Hitachi SU8700 Instruction Manual
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Hitachi SU8700 Instruction Manual

Hitachi SU8700 Instruction Manual

Scanning electron microscope
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Please read through this manual carefully and store
it in a safe place.
· Please thoroughly understand safety instructions and
warnings in this manual before using the instrument.
· Instructions in this manual and in warning labels must
be strictly obeyed.
· Keep this manual close at hand to ensure that it is
accessible whenever needed.
SCANNING ELECTRON MICROSCOPE
INSTRUCTION MANUAL
(User's Operation/Maintenance Edition)
.

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Summary of Contents for Hitachi SU8700

  • Page 1 SCANNING ELECTRON MICROSCOPE INSTRUCTION MANUAL (User’s Operation/Maintenance Edition) Please read through this manual carefully and store it in a safe place. · Please thoroughly understand safety instructions and warnings in this manual before using the instrument. · Instructions in this manual and in warning labels must be strictly obeyed.
  • Page 2 1. Information contained in this document is, due to an improvement, subject to change without notice. 2. This manual is copyrighted by Hitachi High-Tech Corporation with all rights reserved. No part of this manual may be reprinted, reproduced, or disclosed to a third party in any form or by any means without prior written permission of Hitachi High-Tech Corporation.

  • Page 3: About This Manual

    ● This manual contains the operating and maintenance instructions and cautionary matters for the SU8700. ● First of all, be sure to read the “IMPORTANT” and “GENERAL SAFETY GUIDELINE” chapters at the beginning of this manual for ensuring safety in operation of the SU8700. PREFACE-1...

  • Page 4: Important

    Leakage X-Ray Radiation from This Instrument IMPORTANT Leakage X-Ray Radiation from This Instrument The effective dose equivalent of leakage X-ray radiation under its actual operating conditions satisfies the requirement specified in the IEC 61010-1:2010(Third Edition)+AMD1:2016. In the ICRP recommendations, it is stated that electron microscopes, along with home television sets (cathode ray tube type), fall into a category of potential radiation sources that could produce undesired byproduct X-rays.

  • Page 5: Warranty On Product

    Warranty on Product Warranty on Product Hitachi High-Tech Corporation warrants the SU8700 to be free from defects in material and manufacturing workmanship under normal use within the product specifications indicated in this manual and under conditions given below. This warranty is void if the instrument is not used in accordance with the instruction manual.
  • Page 6 Warranty on Product Failure due to disassembly, modification, or relocation not approved by Hitachi High-Tech Corporation. (m) After disposal of this instrument, or after its resale without prior approval from Hitachi High-Tech Corporation. (n) Failure due to use not described in the manual or improper repair not approved by Hitachi High-Tech Corporation.

  • Page 7: Installation, Relocation, And After-Sales Technical Service

    (b) Before installation of this instrument, the user is requested to make preparations and to notify the sales or service engineer of Hitachi High-Tech Corporation for satisfying the installation requirements according to this manual. When relocation of this instrument becomes necessary after initial installation (delivery), please notify the sales or service engineer of Hitachi High-Tech Corporation to avoid possible troubles due to relocation.

  • Page 8: Disposal Of Cooling Water Circulator (Option)

    Technical Seminars and Training for Customers To ensure safety and high accuracy in operation of the instrument, technical seminars and training courses are available at Hitachi High-Tech Corporation's facilities or your site. For further information, contact the sales representative of Hitachi High-Tech Corporation. (The technical seminars and customer training courses are available on a chargeable basis.)

  • Page 9: Other Precautions

    Other Precautions Disclaimer of Liability for Industrial Properties of Third Party Hitachi High-Tech Corporation does not assume any liability for a third party’s complaint regarding infringement of any patent rights or industrial properties with respect to products manufactured through use of the equipment supplied by Hitachi High-Tech Corporation or its related companies or application of said instrument.
  • Page 10 Other Precautions Application Software for This Unit Contains the Following Copyrights LEADTOOLS Copyright (C) 1991-2012 LEAD Technologies, Inc. Open source software license We are using Open source software (short by OSS ) and show its license and copyright below. Please refer to following directory for OSS demands the disclosure of the source code. <Optical Drive >：＼OSS＼Source Code＼’using OSS’...
  • Page 11 Other Precautions There is no warranty against interference with your enjoyment of the library or against infringement. There is no warranty that our efforts or the library will fulfill any of your particular purposes or needs. This library is provided with all faults, and the entire risk of satisfactory quality, performance, accuracy, and effort is with the user.
  • Page 12 Other Precautions fitness for any purpose. The Contributing Authors and Group 42, Inc.assume no liability for direct, indirect, incidental, special, exemplary, or consequential damages, which may result from the use of the PNG Reference Library, even if advised of the possibility of such damage.
  • Page 13 Other Precautions Permission is granted to anyone to use this software for any purpose, including commercial applications, and to alter it and redistribute it freely, subject to the following restrictions: 1. The origin of this software must not be misrepresented; you must not claim that you wrote the original software.

  • Page 14: Handling Of The Insulation Oil Used For Hv Power Supply

    Other Precautions ◆ T-License 2.0 This product uses T-Kernel 2.0 source code based on T-License2.0 of T-Engine Forum (www.tron.org). In addition, cpmlaint with the following five licenses. Please refer to an attached filed in the <Optical Drive>\OSS¥License argument folder. ● 2-clause BSD License・・・「2-Clause BSD License(E)」,「2 条項 BSD License(J)」 ●...

  • Page 15: User Manual Addendum For Weee

    If you wish to discard this product, please contact your local authorities and ask for the correct method of disposal. If you want to find our Hitachi High-Tech office in the European Union, you can find at http://www.hitachi-hightech.com/eu/about/corporate/location/index.html/ California Perchlorate Material Notice Perchlorate Material –...

  • Page 16: General Safety Guide

    Safety Alert Symbols and Signal Words GENERAL SAFETY GUIDE Safety Alert Symbols and Signal Words The warnings for human safety is indicated and described in the following alert headings that is consisted by the safety alart symbol [ ], [WARNING] and [CAUTION]. : This is a safety alert symbol.

  • Page 17: Common Safety Precautions

    Common Safety Precautions Common Safety Precautions Precautions Prior to Use ■ Follow the precautions and instructions stated on the warning labels attached on the instrument and those contained in all the accompanying instruction manuals. Failure to do so could result in fatal/serious injury or damage to the instrument due to an electric shock or fire.

  • Page 18: Installation, Maintenance, And Relocation

    For maintenance that is intended to be performed by service engineers, contact a service engineer or our sales representative of Hitachi High-Tech Corporation.
  • Page 19 This instrument is equipped with protective devices such as fuses, overcurrent detectors, electric leakage detectors, and alarm indicators. If a protective device is activated, contact a service engineer of Hitachi High-Tech Corporation. Power on the instrument again without proper elimination can cause of unexpected dangers such as fuming or ignition.

  • Page 20: Warning Indications In This Manual

    Careless lifting of this unit could result in injury. Lifting should be carried out by using a forklift or the like. The weight must be moved by a service engineer trained and certified by Hitachi High-Tech Corporation only. The customer should not attempt relocation. (Chapter 1 Specification and installation requirements)
  • Page 21 Warning Indications in This Manual Warning Indications in This Manual (Continued) WARNING ● Burns due to Contacting with Hot Surface (Baking of the Electron gun and Ion pump) When the electron gun and the ion pump are baked for maintaining high-vacuum performance, they are heated up to approximately 250°C.
  • Page 22 Insufficient grounding of the instrument can cause not only incorrect operation but also lead to electric shock. Do not touch the grounding wire. The grounding wire to the instrument shall be carried out by a service engineer of Hitachi High-Tech Corporation. (Chapter 1 Specification and installation requirements) SAFETY-7...

  • Page 23: Caution Indications In This Manual

    Caution Indications in This Manual Caution Indications in This Manual CAUTION ● Injury due to Falling If you sit on the main unit, the cover may break and it may cause you to fall and to be injured. Do not sit or lean to the cover. (Chapter 1 Specification and installation requirements) Since it requires the work at a high place, please use a stepladder.

  • Page 24: Warning And Caution Labels On Instrument

    Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument Pages SAFETY - 9 to 27 show warning and caution labels that are affixed to the SU8700. Confirm the actual WARNING and CAUTION labels attached on the instrument.
  • Page 25 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (11) (12) (Right side view) Locations of WARNING and CAUTION labels on main unit SAFETY-10...
  • Page 26 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (12) (12) (8)(9) (Left side view) Locations of WARNING and CAUTION labels on main unit Location of WARNING label inside of the electron gun cover SAFETY-11...
  • Page 27 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (12) (10) (Rear view) Locations of WARNING and CAUTION labels on main unit SAFETY-12...
  • Page 28 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (Top view) Locations of WARNING and CAUTION labels on the stage (12) (Top view) Locations of WARNING and CAUTION labels on the specimen exchange chamber (Top view) Locations of WARNING and CAUTION labels on weight Cover for baking SAFETY-13...
  • Page 29 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (Front view) Locations of WARNING and CAUTION labels on EO control unit (Rear view) Locations of WARNING and CAUTION labels on EO control unit SAFETY-14...
  • Page 30 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (Right side) (Left side) Locations of WARNING and CAUTION labels on EO control unit (4)(5) (Top view) Locations of WARNING and CAUTION labels on EO control unit SAFETY-15...
  • Page 31 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (14) (13) Locations of WARNING and CAUTION labels on stepdown transformer (option) SAFETY-16...

  • Page 32: Semi-S2 Guideline Conforming Version

    Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) SEMI-S2 guideline conforming version (11) (10) (15) (16) (Front view) Locations of WARNING and CAUTION labels on main unit SAFETY-17...
  • Page 33 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (16) (21) (19) (22) (17) (16) (Right side view) Locations of WARNING and CAUTION labels on main unit SAFETY-18...
  • Page 34 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (16) (16) (17) (17) (19) (19) (16) (Left side view) Locations of WARNING and CAUTION labels on main unit Location of WARNING label inside of the electron gun cover SAFETY-19...
  • Page 35 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (19) (17) (16) (16) (16) (Rear view) Locations of WARNING and CAUTION labels on main unit SAFETY-20...
  • Page 36 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (21) (19) (Top view) Locations of WARNING and CAUTION labels on the specimen exchange chamber (20) (Top view) Locations of WARNING and CAUTION labels on weight (18) Cover for baking SAFETY-21...
  • Page 37 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (16) (16) (Front view) Locations of WARNING and CAUTION labels on EO control unit (16) (16) (Rear view) Locations of WARNING and CAUTION labels on EO control unit SAFETY-22...
  • Page 38 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) (16) (Right side) (Left side) Locations of WARNING and CAUTION labels on EO control unit (24) (23) (Top view) Locations of WARNING and CAUTION labels on EO control unit SAFETY-23...
  • Page 39 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) Contents of each labels are described as below. CAUTION Pinch point hazards. Can cause injury. Keep hands clear when opening or closing the stage. P/N 458-6624 CAUTION Pinch point hazards.
  • Page 40 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) CAUTION High Temperature Burns due to contact with High-temperature parts Beware of burn due to high temperature of the inner part during Ion pump baking and cooling. Do not remove the cover.
  • Page 41 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) WARNING Can cause injury. Do not lift with your hands. (13) P/N 536-7095 WARNING Hazardous Voltage inside Can cause death or severe injury. (14) Do not remove the cover. P/N 536-7094 CAUTION Interlock function...
  • Page 42 Warning and Caution Labels on Instrument Warning and Caution Labels on Instrument (Continued) WARNING Heavy Weight (20) Can cause injury. Do not lift with your hands. P/N 537-2535 CAUTION Pinch hazards. Will result in injury to fingers. (21) Be careful not to pinch a finger at the time of opening and closing.

  • Page 43: Emo Switch (Option)

    EMO Switch (Option) EMO Switch (Option) Outline The EMO Switch can power OFF the instrument forcibly by pressing the button switch when it is in the emergency condition. NOTE: Please press the button only when it is in an emergency. When shutting down all power of the instrument forcibly, it can cause of failure of observation because the observing image will not be saved and it take time to restart.

  • Page 44: Operation Method Of The Emo Switch

    EMO Switch (Option) EMO Switch (Option) (Continued) EMO Switch (Mobile type) Location of the EMO Switch (Mobile type) Operation method of the EMO Switch All powers of the instrument will be OFF by pressing either EMO Switch button on the upper front of the EO control unit (Fixed type) or on the operation table (Mobile type).

  • Page 45: Recovery Procedures After Pressing The Emo Switch

    ・ EO control unit: HV breaker, IP/HV breaker, EVAC breaker, EOC breaker, OUTER BAKE breaker, MAIN breaker (2) Unlock the switch by rotating the EMO Switch button clockwise. (3) Startup the instrument. Reference: SU8700 instruction manual 4.5 Operation after recovery from power failure and for star-up of instrument SAFETY-30...

  • Page 46: Protection Against Movement Caused By Earthquake (Option)

    Protection against movement caused by earthquake (Option) Protection against movement caused by earthquake (Option) Main unit Hexagon head bolt to floor (M12 X 40 (or higher) SUS) (4 pcs) Bottom view Fore hexagon head bolts mounting positions * The values on this specification is based on the calculation. Protection against movement caused by earthquake (Main unit) (Recommend) SAFETY-31...

  • Page 47: Eo Control Unit

    Protection against movement caused by earthquake (Option) Protection against movement caused by earthquake (Option) (Continued) EO control unit Fixing plate (4 pcs) Bottom view Hexagon head bolt to floor Four fixing plates (M8 X 40 (or higher) SUS) mounting positions (8 pcs) * The values on this specification is based on the calculation.

  • Page 48: Step Down Transformer Unit (Option)

    Protection against movement caused by earthquake (Option) Protection against movement caused by earthquake (Option) (Continued) Step down Transformer unit (Option) Hexagon head bolt to floor (M6 X 40 (or higher) SUS) (4 pcs) Fixing plate (2 pcs) Two fixing plates mounting positions. * The values on this specification is based on the calculation.

  • Page 49: Weight Unit

    Protection against movement caused by earthquake (Option) Protection against movement caused by earthquake (Option) (Continued) Weight unit Two fixing plates mounting positions. Hexagon head bolt to floor (M10X 40 (or higher) SUS) (4 pcs) * The values on this specification is based on the calculation. * The bolts to fix on the floor are customer’s supplied items.

  • Page 50: Main Unit

    Center of gravity on each unit Center of gravity on each unit Main unit Center of gravity * The center of gravity is based on the calculation. SAFETY-35...
  • Page 51 Center of gravity on each unit Center of gravity on each unit (Continued) EO control unit Center of gravity * The center of gravity is based on the calculation. SAFETY-36...
  • Page 52 Center of gravity on each unit Center of gravity on each unit (Continued) Step down Transformer unit (Option) Center of gravity 42.3° (450) (500) * The center of gravity is based on the calculation. SAFETY-37...
  • Page 53 Weight allocation Weight allocation Main unit About 150 kg About 179 kg About 156 kg About 183 kg Bottom view * The weight allocation is based on the calculation. Weight allocation on the legs of the main unit SAFETY-38...
  • Page 54 Weight allocation Weight allocation (Continued) EO control unit About 53 kg About 91 kg About 60 kg About 66 kg Bottom view * The weight allocation is based on the calculation. Weight allocation on the legs of the EO control unit SAFETY-39...

  • Page 55: Other Safety Guidelines

    ● Power Supply Make sure that the power supply for the SU8700 is single-phase AC 100 V, 4 kVA, 50/60 Hz (without installation of the step down transformer) or AC 115/120/200/208/220/230/240 V, 4 kVA, 50/60 Hz (with installation of the step down transformer).
  • Page 56 Other Safety Guidelines Other Safety Guidelines (Continued) CAUTION ● Cooling Water • Use cooling water having a low residual chlorine concentration of 0.5 ppm or lower. If the residual chlorine concentration is higher than this level, the cooling water lines will corrode and result in water leakage.
  • Page 57 Other Safety Guidelines Other Safety Guidelines (Continued) CAUTION ● Power Supply to Personal Computer (PC) In case of shutting down the PC or application software forcibly an unsaved data will be deleted. Exit all operatable application software before shutting down the PC. ●...
  • Page 58 Other Safety Guidelines Other Safety Guidelines (Continued) CAUTION ● Network Connection The PC is equipped with an Ethernet port for network connection. Sufficient knowledge on the network environment is required for network connection via Ethernet. Proceed with connection upon consulting the network supervisor. •...
  • Page 59 Other Safety Guidelines Other Safety Guidelines (Continued) CAUTION ● Protection against Computer Viruses If any program/data is damaged suddenly or an unexpected operation/screen is encountered, it may cause lie in the condition that the PC is infected with a computer virus.

  • Page 60: 安全警告标签及标语的定义

    安全警告标签及标语的定义 安全使用注意事项 安全警告标签及标语的定义 关于人身安全的注意事项，将安全警示符号 和标识词“警告”、“注意”相组合，用以下方式表示。 ： 这是一个安全警示符号。 它用于提醒可能导致人身事故的潜在危险。 请遵循此符号后面的所有安全信息，以避免可能发生的伤害或死亡。 警 告 ： 表示如不规避，将可能导致死亡或重伤的潜在危险情况。 注 意 ： 表示如不规避，将可能导致轻度或中度人身伤害的潜在危险情况。 以下标识词表示非人身安全方面的注意事项，或者是实用信息。 通 知 ： 表示如不规避，将可能导致财产损失、设备严重损坏、数据丢失、环境污染的危险 情况，但是不会发生人身安全方面的事故。 ： 用于正确使用设备、防止轻度故障、充分发挥设备性能。 注 安全-1...

  • Page 61: 有关安全的共同注意事项

    有关安全的共同注意事项 有关安全的共同注意事项 使用前的注意事项 ■ 请遵守贴在设备上的警告标签以及所有所提供使用说明书中的注意事项和规定，以免发生触电或火 灾导致的死亡、重伤或者设备损坏等事故。 ■ 严禁擅自改装设备，或者使用非指定的部件。另外，严禁在拆除安全装置的状态下使用设备，以防 发生危险。 ■ 试剂等化学品应确认其性状及安全说明（SDS） ，以保证正确使用。 ■ 使用试剂等化学物质时，由用户责任对房间充分换气。如果通风不足，可能会造成健康损害。 ■ 虽然设备或使用说明书中的注意事项是经过充分研究后制定的，但是仍有可能发生意外。操作时不 仅遵守规定事项，而且用户自身也要时刻保持警惕。 ■ 使用过程中出现异声、异臭或冒烟等异常现象时，应立即切断电源，并根据情况采取安全措施后联 系销售责任人或本公司指定的服务公司。 ■ 请根据各制造商的使用说明书正确使用设备上的可选配件。 ■ 在紧急停止时，请关闭 MAIN 断路器。 请务必遵守上述规定。不遵守规定可能导致样品观察不准确，评估结果错误，甚至造成人身伤害。 安全-2...

