Edwards STP-XF803 Series Instruction Manual
Turbomolecular pumps
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Also See for STP-XF803 Series:
- Instruction manual (63 pages) ,
- Instruction manual (45 pages)
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Instruction Manual (B)
STP Series Turbomolecular Pumps
STP-XF803/XF1303 series
STP-XF813/XF1313 series
Pump Specific Information
Model name
STP-XF803BV135/XF1303BV135
STP-XF803BV155/XF1303BV155
STP-XF813Y1BV155/ XF1313Y1BV155
STP-XF813Y2CV155/ XF1313Y2CV155
STP pump consists of the four-volumed Instruction Manuals.
Instruction Manual (A):
Instruction Manual (B):
(This Instruction Manual)
Instruction Manual (C):
Instruction Manual (D):
STP pump generic Instruction Manual
STP pump specific information
STP control unit Instruction Manual
STC-U eTMS unit for Turbomolecular Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
MT-92E-101-C
Voltage
200 - 240 V AC
200 - 240 V AC
200 - 240 V AC
200 - 240 V AC
2023.08
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Table of Contents
Related Manuals for Edwards STP-XF803 Series
Summary of Contents for Edwards STP-XF803 Series
- Page 1 STP pump generic Instruction Manual Instruction Manual (B): STP pump specific information (This Instruction Manual) Instruction Manual (C): STP control unit Instruction Manual Instruction Manual (D): STC-U eTMS unit for Turbomolecular Pump 2023.08 Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
- Page 2 T: +42(0) 580 582 728 documentation@edwardsvacuum.com Product Name: Turbomolecular pump Model Number: STP-XF803 series, XF1303 series STP-XF813 series, XF1313 series Is in conformity with the relevant requirements of European CE legislation: 2006/42/EC Machinery directive Note: The safety objectives of the Low Voltage Directive 2014/35/EU were complied with in accordance with Annex 1 No.
- Page 3 -Oct-2022 You must retain the signed legal declaration for future reference This declaration becomes invalid if modifications are made to the product without prior agreement. Signed for and on behalf of Edwards Ltd Martin Tollner Petr Tochacek President, Semiconductor Chamber Solutions...
- Page 4 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION RoHS (EU, UK): Material Exemption Information This product is compliant with the following Exemptions Annex III: • 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight • 6(c) Copper alloy containing up to 4% lead by weight •...
- Page 5 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 六价铬 多溴联苯 多溴二苯醚 Part name 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 铸铝及铝合金制品 × 〇 〇 〇 〇 〇...
- Page 6 The description of this product consists of the four-volumed Instruction Manuals. Read through each Instruction Manual before operation. The separate volume contents of each description are as follows: Instruction Manual (A) • STP pump generic Instruction Manual: • Introduction • Installation of the STP pump •...
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Page 7: Table Of Contents
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump PAGE CONTENTS Section Title Page TECHNICAL DATA Applicable pump specifications 1.1.1 STP pump specifications 1.1.1.1 STP-XF803BV135/XF1303BV135 1.1.1.2 STP-XF803BV155 [A]/XF1303BV155 [A] 1.1.1.3 STP-XF803BV155 [B]/XF1303BV155 [B] 1.1.1.4 STP-XF813Y1BV155/XF1313Y1BV155 1.1.1.5 STP-XF813Y2CV155/XF1313Y2CV155 1.1.2 Condition for the water-cooling unit 1.1.3 Safety function of blade temperature sensor External appearance of the STP pump Label affixing positions Accessories... - Page 8 STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump PAGE ILLUSTRATIONS Figure Title Page STP-XF803 / XF1303 / XF813 / XF1313 series Label affixing positions for the STP pump Methods of securing the STP pump Configuration of the TMS Water cooling pipe piping diagram TABLES Table Title Page...
