Edwards STP-XF1303 Series Instruction Manual
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Edwards STP-XF1303 Series Instruction Manual

Edwards STP-XF1303 Series Instruction Manual

Turbomolecular pump
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Instruction Manual (D)
for Turbomolecular Pump
Applicable pump model
Read through the Safety Precautions and
each section of this Manual carefully before
using the STC-U.
Keep this Manual in a place where you can
quickly access it at any time.
Read this Manual thoroughly and keep it with
the Turbomolecular Pump Instruction Manual.
STP pump consists of the four-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
Instruction Manual (C):
Instruction Manual (D):
(This Instruction Manual)
STC-U eTMS unit
◼ STP-XF803/XF1303 series
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
STC-U eTMS unit for Turbomolecular Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-92E-A01-C
2023.08

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Summary of Contents for Edwards STP-XF1303 Series

  • Page 1 STP pump generic Instruction Manual Instruction Manual (B): STP pump specific information Instruction Manual (C): STP control unit Instruction Manual STC-U eTMS unit for Turbomolecular Pump Instruction Manual (D): (This Instruction Manual) 2023.08 Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 2 The description of this product consists of the four-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...

  • Page 3: Table Of Contents

    STC-U eTMS unit CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions Electromagnetic compatibility Limited warranty 1.3.1 Item warranted 1.3.2 Disclaimer Labels Label affixing positions General description Cable sets TECHNICAL DATA STC-U specifications INSTALLATION Unpacking Front panel Rear panel Precautions before installation 3.4.1 Operating environment 3.4.2...
  • Page 4 STC-U eTMS unit CONTENTS(CONTINUED) PAGE Section Title Page MAINTENABCE AND INSPECTION Inspection of connection cable Cleaning Maintenance STORAGE, TRANSPORTATION AND DISPOSAL Storage of the STC-U Transporting for repair or overhaul Disposal SERVICE, SPARES AND ACCESSORIES Introduction Service Spares Accessories MT-92E-A01-C Page ii...
  • Page 5 STC-U eTMS unit ILLSUTRATIONS PAGE Figure Title Page Safety instruction label "Use designated cable" caution label Connection caution label High voltage device caution label "Use designated control unit" caution label Applicable pump model label Label affixing positions STC-U System configuration Dimensions (mm) STC-U front panel STC-U rear panel...
  • Page 6 STC-U eTMS unit PAGE This page is intentionally blank. MT-92E-A01-C Page iv...

  • Page 7: Introduction

    STC-U eTMS unit INTRODUCTION Scope and definitions This manual provides installation, operation and maintenance instructions for the external temperature control unit STC-U eTMS unit (abbreviated to "STC-U" throughout this manual) for the Turbomolecular pump (STP). You must use the STC-U as specified in this manual otherwise the protection provided by the equipment may be impaired.

  • Page 8: Electromagnetic Compatibility

    1. This warranty applies only to the product delivered from Edwards to the customer. 2. If any defect is found during this period, Edwards will, at its option, repair or recondition the product free of charge. The costs for repair or replacement of the product after the warranty period has passed will be at your own charge 1.3.2...
  • Page 9 8. Deterioration in the external because of use (discoloration, scratches and so forth). 9. Product damage occurred during transport or other factors not attributable to Edwards. 10. Product breakage or damage due to natural disasters, fire or other external factors.

  • Page 10: Labels

    STC-U eTMS unit Labels The following labels are affixed or printed to the STC-U. Read the contents of the labels before operation. 1. Safety instruction label This label describes instructions before operating the STC-U Figure 1 - Safety instruction label 2.

  • Page 11: High Voltage Device Caution Label

    STC-U eTMS unit 4. High voltage device caution label The STC-U is equipped with a high voltage device. This label warns operators to pay attention to the high voltage device at the maintenance and inspection Figure 4 - High voltage device caution label 5.

  • Page 12: Label Affixing Positions

    STC-U eTMS unit Label affixing positions Refer to Section 1.4 for the details of the labels from 1 to 6. Figure 7 - Label affixing positions Safety instruction label "Use designated cable" caution label Connector caution label High voltage device caution label "Use designated control unit"...

  • Page 13: General Description

    STC-U eTMS unit General description STC-U is an external temperature control device for maintaining predetermined part of the STP pump at the set temperature. When operating the STP pump, connect the STC-U to the STP control unit. STP control unit can set ON / OFF setting of temperature control function of STC-U, and display the temperature value on LCD on the STP control unit.

  • Page 14: Cable Sets

    STC-U eTMS unit Cable sets The following cable sets (optional accessories) are used with the STC-U, STP control unit and STP pump: • Heater, Valve and TMS sensor cable: STP pump to STC-U • STP connection cable and outlet port heater cable: STP pump to STP control unit •...