  • Page 62: 安装、维护和搬迁上的注意事项

    有关安全的共同注意事项 有关安全的共同注意事项（续） 安装、维护和搬迁上的注意事项 ■ 请标准附属品与检查单近旁一起保管，以免丢失。如果标准附属品不够的状态运行设备，可能会发 生故障，导致安全上的障碍。 万一有缺乏、损坏或有您介意的地方，请联系安装工员、销售人员或本公司指定的服务公司。 ■ 用户的维护工作仅限于本使用说明书上规定的项目。维护前，请仔细阅读使用说明书并掌握其中的 内容。请不要执行使用说明书中未描述的维护工作，请将其交给本公司指定的服务公司。不遵守这 些可能导致设备故障或人身伤害。 ■ 请在指定的周期内更换本使用说明书中规定的消耗品。在不及时更换消耗品的情况下运行设备时， 可能会导致设备故障，或导致安全问题。另外，请与本公司指定的就近服务公司联系，以进行除用 户责任范围以外的更换工作。 使用中的警告及注意事项 在使用说明书的正文中未描述的警告项目如下所示。 警 告 ● 由于在异常状态下继续使用而导致的事故 使用处于异常状态的产品可能会导致触电或火灾。当使用中出现异声、异味、冒 烟等异常现象时，请立即关闭电源。之后，请根据情况采取安全措施，并与本公 司指定的服务公司联系。 安全-3...
  • Page 63 有关安全的共同注意事项 有关安全的共同注意事项（续） 在使用说明书的正文中未描述的注意事项如下所示。 注 意 ● 长时间使用导致的疲劳 长时间保持同一姿势看监视器时，眼部或躯体上会积累疲劳。长时间使用时，要 每小时休息 10 至 15 分钟，以保持眼睛或躯体的健康。另外，请参照 SEMI 标准等 配备操作所需的桌椅，并遵守这些标准要求。 ● 激光束辐射引起的紊乱 电脑内置的 Super Multi Drive 中装有激光光源。配备激光设备的电脑符合国际 电工委员会的标准（IEC 60825-1：2014 Edition 3.0） 。特别是激光器，它符合 美国政府机构设定的 1 类激光设备标准，通常情况下不会向设备外部辐射有害人 体的激光束。请务必遵守以下注意事项。 • 请勿打开激光设备的面板，其中没有用户可维修的组件。 • 请勿调整此处未描述的激光设备控制器等。 • 设备维修工作务必交给本公司指定的服务公司。 • 请勿卸下设备盖板。 ●...

  • Page 64: 操作手册中的警告

    操作手册中的警告 操作手册中的警告 本使用说明书中描述的警告及其所在位置汇总如下。 警 告 ● 因掉落而受伤 主体（670kg） 、EO 控制单元（270kg）是重物。由于地震而可能造成人身伤害， 建议安装后使用支架等进行固定。设备移动由本公司指定的服务公司负责进行， 用户不应搬移设备。 （第 1 章 设备规格和安装条件） ● 由于抬起重物导致的伤害 压铁是质量约为 25kg 的重物。如不注意，抬起时可能导致人身伤害。抬起时，使 用搬运工具等。 压铁移动工作由本公司指定的服务公司负责进行。用户不应该进行搬移工作。 （第 1 章 设备规格和安装条件） ● 因触摸高温单元而灼伤（电子枪／离子泵烘烤） 电子枪和离子泵将加热到约 250℃，以实现电子枪高真空化。严禁触摸电子枪、 离子泵和周围区域，以免灼伤。 如果电子枪由于错误动作而被加热，可能会处于高温状态而导致灼伤。烘烤电子 枪后，务必关闭 OUTER BAKE 断路器。 烘烤完成后，冷却至接近室温需要约 6 小时。在此之前，加热单元和周边部位处 于高温状态。严禁触碰它，以免被灼伤。...
  • Page 65 操作手册中的警告 操作手册中的警告（续） 警 告 ● 爆炸与吸入有害物质引起的损坏 乙醇是有机溶剂。 ■ 如果挥发的乙醇着火，有发生爆炸的可能性。 ■ 挥发的乙醇吸太多时，身负重伤或困难呼吸障碍的可能性。 ■ 如果误饮乙醇，还要触摸皮肤或进入眼睛，作用刺激性的影响被发麻及步行 困难等神经炎障碍的可能性。 ■ 请在通风良好没有烟火的地方作业，还要注意过多吸入。 ■ 此外，需要时使用空气呼吸器，保护眼镜，保护手套和保护安全靴。 （第 4 章 维护） ● 起搏器故障 来自离子泵永磁体的磁场（周边 10mT，离子泵盖外侧约 1mT）可能会损坏起搏器。 起搏器用户应保持离离子泵至少 0.6m 的距离。 （第 4 章 维护） ● 高压触电 进行电子枪烘烤工作时，请确保 FIL 灯和 HV 灯熄灭。FIL 灯和 HV 灯点亮时，请 勿烘烤电子枪。由于施加高电压，可能会发生电击。...

  • Page 66: 操作手册中的注意

    操作手册中的注意 操作手册中的注意 本使用说明书中列出的注意事项及其所在位置汇总如下。 注 意 ● 翻倒造成的伤害 由于主体盖板损坏而设备被翻倒时，可能会造成人身伤害。请勿爬上盖板上面或 抵靠盖板。 （第 1 章 设备规格和安装条件） 请使用活梯进行高空作业。在这种情况下，当心摔倒而受伤。请使用符合用户公 司梯子安全标准的活梯。 （第 4 章 维护） ● 因卷入而受伤 在工作台转动部分卷入手或头发时会有受伤的危险。在工作台拉出状态下，当心 手或头发被卷入转动部分。 （第 3 章 操作） 安全-7...

  • Page 67: 本设备的警告标签

    本设备的警告标签 本设备的警告标签 贴在 SU8700 扫描电子显微镜上的警告标签见安全-8～安全-26 的页面内容。 请确认实物警告标签的内容。 请定期清洁并保养警告标签，以便在安全距离内看清。 如果警告标签因老化而模糊不清，请联系本公司指定的服务公司换取新标签。 标准类型 (11) (10) (15) 主体部分（正面）上的警告标签粘贴位置 安全-8...
  • Page 68 本设备的警告标签 本设备的警告标签（续） (11) (12) 主体部分（右侧）上的警告标签粘贴位置 安全-9...
  • Page 69 本设备的警告标签 本设备的警告标签（续） (12) (12) (8)(9) 主体部分（左侧）上的警告标签粘贴位置 电子枪盖内的警告标签位置 安全-10...
  • Page 70 本设备的警告标签 本设备的警告标签（续） (12) (10) 主体部分（背面）上的警告标签粘贴位置 安全-11...
  • Page 71 本设备的警告标签 本设备的警告标签（续） 工作台上表面的警告标签粘贴位置 (12) 样品交换器上的警告标签粘贴位置 压铁（俯视图）上的警告标签粘贴位置 烘烤用盖子 安全-12...
  • Page 72 本设备的警告标签 本设备的警告标签（续） EO 控制单元（正面）警告标签粘贴位置 EO 控制单元（背面）警告标签粘贴位置 安全-13...
  • Page 73 本设备的警告标签 本设备的警告标签（续） （右侧） （左侧） EO 控制单元上的警告标签粘贴位置 (4)(5) EO 控制单元（俯视）上的警告标签粘贴位置 安全-14...
  • Page 74 本设备的警告标签 本设备的警告标签（续） (14) (13) 降压变压器（可选）上的警告标签粘贴位置 安全-15...

  • Page 75: Semi-S2 适用类型

    本设备的警告标签 本设备的警告标签（续） SEMI-S2 适用类型 (11) (10) (15) (16) 主体部分（正面）上的警告标签粘贴位置 安全-16...
  • Page 76 本设备的警告标签 本设备的警告标签（续） (16) (19) (21) (17) (22) (16) 主体部分（右侧）上的警告标签粘贴位置 安全-17...
  • Page 77 本设备的警告标签 本设备的警告标签（续） (16) (16) (17) (17) (19) (19) (16) 主体部分（左侧）上的警告标签粘贴位置 电子枪盖内的警告标签位置 安全-18...
  • Page 78 本设备的警告标签 本设备的警告标签（续） (19) (17) (16) (16) (16) 主体部分（背面）上的警告标签粘贴位置 安全-19...
  • Page 79 本设备的警告标签 本设备的警告标签（续） (21) (19) 样品交换器上的警告标签粘贴位置 (20) 压铁（俯视图）上的警告标签粘贴位置 (18) 烘烤用盖子 安全-20...
  • Page 80 本设备的警告标签 本设备的警告标签（续） (16) (16) EO 控制单元（正面）上的警告标签粘贴位置 (16) (16) EO 控制单元（背面）上的警告标签粘贴位置 安全-21...
  • Page 81 本设备的警告标签 本设备的警告标签（续） (16) （右侧） （左侧） EO 控制单元上的警告标签粘贴位置 (24) (23) EO 控制单元（俯视）上的警告标签粘贴位置 安全-22...
  • Page 82 本设备的警告标签 本设备的警告标签（续） 各标签的内容如下所示。 注 意 当心夹伤 （1） 具有受伤的危险。 打开或关闭工作台时，小心不要夹到手指。 P/N 458-6624 注 意 当心夹伤 （2） 具有受伤的危险。 打开或关闭样品交换室时，小心不要夹到手指。 P/N 458-6624 注 意 当心卷入 （3） 手指、头发等可能会卷入工作台移动部件而受伤。 抽出工作台时当心手指等被卷入。 P/N 458-6625 注 意 当心卷入 （4） 手指可能卷入至风扇等的转动部件而受伤。 请勿打开盖板。 P/N 458-6625 注 意 当心损坏 （5） 盖板损坏后设备翻倒时，可能会受伤。 请勿爬上盖板上面或抵靠盖板。...
  • Page 83 本设备的警告标签 本设备的警告标签（续） 警 告 当心高压 具有触电而导致死亡或重伤的危险。 （8） 由本公司指定的服务公司负责操作。 用户不应打开这个盖子。 P/N 458-6621 注 意 当心高压（10kV） 具有触电而导致死亡或重伤的危险。 （9） 由本公司指定的服务公司负责操作。 用户不应打开这个盖子。 P/N 458-6621 警 告 当心高压（1000V） 具有触电而导致死亡或重伤的危险。 （10） 由本公司指定的服务公司负责操作。 用户不应打开这个盖子。 P/N 458-6621 警 告 当心高压 具有触电而导致死亡或重伤的危险。 （11） 拆下这个盖子时请关闭 HV。 如果在打开 HV 的状态下拆下这个盖子，HV 将被强制关闭。 P/N 458-6621 注...
  • Page 84 本设备的警告标签 本设备的警告标签（续） 警 告 高压注意 有可能因触电导致死亡或者受重伤。 （14） 请勿打开外罩。 P/N 536-7094 注 意 注意连锁操作 （15） 一取掉保护单元连锁启动，HV 强制关闭。 保护单元必须在安装在装置上时使用。 P/N 458-6625 警 告 危险电压 (16) 可能会导致重伤或死亡。 在服务之前要先关闭电压。 P/N 458-6651 警 告 高温 可能会导致烫伤。 (17) 在烘烤或冷却期间， 不要接触盖板。 P/N 458-6652 警 告 高温 可能会导致烫伤。 (18) 在烘烤或冷却期间，...
  • Page 85 本设备的警告标签 本设备的警告标签（续） 注 意 夹点危险 (21) 可能会导致手指受伤。 打开或关闭时，小心不要夹到手指。 P/N 539-4757 注 意 内部的滚轴 可能会导致受伤。 (22) 当打开或关闭工作台时， 手部和头发要保持适当距离。 P/N 458-6657 注 意 损坏风险 由于损坏盖板， (23) 可能会导致受伤。 不要坐在盖板上或倚靠盖板。 P/N 458-6658 注 意 内部的滚轴 可能会导致受伤。 (24) 手部要与风机等滚轴部件保持距离。 不要打开盖板。 P/N 458-6659 安全-26...

  • Page 86: 紧急停止开关（选件

    紧急停止开关（选件） 紧急停止开关（选件） 概 要 紧急停止开关是一个用于紧急时切断仪器所有电源的按压式开关。 注 ：非紧急情况，不要按下。仪器的所有电源都被切断，因此启动仪器需要时间，并且还会出现观察中 的图像没有保存下来等对观察产生影响的情况。 外 观 紧急停止开关设置在 EO 控制单元正面上部（固定式）和操作台（移动式）这两处。 操作台上的紧急停止开关为移动式开关。在电缆够得着的范围内（离本体右后方下部约 2 米处）可自由 配置。 注 ： 紧急停止开关（移动式）由于倾倒或掉落，有可能损坏开关部位或导致错误操作（无意中切断电 源） 。要设置在操作台等稳定场所（平坦之处） 。 紧急停止开关 （固定式） 紧急停止开关（固定式）的设置处 安全-27...

  • Page 87: 紧急停止开关的动作方法

    紧急停止开关（选件） 紧急停止开关（选件） （续） 紧急停止开关 （移动式） 紧急停止开关（移动式）的设置处 紧急停止开关的动作方法 如按下 EO 控制单元正面上部的紧急停止开关（固定式）或操作台上的紧急停止开关（移动式）的任意一 个按钮开关，仪器的所有电源就会被切断。 只要不顺时针转动按压式按钮开关并解除锁定状态，仪器就会保持所有电源切断的状态。 注 ： 非紧急情况，不要按下。仪器的所有电源都被切断，因此启动仪器需要时间，并且还会出现观察 中的图像没有保存下来等对观察产生影响的情况。 按压式按钮开关 安全-28...

  • Page 88: 紧急停止开关动作后的复原方法

    ： “EOC POWER”开关、 “EVAC POWER”开关、IP1 电流断路器、IP2 电流断路器、 STAGE 电流断路器 ・EO 控制单元 ：HV 电流断路器、 IP／HV 电流断路器、 EVAC 电流断路器、 EOC 电流断路器、 OUTER BAKE 电流断路器、MAIN 电流断路器 (2) 顺时针转动按下的紧急停止开关按压按钮开关，并解除开关的锁定状态。 (3) 启动仪器。 参照： SU8700 操作说明书 4.5 Operation after recovery from power failure and for star-up of instrument 安全-29...

  • Page 89: 地震防范措施（选件

    地震防范措施（选件） 地震防范措施（选件） 仪器本体 内六角螺栓 (M12×40 mm 以上 SUS) (4 个) 下面图 内六角螺栓安装位置 ※ 本规格为依照计算得出的数值。 地震防范措施（仪器本体） （推荐例） 安全-30...
  • Page 90 地震防范措施（选件） 地震防范措施（选件） （续） EO 控制单元 固定金属零件 (4 处) 下面图 内六角螺栓 固定金属零件安装位置 (M8×40 mm 以上 SUS) (8 个) ※ 本规格为依照计算得出的数值。 ※ 固定金属零件安装到地面的螺栓由用户自行准备。 应提前准备内六角螺栓（M8×40 mm 以上 SUS） （8 个） 。 地震防范措施（EO 控制单元） （推荐例） 安全-31...

  • Page 91: 降压变压器（选件

    地震防范措施（选件） 地震防范措施（选件） （续） 降压变压器（选件） 内六角螺栓 (M6×40 mm 以上 SUS) (4 个) 固定金属零件 (2 个) 固定金属零件安装位置 (2 处) ※ 本规格为依照计算得出的数值。 ※ 固定金属零件安装到地面的螺栓由用户自行准备。 应提前准备内六角螺栓（M6×40 mm 以上 SUS） （4 个） 。 地震防范措施（降压变压器） （推荐例） 安全-32...
  • Page 92 地震防范措施（选件） 地震防范措施（选件） （续） 压铁 固定金属零件安装位置 (2 处) 内六角螺栓 (M10×40 mm 以上 SUS) (4 个) ※ 本规格为依照计算得出的数值。 ※ 固定金属零件安装到地面的螺栓由用户自行准备。 应提前准备内六角螺栓（M10×40 mm 以上 SUS） （4 个） 。 地震防范措施（压铁） （推荐例） 安全-33...

  • Page 93: 各单元的重心位置

    各单元的重心位置 各单元的重心位置 仪器本体 重心位置 ※ 本规格为依照计算得出的数值。 安全-34...
  • Page 94 各单元的重心位置 各单元的重心位置（续） EO 控制单元 重心位置 ※ 本规格为依照计算得出的数值。 安全-35...

  • Page 95: 降压变压器（选件

    各单元的重心位置 各单元的重心位置（续） 降压变压器（选件） 重心位置 42.3° (450) (500) ※ 本规格为依照计算得出的数值。 安全-36...

  • Page 96: 重量分配

    重量分配 重量分配 仪器本体 约 150 kg 约 179 kg 约 156 kg 约 183 kg 下面图 ※ 本规格为依照计算得出的数值。 仪器本体脚部的重量分配 安全-37...
  • Page 97 重量分配 重量分配（续） EO 控制单元 约 53 kg 约 91 kg 约 66 kg 约 60 kg 下面图 ※ 本规格为依照计算得出的数值。 EO 控制单元脚部的重量分配 安全-38...

