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Introduction
Measurement Resources
MFCMU - Multi Frequency CMU
This section describes typical specification of the multi frequency capacitance
measurement unit (CMU). The CMU performs the impedance measurement and
returns the specified measurement data such as Cp-G.
•
Measurement parameters: See Table 1-10.
•
AC signal, output frequency:
1 kHz to 5 MHz
Setting resolution: 1 mHz (1 kHz to), 10 mHz (10 kHz to), 0.1 Hz (100 kHz to),
or 1 Hz (1 MHz to 5 MHz)
•
AC signal, output level:
10 mVrms to 250 mVrms, 1 mV resolution
•
DC bias:
0 to ± 25 V, using MFCMU internal DC bias
0 to ± 3000 V, using HVSMU and high voltage bias-tee
•
Measurement range:
For the fixed ranging mode, measurement range (impedance range) must be
specified to perform measurement. Table 1-11 shows the available measurement
ranges and the corresponding impedance value. And Figure 1-5 shows the
calculation example of the impedance vs frequency characteristics of a
capacitive load. Use these information to decide the measurement range.
Impedance Z is calculated by the following formula.
Z = 1 / (2 f C)
where f is frequency (Hz) and C is capacitance (F).
1- 30
Keysight B1507A User's Guide, Ed ition 1
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