Advertisement
<Work procedure 2-5>
CAUTION:
Do not bend the center of the Process Unit Lower Stay [1] by holding it during the work.
When you touch the Lower Stay, hold the bases at both ends at the front and rear.
(Bending the Process Unit Lower Stay can cause damage to the ITB Unit.)
24) Replace the screw at the center of the Process Kit Lower Stay with a shorter screw (M4x5) [1].
15 / 16
Advertisement