  • Page 98: 其他注意事项

    其他注意事项 其他注意事项 注 意 ● 关于停电 由于停电、雷击等所致的电源瞬间电压下降，设备中的电脑可能会发生故障，或者 OS、应用软件、 数据会损坏。作为电源瞬间电压下降的对策，建议使用交流式不间断电源等。 ● 关于电源 请确保 SU8700 的供电电源为单相 AC 100 V, 4 kVA, 50/60 Hz（除了安装降压变压器时） 或 AC 115/120/200/208/220/230/240 V, 4 kVA, 50/60 Hz（安装降压变压器时） 。 另外，电源应保持连续通电。 接地时，请使用接地电阻为 100Ω 或更小的接地端子。 请勿与其他电源设备共用接地端子。请在地面单独接地。 ● 关于漏水检测 标准设备中没有附带漏水检测器。由于冷却水的水质和压力引起的流路系统腐蚀或裂缝，有时会 发生漏水现象。如果无法使用冷水循环装置等，请务必购买并安装供水套件。 除了减压恒流阀外，在紧急情况下利用供水套件的漏水传感器还可以防止大量漏水。...
  • Page 99 其他注意事项 其他注意事项（续） 注 意 ● 关于电脑软件的安装 如果在本设备的电脑中安装了非本公司提供的软件，导致本设备动作错误时，它不在产品保修范 围内。在这种情况下，即使是本公司产品的保修期内，修复本设备系统时会收费。安装软件时， 请使用 OS 的“系统恢复”、“备份和恢复”等功能，采取恢复到安装前的状态等措施。 ● 关于电脑 如果强制终止应用软件或电脑，会丢失所有未保存的数据。当有可操作的应用软件时，请务必正 常终止应用软件，然后强行终止电脑。 ● 关于设备主体和电脑的以太网连接 用以太网连接设备主体和控制用电脑时，专门使用电脑板载网络控制器（RJ-45-J 接口）的一个 端口。在设备使用过程中，设备和电脑之间始终进行通信。如果未正确连接网络，可能会降低通 信速度或通信中断，并且本设备将无法正常运行。在设备主体与电脑的以太网连接方面请注意以 下事项。 • 设备主体和控制用电脑的以太网务必一对一连接（直接用网络电缆连接设备和电脑） 。请不要连 接其他网络设备，如集线器。 • 请使用符合 5 类（Cat 5）或更高标准的电缆。 • 公司内部网络等本地连接（LAN 连接）时，电脑上要追加网络控制器，本设备连接用端口和 LAN 连接用端口应分开。 关于本设备和控制用电脑的连接用网络控制器，请使用电脑板载端口。 当使用添加到电脑的网络控制器时，可能会发生通信速度下降或通信中断的现象。尤其是使用将 USB 端口转换为网络端口的适配器时，会发生通信速度下降或通信中断的现象。 安全-40...
  • Page 100 其他注意事项 其他注意事项（续） 注 意 ● 关于网络连接 电脑持有用于网络连接的以太网端口。用以太网进行网络连接时，对网络环境方面必须有足够的 知识。请咨询网络管理员后进行连接工作。 • 以太网端口上的电缆连接由安装技师或本公司指定的服务公司进行。请联系销售责任人或本公 司指定的服务公司。 • 将电脑连接到网络时，请务必采取措施防范电脑病毒。有关详细信息，请参阅本章的“关于电 脑病毒”。 • 附属品中未包含以太网电缆，请用户备好合适的电缆。 • 请慎重更改旨在网络连接的电脑配置。如果更改了本设备操作所需的配置，本设备的系统可能 无法正常运行。 • 不要安装用于网络连接的特殊软件。这可能对设备产生不利影响，或者本设备的系统可能无法 正常运行。 • 如果要连接到特殊网络或请求连接到网络，请联系销售责任人或本公司指定的服务公司。 • 以可选的外部通信接口连接到 EDS 等外部设备时需要使用以太网端口，因此连接至非外部设备 时，为了分支而应备好集线器。一些外部设备标准配备集线器，因此请咨询销售责任人。 • 使用 Microsoft-TCP/IP 协议进行网络连接时需要 IP 地址，因此请事先咨询网络管理员。连接 外部设备（如 EDS）时，外部设备需要另一个 IP 地址。 ● 关于电脑死机 如果由于某种原因而电脑处于死机状态（无法执行鼠标和键盘输入操作）...
  • Page 101 其他注意事项 其他注意事项（续） 注 意 ● 关于电脑病毒 如果程序突然出故障，或数据突然发生缺陷或损坏，或电脑出现意外动作或画面，电脑可能受到 病毒感染了。电脑病毒是一种恶意程序，它悄悄地侵入电脑，随意运行电脑并破坏数据。另外， 检测和删除电脑病毒的程序称为防病毒软件。 下载含电脑病毒的程序或使用含电脑病毒的可交换存储介质 （如 USB 存储器） ， 都会感染电脑病毒。 另外，受病毒感染的电脑通过通信或存储介质可能会感染其他电脑。请勿使用可能包含电脑病毒 的程序或存储介质。 如果电脑受病毒感染，请使用防病毒软件进行检查。但是，根据防病毒软件的类型，有时无法删 除电脑病毒。在这种情况下，建议事先备份硬盘。另外，请备好防病毒软件并自行删除电脑病毒。 ● 关于数据备份 设备故障或错误操作时可能会损坏电脑或硬盘（HD）中的数据。请定期将重要数据（如图像数据） 备份到 CD 或 DVD、外部硬盘等。 ● 关于 Windows 更新 Windows 有一个提高安全性和可靠性的更新程序，该程序定期由 Microsoft 发布。将电脑连接到 网络时，建议应用更新程序并使其保持最新状态。但是，在极少数情况下，由于更新程序本身或 更新程序应用失败，操作可能会变得不稳定。在这种情况下，请卸载已应用的更新程序。另外， 为了以防万一，重要数据（如图像数据）应定期备份。 安全-42...

  • Page 102: 根据《电子信息产品污染控制管理办法》有关要求

    根据《电子信息产品污染控制管理办法》有关要求 根据《电子信息产品污染控制管理办法》有关要求 电子信息产品污染控制标志 ：本标志为电子信息产品污染控制标志，适用于在中华人民共和国境内销售的所有电子 信息产品。扫描电子显微镜也属于电子信息产品。标志中央的数字是指产品的环保使 用期限的年数。所谓环保使用期限是在该产品中含有的有毒有害物质或元素在正常使 用的条件下不会发生外泄或突变，用户使用该产品不会对环境造成严重污染或对其人 身，财产造成严重损害的期限。 有毒有害物质或元素的名称及含量表示 该产品中有毒有害物质或元素的名称以及含量见表 1。 表 1 产品中有毒有害物质或元素的名称及含量 有害物质 铅 汞 镉 六价鉻 多溴联苯 多溴二苯醚 部件名称 （Pb） （Hg） （Cd） （Cr(VI)） （PBB） （PBDE） 主机装置 × ○ ○ ○ ○ ○ EO 控制单元 × ○ ○ ○...

  • Page 103: 本产品的电子信息产品污染控制标志表示方法

    根据《电子信息产品污染控制管理办法》有关要求 本产品的电子信息产品污染控制标志表示方法 电子信息产品污染控制标志会张贴在本产品的下图表示部分。 主机装置背面 电子信息产品污染控制标志 图 1 电子信息产品污染控制标志标签粘贴位置 环境-2...

  • Page 104: 안전한 사용을 위해

    안전 경고 기호와 표제어의 정의 안전한 사용을 위해 안전 경고 기호와 표제어의 정의 사람의 안전과 관련된 주의 사항은 안전 경고 기호 와 ‘경고’나 ‘주의’와 같은 단어를 조합한, 다음과 같은 표제어로 표시합니다. ： 이것은 안전 경고 기호입니다. 잠재적으로 사람에게 위해를 가하는 위험에 주의를 환기시키기 위해 사용하고 있습니다.

  • Page 105: 안전에 관한 공통적 주의 사항

    안전에 관한 공통적 주의 사항 안전에 관한 공통적 주의 사항 사용 전 주의 ■ 장치에 붙어 있는 경고 라벨이나 납품된 모든 취급설명서에 표시되어 있는 주의 사항 및 지시 사항을 준수해 주십시오. 잘 지키지 않으면 감전이나 화재로 인한 사망, 중상 또는 장치의...

  • Page 106: 설치, 보수, 장소 변경에 관한 주의

    안전에 관한 공통적 주의 사항 안전에 관한 공통적 주의 사항(계속) 설치, 보수, 장소 변경에 관한 주의 ■ 부속품은 분실하지 않도록 체크리스트와 함께 주변의 가까운 곳에 보관해 주십시오. 표준 부속품이 부족한 상태로 장치를 가동시키면, 장치에 고장이 발생해 안전상 문제가 발생할 수 있습니다.
  • Page 107 안전에 관한 공통적 주의 사항 안전에 관한 공통적 주의 사항(계속) 취급설명서의 본문 중에 기재되어 있지 않은 주의 사항을 아래에 나타냅니다. 주 의 ● 장시간 사용에 따른 피로 모니터를 보면서 조작할 경우, 같은 자세로 장시간 모니터를 계속 들여다보면 눈과 몸에 피로가 축적됩니다. 장시간 사용할 경우는 건강을 위해...

  • Page 108: 취급설명서 중의 경고 표시

    취급설명서 중의 경고 표시 취급설명서 중의 경고 표시 이 취급설명서 안에 기재되어 있는 경고와 그 경고가 기재된 부분은 아래와 같습니다. 경 고 ● 낙하에 의한 부상 본체(670kg)와 EO 제어 유닛(270kg)은 중량물입니다. 지진으로 인해 부상을 입을 우려가 있으므로, 설치 후 고정 금구 등으로 고정하시길 권해 드립니다.
  • Page 109 취급설명서 중의 경고 표시 취급설명서 중의 경고 표시(계속) 경 고 ● 폭발, 유해물질 흡입에 의한 장애 에탄올은 유기용제입니다. ■ 증기가 된 에탄올에 인화하면 폭발할 우려가 있습니다. ■ 증기가 된 에탄올을 너무 많이 흡입하면 중상을 입거나 호흡곤란이 발생할 우려가 있습니다. ■ 실수로...

  • Page 110: 취급설명서 중의 주의 표시

    취급설명서 중의 주의 표시 취급설명서 중의 주의 표시 이 취급설명서 안에 기재되어 있는 주의와 그 주의가 기재된 부분은 아래와 같습니다. 주 의 ● 넘어짐에 의한 부상 본체의 커버가 파손된 결과 넘어져 부상을 입을 우려가 있습니다. 커버 위에 올라타거나 기대지 마십시오. (제...

  • Page 111: 본 장치의 경고 라벨

    본 장치의 경고 라벨 본 장치의 경고 라벨 SU8700 주사전자현미경에 부착되어 있는 경고 라벨을 안전-8~안전-26 페이지에 표시합니다. 경고 라벨의 내용을 현물로 확인해 주십시오. 경고 라벨은 정기적으로 점검하여 안전한 거리에서 잘 보이도록 청소하고 유지하시기 바랍니다. 시간 경과에 따른 열화로 경고 라벨이 희미해져 보이지 않게 되었을 때는, 당사가 정한 서비스...
  • Page 112 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (11) (12) 메인 유닛부(오른쪽)의 경고 라벨 부착 위치 안전-9...
  • Page 113 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (12) (12) (8)(9) 메인 유닛부(왼쪽)의 경고 라벨 부착 위치 전자총 커버 안쪽의 경고 라벨 위치 안전-10...
  • Page 114 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (12) (10) 메인 유닛부(뒷면)의 경고 라벨 부착 위치 안전-11...
  • Page 115 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) 스테이지 상면부의 경고 라벨 부착 위치 (12) 시료 교환기 상면부의 경고 라벨 부착 위치 웨이트(상면도) 경고 라벨 부착 위치 베이크용 커버 안전-12...
  • Page 116 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) EO 제어 유닛(정면)의 경고 라벨 부착 위치 EO 제어 유닛(뒷면)의 경고 라벨 부착 위치 안전-13...
  • Page 117 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (오른쪽) (왼쪽) EO 제어 유닛의 경고 라벨 부착 위치 (4)(5) EO 제어 유닛(상면)의 경고 라벨 부착 위치 안전-14...
  • Page 118 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (14) (13) 스텝 다운 트랜스(옵션)의 경고 라벨 부착 위치 안전-15...

  • Page 119: Semi-S2 대응 타입

    본 장치의 경고 라벨 본 장치의 경고 라벨(계속) SEMI-S2 대응 타입 (11) (10) (15) (16) 메인 유닛부(정면)의 경고 라벨 부착 위치 안전-16...
  • Page 120 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (16) (21) (19) (17) (22) (16) 메인 유닛부(오른쪽)의 경고 라벨 부착 위치 안전-17...
  • Page 121 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (16) (16) (17) (17) (19) (19) (16) 메인 유닛부(왼쪽)의 경고 라벨 부착 위치 전자총 커버 안쪽의 경고 라벨 위치 안전-18...
  • Page 122 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (19) (17) (16) (16) (16) 메인 유닛부(뒷면)의 경고 라벨 부착 위치 안전-19...
  • Page 123 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (21) (19) 스테이지 상면부의 경고 라벨 부착 위치 (20) 웨이트(상면도) 경고 라벨 부착 위치 (18) 베이크용 커버 안전-20...
  • Page 124 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (16) (16) EO 제어 유닛(정면)의 경고 라벨 부착 위치 (16) (16) EO 제어 유닛(뒷면)의 경고 라벨 부착 위치 안전-21...
  • Page 125 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) (16) (오른쪽) (왼쪽) EO 제어 유닛의 경고 라벨 부착 위치 (24) (23) EO 제어 유닛(상면)의 경고 라벨 부착 위치 안전-22...
  • Page 126 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) 각 라벨의 내용은 다음과 같습니다. 주 의 끼임 주의 부상을 입을 우려가 있습니다. 스테이지 개폐 시 손가락이 끼지 않도록 주의해 주십시오. P/N 458-6624 주 의 끼임 주의 부상을 입을 우려가 있습니다. 시료 교환실 개폐 시 손가락이 끼지 않도록 주의해 주십시오. P/N 458-6624 주...
  • Page 127 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) 주 의 고온 주의 화상을 입을 수 있습니다. 베이킹 중 및 냉각 시간 중에는 커버 내부가 고온이 됩니다. 커버를 떼내지 마십시오. P/N 458-6622 경 고 고전압 주의 감전에 의한 사망 또는 중상의 우려가 있습니다. 작업은...
  • Page 128 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) 경 고 중량물 부상의 원인이 될 수 있습니다. (13) 손으로 들어 올리지 마십시오. P/N 536-7095 경 고 내부에 위험 전압 사망 또는 중대한 부상의 원인이 될 수 있습니다. (14) 커버를 제거하지 마십시오. P/N 536-7094 주...
  • Page 129 본 장치의 경고 라벨 본 장치의 경고 라벨(계속) 경 고 중량물 (20) 부상을 입을 수 있습니다. 손으로 들어올리지 마십시오. P/N 458-6665 주 의 개폐부에서의 끼어 들어감 주의 개폐부에 손가락이 끼어 들어가 부상을 당할 위험이 (21) 있습니다. 개폐 시는 손가락이 끼어 들어가지 않도록 주의해 주십시오. P/N 534-4688 주...

  • Page 130: 비상정지 스위치(옵션

    비상정지 스위치(옵션) 비상정지 스위치(옵션) 개요 비상정지 스위치는 비상 시 장치의 모든 전원을 차단하기 위한 누름 버튼 스위치입니다. 주 ： 비상 시 외에는 누르지 마십시오. 장치의 모든 전원이 차단되기 때문에, 장치 가동 시작에 시간이 걸릴 뿐만 아니라 관찰 중인 이미지가 저장되지 않는 등 관찰에 지장을 초래하는 경우가...

  • Page 131: 비상정지 스위치 동작 방법

    비상정지 스위치(옵션) 비상정지 스위치(옵션)(계속) 비상정지 스위치 (이동식) 비상정지 스위치(이동식) 설치 위치 비상정지 스위치 동작 방법 EO 제어 유닛 정면 상부의 비상정지 스위치(고정식) 또는 조작 테이블 위의 비상정지 스위치(이동식) 중 어느 한쪽의 누름 버튼 스위치를 누르면, 장치의 모든 전원이 차단됩니다. 누름 버튼 스위치를 시계 방향으로 돌려 스위치 잠금을 해제하지 않는 한 장치의 모든 전원 차단 상태는...

  • Page 132: 비상정지 스위치 동작 후의 복귀 방법

    ・EO 제어 유닛 측 : HV 브레이커, IP/HV 브레이커, EVAC 브레이커, EOC 브레이커, OUTER BAKE 브레이커, MAIN 브레이커 눌려져 있는 비상정지 누름 버튼 스위치를 시계 방향으로 돌려서 스위치 잠금을 해제해 주십시오. 장치 가동을 시작해 주십시오. 참조: SU8700 사용설명서 4.5 Operation after recovery from power failure and for star-up of instrument 안전-29...

  • Page 133: 지진 대책(옵션

    지진 대책(옵션) 지진 대책(옵션) 장치 본체 육각 구멍 볼트 (M12×40mm 이상 SUS) (4 개) 하면도 육각 구멍 볼트 장착 위치 ※ 본 사양은 계산에 따른 수치입니다. 지진 대책(장치 본체)(권장 사례) 안전-30...

  • Page 134: Eo 제어 유닛

    지진 대책(옵션) 지진 대책(옵션)(계속) EO 제어 유닛 고정금구(4 개소) 하면도 육각 구멍 볼트 고정금구 장착 위치 (M8×40ｍｍ 이상 SUS) (8 개) ※ 본 사양은 계산에 따른 수치입니다. ※ 바닥면에 고정금구를 장착하는 볼트는 고객님이 준비하셔야 합니다. 사전에 육각 구멍 볼트(M8×40mm 이상 SUS)(8 개)를 준비해 주십시오. 지진...

  • Page 135: 스텝 다운 트랜스(옵션

    지진 대책(옵션) 지진 대책(옵션)(계속) 스텝 다운 트랜스(옵션) 육각 구멍 볼트 (M6×40ｍｍ 이상 SUS) (4 개) 고정금구(2 개) 고정금구 장착 위치(2 개소) ※ 본 사양은 계산에 따른 수치입니다. ※ 바닥면에 고정금구를 장착하는 볼트는 고객님이 준비하셔야 합니다. 사전에 육각 구멍 볼트(M6×40mm 이상 SUS)(4 개)를 준비해 주십시오. 지진...

  • Page 136: 웨이트

    지진 대책(옵션) 지진 대책(옵션)(계속) 웨이트 고정금구 장착 위치(2 개소) 육각 구멍 볼트 (M10×40ｍｍ 이상 SUS) (4 개) ※ 본 사양은 계산에 따른 수치입니다. ※ 바닥면에 고정금구를 장착하는 볼트는 고객님이 준비하셔야 합니다. 사전에 육각 구멍 볼트(M10×40mm 이상 SUS)(4 개)를 준비해 주십시오. 지진...

  • Page 137: 각 유닛의 중심 위치

    각 유닛의 중심 위치 각 유닛의 중심 위치 장치 본체 중심 위치 ※ 본 사양은 계산에 따른 수치입니다. 안전-34...

  • Page 138: Eo 제어 유닛

    각 유닛의 중심 위치 각 유닛의 중심 위치(계속) EO 제어 유닛 중심 위치 ※ 본 사양은 계산에 따른 수치입니다. 안전-35...

  • Page 139: 스텝 다운 트랜스(옵션

    각 유닛의 중심 위치 각 유닛의 중심 위치(계속) 스텝 다운 트랜스(옵션) 중심 위치 42.3° (450) (500) ※ 본 사양은 계산에 따른 수치입니다. 안전-36...

