Stp-Xf813Y2Cv155/Xf1313Y2Cv155; Stp-Xf813Y2Cv155 - Edwards STP-XF803 Series Instruction Manual

1.1.1.5

STP-XF813Y2CV155/XF1313Y2CV155

1
The values shown below are typical. They are not guaranteed.
Flange size
Maximum pumping
speed
Maximum compression
ratio
Ultimate pressure
Maximum backing pressure
Allowable flow backing pressure
Critical operating backing pressure
Enable exhaust gas
Flow rate of purge gas <N
Rated speed
Backup rotational speed
Starting time
Stopping time
Noise
Temperature Management System (TMS)
Baking temperature
Rotor temperature
sensor
Lubricating oil
MT-92E-101-C
Page 10
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
Item
Inlet port flange
Outlet port flange
N
2
Ar
H
2
N
2
Ar
H
2
Pa (Torr)
*1 Pa (Torr)
*2
Pa (Torr)
*3
Pa (Torr)
Pa·m
>
2
(SCCM)
*5
Precision
Safety function

STP-XF813Y2CV155

VG150/ISO160F
ICF203
L/s 800
L/s 670
L/s 550
-7 -9
10 (10 ) order [after baking]
102.3 (0.77)
Chlorine, fluorine system gases or CLF3 gas can
be used. When you use the following gases,
contact Edwards.
・Gases including alkaline metals except Li gas.
・Gases including Ga, Hg, ln, or Sn.
・HBr gas
3
/s
-1
5.91×10 ±8.45×10
rpm
rpm Approximately 8,000
min
min
dB <50 (at 28,000 rpm)
°C
°C
Available
Not necessary
STP-XF1313Y2CV155
VG200/ISO200F
ICF253
KF40
1,300
1,100
600
7
2.0×10
7
7.0×10
2
3.3×10
200 (1.5)
160 (1.2)
-2 *4
(350±50)
28,000
≦9
≦11
Available
<120
±3
*6
*7