Filament Replacement - Hitachi TM3030 Plus Instruction Manual

5.1 Filament Replacement

If an image does not appear when an application button is pressed or a filament-related error
message appears, a blown filament must be suspected. The filament is an electron source
for observation, so it must be replaced when disconnection occurs.
1. Close the application. Turn off the power switch located on the right side of the main unit.
Wait for a minimum of 30 minutes, and then open the top cover.
2. As shown in Figure 5.1-1, holding onto the lower part of the top cover with your finger
tips, gently lift it.
Figure 5.1-1 Opening and Closing the Top Cover (1)
CAUTION: After the system has been in use, the Wehnelt and the anode around the
filament are heated about 90  C. Touching any of them can cause burns.
Before undertaking any filament replacement work, turn off the main unit
and wait at least 30 minutes to allow it to cool down.
WARNING: Internally, the system uses maximum voltages of AC 100 V and DC 15 kV.
Touching any of the internal components or circuits when the system is
powered on can potentially result in severe injury or death from electric
shock.
Do not remove the cover from the system.
When opening the electron gun and other components for maintenance
purposes, be sure to turn off the earth leakage breaker and the power
switch, and unplug the power cord before commencing the work.
CAUTION: The finger might get injured in the opening and shutting part of the top
cover. Be careful not to pinch your fingers when opening and shutting.
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