Hitachi TM3030 Plus Instruction Manual page 250

Specify electron beam conditions.
Figure 5.2-5 Electron Beam Condition Setup Window (1)
* If the supplied reference sample is not loaded, in the confirmation message shown in
Figure 5.2-4, click the [Cancel] button. When the following message appears, click the [OK]
button, and by following the message, load the supplied reference sample and perform the
beam axis alignment again.
Figure 5.2-6 Reference Sample Loading Confirmation Window (2)
4. Beam axis alignment: STEP 1
Turn the four axis alignment knobs, A, B, C, and D to move the electron gun so that the
image will be the brightest.
NOTE : Moving the electron gun by turning the axis alignment knobs, the air trapped in the
o-ring groove can leak into the electron gun chamber and the beam can be forced
off. In addition, an error message will be displayed. In such a case, close the
message window, press the [Start] button again, and then perform beam axis
alignment.
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