two BNC type connectors from the objective lens aperture unit. Remove four screws fixing the flange of the unit. Pull off the unit straightly holding the flange. BNC Connectors Flange fixing screws Place the sperture unit on the aluminum foil aperture support fixing screw (585-4421) Aperture support...
Page 256: Cleaning Of Aperture Plates
(13) Clean the aperture support and aperture holder by means of polishing paste, absorbent cotton (wound on a bamboo stick) and acetone. Cleaning should be done meticulously. (14) Mount an aperture plate, new or cleaned up, on the aperture holder. (15) Place the aperture support on the aperture holder and slightly tighten the aperture support fixing screw.
Page 257 (7) After completion of heating, wait for 10 to 15 minutes and introduce air into the vacuum evaporator. Then remove the aperture plate with tweezers. NOTICE: Do not touch to aperture plate directly by hand. (8) To further improve image quality at low accelerating voltages, coat both sides of the aperture plate with platinum-palladium (Pt-Pd) or gold- palladium (Au-Pd) to a thickness of 10 to 20 nm using an ion coater after heating the aperture plate.
Page 258: Maintenance Of Rotary Pump
4.2 Maintenance of Rotary Pump （Only for P/N 539-9010 and 539-9060） NOTICE Instruments shipped to Europe area where CE marking conformity is necessary do not provide with the rotary pump. Also instruments those shall be compliant to SEMI-S2 guideline do not provide with the rotary pump even when shipped to outside of Europe area.
Page 259: Replacement Of Oil Mist Trap
(2) How to Inject Oil Inject oil through the oil injection port so that oil level reaches the center of the red circle in the oil gauge. Oil injection plug (injection port) gauge Approx. 8 mm Proper oil level range NOTICE: If the oil level is below the lowest point of the red circle, pump performance may be degraded or oil may be deteriorated earlier than usual.
Page 260: Troubleshooting
4.2.3 Troubleshooting Symptom Cause Countermeasure Pump does not rotate at all. Power failure or voltage drop Check the power supply. The breaker switches off below 90 V. immediately. When turning Oil highly viscous because the Close the suction port and turn on the switch, pump buzzes ambient temperature is low (below the switch on and off repeatedly...
Page 261: Maintenance Of Air Compressor
4.3 Maintenance of Air Compressor（Only for P/N 539-9010 and 539-9060） NOTICE Instruments shipped to Europe area where CE marking conformity is necessary do not provide with the air compressor. Also instruments those shall be compliant to SEMI-S2 guideline do not provide with the air compressor even when shipped to outside of Europe area.
Page 262 ○ NOTICE: 1. The mark “ ” indicates the time period after start of operation or ● replacement of the part. The mark “ ” shows the time point of part replacement. The above table shows the standard inspection cycle. The inspection cycle changes slightly with the operating conditions (temperature, humidity, etc.).
Page 263: Troubleshooting Of Air Compressor
4.3.2 Troubleshooting of Air Compressor If the air compressor becomes faulty, reference should be made to the following table. Symptom Probable Cause Remedy Air compressor rotates. Pressure does not rise Drain or stop valve leaks. Retighten. If the valve still leaks, at all or rises very replace with a new one.
Page 264: Location And Functions Of Major Components
4.3.3 Location and Functions of Major Components Pressure switch Starts and stops compressor. Suction filter Removes dust and dirt Safety valve in suction air. Relieves compressed air at Push solenoid (single phase abnormal rise in pressure. type only) Stop valve (air outlet) Activated at start of compressor.
Page 265: Troubleshooting
4.4 Troubleshooting 4.4.1 When Column Evacuation does not Work When the column evacuation system does not work, check the followings. (1) Is an error message shown? If an error message is shown on the evacuation control panel, refer to XXXXXX to find the cause of the error and make countermeasure to it.
Page 266: When Specimen Chamber Vacuum Is Not Good
(4) If you do not find any failure mentioned above, contact a service engineer. 4.4.3 When Specimen Chamber Vacuum is not Good If HV applicable status (HV indicator on GUI blinks in yellow and ON button is enable) is not given even after about 1 to 1.5 hour has been passed from starting specimen chamber evacuation check the followings.
Page 267: When Emission Current Is Not Set At Normal Value
4.4.5 When Emission Current is not Set at Normal Value When emission current is not set at a normal value when you applied HV, check the followings. (1) If emission current indicator is not zero but smaller than the value selected in the Set Ie to box in the HV control dialog window, check the value of Vext on the dialog window.
Page 268: When Image Is Very Noisy
4.4.7 When Image is Very Noisy There may be three types of noise on scanning images. The first is a snow noise which appears uniformly on the image. It is mainly due to statistical fluctuation of number of primary or secondary electrons. It appears when probe current is too small, secondary electron emission efficiency of the specimen is too low, or efficiency of signal detection is too low.
Page 269: When You Cannot Correct Astigmatism
4.4.8 When You cannot Correct Astigmatism If astigmatism still remains at the maximum correction level (One (and/or both) of Stigma sliders is set at the maximum or the minimum, or one (and/or both) of Stigma knobs on the operation panel is full), check the followings. (1) Check if your specimen is ferromagnetic.
