Condition For The Tms Unit - Edwards STP-XF803 Series Instruction Manual

STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
3.7

Condition for the TMS unit

Item
Ambient temperature range
Storage temperature range
Input voltage
Allowable input voltage
fluctuation
Cooling water temperature
Quantity of cooling water flow
Alarm output
°C
°C
Same voltage as the STP control unit 200 to 240 Vac
%
°C
L/min
Alarm outputs from LED on the panel and STP control unit
Condition
0 to 40
-20 to 55
±10
17 to 32
2 to 3
MT-92E-101-C
3
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