Beam Axis Alignment Window - Hitachi TM3030 Plus Instruction Manual

4.3.36 Beam Axis Alignment Window

On this window, perform beam axis alignment after completion of column maintenance
including filament replacement, or when the beam axis becomes misaligned after some time
has passed. It can be easy to perform alignment by viewing the step-by-step guide provided
on the Beam Axis Alignment window. In addition, an accelerating voltage and a filament
current are set according to each step. When selecting [Beam Axis Alignment] (see 4.3.8)
from the [Maintenance] menu, the Beam Axis Alignment window is open.
Before performing beam axis alignment, set the supplied reference sample on the specimen
stage. For the details, refer to 5.2 Beam Axis Alignment.
NOTE : The Beam Axis Alignment window appears only when electron beam irradiation is
on (HV-ON). When any electron gun error occurs during beam axis alignment, the
process will be cancelled.
NOTE : [STEP 1] is displayed when the Beam Axis Alignment window is activated.
Axis alignment:
Shows the way to align the axis of the electron gun in a form of animation.
Figure 4.3.36 Beam Axis Alignment Window
4 - 113