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Page 9: Technical Data
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump TECHNICAL DATA Applicable pump specifications Model Name Specification Applicable Control unit STP-XF803BV135 / XF1303BV135 Extreme High-flow type SCU-800/801 * STP-XF803BV155 / XF1303BV155 Corrosion resistant type STP-XF813Y1BV155 / XF1313Y1BV155 High-emissivity coating type TMS unit STP-XF813Y2CV155 / XF1313Y2CV155 Extreme High-flow type SCU-800/801 * Corrosion resistant type Special material/coating type... -
Page 10: Stp-Xf803Bv135/Xf1303Bv135
Pa (Torr) 160 (1.2) Enable exhaust gas Chlorine or fluorine system gases can be used. When you use the following gases, contact Edwards. ・Gases including alkaline metals except Li gas. ・Gases including Ga, Hg, ln, or Sn. ・HBr gas ・CLF3 gas Pa·m... -
Page 11: Applicable Control Unit
Ar gas is vacuumed continuously and the backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. MT-92E-101-C... -
Page 12: Stp-Xf803Bv155 [A]/Xf1303Bv155 [A]
Pa (Torr) 160 (1.2) Enable exhaust gas Chlorine or fluorine system gases can be used. When you use the following gases, contact Edwards. ・Gases including alkaline metals except Li gas. ・Gases including Ga, Hg, ln, or Sn. ・HBr gas ・CLF3 gas Pa·m... -
Page 13: Scu-800/801
Ar gas is vacuumed continuously and the backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. MT-92E-101-C... -
Page 14: Stp-Xf803Bv155 [B]/Xf1303Bv155 [B]
Pa (Torr) 147 (1.1) Enable exhaust gas Chlorine or fluorine system gases can be used. When you use the following gases, contact Edwards. ・Gases including alkaline metals except Li gas. ・Gases including Ga, Hg, ln, or Sn. ・HBr gas ・CLF3 gas Pa·m... - Page 15 Ar gas is vacuumed continuously and the backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. MT-92E-101-C...
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Page 16: Stp-Xf813Y1Bv155/Xf1313Y1Bv155
Pa (Torr) 160 (1.2) Enable exhaust gas Chlorine or fluorine system gases can be used. When you use the following gases, contact Edwards. ・Gases including alkaline metals except Li gas. ・Gases including Ga, Hg, ln, or Sn. ・HBr gas ・CLF3 gas Pa·m... - Page 17 Ar gas is vacuumed continuously and the backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. MT-92E-101-C...
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Page 18: Stp-Xf813Y2Cv155/Xf1313Y2Cv155
160 (1.2) Enable exhaust gas Chlorine, fluorine system gases or CLF3 gas can be used. When you use the following gases, contact Edwards. ・Gases including alkaline metals except Li gas. ・Gases including Ga, Hg, ln, or Sn. ・HBr gas Pa·m Flow rate of purge gas <N... - Page 19 Ar gas is vacuumed continuously and the backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards. MT-92E-101-C...
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Page 20: Condition For The Water-Cooling Unit
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump 1.1.2 Condition for the water-cooling unit Common to all three specifications. Item Specification Middle stage 3/8-inch tube fitting (SUS) Port type Lower stage Rc1/4(ISO standard, Female, SUS) Flow rate L/min 2 to 3 Water temperature °C 17 to 32 Water pressure MPa (kgf/cm... -
Page 21: Safety Function Of Blade Temperature Sensor
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump 1.1.3 Safety function of blade temperature sensor CAUTION When R TMP OVERHEAT occurs or R TMP HIGHER frequently occurs, continuous use of the pump may lead to serious failure such as rotor blade breakage. The cause of the WARNIGN/failure may be an overload on the pump, accumulation of deposits in the pump, deterioration or damage of parts, or other reasons. -
Page 22: External Appearance Of The Stp Pump
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump External appearance of the STP pump Figure 1 - STP-XF803 / XF1303 / XF813 / XF1313 series Inlet port VG150 VG200 ISO160F ISO200F ICF203 ICF253 flange φA φB φF 231.8 45° 22.5° 15° 15° 9° 7.5° 8-φ12 8-φ15 8-φ11... -
Page 23: Tms Heater
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump Item Description Inlet port flange Height of the purge port TMS sensor TMS heater TMS heater cover Outlet port heater Middle stage cooling water port 2-3/8 inch Lower stage cooling water port 2-Rc Outlet port flange KF40 Purge port KF10... -
Page 24: Label Affixing Positions
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump Label affixing positions Refer to the Instruction Manual (A) for the details of the labels 1 to 3 and 5 to 9, 11, 13, 14. Figure 2 - Label affixing positions for the STP pump STP pump/control unit caution label Connector caution label Protective earth label (M4) Company logo... -
Page 25: Accessories
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump Accessories Item Q’ty Remarks Inlet port cover Outlet port cover STP connector cover Purge port cover Included in pump Instruction Manual (B) This manual MT-92E-101-C Page 17... - Page 26 STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump This page is intentionally blank. MT-92E-101-C Page 18...