  • Page 140: 중량 배분

    중량 배분 중량 배분 장치 본체 약 150 kg 약 179 kg 약 156 kg 약 183 kg 하면도 ※ 본 사양은 계산에 따른 수치입니다. 장치 본체 다리 부분의 중량 배분 안전-37...

  • Page 141: Eo 제어 유닛

    중량 배분 중량 배분(계속) EO 제어 유닛 약 53 kg 약 91 kg 약 60 kg 약 66 kg 하면도 ※ 본 사양은 계산에 따른 수치입니다. EO 제어 유닛 다리 부분의 중량 배분 안전-38...

  • Page 142: 그 외의 주의 사항

    전원의 순간 전압 저하 대책으로서는 교류 무정전 전원장치 등의 사용을 권장합니다. ● 전원에 대하여 SU8700 에 공급하는 전원이 단상 AC100V, 4kVA, 50/60Hz(강압 변압기가 설치되지 않았을 경우) 또는 AC115/120/200/208/220/230/240V, 4kVA, 50/60Hz(강압 변압기가 설치된 경우)인 것을 확인해 주십시오. 아울러 전원은 연속 통전으로 해 주십시오.
  • Page 143 그 외의 주의 사항 그 외의 주의 사항(계속) 주 의 ● 냉각수에 대하여 • 냉각수는 잔류 염소 농도가 낮은(0.5ppm 이하) 물을 사용해 주십시오. 잔류 염소 농도가 높으면 유로 계통에 부식을 유발해 누수의 원인이 됩니다. 또한 온도 관리가 가능한 냉수 순환 장치의 사용을 권장합니다. •...
  • Page 144 그 외의 주의 사항 그 외의 주의 사항(계속) 주 의 ● 장치 본체와 PC 의 이더넷 연결에 대하여 장치 본체와 제어용 PC 는 이더넷으로 연결되어 있으며, PC 온보드의 네트워크 컨트롤러(RJ-45-J 인터페이스) 1 포트를 전용으로 사용합니다. 장치 사용 중에는 항상 장치와 PC 간에 통신을 실시하고 있습니다. 올바르게 네트워크 연결을 하지 않았을 경우, 통신...
  • Page 145 그 외의 주의 사항 그 외의 주의 사항(계속) 주 의 ● 네트워크 연결에 대하여 PC 에는 네트워크 연결을 위한 이더넷 포트가 갖추어져 있습니다. 이더넷을 이용한 네트워크 연결을 실시할 경우에는, 네트워크 환경에 대해 충분한 지식이 필요합니다. 네트워크 관리자와 상담한 후에 연결 작업을 실시해 주십시오. •...
  • Page 146 그 외의 주의 사항 그 외의 주의 사항(계속) 주 의 ● 컴퓨터 바이러스에 대하여 프로그램이나 데이터가 갑자기 고장나거나 손상을 입는 등 예상치 않은 동작이나 화면이 표시될 경우에는 PC 가 컴퓨터 바이러스에 감염되었을 가능성이 있습니다. 컴퓨터 바이러스란 PC 에 몰래 숨어들어 PC 를 자의적으로 조작하거나 데이터를 손상시키는 악성 프로그램을...
  • Page 147 Information about the attached chemical substances 부속화학물질에 관한 정보 (For Korea only) (한국대상) Information about the attached chemical substances 부속화학물질에 관한 정보 The attached chemical substances listed below do not correspond to the standard of classification of the harmful factor under the laws of Korea. 첨부된...

  • Page 148: Table Of Contents

    CONTENTS PREFACE PREFACE ................... PREFACE-1 ABOUT THIS MANUAL ..............PREFACE-1 IMPORTANT Leakage X-Ray Radiation from This Instrument ......IMPORTANT-1 Warranty on Product ..............IMPORTANT-2 Installation, Relocation, and After-sales Technical Service ....IMPORTANT-4 Disposal of Instrument ..............IMPORTANT-4 Disposal of Cooling Water Circulator (Option) ......... IMPORTANT-5 Disposal of Ion Pump (IP) Backup Power Supply (Option) ....
  • Page 149 CONTENTS Protection against movement caused by earthquake (Option) ..SAFETY-31 Main unit ................SAFETY-31 EO control unit ..............SAFETY-32 Step down Transformer unit (Option) ........SAFETY-33 Weight unit ................. SAFETY-34 Center of gravity on each unit ............SAFETY-35 Main unit ................SAFETY-35 EO control unit ..............
  • Page 150 CONTENTS 根据《电子信息产品污染控制管理办法》有关要求 ....... 环境-1 电子信息产品污染控制标志 ........环境-1 有毒有害物质或元素的名称及含量表示 ......环境-1 本产品的电子信息产品污染控制标志表示方法 ...... 环境-2 안전한 사용을 위해 안전 경고 기호와 표제어의 정의 ............안전-1 안전에 관한 공통적 주의 사항 ..............안전-2 사용 전 주의 ..................안전-2 설치, 보수, 장소 변경에 관한 주의 ............ 안전-3 사용...
  • Page 151 CONTENTS 1.1.6 Vacuum system ............1-4 1.1.7 Protections ..............1-4 1.1.8 Size and weight ............1-5 1.2 Installation requirement ............1-6 1.2.1 General ............... 1-6 1.2.2 Room temperature, humidity, altitude, contamination level and overvoltage category ....1-6 1.2.3 Power supply ............... 1-7 1.2.4 Ground terminal ............
  • Page 152 CONTENTS 2.3.6 Magnification ............... 2-16 2.3.7 Preset magnification ............. 2-17 2.3.8 Round off magnification ..........2-18 2.3.9 Alignment ..............2-19 2.3.10 Auto ................. 2-30 2.3.11 Run/Freeze ..............2-33 2.3.12 Scan ................. 2-34 2.3.13 Custom scan .............. 2-36 2.3.14 Image shift ..............2-37 2.3.15 RR (Raster Rotation) ...........
  • Page 153 3.1 Preparation ................3-1 3.1.1 Confirm the instrument condition ........3-1 3.1.2 Cooling water supply ............. 3-3 3.1.3 Startup SU8700 operation program ........ 3-5 3.2 Set a specimen ..............3-6 3.2.1 Caution on specimen preparation ........3-6 3.2.2 Setting a specimen to a specimen stub ......3-8 3.2.3 Set the specimen stub to the specimen holder ....
  • Page 154 4.9.5 Second condenser lens axis alignment ......4-24 4.9.6 Electron current mode setting lens axis alignment .... 4-25 4.10 Precaution on maintenance ..........4-25 5. Replacement parts (SU8700) 5.1 Consumables, life-limited pats, and spear parts ......5-1 5.1.1 Consumables ............... 5-1 5.1.2 Life-limited parts ............
  • Page 155 CONTENTS 6. Troubleshooting 6.1 When vacuum system does not work normally ......6-1 6.2 When the specimen chamber does not reach to the specified vacuum status ......6-1 6.3 When the vacuum status of electron gun is less than the specified value ............6-2 6.4 When emission current is not set to normal value .....

  • Page 156: Specification And Installation Requirements

    1. Specification and installation requirements 1.1 Specifications 1.1.1 Resolution ＊ 0.6 nm (15 kV accelerating voltage, WD = 3 mm, Photo magnification x 220,000) 0.8 nm (1 kV accelerating voltage, WD = 1.5 mm, Photo magnification x 180,000) 0.9 nm (0.3 kV accelerating voltage, WD = 1.5 mm, Photo magnification x 180,000) The resolution shall be measured on a resolution measurement specimen (Gold particle on carbon).

  • Page 157: Electron Optics System

    1.1 Specifications 1.1.3 Electron optics system (1) Electron gun: ZrO/W Schottkey emission electron gun (2) Extracting voltage (Vext): 1.50 to 3.00 kV (0.01 kV steps) (3) Accelerating voltage (Vacc): 0.10 to 30.00 kV (0.01 kV steps) Vb: On 1.00 to 30.00 kV (0.01 kV steps) Vb: Off (4) Suppressor (Vs): 400 to 700 V (5) Lens system:...

  • Page 158: Image Display

    1.1.5 Image display (1) Display method Display the image on the PC (2) Monitor for observing 23 inch or equivalent size of LCD (Display pixels: 1,920 x 1,080) (3) Image display mode Large display mode: 1,280 x 960 pixels 1 display mode: 800 x 600 pixels 2 display mode: 800 x 600 pixels...

  • Page 159: Vacuum System

    1.1 Specifications (8) Auto data display Comment, auto increment No., Accelerating voltage, WD value, detector name, magnification, FOV, date, time, micron marker, micron value display, vacuum status (when variable pressure unit option is equipped) (9) Data input Enable to input the text, numbers, and marks to the image by the keyboard. In addition, diagrams (circle, rectangle, arrow line) can be input to the image.

  • Page 160: Size And Weight

    1.1.8 Size and weight Size and weight (Width) × (Depth) × (Height) (Mass) Main unit 1130 (W) ×1100 (D) × 1800 (H) : About 670 kg EO control unit 710 (W) ×710 (D) × 1210 (H) : About 270 kg Weight 200 (W) ×160 (D) ×...

  • Page 161: Installation Requirement

    ● In case wind such as the air conditioning directly hits an instrument, image disturbance due to temperature change can be occurred. Avoid the airflow when capturing a high resolution SEM image. ● When installing the instrument at the high altitude location, contact to our service representative of Hitachi High-Tech Corporation.

  • Page 162: Power Supply

    NOTE: ● Installation of the step down transformer shall be carried out by service engineers trained and certified by Hitachi High-Tech Corporation only. It is not permitted for the customer to carry out the installation. ● Use of UPS: It is not recommended to use of UPS to the instrument and device which is connected to the instrument.

  • Page 163: Compressed Air

    1.2 Installation requirement 1.2.5 Compressed air When using compressed air supplied within the facility instead of using an air compressor, set the pressure range within 0.6 to 0.8 MPa (Gauge). Any entrained water or oil may lead to erosion of an electromagnetic solenoid valve or an air valve. Please equip an appropriate filter. 1.2.6 Water supply and drain The following water supply conditions should be satisfied.

  • Page 164: Stray Magnetic Field

    1.2.7 Stray magnetic field Measure the stray magnetic field at the place for installing the instrument in advance. When the requirements given in Table 1-2-1 are satisfied, no image trouble will occur. Avoid locations at which abrupt electric current change or magnetic field change might occur due to the presence of a large-sized magnetic clutch or power cable for other equipment.
  • Page 165 1.2 Installation requirement NOTE: ● The frequency component synchronous with power supply (AC magnetic field) is an effective value. Therefore, its allowable value should be multiplied by 2.8 for evaluation in terms of p-p (peak-to-peak) value. ● The DC magnetic field fluctuation stands for a rapid change in stray magnetic field with time lapse.

  • Page 166: Vibration

    1.2.8 Vibration The floor vibration of the installation site should be measured prior to installing the SU8700. When the measured values are satisfied Table 1-2-2, no image trouble will occur. When the instrument is installed on the location in a reinforced concrete or steel frame building and satisfies the table value, generally effect of vibration will be minimized.

  • Page 167: Power Line Noise And Electric Field Noise

    In case equipment energized by power of a frequency different from the commercial frequency employed on the SU8700 or the power line for it is located nearby, scan synchronization with power frequency will become ineffective. Such a location should be avoided.
  • Page 168 Table 1-2-3 External Noise Sources Classification Noise Source Source Equipment Small-sized Electric equipment Electric discharge Flasher (neon sign, ornamental electric having contacts (spark, arc) electric bulb), relay, electromagnetic equipment conductor, (general/hom thermostat (warmer, heater, e electrical refrigerator, iron), cash register appliance) Equipment utilizing Electric discharge...

  • Page 169: Disturbance By Sound Waves

    1.2 Installation requirement 1.2.10 Disturbance by sound waves Sound waves (vibrations of air) will adversely affect the instrument regardless of whether their frequency is high or low, causing image trouble. To prevent this, confirm before installation that no sonic disturbance source is located nearby. If there is any sonic disturbance source in the vicinity of the instrument, then check for noise level.

  • Page 170: Calorific Value

    This value can be calculated from the power consumption P [kW] of equipment by the following equation. Calorific value [kcal/h] = 0.24 × P × 3600 The SU8700 has the following power consumption and calorific value. Power consumption: 1.6 [kW] Calorific value: 1,390 [kcal/h] NOTE: ●...

  • Page 171: Site Requirement

    1.2 Installation requirement 1.2.13 Site requirement (1) Space required A room of about 3.9 × 3.5 m is required. (2) Dimensions of entrance 1.2 (W) × 1.8 (H) m or more (3) Durability of floor Floor strength (N/m Quantity of all facilities (kg) × 9.8 ≧...
  • Page 172 Recommend to use fixing tools after installation of the instrument. Relocation of the instrument is carried out by our service engineers of Hitachi High-Tech Corporation. Customers are not allowed to perform the relocation of the instrument. ● The Weight weighs about 25kg.

  • Page 173: Customer-Supplied Items

    1.3 Customer-supplied items 1.3 Customer-supplied items Prepare the items as shown in Table 1-3-1 prior to the installation. Table 1-3-1 Customer-supplied items Product Name Quantity Note Desiccator or dry storage box 1 set To storage the specimens and parts Ethanol 500 mL For cleaning the parts Conductive double-sided adhesive...

  • Page 174: Function

    2. Function External view of the SU8700 Scanning electron microscope.

  • Page 175: Parts Name

    2.1 Parts name 2.1 Parts name 2.1.1 External view of column The external view of column. Objective aperture Electron (Upper Detector) Specimen stage Condition display panel...

  • Page 176: Configuration Of Column

    2.1.2 Configuration of column The schematic sectional view of column. Electron gun Probe current mode Selectable lens First condenser lens Objective aperture (Electron gun isolation valve) Second condenser lens Booster electrode Upper detector Deflection coil Middle detector (Option) Lower detector Objective lens Specimen stage...

  • Page 177: Specimen Stage

    2.1 Parts name 2.1.3 Specimen stage X direction stage movable range: 0 to 110 mm Y direction stage movable range: 0 to 110 mm Z direction stage movable range: WD＝1.5 to 40 mm Specimen rotation angle R: 360 ° continuous Tilt angle (T): -5 °...

  • Page 178: Specimen Current Measurement

    2.1.4 Specimen current measurement In SU8700, probe current measurement function is equipped in the specimen stage. Do not connect other than the optional specimen bias unit. Cover unit Cable [CNIP] Standard connection...

  • Page 179: Vacuum System

    2.1 Parts name 2.1.5 Vacuum system The vacuum system diagram. IP1, IP2: Ion pump TMP: Turbo Molecular Pump DRP: Dry pump (Customer-supplied item) Electron gun isolation valve Specimen chamber SEC: Specimen exchange chamber AV2 to 4: Vacuum valve LV1, LV2: Leak valve PiG1: Pirani vacuum gauge FRG:...

  • Page 180: Condition Display Panel

    2.1.6 Condition display panel Condition display panel is arranged at front of the main unit. IP1, IP2: Indicate the operating condition of IP1 and IP2. The LEDs are ON during normal operation. FIL: Indicate the [Start up] condition of electron gun. The LED is ON when electron gun is ready to apply.

  • Page 181: Power Switch

    2.1 Parts name 2.1.7 Power switch Power switch is arranged at front of the main unit. EVAC POWER switch: Power ON/OFF the vacuum system. EOC POWER switch: Power ON/OFF the EOC (EO Control Unit) POWER switch. 2.1.8 Switch board on the instrument The switch board is arranged at rear side of the main unit.

  • Page 182: Manual Operation Panel

    2.1.9 Manual operation panel The following shows the manual operation panel. Image shift operation Scan operation Image adjustment area area area Magnification operation Astigmatism correction Focus control area area and axis alignment area (1) Magnification operation area MAGNIFICATION knob: Change the magnification. Rotate the knob to clockwise to increase the magnification.
  • Page 183 2.1 Parts name (4) Focus control area FOCUS COARSE/FINE knobs: Control the focus. The COARSE is for coarse adjustment and the FINE is for fine adjustment. The amount of focusing is linked to the rotating amount of knob. The focus can be controlled even when the magnification is changed.

  • Page 184: Trackball (Option)

    2.1.10 Trackball (Option) The following shows the trackball unit for moving the stage. XY switch Trackball Trackball: Move the FOV to the same direction as rotating the ball. The direction can be reversed. XY switch (Center): Move the FOV to X and Y directions. The FOV moves to the direction as rotating the ball.

  • Page 185: Ui Operation Display

    2.2 UI operation display 2.2 UI operation display The UI operation display configures the control panel, operation panel, sub panel, and image display area. Hide button Close button STOP button Menu button Control panel Control panel list Image display area Sub panel Operation panel ●...
  • Page 186 ● STOP button Stop the stage. ● LOCK button Lock the stage. ● Menu button Display the menu. Some operations and functions that are not arranged in the operation panel can be performed or selected from the menu. ● Control panel Control panel is arranged at upper area of the UI display.

  • Page 187: Control Panel Function

    2.3 Control panel function 2.3 Control panel function The following shows the functions categorized in the [Observation] on the control panel. 2.3.1 HV When accelerating voltage is ready to apply status (electron gun operating condition, vacuum status of electron gun and specimen chamber), the [ON] button will be enabled. Apply the accelerating voltage by clicking the [ON] button.

  • Page 188: Vacc

    2.3.3 Vacc Only the set accelerating voltage will be displayed for the Vacc. The [Optics] tab on the operation panel will be displayed in front by right clicking the mouse on the display area. STATUS Vacc HV ON HV OFF 2.3.4 WD Display the present WD (Working Distance: The focused position that is calculated by the objective lens current).

  • Page 189: Spot Intensity

    2.3 Control panel function 2.3.5 Spot intensity Display the set spot intensity. The [Optics] tab on the operation panel will be displayed in front by right clicking the mouse on the display area. The display will be change according to the HV condition as shown in the below. STATUS Spot intensity HV ON...

  • Page 190: Preset Magnification

    NOTE: ● The magnification display of image which is saved by the display magnification is kept at the display magnification. ● The magnification of data display for the image which is saved by display magnification is S-x display magnification (4 screen, 6 screen mode), M-x display magnification (1 screen, 2 screen mode), L-x display magnification (Large display, large display x 2 mode).

  • Page 191: Round Off Magnification

    2.3 Control panel function In addition, when operating the above mouse operation or rotating the MAGNIFICATION knob on the manual operation panel while the magnification is in the pre-set value status, the magnification value will be increased from the preset magnification, the PM will be disappeared, and the magnification status will not be in the [Pre Mag] status.