Page 270: When S-4800 Control Program Does Not Start Up
When PC has hanged up while operating microscope, close windows and shut down the computer. It is recommended to shut the POWER switch of Display unit before starting up the S-4800 program again. (1) Press Alt, Ctrl and Delete keys simultaneously.
Page 271: When Error Messages Are Shown
4.4.12 When Error Messages are shown Messages shown on the S-4800 GUI includes operation assist messages, warning for operation and messages showing instrumental error. Messages are shown with number. Refer to the list of messages in appendix page. 4.5 Operation for shutting down all power supply of S-4800 (1) Shut off HV and shut down PC.
Page 272: Operation For Starting S-4800
4.7 Operation for Starting S-4800 (1) Turn the MAIN switch in the power distribution panel of customers site to ON. (2) At the back of the display unit, turn the MAIN breaker to ON and press the RESET switch. A sound of relay will be emitted form inside of the unit.
Page 273: Operation When Power Line Failure Recovered
When cooling water stops while the Display power is ON, E-12 error will be shown on the evacuation control panel and buzzer sounds. Close S-4800 control program. If water recovery needs long tome, also shut down PC and turn the Display power off. He error and buzzer will be terminated.
Page 274: Gun Baking Operation
CAUTION Gun baking operation must be carried out by a service engineer or a person who has been trained by Hitachi High-Technologies Corporation or its service representatives. Use the following steps for gun baking operation. (1) Turn HV to OFF.
Page 275 (6) Mount the heater to the electron gun chamber. The heater consists of 2 parts. Fix them with the heater band. (7) Put two rods of inner bake read wire into the HV cable socket. Insert rods correctly to pins A and B at the bottom of the socket referring the right side picture.
Page 276 (11) Starting gun baking on the S-4800 GUI You can start gun baking on the S-4800 GUI or on the evacuation control panel. NOTICE Before starting gun baking, set WD to longer than 10mm on the OPE CONDITION tab of the Operation panel.
Page 277 After selecting baking time, check items described in above (11). And then, press START button. In both case starting gun baking on the GUI or evacuation control panel, an error will be shown in the Numeric / character display and buzzer sound if something incorrect setting is found.
Page 278: Caution On Maintenance
4.11 Caution on Maintenance On maintenance of the instrument, the following cautions must be observed. (1) Follow the maintenance procedures described in this manual after a full understanding of it. (In particular, carefully read “PRECAUTIONS ON HANDLING” at the beginning of the manual.) (2) Maintenance work (disassembly-reassembly or repair) of the components other than described in this manual must not be carried out by the customer.
Page 279: Replacement Parts
5. REPLACEMENT PARTS 5.1 Consumables and Spare Parts 5.1.1 Consumables The items shown in Table 5-1 should always be on hand for normal operation. Table 5-1 Consumables Part No. Part Name Remarks G370009 Conductive paint For protection against chargeup 30 g G370250 Metal polishing paste For cleaning parts...
Page 280: Replacement Parts
5.1.2 Replacement Parts The items below should be prepared in the necessary quantities. Table 5-2 Replacement Parts Part No. Part Name Expiration J386012 Photo multiplier R268 Secondary electron detector 5 years 580-4289 FE tip Electron gun 2 years Pulse motor(X,Y) Type2 stage 4 years 539-1561...
Page 281: Spare Parts
5.1.3 Spare Parts The items shown in Table 5-3 must be prepared for long-term operation. Select a proper quantity in consideration of the application of each part. Table 5-3 Spare Parts Part No. Part Name Location Q’ty Used J821153 Fuse LM03 ...
Page 282: Accessory Operation
6.1.1 6. ACCESSORY OPERATION 6.1 Model S-5080 Auto-Camera (option) This camera is used for taking photographs of images displayed on the screen of CRT dedicated for photographing. You can use the following kinds of film by attaching various units consisting of lenses and adapters (see Figure 6-2): 6 ×...
Page 283 6.1 Model S-5080 Auto-Camera (option) C910804 C910905 C970192 type 4 x 5 single-exposure unit type 4 x 5 Polaroid unit 6 x 7 roll film unit (P/N 589-9871) (P/N 589-9872) (P/N 589-9873) Image ratio = 1:1 Image ratio = 1:1 Image ratio = 1:0.6 C921211 C923691...
Page 284: Specifications
6.1.2 6.1.2 Specifications : ×1.0, ×0.8, and ×0.6 Magnification Lens F = 75 mm : f = 4.5 to 22, manual Aperture Focusing : Manual (preset when shipped at the same time with the SEM) Film type : Roll film 120, Polaroid TYPE52 (P/N 55), Polaroid 107 and 105 (the user is to buy the film.) REMARKS : Refer to Table 6-1, which illustrates image sizes on the film for each...
Page 285 6.1 Model S-5080 Auto-Camera (option) 6 - 4...
