Abnormal State Of Magnetic Bearing; Excessive Vibration; Motor Driver Overload; Overheating Inside The Stp Pump - Edwards STP-XF803 Series Instruction Manual

5.1.3

Abnormal state of magnetic bearing

5
When an abnormality/error occurs in the magnetic bearing, check the STP pump as well as the
STP control unit. If "FAILURE" cannot be released after reset operation, contact Service office.
When the magnetic bearing does not function normally due to a breakage of the STP connection
cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor lands
on the touch down bearing and stops. The "FAILURE" LED illuminates and the LCD displays error
message "Disturbance *" or "DISTURBANCE" (SCU-350 series).
5.1.4

Excessive vibration

When serious vibration or mechanical shock causes the rotor to come in contact with the touch down
bearing (due to external vibration/impact, intrusion of atmosphere or foreign matter into the STP
pump or rotor imbalance), the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Disturbance *" or
"DISTURBANCE" (SCU-350 series).
5.1.5

Motor driver overload

If the STP pump does not attain the rated speed within approximately 30 minutes after starting or
when the ACCELERATION state remains unchanged during operation for approximately 30 minutes,
the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Driver Overload" or
"OVERLOAD" (SCU-350 series).
5.1.6

Overheating inside the STP pump

If the motor inside the STP pump overheats due to an abnormal high temperature or overload
operation, the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Motor Overheat" or "PUMP
OVERTEMP" (SCU-350 series).
MT-00E-2A1-C
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STP Series Turbomolecular Pump
CAUTION