  • Page 192: Alignment

    2.3.9 Alignment (1) Alignment The alignment button can be selected by clicking the split button (▼) and selecting the [Beam] or [Aperture] button of electron optics axis alignment function. The alignments can be arranged on the control panel separately. The selected function will be allocated to the execute button.
  • Page 193 2.3 Control panel function (4) Alignment panel The [Alignment] panel can be displayed by selecting from the [Menu]>[Alignment]. Switch Manual/Auto Select the alignment Alignment operation area Stigmator display/operation area Condenser lens setting area Setting ● Switching the Manual/Auto Switch the Manual/Auto for the alignment. ●...
  • Page 194 ● Selecting the alignment (For Auto mode) Click each alignment button and perform the auto adjustment. When selecting the [Off], finish the alignment mode while tab is displaying. The ULV alignment is not applicable to the auto adjustment. By clicking the [Mode] button on the manual operation panel, the alignment becomes selectable from the beam alignment in order and the manual adjustment can be performed.
  • Page 195 2.3 Control panel function (5) Auto alignment parameter dialog ● Saving The alignment parameter saving dialog will be displayed by clicking the [Save] button. The set auto alignment parameter condition can be saved. Input the saving name in the text box and save it with the [Save] button. Up to 5 conditions can be saved. To save a new condition when reaching to the saving limit number, delete the unnecessary condition by the delete button.
  • Page 196 ● Loading The parameter loading dialog will be displayed by clicking the [Load] button. Select the condition name to load and click the Load button. The loaded condition on the auto alignment parameter dialog will be set. Delete the unnecessary conditions by clicking the [Delete] button.
  • Page 197 2.3 Control panel function (a) Beam tab ● Alignment change amount When performing the beam alignment, set the alignment coil change amount for moving to the FOV center direction as a relative value. ● Wait time Set the wait time until obtaining the image from the alignment coil change. ●...
  • Page 198 (b) Stigmator tab ● Stigmator change amount Set the change amount of stigmator adjustment coil as a relative value. ● Alignment change amount Set the change amount of alignment coil on the stigma Alignment as a relative value. ● Wait time Set the wait time of obtaining the image after changing the alignment coil.
  • Page 199 2.3 Control panel function Aperture tab ● Defocus coefficient The coefficient is for calculating the amount of focus moving amount on the aperture alignment. ● Alignment change amount Set the alignment coil change amount on the aperture alignment as a relative value.
  • Page 200 (d) Focus tab ● Auto Focus Control 1 ・ Execute magnification: The actual magnification of auto focus and the fixed present magnification ・ AFC/ASC: [Menu]>[Standard settings]>[AUTO] tab>[AFC/ASC] common settings. Display the parameter dialog of AFC/ASC by clicking the [Parameter settings] button. Refer to the standard settings for the contents of dialog.
  • Page 201 2.3 Control panel function ● Auto Focus Control 3 ・ Execute magnification: Set the execute magnification of Auto focus. ・ AFC: Select the focus search method. Zlink: Search the focus by centering the present stage Z position and specimen height setting position. Coarse ->...
  • Page 202 (e) Stigmator tab ● Auto Stigmator Control 1 ・ Execute magnification: The actual magnification of auto focus and the fixed present magnification ・ AFC/ASC: [Menu]>[Standard settings]>[AUTO] tab>[AFC/ASC] are common settings. Display the parameter dialog of AFC/ASC by clicking the [Parameter settings] button. Refer to the standard settings for the contents of dialog.

  • Page 203: Auto

    2.3 Control panel function 2.3.10 Auto Auto adjustment functions can be selected by the [AUTO] button. Click the split button (▼) and the function list for allocating to the button will be displayed as shown in the below. Select a function from the list and the execute button will be allocated to the selected function. Each auto function can be performed from the [Menu]>[Observation]>[Auto].
  • Page 204 ● ASC Perform the astigmatism correction automatically. ASC can be arranged on the control panel independently. ● ABA Perform the beam alignment automatically. Perform the detection by the Upper detector (UD) or Lower detector (LD). ● ASA Perform the stigmator alignment automatically. ●...
  • Page 205 2.3 Control panel function ● AA-Seq Perform each auto function continuously. Auto alignment sequence dialog will be displayed by clicking the AA-Seq button. Setting Select a performing auto function from each pull down list and perform it with the Execute button.

  • Page 206: Run/Freeze

    2.3.11 Run／Freeze Stop and start the scanning. Stop the scan by clicking the button while scanning. When clicking the button, “Going to Freeze” indicates at the left top on an image until scanning is stopped and “Freeze” indicates when scanning is stopped. In case that scanning speed is slower than Slow3, a message of “Freezing”...

  • Page 207: Scan

    2.3 Control panel function 2.3.12 Scan Switch the scan speed by clicking scan speed button. The indicator indicates the followings. Light green: Present scan Dark green: The scan that will be selected when clicking the mouse Right click the mouse on the scan speed button and display the scan button setting dialog. Allocate the scan speed to each button and set the integration (Average) frame number of the Rapid or Fast scan in this dialog.
  • Page 208 (a) Select Buttons tab The [Select Buttons] that can allocate the scan speed to the buttons are arranged at the bottom of the four buttons. The scan speed of each button is limited as above. ● Switch between Slow and CSS Select either of Slow scan or CSS scan.

  • Page 209: Custom Scan

    2.3 Control panel function 2.3.13 Custom scan Set the duel time of scan in the [Custom scan]. (1) [Custom] button Switch from normal scan to custom scan by clicking the [Custom] button. When clicking the button again, the scan will be switched to normal scan. Display the [Custom scan] panel on the [Sub panel] in the front by right clicking the mouse on the button.

  • Page 210: Image Shift

    NOTE: ● Up to 180 minutes of scanning time can be set. When the time of 180 minutes is exceeded, the following error message will be displayed. Set the scanning time within 180 minutes according to the message. ● It may take time to start scanning when switching the dwell time. 2.3.14 Image shift Move the observing field of view by shifting the irradiation point of electron beam.
  • Page 211 2.3 Control panel function (2) Raster rotation panel Operate the raster rotation. Rotate the scanning direction of electron beam and change the direction of image. Raster rotation panel can be displayed from the [Menu]>[Observation]>[Raster rotation]. ● Rotation ON/OFF check box Check the rater rotation check box ON for enabling the raster rotation function.

  • Page 212: Histogram

    2.3.16 Histogram Display the [Histogram]<[Sub panel]. Histogram can be referred for controlling the image contrast and brightness manually. The Histogram panel can be displayed from the [Menu]>[Observation]>[Histogram]. (1) Real time tone curve correction check box Enable the real time torn curve correction. Calculate the histogram without correcting the tone curve and display the corrected histogram in light blue color.
  • Page 213 2.3 Control panel function (2) Real time gamma (γ) correction check box Enable the real time γ correction. Calculate the histogram that is before correcting the gamma and display the corrected histogram in light blue color. Real time gamma correction can be set different value for each display during multi-screen mode. When gamma correction is enabled, the [Run γ] is displayed at the upper right of image while running, the [Freeze γ] is displayed at the upper right of image while freezing.

  • Page 214: Saving

    2.3.17 Saving Save an image that is presently displaying. In case that the image is scanning, the image will be the freeze condition and the image will be captured after the scanning is stopped. When the image is in the freeze condition, the image will be saved as it is. The saving condition (Saving destination, image information and file type) can be set in [Saving condition setting] dialog which can be displayed by right-clicking the mouse on [Save] button.
  • Page 215 2.3 Control panel function (2) Saving settings window (a) Capture settings tab Select scan mode ● Link to scan Check box Set the capturing parameter while the check is OFF. Select the scan mode, image size, and speed/Integration number. Set the scan mode that is linked to the present scan image setting for capturing while check is ON.
  • Page 216 ● Drift correction integration Check box This function can control the deterioration of resolution that occurs due to image integration processing when the observing target is slowly moved (Drift). The larger the FOV shift amount, the greater the burr generated on the integration result image by integrating the shifted image.
  • Page 217 2.3 Control panel function ● DCI settings Click the button and display the drift correction integration settings dialog. ・ Background color Select a color of surround area on the drift correction image. Change the settings to distinct the color between the data display text or background color and the filled area color.
  • Page 218 ・ Display template area Check ON the check box and display the frame indicating the template area on the image display area. The frame indicating the template area can be changed by the color button. ・ Reset Set all settings to the default settings. ・...
  • Page 219 2.3 Control panel function (b) Save setting tab Saving destination block ● Display [Save As] dialog When [Show image save dialog when saving] in the [Saving settings] window is selected, the [Save As] dialog is displayed whenever the [Capture/Save] is executing.
  • Page 220 ● File name, folder name and input text box Select a folder for saving and the file name. Click ▼ button at the text input box, the list of folder and file names that are used are displayed. The name can be edited by selecting from the list. ●...
  • Page 221 2.3 Control panel function Reference: Image will be saved as below depending on the combination of radio button and check box. Radio button: ON Display [Save As] dialog Name and Save the file automatically When saving an image, [Save As] dialog is displayed.
  • Page 222 Data display tab Set the function for displaying the data such as observation condition in the bottom of the image. ● [Data display] check box Items that are activating are displayed while the check box is ON. When the check box is OFF, all of the auto data displays are hidden. ●...
  • Page 223 2.3 Control panel function (d) Image processing tab Tru-Image can repair the burr on image which is generated depending on the electron optical condition or contrast deterioration. By enabling this function, perform the Tru-Image and save an image file depending on observation condition (Accelerating voltage, WD, Spot intensity, Specimen height, image size, magnification) while Capturing/saving.

  • Page 224: Capture

    2.3.18 Capture Capture an image (Import and save the image with the set image size and scan speed). [Capture settings] window is displayed and image size, scan speed and number of integration can be set by right clicking the mouse on the capture setting display area. The [Capture settings] window can be selected from [Menu]>[Capture settings].

  • Page 225: High Resolution Capture

    2.3 Control panel function 2.3.19 High resolution capture (1) Execute button Capture a high resolution image. Display the [Capture High resolution] dialog in the [Sub panel] by right clicking the mouse on the button. [Capture high resolution] window can be selected from the [Menu]>[Observation]>[Capture High definition].

  • Page 226: Image List

    Image size Select an image size for capturing with high definition from the pull down list. Refer to the [～nm/pixel] for the length of each pixel and define the image size. 20480×15360 and 40960×30720 are options. (d) Dwell time Select dwell time for one pixel while capturing high definition image for the pull down list.
  • Page 227 2.3 Control panel function Multiple viewer can be opened and displayed on front of the desktop. This function can be used for referring and operating the previous capture image while observing the same FOV image in the different conditions. The [Select] button is arranged at the top of dialog for selecting the display size.
  • Page 228 (b) Display from the image list to image display area An image on the image list can be display to the image display area by dragging & dropping the image to the image display area that NONE is selected on the Select detector.
  • Page 229 2.3 Control panel function Cond Open [Register] dialog in the [Observation condition] and register the observation conditions of the selected image. It cannot execute while selecting multiple images. (g) IPI Set the settings by clicking ON the IPI transfer check box from the [Menu]>[Standard settings]>[General] tab.

  • Page 230: Stage Assist

    2.3.21 Stage assist Display [Stage assist] dialog in [Sub panel]. The [Stage assist] panel can be selected from [Menu]>[Observation]>[Stage assist]. (1) Step counting tab (a) Step counting check box The mouse pointer while moving the mouse on the image display area will be cross mark by setting ON the step count check box.
  • Page 231 2.3 Control panel function (b) Up to The following message will be displayed when the count value is same as the value which is input in the counter value or larger. The operation can be continued by clicking the OK button. (C) Count The count value will be increased at every time of clicking the mouse on the image by set unit.
  • Page 232 Number of Step move text box ● [Number of Step move] text box Perform the step move for the input number which is input in the [Number of Step move] text box. ● [Go] button Perform the step move continuously. ●...
  • Page 233 2.3 Control panel function ● Move to the start point when the backlash is remained, the point will not be moved to the center of display since the moving amount by the count operation is small. At first, move it about 10 to 20 μm to the opposite direction for moving.
  • Page 234 (2) Constant move tab (a) Constant move Check box The mouse pointer while moving the mouse on the image display area will be constant move mark by setting ON the constant move check box. The stage will be moved as the image moving along to the drawing red line by moving the mouse to desired direction while pressing and holding the left button of mouse at the desired position on the image and releasing the button (The direction will be indicated in red line) .

  • Page 235: Display Mode

    2.3 Control panel function NOTE: ● The other stage operation cannot be performed while performing the constant move. In addition, the moving speed on the image will be changed in proportion to the magnification when changing the magnification since the stage moving speed is defined when starting up.
  • Page 236 (2) 2 screens mode (800x600 pixels) The 800×600 pixel size of images are arranged side by side in the 2 screens mode. Two different kind of signal images can be observed simultaneously. [Run/Freeze] and [Capture/Save] buttons are arranged at the upper left side on each image.
  • Page 237 2.3 Control panel function (6) Full screen x2 mode (1,280x960 pixels)(For 2 monitor mode only) The 1,280x960 pixels of images are displayed in the full screen x2 mode. Two different kind of signal images can be observed simultaneously. However, the image are displayed by fixed condition (It does not in the floating condition) under the full screen x2 mode.

  • Page 238: Exchange Specimen

    2.3.23 Exchange specimen When clicking the [Exchange specimen] button, the [Exchange specimen] dialog as shown in the below is displayed in the front and the stage will be moved to the specimen exchange position. When the accelerating voltage is ON, the voltage will be turned OFF automatically and specimen exchange sequence is started.

  • Page 239: Observation Condition

    2.3 Control panel function 2.3.24 Observation condition The observation condition can be loaded by performing the condition setting of electron optics and axis alignment then, registering the settings. Execute the function that is arranged in the execution button. Click the split button (▼) and the pull down list is displayed as shown in the below. (1) Register Display the [Observation condition_Register] dialog by selecting the [Register] from the pull down list.
  • Page 240 (2) Read button Display the [Observation condition_Read] dialog by selecting the [Register] from the pull down list. The dialog can be displayed from the [Menu]>[Observation]>[Observation condition_Read]. The registered observation condition and images are displayed in the dialog. In addition, the recommended condition can be registered in advance. Select a file name to read from the observation condition list.
  • Page 241 2.3 Control panel function NOTE: ● Recommended condition 01 to 05 is the condition that is initial registration of shipment. ● If the registered system condition and the system condition of Read condition are unmatched, the Read cannot be performed. Example: Display mode setting by the 2 monitor mode, usability of Specimen bias (option) or others.

  • Page 242: Sem Map

    2.3.25 SEM MAP Press the [SEM MAP] button and SEM MAP window as shown in the below is displayed in the front. The [SEM MAP] window can be selected from the [Menu]>[SEM MAP]. Image shift Image Navi Reset button Obtain button Menu button Select signal Register coordinate...
  • Page 243 2.3 Control panel function (6) Image Navi capture button Obtain the currently observing SEM image and display the image on the SEM Map display area. In addition, obtain the information of the position. NOTE: In case the magnification is higher than x2000 or number of image for loading is more than 40, the data cannot be loaded.
  • Page 244 (14) Coordinate registration button Display the [Coordinate registration] dialog. [No.] pull down list: Select the registered coordinate number. (b) [Comment] text box: Enter comment of the selected coordinate number. [Register] button: Register the stage coordinate that is observing. (d) [Move] button: Move the stage to the position of coordinate number that is selected at (a).

  • Page 245: Vacuum Mode Settings

    2.3 Control panel function (17) Detector display settings Select detectors (without directivity) for displaying on the SEM MAP window. 2.3.26 Vacuum mode settings The [Vacuum settings] dialog can be displayed from the [Menu]>[Vacuum mode settings] as well. The present vacuum status of specimen chamber is displayed. 2-72...

  • Page 246: Tilt Compensation

    2.3.27 Tilt compensation Press the [Tilt comp] button and display the [Tilt compensation] dialog in the [Sub panel]. The [Tilt compensation] dialog can be displayed from the [Menu]>[Observation]>[Tilt comp]. Correct the focus of tilting direction while tilting a specimen and the magnification by this button.

  • Page 247: Beam Marking

    2.3 Control panel function 2.3.28 Beam marking Click the [Beam Mark] button and display the [Beam marking] dialog. The dialog can be selected from the [Menu]>[Observation]>[Beam marking] as well. This function can irradiate the electron beam to the set point and performs the marking. (1) Beam Mark button Display the cross marker in light blue color on the image area and the beam marking window by clicking the [Beam Mark] button.

  • Page 248: Input Data

    2.3.29 Input data The [Data entry] dialog on the [Sub panel] is displayed. In addition, the [Data entry] dialog can be selected from the [Menu]>[Observation]>[Input data] as well. Text or graphic can be input on an image by this function. ●...
  • Page 249 2.3 Control panel function Select, edit: Click text and the background of the text is black out. Then, the text can edit. When pressing the [Enter] key, the text will be defined, and the text color will be blue. The position of text can be moved by the mouse operation. In addition, the position of graphics can be moved by clicking the mouse on the graphic.

  • Page 250: Undo

    ● [Select All] button Select all input data by clicking the [Select All] button. (The color of selected data is changed to blue). Selected text and graphic can be moved by the mouse operation. ● [Delete] button Delete the selected text and graphics. ●...

  • Page 251: Wobbler Settings

    2.3 Control panel function 2.3.31 Wobbler settings Display the [Wobbler settings] dialog. The dialog can be selected from the [Menu]>[Observation]>[Wobbler settings]. Set the wobbler amplitude and cycle for the aperture alignment, stigmator axis alignment X/Y in this dialog. Amplitude Indicator setting Reset button Standard/High resolution...

  • Page 252: Control Panel Settings

    2.4 Control panel settings The following shows the items that are categorized in the [Settings] on the control panel. 2.4.1 Control panel settings Press the [Ctrl Panel] and display [Control panel settings] dialog. The dialog can be selected from the [Menu]>[Control panel settings] as well. 2-79...
  • Page 253 2.4 Control panel settings Edit the control panel at the upper area of UI. The [Control panel settings] dialog can be displayed by right clicking the mouse on the list buttons in the Control panel. (1) Function list The function list that is selected from the [Observation]>[Settings]>[Maintenance] is displayed.
  • Page 254 (8) Add Add an item in the edit list. Select an item from the function list and click the [Add] button. The selected item is arranged in the edit list (Right side of the control panel). (9) Delete Delete an item from the edit list. Select an item from the edit list and click the [Del] button.

  • Page 255: Sub Panel Settings

    2.4 Control panel settings 2.4.2 Sub panel settings Display the [Sub panel settings] dialog. The dialog can be displayed by the [Menu]>[Sub panel settings] as well. Display the [Sub panel settings] dialog by pressing the button and edit the [Sub panel settings] dialog which is arranged around the image display area.
  • Page 256 (3) Default Press the [Default] button and set the edit list to the default condition. (4) Item Display the function names. (5) Block Indicate the displayed size of function on UI by Block. In the 1 or 2 screens mode, the number of maximum blocks for displaying on UI are 10 blocks.