Page 286: Assembling The Camera
6.1.3 6.1.3 Assembling the Camera Illustrated below are films for the standard PHOTO CRT. (a) type 4 x 5 film (magnification of 1.0) Fig. 6-3 4″ × 5″ Film (Magnification of 1.0) (b) Polaroid 107 film (magnification of 0.8) Fig. 6-4 Polaroid 107 Film (Magnification of 0.8) (c) Roll film 120 (magnification of 0.6) Fig.
Page 287: Operation
6.1 Model S-5080 Auto-Camera (option) 6.1.4 Operation Installing the Camera You should ask a service engineer for the installation. Take out the PHOTO CRT unit by referring to Figure 6-8. Screw four 5-mm screws to fix the camera on the PHOTO CRT panel.
Page 288 6.2 Installation Manual for the SEC Guide Rail (for Installer) PHOTO CRT unit Camera Apertur 6 - 7...
Page 289 INDEX INDEX ABCC ................2-22, 2-25, 2-27, 2-28, 2-32, 2-46, 2-47, 3-18, 3-19, 3-23, 3-25, 3-31, 3-32, 3-85 Accelerating Voltage ............... 1-3, 3-13, 3-107, PRECAUTION-11 Add from File..........................3-120 Alarm..........................2-10~2-12 Alignment ............... 2-22, 2-29, 2-52, 2-56, 3-20~3-23, 3-35, 3-44, 3-58, 3-59, 3-93, 3-109~3-112, 4-14~4-16 Analysis menu Analysis Mode command ..................2-23, 2-54 Oblique command ....................2-54, 3-102...
Page 290 INDEX Calibration......................2-24, 3-62~3-66 Capture ....................2-23, 2-30, 2-32, 3-57, 3-58, 3-72~3-75, 3-85, 3-92 Color Color Bar ........... 2-38, 2-39, 3-74, 3-86, 3-87, 3-94, 3-114, 3-118, 3-127, 3-129, 3-130, PRECAUTION-9 Color Mixing..............2-39, 3-86, 3-87, 3-118, 3-129, 3-130 Color Mode ........................3-127 Color Order........................3-127 Level ..........................3-127 Column Alignment............
Page 291 INDEX Edit menu Copy Attribute command ................2-21, 3-101, 3-117 Copy Image command....................3-101 Electron Beam .........................3-15 Electron Gun ..............3-110, 4-1, PRECAUTION-5, SAFETY-3, SAFETY-10, SAFETY-17 Electron Optical Column ......................3-15 Emission Current ................3-13, 4-14, PRECAUTION-5 Error Message .........................4-18 Fast Scanning ..........................3-29 File menu Direct Save command ..............
Page 292 INDEX Image Brightness ....................2-22, 2-29, 3-31 Image menu Color Mixing command ....................2-23 Data Entry command ....................3-122 Image Navigation ....................3-44, 3-57~3-59 Image Observation........................3-24 Image Processing .................... 3-114, 3-118, 3-128 Image Quality......................3-107, 3-108 Image Saving ...........................3-71 Image Setup..........................3-72 Image Shift........................2-15, 3-50 Image Size ..........................3-99 Ion Pump..................
Page 293 INDEX Oblique........................ 2-23, 2-54, 3-102 Operate menu ABCC command ..........2-22, 2-52, 3-31, 3-32, 3-34, 3-35, 3-92, 3-93 Alignment command .......................2-52 Auto Focus command.....................3-34 Auto Stigma command ....................3-35 BC Monitor command .....................3-32 Operating Condition ..................2-35, 2-50, 3-92, 3-93 Operation Mode ........................3-23 Option menu Comm Port Setting command..........2-24, 2-41, 2-53, 2-54, 3-64~3-66, 3-103, 3-105, 3-106...
Page 294 INDEX Save Image..............2-21, 2-31, 2-51, 2-55, 3-75, 3-76, 3-119 Scan menu Capture command ..................2-23, 2-55, 3-85 Split DM Mode command ....................3-85 Scan Speed ..........................2-23 Screen Mode..........................3-83 Second Condenser Lens ....................... 3-111 SEM Data Manager ..........2-21, 2-31, 2-38, 2-52, 2-56, 3-74~3-76, 3-78, 3-79, 3-94, 3-114, 3-115, 3-117~3-120, 3-122, 3-131, 3-134 Setup menu...
Page 295 INDEX Tilt Compensation ....................2-39, 3-97, 3-98 Toolbar ..........................2-24, 2-26 Transfer..................2-6, 2-21, 2-31, 2-48, 3-72, 3-116 Troubleshooting ................4-7, 4-10, 4-12, FOREWORD-2 Turning High Voltage Off......................3-80 Upper Detector.........................3-24 WD ................2-4, 2-5, 2-35, 2-39, 2-46, 3-15, 3-16, 3-19, 3-23~3-25, 3-28, 3-63~3-66, 3-97, 3-98, 3-103, 3-110, 4-23, PRECAUTION-10 Window ................2-6, 2-18, 2-21, 2-24, 2-51~2-55, 3-75 Window menu...

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