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Page 27: How To Secure The Stp Pump
Use a material that has a tensile strength of 600 N/mm or more. When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more. Note: When using any securing method other than that specified in this manual, contact Edwards. MT-92E-101-C Page 19... -
Page 28: Destructive Torque And Recommended Securing Bolt For Inlet Port Flange
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump Secure the inlet port flange with the correct size bolts as specified in the inlet port flange standard. Secure the base with either the 8 screws for legs or the 8 attached legs. Ensure instructions with regard to legs and bolts for securing the base are adhered to page 19. - Page 29 STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump (A) When the base is not secured (B) When the base is secured Recommended fitting bolt for flange Secure the base Figure 3 - Methods of securing the STP pump MT-92E-101-C Page 21...
- Page 30 STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump This page is intentionally blank. MT-92E-101-C Page 22...
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Page 31: Temperature Management System (Tms)
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump TEMPERATURE MANAGEMENT SYSTEM (TMS) WARNING The STP pump operates at high temperatures while the Temperature Management System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral equipment while TMS unit are in operation. Operators can burn hands. Moreover, NEVER remove the TMS cover while the Temperature Management System (TMS) unit is in operation. -
Page 32: Tms Heater
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump Note: For the connection method of the TMS unit, refer to the STC-U eTMS unit Instruction Manual for STP Turbomolecular Pump. TMS heater The TMS heater heats the base of the STP pump. It’s fitted with the STP pump at the factory. The overheat prevention device is set on the TMS heater. -
Page 33: Connecting The Pump And Tms Valve
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump 3.5.2 Connecting the pump and TMS valve Connect the cooling water pipe to the TMS valve. Pay special attention to the port label on the cooling water valve to connect proper port. Connect the NC side (or OUT side) of the TMS valve to the STP pump, and COM side (or IN side) of the TMS valve to the equipment. -
Page 34: Specification Of Tms Unit
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump Specification of TMS unit Specification Item BV135 BV155 CV155 Temperature control method Control ON/OFF of the TMS heater and cooling water Input channel 1 / Output channel 1 TMS heater temperature Setting °C TMS heater voltage ACV (Hz) 220±10% (50/60) TMS heater capacity... -
Page 35: Condition For The Tms Unit
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump Condition for the TMS unit Item Condition Ambient temperature range °C 0 to 40 Storage temperature range °C -20 to 55 Input voltage Same voltage as the STP control unit 200 to 240 Vac ±10 Allowable input voltage fluctuation Cooling water temperature °C... -
Page 36: Accessories
TMS heater cover Attached to the STP pump Outlet port heater Attached to the STP pump Outler port heater cable Shielded cable with connector at each end. Standard cable length is 5 m. Contact Edwards for further information. MT-92E-101-C Page 28... - Page 37 For more information, contact the nearest Service Office. http://www.edwardsvacuum.com/ Manufacturer: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN Telephone: Domestic 047-458-8836 International +81-47-458-8836 Facsimile: Domestic 047-458-8835 International +81-47-458-8835 Copyright 2023 Edwards Japan Limited. All rights reserved.