Hitachi TM3030 Plus Instruction Manual page 378

4. Execute Z calibration according to the procedure of "7.24.2 Calibration of Z".
Specify the position of tilted part of the specimen as Z calibration position. When the
borderline of the tilted part and the flat part is vertical and does not exist, use Free of the
Measurement of roughness to specify the position. And, specify the line of calibrating Z
horizontally to the borderline of the tilted part and the flat part.
Figure 7.25.2-4 Example of Calibration of Z/Specifying Calibration Position
Figure 7.25.2-3 Condition table Dialog
Tilted part
The first click point
7 - 84
Flat part
The Second click
point
Borderline