  • Page 15: Technical Data

    STC-U eTMS unit TECHNICAL DATA STC-U specifications Applicable pump STP-XF803/XF1303 series Applicable control unit SCU-800/801 Input voltage 200 to 240V AC ± 10% Allowable input voltage fluctuation Total Input power with STP control unit 2300 VA maximum without STP control unit 800 VA maximum Input frequency 50/60 ±...
  • Page 16 STC-U eTMS unit Input / Output terminal X1 AC IN (3 pin) X2 AC OUT (3 pin) X4 HEATER OUT1 (3 pin)） X7 HEATER OUT2 (2 pin) X4 VALVE (4 pin) X6 SENSOR (10 pin) X3 STP (9 pin) MT-92E-A01-C Page 10...
  • Page 17 STC-U eTMS unit Figure 10 - Dimensions (mm) MT-92E-A01-C Page 11...
  • Page 18 STC-U eTMS unit This page is intentionally blank. MT-92E-A01-C Page 12...

  • Page 19: Installation

    X7 HEATER OUT2 connector is commanded to heat up. POWER breaker Main power circuit breaker. (NOT switch the output of X2 AC OUT connector) Cover (for maintenance only) Do not open this cover. Used only by Edwards service personal. Table 1 - STC-U front panel functions MT-92E-A01-C...

  • Page 20: Rear Panel

    STC-U eTMS unit Rear panel X1 AC IN connector X4 VALVE connector X2 AC OUT connector X3 STP connector X5 HEATER OUT1 connector X6 SENSOR connector X7 HEATER OUT2 connector Ground terminal Figure 12 - STC-U rear panel WARNING A hazardous live voltage may exist at the connectors that are marked with the warning sign .

  • Page 21: Precautions Before Installation

    STC-U eTMS unit Precautions before installation Installation, operation and maintenance must only be executed by personnel who read through this Manual carefully and have the specific skills to perform installation, operation and maintenance of the STP pump system. CAUTION DO NOT move the STP pump, the STP control unit, and STC-U while the STP pump is in operation. Doing so may result in product damage.

  • Page 22: Installation Area

    STC-U eTMS unit 3.4.3 Installation area When installing the STC-U, leave enough space for the following. (see Figure 13) • Space for maintenance and inspection. • Space for connecting space. CAUTION DO NOT bend the cables excessively and beware of any obstacles when installing the STC-U. In addition, leave enough space to install other cables without bending them excessively.

  • Page 23: Attaching The Stc-U To A Rack

    STC-U eTMS unit Attaching the STC-U to a rack CAUTION The STC-U cannot be supported with only the 4 screws on the front panel. Always support it from the bottom using a support angle. Attach the STC-U as follows: Note : For the dimensions of the front panel and positions of the screw holes, refer to Figure 10. •...

  • Page 24: Cable Connection

    STC-U and STP control unit at same time. CAUTION Use each cable that Edwards has specified to connect to SCU-800/801 and STC-U. The use of other cables may result in product damage. Align the position of the guide key of the connectors and insert vertically so as not to bend the pins.

  • Page 25: Tms Heater Cable

    STC-U eTMS unit 3.6.1 TMS heater cable WARNING The primary power supply voltage is output from "X5 HEATER OUT 1" and "X7 HEATER OUT 2" connectors. When connecting/disconnecting cables, always power off the STC-U (switch the STC-U MAIN POWER to "OFF") and isolate (Lockout/Tagout) the electrical energy source, water and gas, and other energy sources on the vacuum equipment.

  • Page 26: Tms Valve Cable

    STC-U eTMS unit 3.6.3 TMS valve cable Connect the plug (pin) side of the TMS valve cable to the "X4 VALVE" on the STC-U and connect the receptacle (socket) side to the plug (pin) side of the TMS valve. To "X4 VALVE" on STC-U To TMS valve 4 pin (pin) 2 pin (socket)

  • Page 27: Power Cable

    STC-U eTMS unit 3.6.5 Power cable WARNING Ensure that the STC-U and the power supply cable are suitably protected against earth (ground) faults and that of "X1 AC IN" connector earth (ground) of the STC-U is correctly connected. CAUTION The power cable is designed specifically for the STP pump. DO NOT use the power cable with other products.

  • Page 28: Power Cable (With Plug)

    STC-U eTMS unit PE( ) 49.5 PE( ) STC-U side Power side (Primary) 3 pin (socket) (AWG 14) × 3 cores, φ9.6 to φ10.1 mm 2.5 mm Cable color: Brown, Blue, Yellow/Green or Black1, Black2, Yellow/Green 3 pin (pin) Plug type NEMA6-15 Figure 20 - Power cable (with plug) CON1ピン...

