Maintenance Menu - Hitachi TM3030 Plus Instruction Manual

4.3.8

Maintenance Menu

1. Beam Axis Alignment
Displays the Beam Axis Alignment window that allows performing optical axis alignment
of the electron beam. Perform the alignment if beam axis conditions are changed after
filament exchange, maintenance operations, or observation condition change.
For the details, refer to 5.2 Beam Axis Alignment.
2. Observation Screen Size
Displays the Observation Screen Size window that allows saving the size of the image
observation area. Be sure to set the observation screen size after installing the
application on the PC.
For the details, refer to 2.3.7 Setup of the Observation Screen Size
NOTE : The proper display of scales requires the correct registration of an observation
screen size.
3. Output Log Data
Outputs the operation information of the system to the desktop as log data. Use this
function when abnormality is found while the system is working.
4. Fit View Area
Resets the display position of the main screen to the center. Use this function when the
main screen has been moved.
Figure 4.3.8 Maintenance Menu
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