  • Page 257: Manual Operation Panel

    2.4 Control panel settings 2.4.3 Manual operation panel Display the [Manual operation panel settings] dialog by clicking the button. It can select from the [Menu]>[Manual operation panel settings] or the manual operation panel button on the [Menu]>[Standard settings]>[General] tab. Set the functions that is performed by pressing a button or pressing and holding a button (more than one second) on the manual operation panel.

  • Page 258: Standard Settings

    2.4.4 Standard settings Display the [Standard settings] dialog. The dialog can select from the [Menu]>[Standard settings] as well. Operation environment settings or others can be performed in this dialog. The dialog separated by each function’s tabs. The tab required will be placed in front depending on the place where it is started up.
  • Page 259 Display the [User settings] dialog by clicking the button. The [User settings] button is displayed when logging-in with system administrator name (Default is ”SU8700”), and the [Password settings] button is displayed when logging-in with general username. Manual operation panel settings Display the [Manual operation panel settings] dialog by clicking the button.
  • Page 260 (2) Image display (a) Preset magnification Set the magnification of the [Pre Mag] button. Select magnification from the list or enter desired value. In addition, the current magnification can be registered by clicking the [Current magnification] button. In case the set value is out of the applicable range under the current condition, the magnification is set to the closest magnification value within the range.
  • Page 261 This function is restricted since the standard of observing magnification will be changed. This function can be enabled only when logging-in with system administrator username (The username is SU8700 at default) while starting up the SU8700 operation program. (3) Auto...
  • Page 262 (b) ABCC link While the check box is ON, ABCC is performed when probe current mode, spot intensity or accelerating voltage is changed. AFC/ASC Display the AFC/ASC parameter display by clicking the parameter setting button. 【AFC parameter setting】 It becomes easier to focus by switching magnification of AFC mode and setting the focus search method of Low magnification mode/high magnification mode manually.
  • Page 263 2.4 Control panel settings ● Mode switching magnification Set the magnification for switching the Low magnification mode/High magnification mode for AFC. ・ Low magnification mode Select the focus search method in the low magnification mode. Zlink: Search the focus by centering the present stage Z position and specimen height setting position.
  • Page 264 【ASC parameter setting】 It becomes easier to adjust the astigmatism by setting the ASC mode for each magnification range when performing the AST. Select the adjustment operation of ASC for each magnification range. Search the optimal adjustment value by changing the value from the present value in ASC. When the adjustment range is large, it is more effective when the initial shift is large.
  • Page 265 2.4 Control panel settings (4) Electron optics system (a) Raster rotation Correct the rotation of image due to the objective lens while changing the focus and match the stage moving direction of X axis and the horizontal direction of image constantly by enabling the [WD-Rotation] check box.
  • Page 266 (5) Stage (a) Motor drive Select the [On] for normal use. Select the [Off] radio button when an optional stage is equipped, and the standard motor drive does not use. The UI is designed by assuming that a standard stage is equipped.
  • Page 267 2.4 Control panel settings (b) Reverse mode Moving direction of stage can be reversed by the mouse operation on a display, trackball (Option) or joystick (Option). Enable the check boxes for reversing the moving direction (Example, when enabling the [Trackball/Joystick] check box, image will move to the right direction by rotating the trackball to the left direction).
  • Page 268 Z focus link The focus will be changed according to the move on Z axis by setting ON the check box. Focus is changed after moving the Z axis and degauss of lens is performed automatically by enabling [Run degauss at the end of Z motion] check box after Z axis is moved.
  • Page 269 2.4 Control panel settings Backlash cancel Position of pausing an image is shifted when moving the stage to the same coordinate value. That is called backlash. The backlash can be reduced by moving to the selected position from the same direction. In addition amount of backlash cancel can be selected from the [Number select box].
  • Page 270 (b) Mouse wheel Set the Magnification adjustment function which is operated by mouse wheel on the display image area. When the [Magnification] check box is ON, the function is activated. (7) Specimen exchange (a) Gate valve for the specimen exchange chamber Lock the gate valve of specimen exchange chamber other than the exchange position.

  • Page 271: User Account

    Display the [User settings] dialog. The dialog is displayed by the [Menu]>[Settings]>[User account]. Registering, editing, and setting of password for the new login name can be set in this dialog when logging in the system with system administrator username (“SU8700” when installing).

  • Page 272: Display Type

    2.4.6 Display type Type of image display can be changed. Click the [Display] button and display the image display area with float mode. The image display can be moved by dragging and dropping the mouse. The image display area will return to the previous image display position without the floating mode by clicking the [Display] button.

  • Page 273: Stage Calibration

    Perform the calibration related to the stage. Perform this function when the accuracy of stage function is deteriorated. This function will be displayed only when logging in by the administrator username [SU8700]. (1) Rotation center calibration (Administrator only) The calibration is performed for maintaining the accuracy of Eucentric rotation. Measure and correct the shifting amount between the axis of rotation center and the beam.
  • Page 274 Repeatedly, move the target structure to the center of scanning image then click the [Enter] button. The stage will rotate to 45° at each time. (g) When the angle of stage rotation is at 315°, click the [Enter] button. The calibration coefficient is calculated and displayed.
  • Page 275 2.4 Control panel settings After the stage is moved, move the target structure to the center of scanning image by operating the X and Y axes of stage then, click the [Enter] button at Tilt 40 °. The calibration coefficient is calculated and displayed. The calculated value indicates the shifting amount of specimen height from the standard position.

  • Page 276: Separator

    2.4.9 Separator Separate in the group for the control panel items. Structure the items of UI visually for the usability. 2-103...

  • Page 277: Control Panel Maintenance

    The following shows the items categorized in the [Maintenance] on the control panel. 2.5.1 Electron gun Display the [Gun control] dialog. The display is different in the administrator user (“SU8700” in the default status) and general user. The dialog can be displayed by the [Menu]>[Maintenance]>[Electron gun] as well.
  • Page 278 (1) Operation status Indicate the present value and setting value of the emission current, extraction voltage, suppression voltage, filament current and accelerating voltage. The setting value of applying to the electron gun can be changed. The booster voltage can be set to Auto/OFF (The operation can perform by the system administrator only except booster voltage).

  • Page 279: Electron Gun Baking

    2.5.2 Electron gun baking Display the [Gun baking] dialog. This function will be displayed only when logging in with the administrator username (“SU8700” in the default status). This dialog can be displayed from the [Menu]>[Maintenance]>[Electron gun baking] as well. (a) Baking time Set the baking time from the pull down list.

  • Page 280: Electron Gun Maintenance

    Remaining time Indicate the remaining time of baking. When the baking is finished, the display changes to the [Elapsed time] and indicate the time up to 10 h at maximum. 2.5.3 Electron gun maintenance Display the [Electron gun maintenance] dialog. The dialog can be displayed from the [Menu]>[maintenance]>[Electron gun maintenance].

  • Page 281: Adjustment Of The Objective Aperture Position

    2.5 Control panel maintenance The electron gun status and vacuum status can be confirmed. ● Switching the graph Switch the graph to display. ● Display/hide Select the items to display on the graph. ● Vacuum status Display a warning message when the ion pump power is OFF or the baking recommendation condition due to vacuum level deterioration.
  • Page 282 The beam will be ON in the condition of objective aperture adjustment position automatically and following dialog is displayed by selecting the [Yes]. Adjust the position according to the dialog. When pressing the [OK] button after adjusting the position, the conditions will be return to the previous conditions.

  • Page 283: Manual Alignment

    This dialog can be selected from the [Menu]>[Maintenance]>[Manual alignment]. This function will be displayed only when logging in with the system administrator username (“SU8700” in the default status). Display the manual alignment dialog by selecting the manual alignment. Perform the mechanical axis alignment, booster voltage OFF setting, aperture number settings and vacuum mode settings according to the dialog condition.
  • Page 284 When all conditions are finished, the indicator will be in light blue and the [Cancel] button will be changed to [Finish] button. Click the [Finish] button to finish it. The Learning alignment function update message will be display. Click the [Yes] button for updating as required. The manual alignment can be adjusted as many time as required.

  • Page 285: Vacuum Display

    2.5 Control panel maintenance 2.5.6 Vacuum display Click the [Vacuum] button and display the [Vacuum system] dialog. The dialog can be displayed from the [Menu]>[Maintenance]>[Vacuum display] as well. This dialog indicates the vacuum system diagram. The vacuum status of each part and amount of cooling water flow can be confirmed.
  • Page 286 (1) Vacuum system status Vacuum status indicates the status of vacuum system. Display the High vacuum mode or VP mode (Option). (2) Vacuum system diagram Display each vacuum status in colors (Light blue: vacuum condition, Orange: atmospheric condition) and the open or close condition of valve by symbols. Ready: Ready to high vacuum mode operation Low:...

  • Page 287: Maintenance Of Dry Pump

    With air flash function 2.5.8 SC (AIR/EVAC) Venting air or pump air to/from the specimen chamber. It can be performed by the [Menu]>[Maintenance]>[SC]>[AIR/EVAC]. NOTE: Please operate the SC (AIR/EVAC) according to the instruction of service engineer of Hitachi High-Tech Corporation. 2-114...

  • Page 288: Sem Maintenance Tools

    NOTE: ● Operate the SEM maintenance tools according to the instruction of service engineer of Hitachi High-Tech Corporation. ● When switching the language on the Japanese OS, the SEM maintenance tools will be displayed in Japanese.

  • Page 289: Maintenance Item

    2.5 Control panel maintenance 2.5.10 Maintenance item Display the [Part maintenance] dialog. The dialog can be displayed by the [Menu]>[maintenance]>[Part maintenance]. Explanation Alarm settings Display the maintenance information. (1) Condition Indicate the present condition by indicators. (a) Green: More than 3 months to the next scheduled date from the present date. (b) Yellow: Less than 3 months to the next scheduled date from the present date.
  • Page 290 (a) The status with yellow (b) The status with red (8) Updating It will be displayed only when logging in with the system administrator username (“SU8700” in the default status). The maintenance date and cycle of selected parts can be changed. 2-117...

  • Page 291: Operation Panel

    2.6 Operation panel 2.6 Operation panel The electron optics system condition, selecting a signal, Stage operation, other settings or operations are arranged by tabs. 2-118...

  • Page 292: Optics Tub

    2.6.1 Optics tab (1) Electron beam (a) HV Click the [ON] button and apply the accelerating voltage. Shut off the accelerating voltage by pressing the [OFF] button. The function is the same as the [HV] in the control panel. (b) Accelerating voltage Set the accelerating voltage.
  • Page 293 2.6 Operation panel Object aperture size Display the diameter of presently used object aperture. The smaller No. of aperture is set, the larger the aperture size becomes. Select an aperture size from the pull down list. Activate the aperture size change sequence and change the aperture size according to the sequence for minimizing the position shift.
  • Page 294 ● Faraday cup Move the stage to the selected coordinate value and registered at the Faraday cup position. When the stage is moving or has moved, the button change to the [Return]. When pressing the [Return] button, the stage move to the previous position.
  • Page 295 2.6 Operation panel (b) Faraday cup position Register or select the Faraday cup position. Select the stage coordinate No. and input the stage X, Y and R coordinate values then register the position with comments. The present value of stage can import to the stage coordinate. Select the stage coordinate No.

  • Page 296: Signal Tub

    2.6.2 Signal tub Selecting a detector, setting the detector condition, adjustment of each detector and mixing the signal can be performed in this tub. The following figure shows an example of 4 screens mode. However the same function for selecting a detector is placed at upper right of each screen.
  • Page 297 In addition, the value can be entered directly in the value display box (The value is applied by pressing the enter key). (2) Each detector setting Two detectors of UD and LD are equipped as a standard for SU8700. MD is an option. The setting items are different in each detector. (a) UD...
  • Page 298 (b) MD (Option) Dedicated settings are existed in the assist settings and detail settings. LPF settings Segment settings ● Segment setting Set the detecting segment of MD. Segment setting is displayed in the dialog. The setting display will be enlarged, and setting can be performed by clicking the segment settings.
  • Page 299 2.6 Operation panel ● LD bias Control the second electron collection efficiency at the LD bias setting area. Move the slider with the mouse or click the right and left button ( ) for performing the fine adjustment. Click the right and left area of bar knobs for performing the rough adjustment.

  • Page 300: Stage Tab

    2.6.3 Stage tab Priority axis select button Display the [Stage] tub on [Basic setting] dialog by right clicking the mouse in the stage tub and set each stage parameter. (1) Settings The settings button will be activated at the stage home position. Click the [Set] button for displaying the [Set Sample Height] dialog.
  • Page 301 2.6 Operation panel (4) Position memory Display the [Position memory] dialog. (5) Stage assist Display the [Stage assist] dialog. (6) Coordinate select move (a) X and Y axes operation area The X and Y boxes indicate the present coordinate value of stage X and Y axes. Input the value and move the stage to the desired position by clicking the [Enter] key or the [Go] button.

  • Page 302: Image Display Area

    2.7 Image display area The observing image, data display, scanning condition, Run/Freeze button, Save/Capture button, select detector, mouse operation button, Simple measurement button and marker button are arranged in the image display area. Run/Freeze button Save/Capture button Pin button Select detector Screen number...
  • Page 303 2.7 Image display area (5) Data display Display the data display of observation condition and micron marker. Right click the mouse for displaying the [Data display] tab on the [Saving condition settings]. The contents of the data display area can be changed by changing the setting. (6) Pin button The image display area position can be fixed by clicking the pin button while setting the image display area to flow by the display type function.
  • Page 304 (8) Simple measurement, Marker button Display the center marker setting and cross-marker setting buttons by clicking the marker setting display button. Simple measurement Center marker setting button Cross marker setting button Marker setting display button (a) Center marker button Click the button and display the center marker, which indicates the center of display with the crossed line.

  • Page 305: Operation

    (1) When the IP1 and IP2 lamps are OFF Power ON the IP breaker located at rear side of the main unit. Startup the SU8700 operation program and activate the IP1 and IP2 by pressing the [IPHV ON] button on the [Menu]>[Maintenance]>[Vacuum display]>[Vacuum system dialog].
  • Page 306 3.1 Preparation (2) When the FIL lamp is OFF Startup the SU8700 operation program and press the [Star-tup] button on the [Menu]>[Maintenance]>[Electron gun]>[Gun control dialog]>[Gun startup] for executing the startup sequence of electron gun. (3) When the EVAC and EOC lamps are OFF EVAC: Power ON (-) the EVAC power switch at right side of the main unit.

  • Page 307: Cooling Water Supply

    3.1.2 Cooling water supply Water is used for cooling the objective lens and TMP in this instrument. A value is equipped at the cooling water circulator inlet and the value is opened and closed by deactivating the EO Control Unit. If the EO Control Unit is activated that water cannot be supplied, a message of [Objective lens cooling water is insufficient or overheat of the objective lens coil is occurred.
  • Page 308 3.1 Preparation Seven lamps are arranged and one of the lamp is ON according to the water flow condition. LED7 (Red): 1.20 L/minutes or more LED6 (Blue): 1.05 L/minutes ←Maximum LED5 (Blue): 0.90 L/minutes LED4 (Blue): 0.75 L/minutes ←Adjust position (Adjust the water flow to ON this lamp) LED3 (Blue): 0.60 L/minutes LED2 (Blue): 0.45 L/minutes ←Minimum LED1 (Red):...

  • Page 309: Startup Su8700 Operation Program

    3.1.3 Startup SU8700 operation program (1) Activate the OS and start up the SU8700 operation program by clicking the SU8700 operation program icon. (2) Click the SU8700 operation program icon and display the log in window. (3) Enter the login name and password then, click the [OK] button. The SEM operation window will be displayed.

  • Page 310: Set A Specimen

    3.2 Set a specimen 3.2 Set a specimen 3.2.1 Caution on specimen preparation Note the followings descriptions while fixing a specimen to a specimen stub. NOTE:● Do not touch the specimen or specimen stub with bare hands. Make sure to wear clean gloves for handling.
  • Page 311 300 times of discharging or less. If more than 300 times of discharging are occurred, replacement of Middle detector is recommended. Please contact a service engineer of Hitachi High-Tech Corporation. The times of discharging can be confirmed at Vb Error counter in [Menu]>[Maintenance]>[Electron gun]>[Gun control dialog].
  • Page 312 3.2 Set a specimen 3.2.2 Setting specimen to stub The specimen preparation method is different depending on the different materials. Listed below describes the typical specimen preparation methods. (1) Prepare a specimen. Prepare a suitable size of specimen stub that can accommodate the entire specimen. The maximum diameter size of specimen is 6-inch.

  • Page 313: Set The Specimen Stub To The Specimen Holder

    3.2.3 Set the specimen stub to the specimen holder (1) Set the specimen stub to specimen holder. Assemble the adjustable screw, lock nut and specimen holder then, fix the specimen stub to the adjustable screw part. Specimen stub Adjustment screw Lock nut Specimen holder Hook...

  • Page 314: Operation Method Of Specimen Exchange Chamber

    3.2 Set a specimen NOTE: ● Make sure to set the parameter properly. It can cause of damaging the detectors in the specimen chamber, structure, or specimen due to setting improperly. ● Make sure to carefully set the specimen height so that it does not higher than the height gauge.
  • Page 315 The specimen exchange chamber is moved to front and back along with the rail. Hold the specimen exchange chamber with both hands from right and left sides and move it to front and back while opening and closing. It indicates the specimen exchange chamber. SET LED OPEN button AIR button...
  • Page 316 3.2 Set a specimen (4) EVAC button Pump air from the specimen exchange chamber. When the specimen exchange chamber is in vacuum status, the button LED will be ON in green. When the specimen exchange chamber is in the air condition, the button LED is OFF.

  • Page 317: Operation Display Of Specimen Exchange Chamber

    3.2.5 Operation display of specimen exchange chamber When clicking the [Exchange specimen] button, the [Exchange specimen] dialog as shown in the below will be displayed in front. When the accelerating voltage is ON, the voltage will be OFF automatically, and specimen exchange sequence will be started. Specimen exchange can be performed from the [Menu]>[SEC].