  • Page 29: Connecting Method Of The Power Cable Without Plug

    STC-U eTMS unit STC-U side Power side (Primary) Brown or Black1 M4-bolt (fixing screw) Blue or Black2 Crimp-type terminal (M4) Yellow/Green Cover Clearance min. 1.5 mm Terminal block Use material flammability: UL 94V-0 Use the UL-recognized terminal block satisfying with the following conditions; a) Clearance (between each terminal): 1.5 mm or more b) Material flammability: UL 94V-0 c) The installation category Ⅱ.

  • Page 30: Power Extension Cable

    STC-U eTMS unit 3.6.6 Power extension cable WARNING The output of the "X2 AC OUT" connector of the STC-U is directly connected to the input of the "X1 AC IN" connector. Even when the STC-U breaker is "OFF", the output of "X2 AC OUT"...

  • Page 31: Cable Installation

    STC-U eTMS unit 3.6.7 Cable installation CAUTION DO NOT bundle the pump connection cable with a protective earth conductor or a power line. Moreover, keep away a communication line from the apparatus used as a noise source as much as possible.

  • Page 32: Connecting To Semiconductor Equipment

    STC-U eTMS unit Connecting to semiconductor equipment The STP pump is a component system when installing to the semiconductor equipment. Consider the following when designing the semiconductor equipment. 3.7.1 Connecting to power The STC-U receives its power from the semiconductor equipment electrical distribution system via a circuit breaker (rated current 15 A).

  • Page 33: Operation

    STC-U eTMS unit OPERATION Before starting CAUTION NEVER connect or disconnect any cables while the power is ON. NEVER turn the primary power OFF (turn the MAIN POWER "OFF") while the STP pump is in rotation. DO NOT release the inlet port flange or outlet port flange into the atmosphere while the STP pump is rotating.

  • Page 34: Power On

    STC-U eTMS unit Power ON 1. Turn "ON" the MAIN POWER, located on the STP control unit rear panel. 2. Turn "ON" the MAIN POWER located on the STC-U front panel (refer to Figure 11). The STC-U performs a self-test (1 sec.). During “Autotest”, “POWER” LED on the front panel illuminates in orange.

  • Page 35: Abnormality/Error In The Stc-U

    STC-U eTMS unit Abnormality/Error in the STC-U When the "POWER" LED flashes in orange or red, check the contents of the error message displayed on the LCD of the STP control unit (see Table 5). Power LCD message Heater Valve Item (STP control unit) Orange...

  • Page 36: Troubleshooting Immediately After Power Failure Occurs

    STC-U eTMS unit If the temperature of the STP pump predetermined part is higher than the setting value by 10 ºC (18 ºF) or more due to the occurrence of an abnormality/error in the TMS sensor or other fault, the "POWER"...

  • Page 37: Error Messages Related To Stc-U

    STC-U eTMS unit MT-92E-A01-C Page 31...

  • Page 38: Error Messages Related To Stc-U (Continued)

    STC-U eTMS unit MT-92E-A01-C Page 32...

  • Page 39: Maintenabce And Inspection

    STC-U eTMS unit MAINTENABCE AND INSPECTION Inspection of connection cable When carrying out the maintenance of the STP pump, perform the following inspection. 1. Check that there is no damage to each cable connected to STC-U, STP control unit, and STP pump.
  • Page 40 STC-U eTMS unit This page is intentionally blank. MT-92E-A01-C Page 34...

  • Page 41: Storage, Transportation And Disposal

    Ensure you follow the "Return Procedure" to prevent an accident during the transportation, repair or overhaul. CAUTION Edwards will not be responsible for any damage or problems that may occur when returning the STC-U. Always contact Service office before returning the STC-U for repairs, overhaul or other purposes.

  • Page 42: Disposal

    STC-U eTMS unit Disposal Dispose of the STC-U as industrial waste in accordance with all local and national safety and environmental standards. Note : Edwards will not be responsible for problems during or after disposal. MT-92E-A01-C Page 36...

  • Page 43: Service, Spares And Accessories

    A majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses. Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required: •...

  • Page 44: Accessories

    STC-U eTMS unit Accessories The following is a list of accessories that can be purchased by contacting Edwards. Items Application purpose Remarks Instruction Manual (A) Generic Instruction Manual Instruction Manual (B) Pump Specific Information Instruction Manual (C) Control unit Instruction Manual...
  • Page 45 For more information, contact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8836 International +81-47-458-8836 Facsimile: Domestic 047-458-8835 International +81-47-458-8835 Copyright 2023 Edwards Japan Limited. All rights reserved.

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