CAUTION
Figure 1-4
Introduction
Measurement Resources
HVSMU - High Voltage SMU
This section describes typical specification of the high voltage source/monitor unit
(HVSMU).
•
Maximum voltage/current: 3000 V/4 mA, -3000 V/-4 mA, 1500 V/8 mA, or
-1500 V/-8 mA
•
Maximum output power: 12 W
•
Minimum range: 200 V, 1 nA
•
Output/measurement value and resolution: see Table 1-8 and Table 1-9.
Never connect the HVSMU Force and Guard terminals to any output, including
circuit common, chassis ground, or any other measurement resource such as SMU.
Connecting other measurement resource may damage the connected one.
HVSMU Output and Measurement Ranges
-
-
3000
1500
1- 28
Current (mA)
8
4
1
1500
-
1
-
4
-
8
Keysight B1507A User's Guide, Ed ition 1
Voltage (V)
3000