  • Page 318: Operation Of Specimen Exchange

    3.2 Set a specimen 3.2.6 Operation of specimen exchange (1) Click the [EXC] button to insert a specimen. The specimen stage will be moved to the specimen exchange position by clicking the button. (2) Display the [Exchange specimen] dialog. Select a specimen size to use. NOTE: Make sure to set the parameter properly.
  • Page 319 (b) Draw out the specimen exchange chamber. Specimen exchange chamber NOTE: Do not open or close the specimen exchange chamber by holding the specimen exchange rod. The specimen exchange rod will be bended and the specimen exchange will not be performed. Facing up the UNLOCK on the specimen exchange rod and adjust the hole of specimen holder to the tip of specimen exchange rod.
  • Page 320 3.2 Set a specimen (d) Facing up the LOCK on the specimen exchange rod and confirm that the specimen holder will not be come off by pulling out the holder. Specimen exchange rod (LOCK) Specimen holder mounting condition NOTE: Make sure that the LOCK on the specimen exchange rod is facing up after attaching the specimen holder to the tip of specimen exchange rod.
  • Page 321 (g) After loosening the lock screw, insert a specimen exchange rod to the receiving part of specimen holder until the insertion detection lamp on the specimen exchange chamber operation area is ON while viewing inside. Insertion detection lamp Lock screw Specimen exchange rod insertion detection lamp NOTE: ●...
  • Page 322 3.2 Set a specimen (4) Remove a specimen when the specimen is in the specimen chamber (a) Press the OPEN switch on the specimen chamber operation area on the specimen exchange chamber. The gate valve will be open after the specimen exchange chamber is in the vacuum condition.

  • Page 323: Start Sem Observation

    3.3 Start the SEM observation NOTICE: When observing an insulating specimen with a projection part (Dielectric material) or a field-emitting specimen (such as a carbon nanotube), the specimen may discharge due to the electric field of objective lens. The scintillator of Middle detector (Option) can be damaged, and observation cannot be performed when the discharge is occurred repeatedly.

  • Page 324: Electron Optics System

    3.4 Electron optics system 3.4 Electron optics system 3.4.1 Accelerating voltage settings Display the accelerating voltage value list by clicking the button at the right side of the accelerating voltage select box on the [Operation] panel >[Optics] tub >[Electron beam]. Select an accelerating voltage value from the list.
  • Page 325 (b) Set the spot intensity The spot intensity can be adjusted 100 times of probe current from the minimum to the maximum. The larger the value, the larger probe current will be. The standard value is 30. (2) Objective aperture (APT-Size) settings Four different diameters of objective movable aperture are available.
  • Page 326 3.4 Electron optics system (b) The following dialog will be displayed by selecting an aperture size from the pull down list. Perform the beam alignment according to the dialog. When the beam alignment is completed, press the [OK] and move to the next operation. Click the [Cancel] for canceling the aperture size changing.
  • Page 327 (d) Adjust the aperture position according to the adjustment dialog for the objective aperture position. 3-23...

  • Page 328: Focus Settings

    3.4 Electron optics system 3.4.3 Focus settings Click the triangle button at the WD value in the [Operation panel]>[Optics]>[Probe current] and select the WD value from the list then, the focus is controlled for the WD, and the optimized electron optical condition of objective lens is set. In addition, current focus position of WD is displayed in this area by adjusting the focus knob.

  • Page 329: Align The Electron Beam Axis (Alignment)

    3.4.4 Align the electron beam axis (Alignment) (1) Display the electron beam alignment dialog Alignment dialog can be displayed by the following two methods. (a) Display the dialog from GUI ● [Menu]>[Alignment] ● [Sub panel]>[Alignment] ● [Operation panel]>[Alignment] /[Beam]/[Aperture] button (b) Startup from manual operation panel Startup the alignment panel by pressing the STIGMATOR/ALIGNMENT MODE button on the manual operation panel.
  • Page 330 3.4 Electron optics system (2) Beam alignment Align the beam to through the center of the objective lens movable aperture. In case that this alignment is carried out improperly, probe current may be insufficient. (a) Display the alignment panel. (b) Click the beam button and the scan image becomes circle. Adjust the contrast for changing the brightness.
  • Page 331 Adjust the circle image to the center of the display by operating the STIGMATOR/ ALIGNMENT knobs on the manual operation panel or move the cross marker by dragging the mouse in the alignment dialog. When adjustment is finished, release the beam alignment by clicking the [Release] button and close the dialog by clicking the [x] button.
  • Page 332 3.4 Electron optics system NOTE: ● In case greatly changing the focus, click the [Degauss] button in the [Optics] tub in the operation panel then, perform the alignment. ● Aperture alignment cannot be performed accurately under the low magnification condition (10,000 or less). Carry out the rough alignment in the low magnification then, perform the alignment in the high magnification.
  • Page 333 NOTE: The stigmator alignment may cause degradation of the aperture alignment. Perform the aperture alignment again after completing the stigmator alignment (X/Y). Aperture alignment will not effect to the stigmator alignment. (5) ULV alignment (Correction function for off-axis chromatic aberration) The preferable resolution can be obtained while observing a specimen in low accelerating voltage and the slightly shifting the optical axis from the condition that minimizes the wobbling of image by the aperture alignment mode This correction function can be used...

  • Page 334: Operating The Specimen Stage And Moving The Observing Fov

    3.5 Operating the specimen stage and moving the observing FOV 3.5 Operating the specimen stage and moving the observing Move the field of view (FOV) by changing the stage and electron beam scan positions. The mechanical coordinate (stage coordinate) of stage and the coordinate value on the specimen (Specimen coordinate) methods are available for displaying the coordinate value.
  • Page 335 NOTE: Use the [Backlash cancel] when position reproducibility is required. Use the [Drift cut] when stopping accuracy is required. The buttons for the backlash cancel and drift cut will be displayed in the stage tub on the operation panel by enabling the [Display Operation panel] check box of each item in the [Menu]>[Standard settings]>[Stage] tub.
  • Page 336 3.5 Operating the specimen stage and moving the observing FOV NOTE: ● Make sure to set the specimen size, height, and detector properly. It can cause of damaging the objective lens or specimen. ● Release the stage lock while operating the Z and Tilt. When the stage is locked, Z and Tilt cannot be operated.
  • Page 337 (3) Mouse operation on an image Display the control on an image and operate the stage. (4) Operation on the SEM MAP Move the stage by clicking or dragging the mouse on the SEM MAP. In addition, the stage can move to the registered position that is registered at the [Coordinate registration] in the SEM MAP Menu button.
  • Page 338 3.5 Operating the specimen stage and moving the observing FOV (5) Trackball (Option) The image is moved to the rotating direction of the track ball. The stage moving amount by rotating the ball is linked to the image magnification and it is moved greatly in the lower magnification.

  • Page 339: Movable Range Of Each Axis

    3.5.3 Movable range of each axis The following table shows the movable range of each axis and specimen exchange position. Movable range Specimen exchange position* -35 to 75 mm 0 mm -55 to 55 mm 0 mm 0 to 359.9 ° 0 °...

  • Page 340: Stage Movable Range

    3.5 Operating the specimen stage and moving the observing FOV 3.5.4 Stage movable range (1) Specimen size and stage movable range The movable area of specimen stage is limited by the specimen size. The movable range is set based on the following descriptions. (a) When the specimen stub size is Φ...
  • Page 341 (2) Observation range The following shows the observation range of each specimen size. The X, Y observation range of each specimen size (Without optional detector) 4inches specimen 3inches specimen (-35, 50) (50, 50) (-35, 37.5) (37.5, 37.5) Observable area Observable area (0, 0) (0,0) Observable...
  • Page 342 3.5 Operating the specimen stage and moving the observing FOV In this instrument, when setting the coordinate of X or T axis, the other movable range is calculated as shown in the below. Refer the instruction manual of optional detector regarding the movable range of the optional detector.

  • Page 343: Moving The Observation Fov By The Image Shift

    Φ5 mm Φ8, 10, 15 mm, φ1 inch Φ2 to 6 inch, 4 to 6 inch Mask Movable range of T axis to the Z axis coordinate (Minus tilting angle, specimen height at 0 mm) 3.5.5 Moving the observation FOV by the image shift This function is possible to shift the irradiation position of electron beam and move the observing FOV.

  • Page 344: Rotating The Fov

    3.5 Operating the specimen stage and moving the observing FOV 3.5.6 Rotating the FOV Rotate the FOV by using the raster rotation. Raster rotation is enabled by clicking the [RR] button on the control panel, or enabling the [ON] check box in [Sub panel settings]>[Raster rotation]. 3.5.7 The magnification setting The following shows the methods of setting the observing magnification.

  • Page 345: Magnification Range

    (3) Use the Preset magnification Click the [Control panel]>[Preset] button and the magnification will be set to the Preset value. Click the [Preset magnification] button and the button is changed to [Back]. The magnification can be changed to the previous value by clicking the [Back] button. NOTE: In case that the preset magnification is out of the maximum or minimum range under the current condition, the magnification will be set to the closest magnification that can be set.
  • Page 346 3.5 Operating the specimen stage and moving the observing FOV (2) Booster voltage: Magnification range of OFF Vacc[kV] WD range [mm] ≦10 ≦15 ≦20 ≦25 ≦30 WD<1.3 1.3≦WD<1.8 1.8≦WD<2.8 2.8≦WD<3.8 3.8≦WD<4.8 4.8≦WD<5.8 5.8≦WD<6.8 6.8≦WD<8.8 8.8≦WD<10.8 10.8≦WD<12.8 12.8≦WD<15.8 15.8≦WD<20.8 20.8≦WD<25.8 25.8≦WD<30.8 30.8≦WD<35.8 35.8≦WD<40.8 40.8≦WD...

  • Page 347: Observing A Specimen

    3.6 Observing a specimen The following shows the required setting and operation for observing a specimen.. 3.6.1 Selecting a detector Select a detector to use from the [Operation panel]>[Signal] tub or upper area of the image display. Two detectors (Upper detector/Lower detector) are equipped as a standard. Middle detector (Option) can be equipped.

  • Page 348: Scan Speed Setting

    3.6 Observing a specimen 3.6.2 Scan speed setting Select a scan speed (scanning speed of electron beam) for observing and obtaining an image. (1) Scan/stop operation The Scan/Stop operation can be performed by the [Run/Freeze] button. The [Run/Freeze] button is located at the upper part of the image display. The [Run/Freeze] button located at the upper part of image display performs the scan/stop operation.
  • Page 349 (b) Fast scan mode (Fast1/2) Perform the scan with the half speed of the rapid scan. The number of integration frames can be set by the [Scan button settings] dialog. The following table shows the speed of Rapid scan and Fast scan mode. NOTE: In the Fast scan mode, the uniformity of the magnification between the center of display and the left area is deteriorated compared with the slow scan.
  • Page 350 3.6 Observing a specimen (d) Slow scan mode (Slow3/4/5/6/7) Create an image with two dimension for each time by scanning the electron beam slowly and integrating the signal for each pixel. This mode is rarely affected by the disturbance of power frequency. Slow 3/4/5/6/7 Scan speed (Unit: Second/Frame) Screen mode Scan...
  • Page 351 NOTE: ● Since the CS scan performs to the horizontal direction with high speed, the image may be shifted to horizontal direction on the optional detector whose frequency band is narrow (semiconductor type backscattered electron detector, etc.). ● Images of CS scan blur more comparing to the image of Slow scan when images are wobbling due to stray alternating magnetic fields.

  • Page 352: Controlling The Brightness And Contrast Of An Image

    3.6 Observing a specimen 3.6.3 Controlling the brightness and contrast of an image The brightness and contrast of image can be controlled automatically or manually. Generally, control the brightness and contrast of image automatically then, perform fine control manually. (1) Auto brightness & contrast control (ABCC) (a) Perform the brightness &...

  • Page 353: Focusing And Astigmatism Correction

    3.6.4 Focusing and astigmatism correction Focus and correct the astigmatism by automatically or manually. (1) The method of focusing and correcting the astigmatism Focusing and astigmatism correction are related and repeating of focusing and correcting the astigmatism are required alternatively. The finer adjustment of focusing and astigmatism correction is required in the high magnification and low accelerating voltage.
  • Page 354 3.6 Observing a specimen (2) Auto adjustment (a) Focus (AFC) Press the [AFC] button on the [Control panel] and execute focusing automatically. (b) Astigmatism (ASC) Press the [Control panel]>[ASC] and execute the astigmatism correction. AFC/ASC parameter settings Display the AFC/AST parameter setting dialog from the [Menu]>[Standard settings]>[Auto] tub.
  • Page 355 Setting for changing the searching range by the magnification is possible in AFC. The searching range is wider in order of Zlink>Coarse>Middle >Fine (The order of searching range for Zlink can be different due to the change of accelerating voltage and stage height).

  • Page 356: Recoding An Image

    3.7 Recoding an image 3.7 Recoding an image The observing image can be saved as an image file (bitmap, TIFF, TIFF (16bit), JPEG format). Select the [Save] for saving the presently observing image. Select the [Capture] for saving an image with the condition that is previously set. In addition, the obtained image can be confirmed on [Menu]>[Observe]>[Image list].

  • Page 357: Operation Of The Manual Operation Panel

    3.7.4 Operation of the manual operation panel The image saving and image capture operations can be operated from the manual operation panel. Image saving (3.7.2): SAVE button Image capture (3.7.3): CAPT button Press/Press and hold (more than 1 second) the button to set the image saving and capturing method as required.

  • Page 358: Stopping Operation

    3.8 Stopping operation 3.8 Stopping operation Perform the following procedures to stop the system when the observation is finish, 3.8.1 Shutting down the accelerating voltage (1) Close all displaying windows with required processes. (2) Click the electron beam OFF in the electron optics system tub on the operation panel and set OFF the accelerating voltage.

  • Page 359: Finishing Operation

    3.8.3 Finishing operation Exit the SU8700 operation program and OS then, power OFF the computer and display. (1) The message for confirming of finishing is displayed by clicking the close button on the SU8700 main window. The SU8700 operation display will be closed by clicking the OK button.

  • Page 360: Maintenance

    4. Maintenance Table 4 shows the maintenance and inspection items that must be carried out periodically to insure the continued proper operation of the instrument. NOTE: The maintenance or/and inspection items shall be carried out by service engineers only. Table 4 Periodical maintenance and inspection items * “U”...

  • Page 361: Maintenance Of Electron Optical Column

    The periodical maintenance of the following parts that are used in this instrument is required. Update the maintenance date after performing the maintenance according to the following procedure. Only administrator user (Login name : SU8700) can update the maintenance date. Please contact a service engineer for performing this maintenance.

  • Page 362: Maintenance Of Dry Pump (Option)

    4.3 Maintenance of dry pump (Option) The periodical maintenance of dry pump is required. Please perform the required periodical maintenance depending to your dry pump. The maintenance of dry pump is available at charge. The following message will be displayed when the setting maintenance date of dry pump is expired when starting up the SEM.

  • Page 363: Remove The Contamination Or Moisture

    (It is recommended by pump manufacturer). If the dry pump requires atmospheric pressure operation, our service engineer of Hitachi High-Tech Corporation perform the setting during the installation. ● When it is operated at the first time after installation ●...
  • Page 364 (1) Click the [DP maintenance] button on the control panel item and display the following dialog. (2) Click the [Execute] button in the [Air flash]. (3) The following confirmation message will be displayed. Click the [OK] button to start the air flash procedure.

  • Page 365: Operation At Power Failure And For Complete Shutdown Of Instrument

    4.4 Operation at power failure and for complete shutdown of instrument 4.4 Operation at power failure and for complete shutdown of instrument (1) Finish the SEM observation, remove the specimen and vent air to the chamber. (2) If the detectors of the third party vendor products are installed to the SEM, retract the detectors.

  • Page 366: About Shutting Down The Electron Gun

    4.4.1 About shutting down the Electron gun The electron source of SU8700 is a Schottky emitter type. The emission current is extracted by applying an extracting electric field to the emitter point heated to about 1700 K. In normal operation, maintain the instrument as started and use is continuously. Perform the shut down and start-up operation described below only when the instrument will not be used for a long period or a full-off of the power.

  • Page 367: Operation After Recovery From Power Failure And For Star-Up Of Instrument

    (14) Align the axis of electron beam. NOTE: When the emission current Ie is lowered drastically after performing the [Aging], contact our service engineer of Hitachi High-Tech Corporation. 4.6 Operation at water failure When water supply is stopped while EO Control unit is started up, error message of E602 displays and buzzer sounds.

  • Page 368: Procedure Of Electron Gun Baking

    When baking was performed, it takes about half a day. In addition, gradual change on the emission current may follow continuing for the next several days. Before conducting baking, it is recommended to consult our service engineer of Hitachi High-Tech Corporation about necessity of baking.

  • Page 369: Procedure Of Electron Gun Baking

    Please note that costs of any trouble (including cost for repair) arising from baking operation that has been performed by the customer as instructed by service engineers of Hitachi High-Tech Corporation or service company are excluded from the warranty even during the warranty period.
  • Page 370 (6) Loosen the three screws and remove the interlock cover of the electron gun HV cable. (Interlock operates and turn OFF the high voltage when HV is applying.) Fixing screw Interlock cover CAUTION: Since it requires the work at a high place, please use a stepladder. Otherwise, you may fall and be injured.
  • Page 371 4.8 Procedure of electron gun baking (8) Insert the pulled out HV cable to the gun socket at the rear side of the instrument (The baking operation cannot be performed without inserting the HV cable to the socket). Gun socket (9) Re-tighten the screws on top of the electron gun with the sequence shown in the diagram.
  • Page 372 (10) Attach the baking cap to the high voltage cable part. Baking cap (11) Attach the baking cover to the electron gun cover then attach the electron gun cover on top of the instrument. Fix the baking cover with four knurling screws by hands. The baking cannot be performed without this cover.
  • Page 373 4.8 Procedure of electron gun baking (12) Place the accessory high temperature caution plate in front of the column to inform third persons that high temperature baking is performing. High temperature caution plate (13) Power ON the baking power breaker. Power ON the OUTER BAKE breaker on the EO Control unit switchboard.
  • Page 374 (14) Startup the baking. Start up the SEM application with the administer user (User name: SU8700). When the application is started up, the following message will be displayed. Click the [OK] button on the message. The SU8700 will be started up.
  • Page 375 4.8 Procedure of electron gun baking (18) If a trouble occurs during the baking, an error number will be displayed on the STATUS CODE in the condition display panel. Error numbers and counter measures are described in the below. When error occurs, the warning buzzer sounds. Press the [ALARM STOP] switch and error and electron gun baking are released.
  • Page 376 (21) Assembling the HV Cable to the Electron Gun Reassemble the HV cable to the electron gun with foreign matters attached to the insulated section of the HV cable or the electron gun receptacle during the baking may cause electric discharge. Perform cleaning of the HV cable and the electron gun receptacle according to the following procedures.
  • Page 377 4.8 Procedure of electron gun baking WARNING: Ethanol is an organic solvent. ● There is a danger of explosion if vaporized ethanol is ignited. ● Excessive inhalation of vaporized ethanol could cause breathing difficulty or other severe ill effects. ● If ethanol is gulped, touches the skin or splashes into eyes by mistake, there is a risk of polyneuritis such as sensory paralysis or walking difficulty due to irritant actions.

  • Page 378: Startup Of Electron Gun

    ON the PC and start up the SEM application. Log in the application with administrator user (SU8700). In case that the HV breaker is OFF, error message will be displayed. When the error message is displayed, close the SEM application, shut down the PC and turn OFF the [EOC POWER] switch.

  • Page 379: Mechanical Axis Alignment

    4.9 Mechanical axis alignment 4.9 Mechanical axis alignment Make sure to perform the alignment of the mechanical axis after the electron gun baking. In a normal operation after the electron gun start-up, the alignment of the mechanical axis of the electron gun and the C1 and C2 lenses are not required. However, if a good electron beam is not obtained even after the alignment of the electromagnetic axis, align the mechanical axis.

  • Page 380: Electron Gun Axis Alignment

    4.9.2 Electron gun axis alignment (1) Set to the beam alignment mode by clicking the beam button on the alignment panel. The circle marker and circle image will be displayed on the screen. In case of the image is too bright or dark, adjust the brightness. The most outer line of the circle image Hexagonal screwdriver...
  • Page 381 4.9 Mechanical axis alignment (4) Repeat the procedures of (1) to (3). When the position of beam alignment image is the same position by changing the accelerating voltage 1 kV ⇔ 9 kV, the adjustment of electron gun axis is complete. 9 kV NOTE:●...

  • Page 382: Objective Aperture Axis Alignment

    4.9.3 Objective aperture axis alignment (1) Set the objective aperture to No.2 or No.3 under the beam alignment mode with accelerating voltage 9 kV. Diameter of the apertures are described as below. No.1: 70 µm No.2, No.3: 50 µm No.4: 20 µm (2) The image becomes dark.

  • Page 383: First Condenser Lens Axis Alignment

    4.9 Mechanical axis alignment 4.9.4 First condenser lens axis alignment (1) Click the [Condenser lens 1] check box on the alignment panel while the [beam alignment mode] is ON. (2) Confirm that the current mode in operation panel is Normal and spot intensity is 30. (3) Adjust the brightness and contrast as required.

  • Page 384: Electron Current Mode Setting Lens Axis Alignment

    4.10 4.9.6 Electron current mode setting lens axis alignment (1) Set to the beam alignment mode by clicking [Beam] in the alignment panel. (2) Set the electron current mode to High in the operation panel. (3) Adjust the center of circle image to the center of the beam alignment display with the hexagonal screwdriver for aligning the electron gun axis and the adjustment knob of beam current mode setting lens axis.

  • Page 385: Replacement Parts (Su8700)

    5. Replacement parts (SU8700) 5.1 Consumables, life-limited pats, and spear parts 5.1.1 Consumables The consumables parts should always be on hand in sufficient quantities for normal operation. (Refer to Table 5-1-1). Table 5-1-1 Consumables parts and Customer-supplied items Part No.

  • Page 386: Life-Limited Parts

    Table 5-1-2 lists the life-limited parts. They should be replaced on a predetermined cycle to ensure safety in operation of the instrument and maintain its performance. Replacement work shall be carried out by our service engineer of Hitachi High-Tech Corporation. Please contact service engineers of Hitachi High-Tech Corporation.
  • Page 387 Replacement Part No. Part Name Usage cycle K111250 Relay Control system 5 years K111201 Relay Control system 5 years 458-5491 Fan for DCPS1 PCB For DCPS1 PCB 5 years 458-5492 Fan for DCPS2 PCB For DCPS2 PCB 5 years 458-5493 Fan for EO-DRV PCB For EO-DRV PCB 5 years...

  • Page 388: Spare Parts

    5.1 Consumables, life-limited pats, and spear parts 5.1.3 Spare parts The following spare parts shall be prepared to operate the instrument for a long period. Prepare them in sufficient quantities depending on the purpose of use. (See Table 5-1-3). Table 5-1-3 Spare parts Part No.

  • Page 389: Accessories

    Table 5-2-1 Accessories Tool ○ Part Quantit Equipment △ Part name Remarks number Installation ◎ parts --------- Inspection report △ --------- SU8700 software △ 589-0936 Hose (7M x 2) ◎ F229238 Tube △ 595-3493 Anti-vibration pat ◎ 459-3065 Protective resistance △ 459-3829 IL protection cover △...
  • Page 390 5.2 Accessories Tool ○ Part Quantit Equipment △ Part name Remarks number Installation ◎ parts F276001 Teflon tape △ 0.1X13 (5 M) 539-4570 Hose nipple 1 ◎ 546-2305 Wrench adapter ○ ― Error code plate △ 539-0345 Specimen holder △ 535-1257 Lock nut △...
  • Page 391 Tool ○ Part Quantit Equipment △ Part name Remarks number Installation ◎ parts J821572 Alarm fuse SDP10 △ J821573 Alarm fuse SDP16 △ J821574 Alarm fuse SDP20 △ J821575 Alarm fuse SDP32 △ J821576 Alarm fuse SDP50 △ J821577 Alarm fuse SDP63 △...

  • Page 392: Troubleshooting

    (3) It may take longer to reach to the specified vacuum status if the specimen is dried insufficiently. Turn OFF and ON the [EVAC POWER] switch at side of the main unit. (4) If the error is occurred again, please contact a service engineer of Hitachi High-Tech Corporation.

  • Page 393: When The Vacuum Status Of Electron Gun Is Less Than The Specified Value

    −5 IP2: >2×10 Contact a service engineer of Hitachi High-Tech Corporation if the vacuum status will not improve after carrying out the electron gun baking. WARNING: Since the voltage up to AC 100 V, DC 30 kV are used inside of this instrument, it can cause of receiving electric shock due to contacting.

  • Page 394: When Sem Image Does Not Display On The Screen

    (Set to the “0” position). If a circular image is appeared, carry out mechanical axis alignment. If the condition will not be recovered, please contact a service engineer of Hitachi High-Tech Corporation. 6.6 When noise on image is large Three possible causes of noise on image can be considered.

  • Page 395: When Astigmatism Cannot Be Corrected

    Hitachi High-Tech Corporation. (3) If the image is shifted while correcting the astigmatism, adjust the stigmator align X, Y from the [Menu]>[Alignment]. If the condition will not be improved, please contact a service engineer of Hitachi High-Tech Corporation.

  • Page 396: When The Discharge Is Occurred

    Replacement period for the scintillator of Middle detector (Option) is 3 years or 300 times of discharging or less. It is recommended to replace the scintillator of Middle detector (Option) when the times of discharging exceeds 300 times. Please contact a service engineer of Hitachi High-Tech Corporation.

  • Page 397: When Sem Operation Program Does Not Start Up

    6.10 When SEM operation program does not start up 6.10 When SEM operation program does not start up Check the followings if the SEM operation program does not start up (the progress bar does not extend to the end after log in) after activating and logging in the program. (1) Confirm if the [EVAC POWER] switch is ON.

  • Page 398: When Error Message Is Displayed

    6.14 Measures to take in emergency (1) Power OFF the MAIN breaker of the EOC unit switchboard or power OFF the switchboard breaker directly. (2) In case of water leakage, close the cooling water valve. (3) Please contact a service engineer of Hitachi High-Tech Corporation.

  • Page 399: Appendix Error Message List

    Appendix Error message list Appendix Error message list The list shows the error messages that can be displayed while operating the SU8700. Code Category Error Message 10002 Error Exceeding the input range. Please check the input range. 10003 Error Invalid characters are included.
  • Page 400 Appendix Error message list Code Category Error Message 10017 Error Vacuum system has not activated. Please restart the instrument according to the following procedures. 1. Shut down the PC 2. Power off the [EOC POWER] switch 3. Confirm that the [EVAC POWER] switch is on 4.
  • Page 401 Appendix Error message list Code Category Error Message 10053 Error Full-range vacuum gauge error Vacuum operation has stopped. Turn off and on the [EVAC power] switch. If this message is appeared again, please contact a service engineer. ({0}) {0}:Error code 10056 Error The specimen exchange chamber cannot be in the atmospheric...
  • Page 402 Appendix Error message list Code Category Error Message 10059 Error Vacuum system error Please perform the following operations. 1. Click [Specimen exchange] button 2. Check if the specimen stage and specimen chamber are firmly closed 3. Click [EVAC] button In case the air cannot be vented to the specimen chamber, turn off and on the [EVAC POWER] switch If this message is appeared again, please contact a service engineer.
  • Page 403 Appendix Error message list Code Category Error Message 10086 Confirmation The setting value will be saved by clicking [Save]. Do you want to save the setting value? 10087 Warning The increment operation time or accumulated value of [Startup] times will be reset. Please do not reset the accumulated value unless replacing a chip.
  • Page 404 2. Power off the [EOC POWER] switch 3. Power on the [EOC POWER] switch 10129 CriticalError Electron gun has shutdown because control circuit for the HV power error has occurred. Please contact a service engineer of Hitachi High-Tech Corporation. Appendix-6...
  • Page 405 Emission current has decreased. Please check the setting of electron gun. 10135 CriticalError The setting range of filament current is invalid. Please contact a service engineer of Hitachi High-Tech Corporation. 10136 CriticalError Electron gun has shutdown because of the filament drive voltage error.
  • Page 406 Please execute it again when the vacuum condition is recovered or the interlock unit error is released. If the error message is displayed again, please contact a service engineer of Hitachi High-Tech Corporation. 10142 Error Cannot close the gun valve (GV) .
  • Page 407 Appendix Error message list Code Category Error Message 10153 Error Stage error Stage is out of the maximum range (Z-axis). If this message is appeared again, please contact a service engineer. 10154 Error Stage error Stage is out of the maximum range (Z-axis). If this message is appeared again, please contact a service engineer.
  • Page 408 Appendix Error message list Code Category Error Message 10206 Error Cannot move the stage to the specimen exchange position. Please pull out the following detectors. {0}:Detector name 10211 CriticalError Vacuum system control power error Vacuum operation has stopped. Please turn OFF the [EVAC POWER] switch and contact a service engineer.
  • Page 409 Appendix Error message list Code Category Error Message 10227 Error Please input file name. 10228 Error Please input user name. 10229 Info Auto increment counter has reached 9999. 10232 Error Cannot find the folder or cannot save the file because invalid character is included.
  • Page 410 Appendix Error message list Code Category Error Message 10252 Info Please exit and restart the operation program for applying the contents. 10254 Confirmation Do you want to turn off [HV] ? 10255 Error Serial number is incorrect. Please enter correct serial number. 10256 Confirmation Do you want to delete this option?
  • Page 411 Appendix Error message list Code Category Error Message 10304 Info [ASC] is executing. 10305 Info [ABA] is executing. 10314 Info The value of [Accelerating voltage] is changing. 10315 Info [Auto start] is performing. 10316 Info [HV ON] is performing. {0} 10317 Info [HV OFF] is performing.
  • Page 412 Appendix Error message list Code Category Error Message 10379 Error Please use this function with the magnification that is lower than ｘ {0}. {0}:Threshold(Mag) 10380 Error T-axis is tilted. Move the T-axis at 0 deg and set the alignment point again. 10381 Info Please select an image which size is more than 300 x 225.
  • Page 413 Appendix Error message list Code Category Error Message 10418 Confirmation {0} image is already existed on the image list. Overwritten image will be listed at the end of the image list. Do you over write it? {0}:File name 10419 Confirmation {0} image is already existed on the image list.
  • Page 414 Appendix Error message list Code Category Error Message 10454 Info Please perform [Calibration] according to the following procedure. 1. Move the target structure to the center of display 2. Click [enter] of the Tilt 0 deg 3. Stage is tilted at 20 and 40 deg. Move the observation point to the center of display by each tilted angle 4.
  • Page 415 Appendix Error message list Code Category Error Message 10460 CriticalError Gate valve of specimen exchange device error Please turn OFF the [EVAC POWER] switch and contact a service engineer. ({0}) {0}:EVAC error code 10461 CriticalError Vacuum system valve error Please turn OFF the [EVAC POWER] switch and contact a service engineer.
  • Page 416 Appendix Error message list Code Category Error Message 10475 Error Decelerating error HV has turned OFF. If this message is appeared again, please contact a service engineer. 10476 Error Detector error HV has turned OFF. If this message is appeared again, please contact a service engineer.
  • Page 417 Category Error Message 10492 Info The maintenance of rough pump which is used for the SU8700 is required to perform within 2 months. Please contact a service engineer and carry out the maintenance before the following date. Maintenance is required by: {0}...
  • Page 418 Appendix Error message list Code Category Error Message 10497 Error Detector has inserted. Buzzer sounds while stage is moving to safety position. Stop to insert the detector and confirm that the buzzer is stopped. Then, insert the detector again. If buzzer does not sound, you can insert detector immediately. 10498 Error Stage has locked.
  • Page 419 Appendix Error message list Code Category Error Message 10508 Error Over run error Z-axis (CW side) of stage has overrun. In case the stage will not be recovered automatically, please initialize the stage. 10509 Error Over run error T axis (CCW side) of stage has overrun. In case the stage will not be recovered automatically, please initialize the stage.
  • Page 420 Appendix Error message list Code Category Error Message 10519 Info Detector is inserted while PC-SEM is deactivated or stage error is occurred. Stage will be initialized. 10520 Error Cannot move the stage to the initializing position. Confirm the detector condition. 10521 Info Reference image will be obtained.
  • Page 421 Appendix Error message list Code Category Error Message 10543 Error Cooling water error The amount of cooling water is out proper amount. Please adjust the flow amount of the cooling water. 10544 Info Frame list is being created. 10545 Info Frame is being saved.
  • Page 422 Appendix Error message list Code Category Error Message 10563 Error Cannot restore the observation position because the position is out of the stage movable range. Please confirm the setting of the specimen size or detector position. 10564 Info A detector/Unit that is unable to equip has set. {0}: Accessory device name (Including the detector names) 10565 Info...
  • Page 423 Appendix Error message list Code Category Error Message 10585 Info Gamma correction can not be applied to the mixed signal Image. Turn off gamma correction. 10586 Info Cannot recover the observation condition because, booster voltage setting is different. Please check the setting of booster voltage. 10587 Info Move the target structure of specimen to the center of the...
  • Page 424 Appendix Error message list Code Category Error Message 10598 Error Cooling water has stopped to introduce to the system because, water leakage is detected. Can cause of injury due to electric shock. Stay away from the system and contact a service engineer. If it is possible, shut down or stop the water supply including the cooling watery circulation system.
  • Page 425 Appendix Error message list Code Category Error Message 11024 Error Updating of control unit is failed. Turn off the [EOC POWER] switch at the main unit and update the control unit again. If the error is occurred again, please contact a service engineer.
  • Page 426 Appendix Error message list Code Category Error Message 21002 Warning Cannot read some of the image(s), which remain not transferred. If this message is appeared again, please contact a service engineer. 21003 Warning Cannot read some of the image(s), which remain not transferred.
  • Page 427 Appendix Error message list Code Category Error Message 21005 Error Some of the image(s) remain not transferred. 1. Please carry out the following operations. (1) In case any image process is running on Image-Pro, wait until the process is completed. (2) Transfer the image again.
  • Page 428 Appendix Error message list Code Category Error Message 21009 Error Some of the image(s) remain not transferred. 1. Please carry out the following operations. (1) In case any error message is appeared on the Image- Pro, carry out the operation according to the message. (2) Transfer the image again.
  • Page 429 The HV is turned OFF. Confirm the connection of the interlock unit and turn ON the If the HV will not be turned ON or the error message is displayed again, please contact a service engineer of Hitachi High-Tech Corporation. 22000...
  • Page 430 Appendix Error message list Code Category Error Message 22302 Confirmation The adjustment has not finished. Do you want to finish without recording the alignment values? 22303 Confirmation Do you want to cancel the [Manual Alignment] without recording the alignment value? 22305 Info The Manual Alignment conditions are applying.
  • Page 431 Appendix Error message list Code Category Error Message 23014 Error Vacuum system error Vacuum operation has stopped. Power off and on the [EVAC POWER] switch. If this message is appeared again, please contact a service engineer. ({0}) 23015 Error Discharge has detected in the column. {0} times of discharge have occurred.
  • Page 432 Appendix Error message list Code Category Error Message 23023 Error R-axis motion error Please turn off and on the [STAGE] breaker. If this message is appeared again, please contact a service engineer. 23029 Info {0} and UD(+{1}) are selected. Do you want to set OFF the UD(+{1})? 23030 Info...

  • Page 433: Evacseq Error Code List

    If an alarm sound is emitted from the main unit, check the error code on the condition display panel. Refer to the table below for the code and corrective action when a warning or an error occurs. (*) indicates that the error concerned is due to instrument malfunction. Contact a service representative of Hitachi High-Tech Corporation. Appendix-35...
  • Page 434 Appendix Error message list Type Code Contents Countermeasure Error or Start to vent air from Push the specimen stage Warning other specimen chamber while until it completely touches E505 specimen chamber is not the specimen chamber, and than instrument closed. start evacuating.
  • Page 435 Appendix Error message list Type Code Contents Countermeasure The baking protection cover E812 is not installed. Error due to The control power supply E001* instrument error. (DC24V) malfunction The control power supply E002* error. (DC15V) The dry pump is not Check if the DRP breaker in E016 working.
  • Page 436 Appendix Error message list Type Code Contents Countermeasure The pressure of specimen This error occurs when the chamber cannot be lowered specimen chamber vacuum is than the atmospheric not lower than atmospheric pressure. pressure 20 seconds after E102 the evacuation starts. Check if a foreign object is jammed in the O ring of the specimen stage.
  • Page 437 Appendix Error message list Type Code Contents Countermeasure PD-BSED The BSE detector is inserted Return the BSE detector to (Option) error while the stage power is OFF. the OUT state, turn ON the STAGE breaker on the back E508 of the main unit, confirm that the stage operation is normal, and then insert the BSE detector.
  • Page 438 Appendix Error message list Type Code Contents Countermeasure The specimen exchange E153 chamber cannot reach to the desired pressure. The specimen exchange E154 chamber cannot reach to the desired pressure. It elapsed 12 minutes after E155 venting air from the specimen exchange chamber.
  • Page 439 Appendix Error message list Type Code Contents Countermeasure Water leak The water leakage is The leak detector will be E611* detector detected. (Objective lens) installed only when SEMI (Option) error The water leakage is compatible option is installed and an error will be displayed E612* detected.
  • Page 440 If the alarm sound does not 1. Transition to low-vacuum stop, contact our service mode (optional function engineer. for the SU8700) E521 2. Execution of the SC AIR sequence 3. Execution of EV OPEN 4. Execution of SEC EVAC 5.

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